WO2002073173A2 - Systeme et procedes d'inspection de surfaces de specimen - Google Patents

Systeme et procedes d'inspection de surfaces de specimen Download PDF

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Publication number
WO2002073173A2
WO2002073173A2 PCT/US2002/002555 US0202555W WO02073173A2 WO 2002073173 A2 WO2002073173 A2 WO 2002073173A2 US 0202555 W US0202555 W US 0202555W WO 02073173 A2 WO02073173 A2 WO 02073173A2
Authority
WO
WIPO (PCT)
Prior art keywords
specimen
contact image
light
image sensor
rod lens
Prior art date
Application number
PCT/US2002/002555
Other languages
English (en)
Other versions
WO2002073173A3 (fr
Inventor
Eliezer Rosengaus
Lydia J. Young
Original Assignee
Kla-Tencor, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/965,408 external-priority patent/US7072034B2/en
Application filed by Kla-Tencor, Inc. filed Critical Kla-Tencor, Inc.
Priority to AU2002306430A priority Critical patent/AU2002306430A1/en
Publication of WO2002073173A2 publication Critical patent/WO2002073173A2/fr
Publication of WO2002073173A3 publication Critical patent/WO2002073173A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Abstract

L'invention concerne des systèmes et des procédés de détecteur d'image à contact sur l'inspection de spécimens. Un système configuré de manière à inspecter un spécimen peut comporter un détecteur d'image à contact. Ce détecteur d'image à contact peut lui-même comprendre une source lumineuse configurée afin de diriger la lumière vers une surface du spécimen et un réseau de détection linéaire conçu de manière à détecter la lumière réfléchie par la surface. Ce système peut également comprendre un processeur configuré afin de déterminer la présence de défauts à la surface en utilisant la lumière réfléchie. L'invention concerne également un procédé d'inspection du spécimen pouvant comporter la direction de la lumière à partir d'une source lumineuse vers une surface du spécimen et la détection de la lumière réfléchie par la surface au moyen du réseau de détection linéaire. La source lumineuse et le réseau de détection linéaire peuvent être placés dans un détecteur d'image à contact. Ce procédé comporte en outre la détermination de la présence de défauts à la surface, à partir de la lumière détectée.
PCT/US2002/002555 2001-01-29 2002-01-29 Systeme et procedes d'inspection de surfaces de specimen WO2002073173A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002306430A AU2002306430A1 (en) 2001-01-29 2002-01-29 Systems and methods for inspection of specimen surfaces

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US26497901P 2001-01-29 2001-01-29
US60/264,979 2001-01-29
US29722101P 2001-06-08 2001-06-08
US60/297,221 2001-06-08
US09/965,408 US7072034B2 (en) 2001-06-08 2001-09-25 Systems and methods for inspection of specimen surfaces
US09/965,408 2001-09-25

Publications (2)

Publication Number Publication Date
WO2002073173A2 true WO2002073173A2 (fr) 2002-09-19
WO2002073173A3 WO2002073173A3 (fr) 2003-05-30

Family

ID=27401754

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/002555 WO2002073173A2 (fr) 2001-01-29 2002-01-29 Systeme et procedes d'inspection de surfaces de specimen

Country Status (2)

Country Link
AU (1) AU2002306430A1 (fr)
WO (1) WO2002073173A2 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1029285C2 (nl) * 2005-06-17 2006-12-19 Ccm Beheer Bv Detectiesysteem.
WO2007143045A3 (fr) * 2006-05-31 2008-03-13 Boeing Co Procédé et système d'inspection bidimensionnelle et tridimensionnelle d'une pièce à usiner
US8050486B2 (en) 2006-05-16 2011-11-01 The Boeing Company System and method for identifying a feature of a workpiece
DE102014011268A1 (de) 2014-07-29 2016-02-04 Brückner Maschinenbau GmbH & Co. KG Optische Fehlstellendetektion

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5815607A (en) * 1993-07-19 1998-09-29 Canon Kabushiki Kaisha Image reading device, and inspection apparatus and exposure apparatus using the device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62276443A (ja) * 1986-05-24 1987-12-01 Kyoei Sangyo Kk 自動穴ミス検査機
JP2783468B2 (ja) * 1991-05-09 1998-08-06 和泉電気株式会社 織物欠陥検出器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5815607A (en) * 1993-07-19 1998-09-29 Canon Kabushiki Kaisha Image reading device, and inspection apparatus and exposure apparatus using the device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 012, no. 161 (P-702), 17 May 1988 (1988-05-17) & JP 62 276443 A (KYOEI SANGYO KK), 1 December 1987 (1987-12-01) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 175 (P-1516), 5 April 1993 (1993-04-05) & JP 04 332854 A (IDEC IZUMI CORP), 19 November 1992 (1992-11-19) *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1029285C2 (nl) * 2005-06-17 2006-12-19 Ccm Beheer Bv Detectiesysteem.
US8050486B2 (en) 2006-05-16 2011-11-01 The Boeing Company System and method for identifying a feature of a workpiece
WO2007143045A3 (fr) * 2006-05-31 2008-03-13 Boeing Co Procédé et système d'inspection bidimensionnelle et tridimensionnelle d'une pièce à usiner
US9052294B2 (en) 2006-05-31 2015-06-09 The Boeing Company Method and system for two-dimensional and three-dimensional inspection of a workpiece
DE102014011268A1 (de) 2014-07-29 2016-02-04 Brückner Maschinenbau GmbH & Co. KG Optische Fehlstellendetektion

Also Published As

Publication number Publication date
WO2002073173A3 (fr) 2003-05-30
AU2002306430A1 (en) 2002-09-24

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