WO2003062862A3 - Phasenübergangsthermometer für mikrokalorimeter zur detektion von röntgenstrahlen - Google Patents

Phasenübergangsthermometer für mikrokalorimeter zur detektion von röntgenstrahlen Download PDF

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Publication number
WO2003062862A3
WO2003062862A3 PCT/DE2002/004756 DE0204756W WO03062862A3 WO 2003062862 A3 WO2003062862 A3 WO 2003062862A3 DE 0204756 W DE0204756 W DE 0204756W WO 03062862 A3 WO03062862 A3 WO 03062862A3
Authority
WO
WIPO (PCT)
Prior art keywords
energy
determined
thermometer
ray
microcalorimeter
Prior art date
Application number
PCT/DE2002/004756
Other languages
English (en)
French (fr)
Other versions
WO2003062862A2 (de
Inventor
Feilitzsch Franz Von
Original Assignee
Feilitzsch Franz Von
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feilitzsch Franz Von filed Critical Feilitzsch Franz Von
Priority to AU2002363845A priority Critical patent/AU2002363845A1/en
Priority to DE10296353T priority patent/DE10296353D2/de
Publication of WO2003062862A2 publication Critical patent/WO2003062862A2/de
Publication of WO2003062862A3 publication Critical patent/WO2003062862A3/de

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2555—Microprobes, i.e. particle-induced X-ray spectrometry
    • H01J2237/2561—Microprobes, i.e. particle-induced X-ray spectrometry electron

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Offenbart ist ein Verfahren und eine Vorrichtung zur Röntgenspektroskopie in dem man eine Materialprobe mit einem Elektronenstrahl beschießt und dabei ent­stehende Röntgenquanten auf ihren Energieinhalt hin untersucht und hieraus ein Spektrum ermittelt. Dabei wird die Energie der Röntgenquanten als Wärmepuls mit Hilfe eines Thermometers in Form eines Detektor-Widerstandes bestimmt, dessen elektrischer Wider­stand gemessen wird. Das Thermometer wird im Übergang von Supraleitung in den ohmschen Bereich be­trieben. Das Verfahren ist dadurch gekennzeichnet dass man die Energie je Röntgenquant aus der Impuls­höhe auf Grund einer vorab durch eine Eichung ermit­telten Energie/Impulshöhen/Basislinien-Beziehung ermittelt.
PCT/DE2002/004756 2001-12-29 2002-12-30 Phasenübergangsthermometer für mikrokalorimeter zur detektion von röntgenstrahlen WO2003062862A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002363845A AU2002363845A1 (en) 2001-12-29 2002-12-30 Phase transition thermometer for use in microcalorimeter for detecting x-rays
DE10296353T DE10296353D2 (de) 2001-12-29 2002-12-30 Verfahren und Vorrichtung zur Röntgenspektroskopie

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10164428.0 2001-12-29
DE10164428A DE10164428A1 (de) 2001-12-29 2001-12-29 Verfahren und Vorrichtung zur Röntgenspektroskopie

Publications (2)

Publication Number Publication Date
WO2003062862A2 WO2003062862A2 (de) 2003-07-31
WO2003062862A3 true WO2003062862A3 (de) 2004-01-15

Family

ID=7711118

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2002/004756 WO2003062862A2 (de) 2001-12-29 2002-12-30 Phasenübergangsthermometer für mikrokalorimeter zur detektion von röntgenstrahlen

Country Status (3)

Country Link
AU (1) AU2002363845A1 (de)
DE (2) DE10164428A1 (de)
WO (1) WO2003062862A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10317888B3 (de) 2003-04-17 2004-12-16 Vericold Technologies Gmbh Kryo-Detektorvorrichtung
DE202004018469U1 (de) * 2004-11-29 2006-04-13 Vericold Technologies Gmbh Tieftemperatur-Kryostat

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5641961A (en) * 1995-12-28 1997-06-24 Stanford University Application of electrothermal feedback for high resolution cryogenic particle detection using a transition edge sensor
US5880467A (en) * 1997-03-05 1999-03-09 The United States Of America As Represented By The Secretary Of Commerce Microcalorimeter x-ray detectors with x-ray lens
US5880468A (en) * 1996-08-26 1999-03-09 The United States Of America As Represented By The Secretary Of Commerce Superconducting transition-edge sensor
WO1999066567A1 (en) * 1998-06-17 1999-12-23 Isis Innovation Limited Superconductive tunnel junction device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5641961A (en) * 1995-12-28 1997-06-24 Stanford University Application of electrothermal feedback for high resolution cryogenic particle detection using a transition edge sensor
US5880468A (en) * 1996-08-26 1999-03-09 The United States Of America As Represented By The Secretary Of Commerce Superconducting transition-edge sensor
US5880467A (en) * 1997-03-05 1999-03-09 The United States Of America As Represented By The Secretary Of Commerce Microcalorimeter x-ray detectors with x-ray lens
WO1999066567A1 (en) * 1998-06-17 1999-12-23 Isis Innovation Limited Superconductive tunnel junction device

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
COLLING P ET AL: "Low-energy X-ray detection in cryogenic detectors with tungsten thermometers", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION - A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, NORTH-HOLLAND PUBLISHING COMPANY. AMSTERDAM, NL, vol. A354, no. 2, 30 January 1995 (1995-01-30), pages 408 - 416, XP004006025, ISSN: 0168-9002 *
FRANK M ET AL: "High-resolution X-ray detectors with high-speed SQUID readout of superconducting tunnel junctions", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION - A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, NORTH-HOLLAND PUBLISHING COMPANY. AMSTERDAM, NL, vol. A370, no. 1, 11 February 1996 (1996-02-11), pages 41 - 43, XP004006665, ISSN: 0168-9002 *
IRWIN K D ET AL: "X-RAY DETECTION USING A SUPERCONDUCTING TRANSITION-EDGE SENSOR MICROCALORIMETER WITH ELECTROTHERMAL FEEDBACK", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 69, no. 13, 23 September 1996 (1996-09-23), pages 1945 - 1947, XP000628936, ISSN: 0003-6951 *

Also Published As

Publication number Publication date
DE10296353D2 (de) 2004-11-04
DE10164428A1 (de) 2003-07-17
AU2002363845A1 (en) 2003-09-02
WO2003062862A2 (de) 2003-07-31

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