WO2002082060A1 - Terahertz optical device and adjustment method therefor - Google Patents

Terahertz optical device and adjustment method therefor Download PDF

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Publication number
WO2002082060A1
WO2002082060A1 PCT/JP2002/003342 JP0203342W WO02082060A1 WO 2002082060 A1 WO2002082060 A1 WO 2002082060A1 JP 0203342 W JP0203342 W JP 0203342W WO 02082060 A1 WO02082060 A1 WO 02082060A1
Authority
WO
WIPO (PCT)
Prior art keywords
terahertz
generator
detector
rotation position
light
Prior art date
Application number
PCT/JP2002/003342
Other languages
French (fr)
Japanese (ja)
Inventor
Mamoru Usami
Original Assignee
Nikon Corporation
Tochigi Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation, Tochigi Nikon Corporation filed Critical Nikon Corporation
Publication of WO2002082060A1 publication Critical patent/WO2002082060A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Toxicology (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

A terahertz optical system comprising a terahertz light generator, a terahertz light detector, and a beam splitter or the like disposed between them. A rotating mechanism can rotate the beam splitter to a first rotation position where a probe light is directed toward a detector and to a second rotation position where a probe light is directed toward a generator. Alignment between a curved-surface mirror and the detector is adjusted so that a probe light condenses onto a proper position on the detector in a first rotation position status. Alignment between the curved-surface mirror and the generator is adjusted so that a probe light condenses onto the terahertz pulse light generation point on the generator in a second rotation position status.
PCT/JP2002/003342 2001-04-04 2002-04-03 Terahertz optical device and adjustment method therefor WO2002082060A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001105395A JP2002303574A (en) 2001-04-04 2001-04-04 Terahertz optical device and its adjusting method
JP2001-105395 2001-04-04

Publications (1)

Publication Number Publication Date
WO2002082060A1 true WO2002082060A1 (en) 2002-10-17

Family

ID=18958095

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/003342 WO2002082060A1 (en) 2001-04-04 2002-04-03 Terahertz optical device and adjustment method therefor

Country Status (2)

Country Link
JP (1) JP2002303574A (en)
WO (1) WO2002082060A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4183546B2 (en) 2003-04-11 2008-11-19 独立行政法人理化学研究所 Terahertz optical system
JP4963640B2 (en) * 2006-10-10 2012-06-27 キヤノン株式会社 Object information acquisition apparatus and method
WO2009050993A1 (en) * 2007-10-16 2009-04-23 Aisin Seiki Kabushiki Kaisha Non-contact film thickness measurement method and device
FR2925685B1 (en) * 2007-12-21 2010-02-05 Centre Nat Rech Scient METHOD AND DEVICE FOR THE MONOCOUP MEASUREMENT OF TRANSIENT BIREFRINGENCE INDUCED BY A DISTURBENCE BELONGING TO THE TERAHERTZ FREQUENCY DOMAIN
JP4729603B2 (en) * 2008-07-09 2011-07-20 独立行政法人理化学研究所 Terahertz band wave processing apparatus and method
JP5240858B2 (en) * 2009-09-03 2013-07-17 独立行政法人理化学研究所 Monochromatic tunable terahertz wave generation / detection system and method
JP2012108117A (en) * 2010-10-25 2012-06-07 Olympus Corp Imaging device
FR2970090B1 (en) * 2011-01-04 2013-02-15 Centre Nat Rech Scient DEVICE FOR FORMING AN INTERFERENCE NETWORK ON A SAMPLE
CN106644083B (en) * 2017-02-23 2018-05-29 深圳大学 The polarization spectrum characteristic measuring device and system of Terahertz material
CN111337430A (en) * 2020-03-13 2020-06-26 华太极光光电技术有限公司 Transmission type terahertz probe adjusting device and positioning method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11242164A (en) * 1998-02-24 1999-09-07 Nikon Corp Laser scanning microscope, and method for adjusting laser scanning optical system
JP2001050908A (en) * 1999-08-13 2001-02-23 Nippon Telegr & Teleph Corp <Ntt> Millimeter wave imaging system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11242164A (en) * 1998-02-24 1999-09-07 Nikon Corp Laser scanning microscope, and method for adjusting laser scanning optical system
JP2001050908A (en) * 1999-08-13 2001-02-23 Nippon Telegr & Teleph Corp <Ntt> Millimeter wave imaging system

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Q. WU ET AL.: "Two-dimensional electro-optic imaging of THz beams", APPL. PHYS. LETT., vol. 69, no. 8, 19 August 1996 (1996-08-19), pages 1026 - 1028, XP000626128 *
Y. CAI ET AL.: "Coherent terahertz radiation detection: Direct comparison between free-space electro-optic sampling and antenna detection", APPL. PHYS. LETT., vol. 73, no. 4, 27 July 1998 (1998-07-27), pages 444 - 446, XP000774906 *
Z. JIANG AND X.-C. ZHANG: "Terahertz imaging via electrooptic effect", IEEE TRANSACTIONS ON MICROWEVA THEORY AND TECHNIQUES, vol. 47, no. 12, 1999, pages 2644 - 2650, XP002951533 *

Also Published As

Publication number Publication date
JP2002303574A (en) 2002-10-18

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