WO2003004967A1 - Position detection apparatus, position detection method, and electr5onic part convey apparatus - Google Patents

Position detection apparatus, position detection method, and electr5onic part convey apparatus Download PDF

Info

Publication number
WO2003004967A1
WO2003004967A1 PCT/JP2002/006494 JP0206494W WO03004967A1 WO 2003004967 A1 WO2003004967 A1 WO 2003004967A1 JP 0206494 W JP0206494 W JP 0206494W WO 03004967 A1 WO03004967 A1 WO 03004967A1
Authority
WO
WIPO (PCT)
Prior art keywords
position detection
comparison area
input image
phase
converted
Prior art date
Application number
PCT/JP2002/006494
Other languages
French (fr)
Japanese (ja)
Inventor
Masayoshi Ichikawa
Takahiro Yamaguchi
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Publication of WO2003004967A1 publication Critical patent/WO2003004967A1/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7092Signal processing
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/70Determining position or orientation of objects or cameras
    • G06T7/73Determining position or orientation of objects or cameras using feature-based methods
    • G06T7/74Determining position or orientation of objects or cameras using feature-based methods involving reference images or patches

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Image Analysis (AREA)
  • Image Processing (AREA)

Abstract

A position detection apparatus includes comparison area selection means (34) for selecting a comparison area for comparing to a template image indicating an electronic part from an input image, phase difference calculation means (42) for calculating a phase difference for each frequency between a phase component when a template image is converted into a frequency component with a predetermined position in the template image as a reference and a phase component when a comparison area image is converted into a frequency component with a predetermined position in the comparison area as a reference, part position detection means (50) for detecting a position of a part in the input image according to a phase impulse response function into which the phase component difference is converted, relative part position detection means (60) for detecting relative positions of a plurality of parts in the input image, and electronic part position detection means (62) for detecting the position of an electronic part in the input image.
PCT/JP2002/006494 2001-07-01 2002-06-27 Position detection apparatus, position detection method, and electr5onic part convey apparatus WO2003004967A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-238470 2001-07-01
JP2001238470A JP4729205B2 (en) 2001-07-01 2001-07-01 POSITION DETECTION DEVICE, POSITION DETECTION METHOD, AND ELECTRONIC COMPONENT CONVEYING DEVICE

Publications (1)

Publication Number Publication Date
WO2003004967A1 true WO2003004967A1 (en) 2003-01-16

Family

ID=19069371

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/006494 WO2003004967A1 (en) 2001-07-01 2002-06-27 Position detection apparatus, position detection method, and electr5onic part convey apparatus

Country Status (2)

Country Link
JP (1) JP4729205B2 (en)
WO (1) WO2003004967A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5007093B2 (en) * 2006-10-06 2012-08-22 株式会社アマダ Product conveying system by image processing and method thereof
US10499662B1 (en) 2018-07-20 2019-12-10 Tetra Laval Holdings & Finance S.A. Extruded product position control of ice cream products

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188596A (en) * 1992-12-17 1994-07-08 Toshiba Corp Part position recognition method and device thereof
JPH0843025A (en) * 1994-07-29 1996-02-16 Yamaha Motor Co Ltd Method and apparatus for recognizing parts
JP2001067481A (en) * 1999-08-31 2001-03-16 Matsushita Electric Ind Co Ltd Device and method for image retrieval, and recording medium

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05159056A (en) * 1991-12-06 1993-06-25 Sumitomo Chem Co Ltd Position estimation mehtod by pattern matchining

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188596A (en) * 1992-12-17 1994-07-08 Toshiba Corp Part position recognition method and device thereof
JPH0843025A (en) * 1994-07-29 1996-02-16 Yamaha Motor Co Ltd Method and apparatus for recognizing parts
JP2001067481A (en) * 1999-08-31 2001-03-16 Matsushita Electric Ind Co Ltd Device and method for image retrieval, and recording medium

Also Published As

Publication number Publication date
JP4729205B2 (en) 2011-07-20
JP2003017510A (en) 2003-01-17

Similar Documents

Publication Publication Date Title
WO2002044699A3 (en) Method and device for determining the properties of an integrated circuit
WO2003096266A3 (en) Method for improving positioned accuracy for a determined touch input
US6180894B1 (en) Dual mode digitizer tablet system
WO2003102717A3 (en) Method of measuring the movement of an input device
EP1425735A4 (en) Pitch determination method and apparatus on spectral analysis
EP0762315A3 (en) Coordinates input apparatus and its method
EP1438594A4 (en) Method and apparatus for detecting a change in capacitance of a capacitive proximity sensor
EP1089214A3 (en) Apparatus and method for image recognition
SG158187A1 (en) Lithographic apparatus with multiple alignment arrangements and alignment measurement method
WO2005011947A3 (en) Image processing method and system for microfluidic devices
EP0812079A3 (en) Synchronizing apparatus
WO2002010791A3 (en) Physical object location apparatus and method and a platform using the same
WO2002075334A3 (en) Apparatus and method for measuring and probability estimating for clock skews
WO2005094397A3 (en) Tone event detector and method therefor
WO2005024464A8 (en) Object detection system and method of detecting object
EP1416692A3 (en) Detection of Doppler shift
WO2003040852A3 (en) Concept for compensating external disturbance variables on physical functional parameters in integrated circuits
WO2003001684A3 (en) A timing estimation method and apparatus for a location system
EP1313229A3 (en) Fixed pattern detection apparatus and fixed pattern detection method
WO2004054105A3 (en) Capacitive proximity sensor
EP1286157A3 (en) Vibration analysis of sheet material
WO2003101826A3 (en) Method and system for determining heave and heave rate of vessels
EP1162360A3 (en) Malfunction determining apparatus of engine system
CA2251799A1 (en) Synchronizing signal detecting device
WO2007011452A3 (en) An apparatus and method for obtaining a device signal value using a ternary search process

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): DE US

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642