WO2003043072A1 - Etching method and plasma etcher - Google Patents
Etching method and plasma etcher Download PDFInfo
- Publication number
- WO2003043072A1 WO2003043072A1 PCT/JP2002/011844 JP0211844W WO03043072A1 WO 2003043072 A1 WO2003043072 A1 WO 2003043072A1 JP 0211844 W JP0211844 W JP 0211844W WO 03043072 A1 WO03043072 A1 WO 03043072A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- etching
- frequency
- plasma
- lower electrode
- treatment
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003544806A JP4203996B2 (en) | 2001-11-14 | 2002-11-13 | Etching method and plasma etching apparatus |
US10/844,498 US20050103441A1 (en) | 2001-11-14 | 2004-05-13 | Etching method and plasma etching apparatus |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001-349289 | 2001-11-14 | ||
JP2001349289 | 2001-11-14 | ||
JP2002115087 | 2002-04-17 | ||
JP2002-115087 | 2002-04-17 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/844,498 Continuation US20050103441A1 (en) | 2001-11-14 | 2004-05-13 | Etching method and plasma etching apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003043072A1 true WO2003043072A1 (en) | 2003-05-22 |
Family
ID=26624522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/011844 WO2003043072A1 (en) | 2001-11-14 | 2002-11-13 | Etching method and plasma etcher |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4203996B2 (en) |
TW (1) | TWI222132B (en) |
WO (1) | WO2003043072A1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007516622A (en) * | 2003-12-23 | 2007-06-21 | ラム リサーチ コーポレーション | Selectivity control method in plasma processing system |
JP2008193015A (en) * | 2007-02-08 | 2008-08-21 | Tokyo Electron Ltd | Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium |
JP2008244144A (en) * | 2007-03-27 | 2008-10-09 | Toshiba Corp | Manufacturing method of semiconductor device |
US8222155B2 (en) | 2004-06-29 | 2012-07-17 | Lam Research Corporation | Selectivity control in a plasma processing system |
CN107924837A (en) * | 2015-08-12 | 2018-04-17 | 中央硝子株式会社 | Dry etching method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6925202B2 (en) * | 2017-08-30 | 2021-08-25 | 東京エレクトロン株式会社 | Etching method and etching equipment |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0794482A (en) * | 1993-09-24 | 1995-04-07 | Sumitomo Metal Ind Ltd | Dry etching method |
JP2000156370A (en) * | 1998-09-16 | 2000-06-06 | Tokyo Electron Ltd | Method of plasma processing |
JP2001168088A (en) * | 1999-10-26 | 2001-06-22 | Samsung Electronics Co Ltd | Method of etching insulating film of semiconductor device |
-
2002
- 2002-11-13 JP JP2003544806A patent/JP4203996B2/en not_active Expired - Fee Related
- 2002-11-13 WO PCT/JP2002/011844 patent/WO2003043072A1/en active Application Filing
- 2002-11-14 TW TW91133415A patent/TWI222132B/en not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0794482A (en) * | 1993-09-24 | 1995-04-07 | Sumitomo Metal Ind Ltd | Dry etching method |
JP2000156370A (en) * | 1998-09-16 | 2000-06-06 | Tokyo Electron Ltd | Method of plasma processing |
JP2001168088A (en) * | 1999-10-26 | 2001-06-22 | Samsung Electronics Co Ltd | Method of etching insulating film of semiconductor device |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007516622A (en) * | 2003-12-23 | 2007-06-21 | ラム リサーチ コーポレーション | Selectivity control method in plasma processing system |
US8222155B2 (en) | 2004-06-29 | 2012-07-17 | Lam Research Corporation | Selectivity control in a plasma processing system |
JP2008193015A (en) * | 2007-02-08 | 2008-08-21 | Tokyo Electron Ltd | Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium |
JP2008244144A (en) * | 2007-03-27 | 2008-10-09 | Toshiba Corp | Manufacturing method of semiconductor device |
CN107924837A (en) * | 2015-08-12 | 2018-04-17 | 中央硝子株式会社 | Dry etching method |
CN107924837B (en) * | 2015-08-12 | 2022-02-01 | 中央硝子株式会社 | Dry etching method |
Also Published As
Publication number | Publication date |
---|---|
TW200300578A (en) | 2003-06-01 |
JPWO2003043072A1 (en) | 2005-03-10 |
JP4203996B2 (en) | 2009-01-07 |
TWI222132B (en) | 2004-10-11 |
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