WO2003012498A1 - Structure liee de guide d'onde optique plan et d'element metallique et module de guide d'onde optique utilisant la structure liee - Google Patents

Structure liee de guide d'onde optique plan et d'element metallique et module de guide d'onde optique utilisant la structure liee Download PDF

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Publication number
WO2003012498A1
WO2003012498A1 PCT/JP2002/006161 JP0206161W WO03012498A1 WO 2003012498 A1 WO2003012498 A1 WO 2003012498A1 JP 0206161 W JP0206161 W JP 0206161W WO 03012498 A1 WO03012498 A1 WO 03012498A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical waveguide
metal member
bonded structure
plane optical
bonding
Prior art date
Application number
PCT/JP2002/006161
Other languages
English (en)
Japanese (ja)
Inventor
Atsushi Hiraizumi
Nobuhiko Kurahashi
Yoshinobu Nekado
Kanji Tanaka
Original Assignee
The Furukawa Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Furukawa Electric Co., Ltd. filed Critical The Furukawa Electric Co., Ltd.
Publication of WO2003012498A1 publication Critical patent/WO2003012498A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12014—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the wavefront splitting or combining section, e.g. grooves or optical elements in a slab waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12026—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
    • G02B6/1203—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence using mounting means, e.g. by using a combination of materials having different thermal expansion coefficients
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12033—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for configuring the device, e.g. moveable element for wavelength tuning

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

L'invention concerne une structure liée d'un guide d'onde optique plan et d'un élément métallique hautement fiable et sans déformation des éléments de liaison. L'invention concerne également un module de guide d'onde optique pouvant procurer efficacement des fonctions de réglage voulues par liaison fiable d'un guide d'onde optique plan à un élément métallique. Par exemple, une couche mince métallique (11b) est formée sur la surface de liaison d'un guide d'onde optique plan (20) tel qu'un réseau de diffraction de guide d'onde matriciel, et une couche mince métallique (11a) est formée sur la surface de liaison d'un élément métallique (7). L'élément métallique (7) est lié au guide d'onde optique plan (20) par liaison par diffusion entre la couche mince métallique (11a) et la couche mince métallique (11b). un élément de déplacement (17) à coulisse déplace un guide d'onde à plaques séparées, séparé par la surface de séparation du guide d'onde optique plan (20), le long de la surface de séparation afin de réduire la dépendance du réseau de diffraction du guide d'onde matriciel vis-à-vis de la température de longueur d'onde centrale de phototransmission.
PCT/JP2002/006161 2001-07-30 2002-06-20 Structure liee de guide d'onde optique plan et d'element metallique et module de guide d'onde optique utilisant la structure liee WO2003012498A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001229934 2001-07-30
JP2001-229934 2001-07-30
JP2002173083A JP2003114358A (ja) 2001-07-30 2002-06-13 平面光導波路と金属部材との接合構造およびその接合構造を用いた光導波路モジュール
JP2002-173083 2002-06-13

Publications (1)

Publication Number Publication Date
WO2003012498A1 true WO2003012498A1 (fr) 2003-02-13

Family

ID=26619554

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/006161 WO2003012498A1 (fr) 2001-07-30 2002-06-20 Structure liee de guide d'onde optique plan et d'element metallique et module de guide d'onde optique utilisant la structure liee

Country Status (2)

Country Link
JP (1) JP2003114358A (fr)
WO (1) WO2003012498A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103197386A (zh) * 2013-04-01 2013-07-10 北京工业大学 一种金属键合的垂直耦合光栅耦合器及其制作方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005017611A1 (fr) * 2003-08-13 2005-02-24 The Furukawa Electric Co., Ltd. Attenuateur optique variable du type a circuit de guides d'ondes optiques plat
KR101327158B1 (ko) 2013-01-24 2013-11-06 주식회사 네온포토닉스 배열 도파로 격자

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000114581A (ja) * 1998-10-09 2000-04-21 Fujitsu Ltd 電気的相互連結及び光学的相互連結を具備した多層光電子基板並びにその製造方法
JP2000150745A (ja) * 1998-11-17 2000-05-30 Kyocera Corp 光半導体素子収納用パッケージ
JP2001150745A (ja) * 1999-11-30 2001-06-05 Canon Inc 画像処理装置および方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000114581A (ja) * 1998-10-09 2000-04-21 Fujitsu Ltd 電気的相互連結及び光学的相互連結を具備した多層光電子基板並びにその製造方法
JP2000150745A (ja) * 1998-11-17 2000-05-30 Kyocera Corp 光半導体素子収納用パッケージ
JP2001150745A (ja) * 1999-11-30 2001-06-05 Canon Inc 画像処理装置および方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
G. Lascar, "Etude des liaisons entre m.taux et une vitroc.ramique", In: M.moires et Etudes Scientifiques Revue de m.tallurgie, 1985, Vol. 82, No. 7/8, pages 347 to 363 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103197386A (zh) * 2013-04-01 2013-07-10 北京工业大学 一种金属键合的垂直耦合光栅耦合器及其制作方法

Also Published As

Publication number Publication date
JP2003114358A (ja) 2003-04-18

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