WO2003069297A1 - Capteur de vide a fil et panneau a vide avec des rheophores en bande destine a ce capteur - Google Patents

Capteur de vide a fil et panneau a vide avec des rheophores en bande destine a ce capteur Download PDF

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Publication number
WO2003069297A1
WO2003069297A1 PCT/IT2003/000059 IT0300059W WO03069297A1 WO 2003069297 A1 WO2003069297 A1 WO 2003069297A1 IT 0300059 W IT0300059 W IT 0300059W WO 03069297 A1 WO03069297 A1 WO 03069297A1
Authority
WO
WIPO (PCT)
Prior art keywords
wire
housing
conductive
vacuum panel
vacuum
Prior art date
Application number
PCT/IT2003/000059
Other languages
English (en)
Inventor
Roberto Giannantonio
Alessandro Fumagalli
Gianluca Galliani
Enea Rizzi
Original Assignee
Saes Getters S.P.A.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saes Getters S.P.A. filed Critical Saes Getters S.P.A.
Priority to AU2003209697A priority Critical patent/AU2003209697A1/en
Publication of WO2003069297A1 publication Critical patent/WO2003069297A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Definitions

  • the present invention relates to a method for measuring the vacuum, in particular in closed environments, as for example in a vacuum panel.
  • the present invention relates also to a sensor for carrying out said method, as well as a vacuum panel comprising said sensor.
  • the object of the present invention is therefore to provide a method free from these drawbacks, that is, a method which allows to measure the vacuum in short times and without wasting the vacuum panel. Said object is achieved with a method, a sensor and a vacuum panel, the main features of which are specified respectively in claims 1, 6 and 14, while other features are specified in the remaining claims.
  • the method according to the present invention allows to carry out measurements of the residual gases pressure not only in a vacuum panel, but also in every environment which requires quick and accurate measurements of the vacuum degree.
  • the sensor according to the present invention thanks to its simplicity, compactness and cheapness, can be permanently inserted into all the environments in which the measurement of the vacuum degree is desired, in particular in all the vacuum panels coming from a production line. Through this device it is possible to determine quickly and accurately the quality of the vacuum panels not only during their manufacture, but also after a long time from their installation. Through the method and the sensor according to the present invention it is even possible to make periodical measurements of the vacuum in already installed vacuum panels, so as to check constantly their quality.
  • the senor is connected with the outside through conductive bands which can be easily manufactured and assembled together with the vacuum panels, since they are preferably made up with the same material used for the relevant barrier sheets, or alternatively with a similar material or a material compatible with the latter.
  • FIG. 1 shows a partial cross-sectional top view of a vacuum panel comprising the sensor according to a first embodiment of the invention
  • figure 2 shows a partial enlarged sectional view taken along plane H-H of the vacuum panel of figure 1 ;
  • the sensor according to a first embodiment of the invention includes a housing 1 preferably cylindrical-shaped inside which a wire 2 of conductive material is arranged.
  • the internal volume of housing 1 is much greater than the volume of wire 2; in particular, the internal diameter di of housing 1 is much greater than diameter d 2 of wire 2, that is, di » d 2 .
  • the interior of housing 1 is suitably connected to the vacuum environment in which it is placed in such a way to exchange gases with it.
  • housing 1 is gas permeable and can be formed of a tube of a non-porous material, for example glass, which is provided of a plurality of holes, or of a tube of a porous material, for example ceramic or alumina.
  • Wire 2 is preferably made up of nickel, platinum or tungsten, that is, metals having a high temperature coefficient j of the resistance and a low emissivity Sf.
  • the ends of housing 1 are provided with two closing elements 3, 3', for example substantially conical or frustoconical-shaped.
  • housing 1 is arranged inside a vacuum panel comprising in a known way a discontinuous or porous filling material 5 enclosed between two barrier sheets 6 mutually joined along the edges, for example welded by heat sealing.
  • Terminals 4, 4' of the sensor are electrically connected to the outside through one or more rheophores 7, 7' arranged between the barrier sheets 6.
  • rheophores 1, T are preferably formed of two conductive bands both comprising a conductive layer 8 enclosed between two insulating layers 9 mutually joined along the edges, for example by means of heat sealing.
  • the two ends of conductive bands 7, 7' are further provided with pins 10, 11, the former of which is soldered to a terminal 4 or 4' and the latter is prepared for the coimection with external apparatuses.
  • the conductive bands 7, T comprise two insulating layers 9 formed of one or more tapes of polymeric material, in particular a heat sealable tape of high density polyethylene (HDPE) having a thiclcness comprised between 50 and 100 ⁇ m.
  • Insulating layers 9 enclose a conductive layer 8 formed particularly of an aluminum tape having a thickness comprised between 4 and 10 ⁇ m.
  • layers 9 can be made up with other thermoplastic polymers, such as e.g.
  • conductive layer 8 can be made up with other conductive metals, such as copper, gold and silver, or with conductive polymers, such as iodine- doped polyacetylene.
  • Conductive layer 8 is inserted between insulating layers 9 by co-lamination, preferably carried out by arranging between layers 8 and 9 an adhesive material, such as epoxidic, cyanoacrylic, polyurethanic, etc. resins.
  • the conductive bands 7, 7 are arranged between the two barrier sheets 6 of the vacuum panel before they are sealed along their edges.
  • the sealing of the edges of the barrier sheets 6 occurs preferably by means of heat sealing; since sheets 6 are made of materials identical, similar or in any case compatible with those used for the insulating layers 9 of the conductive bands 1, 7, the latter are sealed between the barrier sheets 6, thereby forming a perfect gas-tight joining while avoiding possible current dispersions or short-circuits with the metallic or metallized layer 12 which may be present on the internal surface of the barrier sheets 6.
  • Pins 10, 11 are preferably inserted in a substantially perpendicular way through the conductive bands 7, 7 during the manufacture thereof, so as to pierce layers 8, 9 and to accomplish an electric connection with the conductive layer 8.
  • pins 10, 11 are joined to metallic members, particularly clamps 13, 14 provided with tips crossing the conductive bands 1, 7. Once the tips of clamps 13, 14 have been inserted into the conductive bands 7, 7, the borders 15, 16 of the latter included between their ends and clamps 13, 14 are folded and heat sealed onto the same bands, so as to enclose and insulate the tips of clamps 13, 14. With this arrangement, pins 10, 11 protrude freely outwards and are at the same time steadily locked along the same plane of the conductive bands 7, 7.
  • I I 2
  • pressure P of the residual gases in housing 1 is relatively low, in particular lower than 0.1 hecto-Pascal (hPa), the thermal exchange due to these gases is very modest and the temperature of wire 2 increases progressively from an initial value T; up to a high final value T f , which stabilizes when the dissipated thermal power O , G , depending on the thermal gradient between wire 2 and the gas mass inside housing 1, is equal to the electric power Q_ e supplied from the outside through the conductive bands 7, 7.
  • pressure P of the residual gases in housing 1 is relatively high, in particular higher than 1 hPa, when current I 2 starts to flow along wire 2, convective-type thermal exchange mechanisms are immediately established, thus keeping the final temperature T f of wire 2 substantially equal to the initial temperature Tj,.
  • wire 2 comes to the stationary conditions absorbing the maximum electric power Q e and revealing the maximum potential drop ⁇ V at its ends, since the electric resistance R of wire 2 increases at high temperatures T f .
  • the electric resistance R and the temperature T f and consequently the absorbed electric power Q e and the potential drop ⁇ V, are at minimum values.
  • Figure 3 shows a diagram from which it can be seen how the variation of the potential difference ⁇ V at the ends of wire 2, measured in stationary conditions, varies according to pressure P of the residual gases present in housing 1, that is, in the vacuum panel.
  • Figure 4 shows another diagram from which it can be seen how the potential difference ⁇ V measured at the ends of wire 2 develops during the time at a pressure P of the residual gases equal to 0.1 hPa.
  • P of the residual gases equal to 0.1 hPa.
  • wire 2 is powered by an external device capable to supply an electric current I 2 constant in time and to measure in the meantime the potential difference ⁇ V at the ends of wire 2, that is of pins 11.
  • wire 2 can be powered by a circuit capable of supplying a constant electric power Q e .
  • the higher temperature T f reachable by wire 2 in the stationary conditions can be determined and controlled a priori.
  • Housing 1 is preferably made up with an heat-resistant material, since wire 2 can reach an high temperature T f , for example comprised between 300°C and 350°C.
  • Wire 2 is relatively long, thin and linked to conductive terminals 4, 4' so as to maximize the thermal exchange with gases and minimize the irradiating area and the dispersion by conduction through the terminals.
  • the measure range of pressures P can be adjusted by suitably modifying the internal diameter of housing 1.
  • Knudsen number a dimensionless quantity
  • Knudsen number ⁇ / d
  • 0,01 are in viscous flow conditions and if 0,5 > Kn > 0,01 they are in intermediate conditions. Since ⁇ depends on pressure P, temperature T and on the nature of residual gases, once these quantities have been fixed, the fluidodynamic conditions of the residual gases depends only on diameter di of housing 1. Hence, the variation of potential difference ⁇ V at the ends of wire 2 as a function of pressure P in the housing 1 can be influenced by the choice of diameter di of the housing 1.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Un boîtier poreux (1) avec un fil (2) est aménagé à l'intérieur d'un panneau à vide comprenant une matière de remplissage poreuse (5) et des feuilles barrières (6). Les rhéophores (les fils intégrés) (7, 7') sont constitués de bandes polymères thermoplastiques (9) et de bandes d'aluminium (8). Des goujons (10, 11) avec des pinces (13, 14) sont utilisés pour le raccordement. Ce système permet de mesurer le vide dans des délais brefs et sans perdre le panneau à vide.
PCT/IT2003/000059 2002-02-18 2003-02-07 Capteur de vide a fil et panneau a vide avec des rheophores en bande destine a ce capteur WO2003069297A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003209697A AU2003209697A1 (en) 2002-02-18 2003-02-07 Wire vacuum sensor and vacum panel with tape rheophores to such a sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITMI2002A000320 2002-02-18
IT2002MI000320A ITMI20020320A1 (it) 2002-02-18 2002-02-18 Metodo e sensore per misurare il vuoto nonche' pannello evacuato comprendente detto sensore

Publications (1)

Publication Number Publication Date
WO2003069297A1 true WO2003069297A1 (fr) 2003-08-21

Family

ID=11449288

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IT2003/000059 WO2003069297A1 (fr) 2002-02-18 2003-02-07 Capteur de vide a fil et panneau a vide avec des rheophores en bande destine a ce capteur

Country Status (3)

Country Link
AU (1) AU2003209697A1 (fr)
IT (1) ITMI20020320A1 (fr)
WO (1) WO2003069297A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004025237A1 (fr) * 2002-09-12 2004-03-25 Saes Getters S.P.A. Capteur de vide a resistance du type filaire, sans fil et panneau a vide

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62215194A (ja) * 1986-03-13 1987-09-21 株式会社東芝 断熱板及びその検査方法
JPH05142075A (ja) * 1992-05-25 1993-06-08 Toshiba Corp 真空断熱パネルの圧力検査方法
US5962791A (en) * 1998-07-16 1999-10-05 Balzers Aktiengellschaft Pirani+capacitive sensor
WO2001060598A2 (fr) * 2000-02-18 2001-08-23 Saes Getters S.P.A. Enveloppe sous vide d"isolation thermique et procede de fabrication

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62215194A (ja) * 1986-03-13 1987-09-21 株式会社東芝 断熱板及びその検査方法
JPH05142075A (ja) * 1992-05-25 1993-06-08 Toshiba Corp 真空断熱パネルの圧力検査方法
US5962791A (en) * 1998-07-16 1999-10-05 Balzers Aktiengellschaft Pirani+capacitive sensor
WO2001060598A2 (fr) * 2000-02-18 2001-08-23 Saes Getters S.P.A. Enveloppe sous vide d"isolation thermique et procede de fabrication

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004025237A1 (fr) * 2002-09-12 2004-03-25 Saes Getters S.P.A. Capteur de vide a resistance du type filaire, sans fil et panneau a vide

Also Published As

Publication number Publication date
ITMI20020320A1 (it) 2003-08-18
AU2003209697A1 (en) 2003-09-04
ITMI20020320A0 (it) 2002-02-18

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