WO2003007436A3 - Systeme de purge en boucle fermee destine a un laser - Google Patents

Systeme de purge en boucle fermee destine a un laser Download PDF

Info

Publication number
WO2003007436A3
WO2003007436A3 PCT/US2002/019069 US0219069W WO03007436A3 WO 2003007436 A3 WO2003007436 A3 WO 2003007436A3 US 0219069 W US0219069 W US 0219069W WO 03007436 A3 WO03007436 A3 WO 03007436A3
Authority
WO
WIPO (PCT)
Prior art keywords
enclosure
purging system
laser
optical components
contaminants
Prior art date
Application number
PCT/US2002/019069
Other languages
English (en)
Other versions
WO2003007436A2 (fr
Inventor
Yang Pang
Matthew Perry Philpott
Original Assignee
Coherent Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coherent Inc filed Critical Coherent Inc
Publication of WO2003007436A2 publication Critical patent/WO2003007436A2/fr
Publication of WO2003007436A3 publication Critical patent/WO2003007436A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
    • H01S3/027—Constructional details of solid state lasers, e.g. housings or mountings comprising a special atmosphere inside the housing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094038—End pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106—Mode locking
    • H01S3/1112—Passive mode locking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/1601—Solid materials characterised by an active (lasing) ion
    • H01S3/162—Solid materials characterised by an active (lasing) ion transition metal
    • H01S3/1625—Solid materials characterised by an active (lasing) ion transition metal titanium

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

L'invention concerne un procédé permettant de réduire au minimum la contamination des composants optiques d'un résonateur laser. Les composants de résonateur sont disposés dans une enveloppe pouvant contenir des contaminants, notamment de la vapeur d'eau et de la vapeur organique libérées par les composants optiques, par les montages de composants optiques ou par l'enveloppe elle-même. L'enveloppe peut également contenir une matière particulaire suspendue. Afin de réduire le niveau de ces contaminants, un système de purge extrait du gaz de l'enveloppe et le fait passer à travers un déshydratant, un matériau de piégeage de vapeur organique et un filtre à matière particulaire, puis il renvoie le gaz extrait vers l'enveloppe. Le système de purge selon l'invention est particulièrement utile pour des lasers ultrarapides et pour des lasers ultraviolets, dans lesquels la puissance du rayonnement laser augmente la probabilité de réactions déstabilisatrices entre ledit rayonnement laser et les contaminants.
PCT/US2002/019069 2001-07-09 2002-06-14 Systeme de purge en boucle fermee destine a un laser WO2003007436A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/901,857 US6798813B2 (en) 2001-07-09 2001-07-09 Closed-loop purging system for laser
US09/901,857 2001-07-09

Publications (2)

Publication Number Publication Date
WO2003007436A2 WO2003007436A2 (fr) 2003-01-23
WO2003007436A3 true WO2003007436A3 (fr) 2003-11-06

Family

ID=25414931

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/019069 WO2003007436A2 (fr) 2001-07-09 2002-06-14 Systeme de purge en boucle fermee destine a un laser

Country Status (2)

Country Link
US (2) US6798813B2 (fr)
WO (1) WO2003007436A2 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6798813B2 (en) * 2001-07-09 2004-09-28 Coherent, Inc. Closed-loop purging system for laser
US6671303B1 (en) * 2002-06-10 2003-12-30 Coherent, Inc. Closed-loop purging system for laser
DE10355866B3 (de) * 2003-11-27 2005-04-14 Jenoptik Laser, Optik, Systeme Gmbh Optische Anordnung zur Gewinnung eines Messsignals für die Leistungsmessung bei Lasern
US7826513B2 (en) * 2007-08-30 2010-11-02 The Boeing Company Re-entrant structure for thin disk resonators
US8563735B2 (en) 2008-12-05 2013-10-22 Abbvie Inc. Bcl-2-selective apoptosis-inducing agents for the treatment of cancer and immune diseases
DE102011007730B4 (de) 2011-04-20 2017-03-30 Trumpf Laser Gmbh Laservorrichtung mit einem gasgespülten Laserresonator und zugehöriges Spülverfahren
US8817831B1 (en) 2013-01-30 2014-08-26 Photonics Industries Int'l. High power UV lasers
GB2541462B (en) * 2015-08-21 2019-09-11 M Squared Lasers Ltd Purging system for a laser resonator
US20170365973A1 (en) * 2016-06-17 2017-12-21 Coherent, Inc. Exchangeable pump module
EP3639145B1 (fr) 2017-06-15 2024-03-20 Rambus Inc. Module de mémoire hybride

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3810044A (en) * 1973-02-22 1974-05-07 Hughes Aircraft Co Methods for protecting laser optical elements from surface damage
US4610014A (en) * 1983-02-15 1986-09-02 Rofin-Sinar Laser Gmbh Gas flow laser
US4977566A (en) * 1990-02-02 1990-12-11 Spectra-Physics, Inc. Purged cavity solid state tunable laser
US6036321A (en) * 1997-05-16 2000-03-14 Spectra Physics Lasers, Inc. Crystal isolation housing

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
US3393032A (en) 1964-12-21 1968-07-16 Navy Usa Corrosive-resistant and hermetically sealed controlled atmosphere microscope box andmicroscope
US3751225A (en) 1970-03-02 1973-08-07 Pollution Control Ind Inc Sterilizing with liquid spray containing ozone
US3789320A (en) * 1972-06-19 1974-01-29 Ferranti Ltd Gas laser circulation system
US4229709A (en) 1978-06-12 1980-10-21 Mcmahan William H Laser device
US4316157A (en) * 1979-08-13 1982-02-16 Canadian Patents & Development Ltd. Gas recirculation system for carbon dioxide lasers
DE3003793A1 (de) 1980-02-02 1981-08-13 Benckiser Gmbh Joh A Katalysatoren zur ozonvernichtung in ozonhaltiger luft und ozonhaltigen gasen und ihre herstellung
US4364015A (en) * 1981-03-12 1982-12-14 Jersey Nuclear-Avco Isotopes, Inc. Compact reservoir system for dye lasers
DE3938592A1 (de) 1989-11-21 1991-05-23 Thomas Keese Vorrichtung zur beseitigung des ozongehaltes von raumluft
US5216689A (en) 1990-10-12 1993-06-01 Coherent, Inc. Slab laser with enhanced lifetime
US5430303A (en) 1992-07-01 1995-07-04 Nikon Corporation Exposure apparatus
US6214303B1 (en) 1995-01-20 2001-04-10 Engelhard Corporation Method and apparatus for treating the atmosphere
US5771260A (en) 1996-10-04 1998-06-23 Excimer Laser Systems, Inc. Enclosure system for laser optical systems and devices
US5876487A (en) 1997-03-17 1999-03-02 Donaldson Company, Inc. Adsorbent construction; and, method
DE19734715A1 (de) 1997-08-11 1999-02-25 Lambda Physik Gmbh Vorrichtung zum Spülen des Strahlenganges eines UV-Laserstrahles
US6327290B1 (en) * 1999-02-12 2001-12-04 Lambda Physik Ag Beam delivery system for molecular fluorine (F2) laser
US6243406B1 (en) 1999-03-12 2001-06-05 Peter Heist Gas performance control system for gas discharge lasers
US6419487B1 (en) 1999-11-08 2002-07-16 Vernon R. Tunnell, Jr. Multiport antibackflow manifold for dental handpiece system
US6504860B2 (en) 2001-01-29 2003-01-07 Cymer, Inc. Purge monitoring system for gas discharge laser
US6428608B1 (en) * 2000-12-22 2002-08-06 Honeywell International Inc. Method and apparatus for controlling air quality
US6798813B2 (en) * 2001-07-09 2004-09-28 Coherent, Inc. Closed-loop purging system for laser

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3810044A (en) * 1973-02-22 1974-05-07 Hughes Aircraft Co Methods for protecting laser optical elements from surface damage
US4610014A (en) * 1983-02-15 1986-09-02 Rofin-Sinar Laser Gmbh Gas flow laser
US4977566A (en) * 1990-02-02 1990-12-11 Spectra-Physics, Inc. Purged cavity solid state tunable laser
US6036321A (en) * 1997-05-16 2000-03-14 Spectra Physics Lasers, Inc. Crystal isolation housing

Also Published As

Publication number Publication date
WO2003007436A2 (fr) 2003-01-23
US20030007537A1 (en) 2003-01-09
US6798813B2 (en) 2004-09-28
US20050013329A1 (en) 2005-01-20
US7239656B2 (en) 2007-07-03

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