WO2002023578A1

WO2002023578A1 - Display device

Info

Publication number: WO2002023578A1
Application number: PCT/JP2000/006349
Authority: WO
Inventors: Kenji Miyata; Kiyoshige Kinugawa
Original assignee: Hitachi, Ltd.
Priority date: 2000-09-18
Filing date: 2000-09-18
Publication date: 2002-03-21
Also published as: JPWO2002023578A1

Abstract

A display device of good performance using electron emission is provided that has a structure suited to mass production, i.e., easy to assemble. The main surfaces of cathode and anode substrates that compose a field-emission display device are separated with a predetermined gap by a plurality of partitions, which are integrally supported on a surface along one of the main surfaces by a partition holder. The partitions, fixed mechanically to the partition holder, are arranged on the cathode substrate and the cathode substrate. The assembly consisting of the partitions and the partition holder can be provided fixedly with an electrode for controlling the flow of electrons from the cathode substrate to the anode substrate.

Description

Description Display device Technical field

The present invention relates to a display device utilizing electron emission into a vacuum, and more particularly to a structure of a display device having excellent display characteristics and being easy to assemble, and a method of manufacturing the same.

Background art

A display device utilizing electron emission into a vacuum (hereinafter, referred to as an electron emission display device or a field emission display device) includes a spin-type electron emission structure proposed by A. Spindt et al. (For example, refer to US Pat. No. 3,435,478, Japanese Patent Application Laid-Open No. 2000-213505), utilizing the electron emission phenomenon due to the quantum tunnel effect. The type (also referred to as a surface conduction electron source, see Japanese Patent Application Laid-Open No. 2000-213505), one that accelerates and emits electrons in a solid material, and one that has a diamond film. A group that uses the electron emission phenomena of graphite membranes and carbon nanotubes (“vacuum”… Journal of Vacuum Society of Japan's original version, Vol. 42, No. 8. 1999), pages 722-726).

An example of a field emission display device is schematically shown in FIG. 57A is an exploded perspective view showing the display device, and FIG. 57B is a sectional view of the assembled display device. As shown in Fig. 57 (a), the field emission display is composed of a cathode substrate 1 including a substrate made of glass, alumina, etc., and glass or a material having a light transmittance equal to or higher than glass. The anode substrate 2 including the base plate made of is assembled with the upper surface or the lower surface of the holding frame 30 (also called a side plate) on the periphery of each main surface. Anode substrate 2 Since it is arranged to face the cathode substrate 1 provided with the electron source, it is also called a counter substrate. In the illustrated example, the cathode substrate 1 has a glass substrate 6 on which an electron source (electron emitting portion) and an electric wiring for controlling the electron emission are formed. Although these details will be described later, the two types of wiring groups for operating the electron emission section are separated by the illustrated insulating film 8. The area of the glass substrate 6 (xy plane) is wider than the support frame 30, and its periphery is a terminal 50 (control electrode terminal) for supplying a current to one of the above wiring groups (called a control electrode or a gate electrode). ) And the other (called the cathode) are provided with a terminal 70 (cathode terminal) for supplying current. The glass substrate 6 is not limited to ceramics such as glass or alumina, but may be formed of a metal film such as stainless steel coated on the surface with an insulating film. On the other hand, for the anode substrate 2 facing the cathode substrate, electrodes, phosphors and the like are formed on a substrate made of glass or a material having light transmittance equal to or higher than glass. A support frame 30 made of glass or the like is inserted between the cathode substrate 1 and the anode substrate 2, and the space surrounded by the respective main surfaces of the cathode substrate 1 and the anode substrate 2 is: 10 − ⁵ - 1 0 - is evacuated to ⁷ Torr vacuum. In order to maintain a vacuum in this space, the support frame 30 is adhered to each of the cathode substrate 1 and the anode substrate 2 by means of a flat glass or the like. Since the support frame 30 is required to have a function of isolating this space from the atmosphere and keeping it in a vacuum, it is often called a sealed frame. The dotted line shown on the upper surface of the glass substrate 6 indicates a position where the outer periphery of the support frame 30 comes into contact with the dotted line, and the insulating film 8 is formed so as to fit inside the space maintained in the vacuum. Accordingly, the field emission display emits electrons from the cathode substrate 1 into the above-mentioned space kept in a vacuum, and accelerates the electrons by a potential difference between the electron emission portion and the electrode provided on the anode substrate 2, thereby increasing the anode. The phosphor is illuminated by hitting an electrode provided on the substrate 2. The energy of electrons required to illuminate the phosphor reaches about 600 eV (eV = electron volt), so a high potential difference of about 6 kV exists between the cathode substrate 1 and the anode substrate 2. Provided. Therefore, the cathode base A gap of 1 cm or more is provided between the opposing raw surfaces of the plate 1 and the anode substrate 2 to prevent dielectric breakdown between these substrates. Note that the rectangular coordinates in FIG. 57 (a) are the same as those in the perspective view, plan view, cross-sectional view, and equivalent circuit diagram, as well as the structure or structure shown in each figure. Relate circuit layout.

FIG. 58 is a view for explaining an example of a field emission display device having the above-mentioned spin-type electron source, where (a) shows an equivalent circuit thereof, and (b) shows an equivalent circuit near the electron source. (C) shows a cross-sectional view taken along the line CC in (b), respectively. FIG. 58 (a) shows a configuration of a display device in which an electron emission portion is provided for each pixel arranged in m rows and n columns. The boxes labeled G, B, and R in Fig. 58 (a) indicate the electron emission parts (electron sources) provided for each surface element. The electrons emitted from each of the electron-emitting portions give energy to the respective phosphors provided on the anode substrate 2, and the electron-emitting portion G is green, the electron-emitting portion B is blue, and the electron-emitting portion R is 'Emit red light from the phosphor. In Fig. 58 (a), each of the m electron-emitting portions arranged in the y-axis direction passes through a video signal driving circuit (horizontal scanning circuit) H through a terminal 70 and a cathode 7 extending in the y-axis direction. A predetermined voltage is applied. On the other hand, in FIG. 58 (a), the control electrode 5 extending in the X-axis direction (the direction intersecting the y-axis) is provided with a plurality of the cathodes 7 (column number: X , X 2,..., X n) are provided with openings for exposing the cathode 7. Each of the control electrodes 5 (line numbers: Yl, Y2,..., Ym) arranged in the y-axis direction receives a scanning signal from a vertical scanning circuit V at a terminal 50. Are sequentially supplied in the y-axis direction. The voltage applied to each cathode 7 is appropriately modulated according to the row number of the control electrode 5 to which the scanning signal is applied (every time the control electrode 5 changes), and the address of (X i, Y j) It controls the emission of electrons from the electron emission unit provided for each pixel specified by the address, and causes the phosphor corresponding to the pixel of the desired address to emit light. Fig. 58 (b) shows the pixel structure (electron emission part and its surroundings) when a spin-type electron source is used for the field emission display device having the equivalent circuit of Fig. 58 (a). A plan view is shown, and a cross-sectional view along the line CC is shown in FIG. 58 (c). The cathode 7 is composed of Ni (nickel), Cr (chrome), Au (gold), Mo (molybdenum), W (tungsten), and Pt (platinum) formed on the glass substrate 6. , T i (Chita down), a 1 (aluminum), C u (copper), P d (palladium) or the like of a metal or an alloy containing _{these, ITO (I n 2 03 -} S n 0 2, Lee indium - tin _{oxide), IZO (I n 2 0} 3 - S n 0 2, Lee indium one zinc oxide), R u 0 ₂ (metal oxides of ruthenium oxide) or the like, or impurities doped in a semiconductor Material.

The control electrode 5 is a thin film made of the same kind of conductive material as the cathode 7 formed on the upper surface of the insulating film (insulating material for control electrode) 8 grown to cover the cathode 7. At the portion where the control electrode 5 straddles the cathode 7, an opening is provided through the control electrode 5 and the insulating film 8. On the upper surface of the cathode 7 exposed by the opening, an electron emitting portion having a conical shape or a shape close to the shape called an emitter cone 100 is formed. Since the emitter cone 100 and the cathode 7 are electrically connected, the potential difference between the cathode 7 and the control electrode 5 is equal to the potential difference AV between the tip of the emitter cone 100 and the control electrode 5. Generate. When the potential difference A V exceeds several tens of eV, electrons are emitted from the tip of the emitter cone 100 along the z-axis as shown in Fig. 58 (c). The electrons impinge on the anode 10 provided on the glass substrate 13 constituting the anode substrate, thereby causing the phosphor 11 to emit light. Since the phosphor 11 is separated by a light-shielding film (black matrix) 12 for each pixel, the electrons emitted to the periphery of the pixel emit the phosphor of the pixel adjacent to this pixel. Does not emit light.

The emitter cone may be formed of the same material as the cathode 7, but if a material having a smaller work function is used, the electron emission efficiency is increased and the surface image is brightened. Easy to display. On the other hand, the anode 10 may be formed of a conductive thin film having high light transmittance such as the above-mentioned IT0 or IZ0, or may be formed by vapor deposition of aluminum or silver. When the anode 10 is formed of such a metal thin film having a high reflectivity. Of the light generated by the phosphor 11, a component that propagates to the cathode 7 side can be reflected to the glass substrate 13 side. The displayed image also becomes brighter. Because of such an effect, the anode 10 formed of a metal thin film having high reflectivity is called a metal chuck.

As is clear from the above description, this field emission display device has a light-emitting portion on the anode substrate 2 disposed on the user (observer) side, so that the phosphor 11 is moved from the cathode substrate 1 to the cathode substrate 1 side. The light transmittance of the member located at the position is substantially irrelevant. Therefore, the glass substrate 6 can be replaced with an opaque ceramic or metal plate. However, when a conductive substrate made of metal or the like is used instead of the glass substrate, the above-mentioned cathode 7 is formed on the main surface on the anode substrate side. It is necessary to increase the resistance value of the main surface by oxynitriding, and the control electrode 5 is formed of a conductive plate member made of a metal or an alloy having an opening. In this case, as the control electrode insulating material 8, a plurality of insulator blocks are arranged so as to be spaced apart from each other so as to cross the plurality of cathodes 7 along the y-axis. Is filled with an insulating adhesive such as frit and glass, and the above-described conductive plate-like member is fixed on the block of the insulator by the insulating adhesive. The function of the control electrode insulating material 8 is to be changed to the desired shape (for example, thin film or block shape, etc.). Unless it is specialized in bulk, it is also simply referred to as insulating material 8. Fig. 59 is a diagram explaining the outline of a field emission display device with a surface conduction electron source, and (a) is the figure. Equivalent circuit, (b) is a plan view near the electron source, (c) is a cross-sectional view taken along line C-C in (b), the same as Fig. 58 (a)-(c) As is clear from the equivalent circuit shown in Fig. 59 (a), the electron emission source of the field emission display device shown in this figure is as follows. A voltage is applied to each of G, B, and R from the cathode 7 on the Y j row and the control electrode 5 on the X i column corresponding to the address (X i, Y j) of the surface element where the electron source is located. The driving mode for emitting electrons, which is different from that in FIG. 58 (a), can be used because of the shape of the surface conduction type electron source. As shown in FIGS. 59 (b) and 59 (c), the surface conduction electron source has an opening 9 'in a portion of the control electrode insulating material 8 covering the cathode 7 corresponding to the pixel. The control electrode 5 and the cathode 7 provided on the control electrode insulating material 8 are connected through the opening 9 ′ with the conductive layer 57, and a part of the control electrode 5 is formed by a forming process (such as an energizing process). ) To make the resistance of this part (101) higher than the other parts of the conductive layer 57. The high resistance portion 101 that divides the conductive layer 57 into the control electrode 5 side and the cathode 7 side becomes a surface conduction type electron source (electron emission portion). This electron source utilizes the tunnel effect that occurs when a predetermined voltage is applied between the control electrode 5 and the cathode 7 and the junction between the conductive layer 57 and the high-resistance portion 101-the conductive layer 57. And emit electrons. The conductive layer 57 is preferably formed of fine particles of a conductive material. For forming the high-resistance portion 101, not only the above-described forming process of the conductive layer 57 but also the conductive layer 5 is used. Irradiation of Focused Ion Beam to 7 can also be used.

A display device using a surface conduction electron source can operate with the equivalent circuit shown in Fig. 58 (a). In this case, a pair of conductive layers having different voltages are provided for each of the cathodes 7 in the X1 to Xn columns, and the insulating material 8 covering the cathode 7 is provided at least at a position corresponding to each pixel. Provide openings or do not provide insulation 8. The pair of conductive layers is electrically connected in a region not covered with the insulating material, and the above-described high-resistance portion is formed at the connection portion. On the other hand, the control electrode 5 is provided so as to sandwich or surround this high-resistance portion, and controls the passage and cutoff of electrons emitted from the high-resistance portion by its potential. By configuring the cathode 7 and the control electrode 5 in this manner, the control cathode 5 is set to a potential at which electrons emitted from the cathode 7 pass to the anode substrate side. Thus, an image can be displayed by modulating the electron emission from the cathodes 7 in the X1 to Xn columns.

Therefore, the functions of the cathode 7, the anode 10, and the control electrode 5 of the field emission display device described below in this specification may be different depending on the type of the electron emission unit provided therein. . Therefore, these elements include, in that order, a first electrode (a so-called emitter that emits electrons from the electron-emitting portion), a second electrode (a so-called collector that is irradiated with the emitted electrons), and It can also be called the third electrode (turns on / off the flow of electrons from the first electrode to the second electrode).

Irrespective of the electron emission effect of the above-mentioned Spindt electron source, surface conduction electron source, and other types of electron sources, the phosphor 11 excited by the electrons emitted from these sources is It can be formed using the same fluorescent material as a cathode ray tube known as a tube. For example, the pixels displaying red Y _₂ 0 ₂ S: E u to S m, the pixel displaying green Z n S: C u, A u, the A 1, the pixel displaying blue Z Phosphor 11 is formed using n S: Ag respectively. Each of the phosphor materials exemplified here is described as “phosphor crystal: activator” with a colon interposed therebetween. The activator determines the concentration and type of the phosphor 11, the afterglow characteristics of the phosphor 11, and the like, depending on the firing (synthesis) conditions with the phosphor crystal. In addition, a pigment is coated on the surface of the phosphor 11 so that the phosphor 11 exhibits a black color or a color close to this when not emitting light (reflected color). 1 reflects a color close to gray, which causes the display screen to shimmer.)

In the above-described field emission display device, the space surrounded by the respective main surfaces of the cathode substrate 1 and the anode substrate 2 and the support frame 30 is the glass substrate 6 shown in FIG. The air is exhausted from the exhaust port 61 provided on the back surface of the, and the pressure is reduced until the pressure reaches the above value (degree of vacuum). In the evacuation process, the cathode substrate 1 and the anode substrate 2 are separated from the space between them by the atmosphere. In order to prevent the space from being crushed by the atmospheric pressure due to the pressure difference from the pressure, the member called the partition wall material 3 is appropriately placed in the vacuum space of the display device. ing. This technique is discussed in, for example, JP-A-2000-213335.

FIG. 60 schematically illustrates an example of the structure of the above-described conventional field emission display device. In this figure, the periphery of the surface element (electron emission portion) is shown in an enlarged manner, and the above-described support frame (side wall) 30 is omitted. The partition material 3 is an insulating material disposed between the cathode substrate 1 and the anode substrate 2. Although the insulation resistance is kept high enough, the surface may be slightly conductive to prevent electrons from colliding and becoming charged. In the operation of the above-mentioned field emission display device, it is positioned as thin as possible and accurately positioned at an appropriate interval between the pixels so as not to hinder electrons traveling in a vacuum from the cathode substrate 1 to the anode substrate 2. Need to be placed. In driving the field emission display, a positive potential is applied to the anode substrate 2 (the above-described anode 10... Not shown) with respect to the cathode substrate 1 (the above-described cathode 0.7... Not shown). In order to sufficiently accelerate the electrons and secure the luminous efficiency, a potential of several hundred volts or more, and sometimes several thousand volts or more, is used. When a high voltage is used, it is necessary to secure a sufficient space between the cathode substrate 1 and the anode substrate 2 so that voltage breakdown does not occur. For example, when setting a potential difference of several thousand volts between the cathode substrate 1 and the anode substrate 2, it is necessary to separate them by at least 1 mm. On the other hand, a thickness of, for example, 100 m is selected so that the presence of the partition wall material 3 does not affect the display screen. Disclosure of the invention

As described above, in manufacturing a field emission display, a thickness in a range of 30 to 150 m (for example, 100 // m) and a height of 1 mm or more (for example, It is necessary to accurately and efficiently arrange and incorporate the partition wall material 3 having a value in the range of 2 to 3 mm). Also, as the number of the partition walls 3 It is necessary to arrange at least as many as possible to withstand the stress due to atmospheric pressure (eg, bending of the glass substrate 13). This number varies greatly depending on the strength of the cathode substrate 1, the anode substrate 2, and the partition wall material 3. For example, a large field emission display device having a diagonal dimension of 40 inches (class) is used. At least several hundreds are required, and depending on the design, tens of thousands are required.

On the other hand, in the partition wall material 3, when electrons collide with the partition wall material 3, secondary electrons are generated from the surface or the surface is charged (charge-up). is there. Due to these phenomena, the traveling of electrons near the partition wall material 3 is hindered, and the uniformity of the display performance of the pixels in the display screen of the field emission display device may be impaired. To deal with this problem, it is important to appropriately control the electron traveling space and to arrange the partition members 3 as uniformly as possible. For this purpose, for example, by sufficiently increasing the number of partition members 3 arranged between the cathode substrate 1 and the anode substrate 2, the pressure difference between the space surrounded by these members and the atmospheric pressure can be reduced. The strength of the display device is ensured, and the uniformity of the display performance within the display surface is maintained. .

However, the arrangement of the partition wall material 3 proposed in the past is not always enough to efficiently and accurately arrange it at an appropriate place. If it were to be produced at a later date, there was a risk that productivity would suffer significantly. .

In addition, the bulkhead material 3 is bonded to the cathode substrate 1 and the anode substrate 2 at a time with an inorganic adhesive or the like. A manufacturing method has also been adopted in which, after bonding 3, the other side is bonded to the other side. In this method, the following problem is added in addition to the above-mentioned problem that the collective arrangement is difficult. For example, when the cathode substrate 1 and the partition member 3 are first bonded, the partition member 3 is fixed with an inorganic adhesive or the like so that its position does not change at least during the manufacturing process. Heat treatment in which the effect on the electron-emitting portion provided on the cathode substrate 1 cannot be ignored in this fixing process (Example For example, a heat treatment of about -500 ° C.) is applied, so that there is a high probability that the electron emission performance of the electron emission portion provided in advance on the cathode substrate 1 is deteriorated. In addition, the deterioration of the electron emission performance becomes remarkable in the vicinity of the partition wall material 3, and as a result, the in-plane uniformity is deteriorated in the display characteristics of the field emission display device. Some materials have a lower temperature as the processing temperature of the inorganic adhesive, but when bonding the cathode substrate 1 and the partition material 3 first, the adhesive softens and deforms at the temperature used in the subsequent assembly process. Cannot be used. For this reason, the processing temperature of the adhesive used in the first assembly must be set so as to process at the highest temperature. It is practically difficult to provide an electron-emitting portion on the cathode substrate 1 to which the partition wall material 3 is bonded, because of the structure of the electron-emitting portion described above.

Similarly, when the anode substrate 2 and the partition wall material 3 are first bonded, the anode substrate 2 is subjected to a non-negligible heat treatment, for example, a heat treatment of about 500 ° C., so that the anode substrate 2 is formed on the anode substrate 2 in advance. There is a risk of deteriorating the luminous efficiency of the phosphor 11. In addition, the deterioration of the luminous efficiency becomes remarkable in the vicinity of the partition wall member 3, and as a result, the in-plane uniformity of the display characteristics of the field emission display device may be impaired. It is also difficult to provide the phosphor 11 on the anode base plate 2 to which the partition wall material 3 is bonded, due to the structure of the anode substrate 2.

The present invention solves the above-mentioned problems, and provides a structure capable of efficiently and accurately arranging the partition member 3 without impairing the display performance, and a method of manufacturing the same. It is intended for.

To this end, the present invention provides the following display device.

One of the display devices according to the present invention includes a cathode substrate provided with an electron emitting portion and an anode provided with a light emitting portion (for example, a fluorescent portion) that emits light by irradiation of electrons emitted from the electron emitting portion. A plurality of partition members that separate the board from the substrate with a predetermined gap (distance) are bundled (connected to individual partition members and the positional relationship between them is maintained). It is characterized by: Hereinafter, this display device is also referred to as a first display device according to the present invention. Another one of the display devices according to the present invention is provided with a cathode substrate provided with an electron-emitting portion and a light-emitting portion (for example, a fluorescent portion) which emits light by irradiation of electrons emitted from the electron-emitting portion. A plurality of partition members for separating the anode substrate with a predetermined gap (distance) with a predetermined gap (distance), and electrodes (control electrodes) for controlling the flow of electrons from the electron emission section to the anode substrate. (It is connected to the partition wall material and the electrode to maintain the positional relationship between them.) It is characterized in that it has a “partition wall material / control electrode connection holding plate”. Hereinafter, this display device is referred to as a second display device according to the present invention.

These display devices are, for example, field emission display devices in which two substrates (plate-like members) constituting the display device are separated from each other more widely than a liquid crystal display device or a plasma display panel. Applicable, especially when maintaining pressure between two substrates _; below atmospheric pressure. In addition, many advantages are provided for a field emission display device that performs surface image display by causing charged particles to travel between two substrates.

According to the present invention, irrespective of the first and second display devices described above, these components are combined, the components of the display device are replaced with substitutes, or the display device has a new configuration. By adding requirements, a new display device can be provided. The above and other objects, features, and advantages of the present invention will be further clarified by associating the following description with the accompanying drawings. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a schematic diagram (perspective view of a display device disassembled into main components) for briefly explaining the structural features of a first display device according to the present invention. FIG. 3 is a schematic view (perspective view of a display device disassembled into main components) for briefly explaining the structural features of a second display device according to the present invention. FIG. 1 is a perspective view illustrating an embodiment. (An exploded perspective view showing the display device disassembled into main components, and is abbreviated as “perspective view” unless otherwise noted.)

FIG. 4 is a CD cross-sectional view of the cathode substrate 1 in FIG.

FIG. 5 is an example of an A-B cross section of the cathode substrate 1 in FIG.

FIG. 6 is a view showing a second embodiment having another AB section of the cathode substrate 1 in FIG.

FIG. 7 is a view showing a third embodiment having another AB cross section of the cathode substrate 1 in FIG.

FIG. 8 is a plan view of the partition wall member connection holding plate 4 shown in FIG.

FIG. 9 is an enlarged view of the partition wall material insertion hole 21 in the plan view of the partition wall member connection holding plate 4 shown in FIG.

FIG. 10 is a view showing a fourth embodiment having another AB cross section of the cathode substrate 1 in FIG.

FIG. 11 is a diagram showing a fifth embodiment having another section A-B of the cathode substrate 1 in FIG. · FIG. 12 is a diagram showing a sixth embodiment having another AB cross section of the cathode substrate 1 in FIG.

FIG. 13 is a perspective view for explaining a seventh embodiment of the display device according to the present invention.

FIG. 14 is a CD sectional view of the cathode substrate 1 in FIG.

FIG. 15 is a perspective view for explaining an eighth embodiment of the present invention.

FIG. 16 is a perspective view for explaining a ninth embodiment of the display device according to the present invention.

FIG. 17 is a perspective view for explaining a tenth embodiment of the display device according to the present invention.

FIG. 18 is a perspective view for explaining a first embodiment of the display device according to the present invention. FIG. 19 is a CD sectional view of the cathode substrate 1 in FIG.

FIG. 20 is a perspective view for explaining a 12th embodiment of the display device according to the present invention.

FIG. 21 is a cross-sectional view taken along a line AB of the cathode substrate 1 in FIG.

FIG. 22 is a diagram showing a thirteenth embodiment having another AB cross section of the cathode substrate 1 in FIG.

FIG. 23 is a view showing a 14th embodiment having another AB cross section of the cathode substrate 1 in FIG.

FIG. 24 is a perspective view for explaining a fifteenth embodiment of the display device according to the present invention.

FIG. 25 is a perspective view for explaining a sixteenth embodiment of the display device according to the present invention.

FIG. 26 is a perspective view for explaining a seventeenth embodiment of the display device according to the present invention. '

FIG. 27 is a perspective view for explaining the eighteenth embodiment of the display device according to the present invention.

FIG. 28 is a perspective view for explaining a nineteenth embodiment of the display device according to the present invention.

FIG. 29 is a perspective view for explaining a 20th embodiment of the display device according to the present invention.

FIG. 30 is a perspective view for explaining a twenty-first embodiment of the display device according to the present invention.

FIG. 31 is a perspective view for explaining a second embodiment of the display device according to the present invention.

FIG. 32 is a perspective view for explaining a 23rd embodiment of the display device according to the present invention.

FIG. 33 is a perspective view illustrating a twenty-fourth embodiment of the display device according to the present invention. FIG.

FIG. 34 is a perspective view for explaining a twenty-fifth embodiment of the display device according to the present invention.

FIG. 35 is a CD sectional view of the cathode substrate 1 in FIG.

FIG. 36 is a perspective view for explaining a 26th embodiment of the display device according to the present invention.

FIG. 37 is a perspective view for explaining a twenty-seventh embodiment of the display device according to the present invention.

FIG. 38 is a perspective view for explaining a twenty-eighth embodiment of the display device according to the present invention.

FIG. 39 is a perspective view for explaining a ninth embodiment of the display device according to the present invention.

FIG. 40 is a perspective view for explaining a 30th embodiment of the display device according to the present invention.

FIG. 41 is a perspective view illustrating a thirty-first embodiment of the display device according to the present invention.

FIG. 42 is a perspective view showing an example of a combination structure of the partition wall members 3 in FIG. FIG. 43 is a perspective view for explaining a 32nd embodiment of the display device according to the present invention.

FIG. 44 is a perspective view for explaining a third embodiment of the display device according to the present invention.

FIG. 45 is a perspective view for explaining a 34th embodiment of the display device according to the present invention.

FIG. 46 is a perspective view for explaining a thirty-fifth embodiment of the display device according to the present invention.

FIG. 47 is a perspective view illustrating a 36th embodiment of the display device according to the present invention. FIG.

FIG. 48 is a perspective view for explaining a 37th embodiment of the display device according to the present invention.

FIG. 49 is a perspective view for explaining a 38th embodiment of the display device according to the present invention.

FIG. 50 is a perspective view for explaining a thirty-ninth embodiment of the display device according to the present invention.

FIG. 51 is a perspective view for explaining a 40th embodiment of the display device according to the present invention.

FIG. 52 is a perspective view for explaining a 41st embodiment of the display device according to the present invention.

FIG. 53 is a perspective view for explaining a 42nd embodiment of the display device according to the present invention. '-• FIG. 54 is a perspective view for explaining a fourth embodiment of the display device according to the present invention.

FIG. 55 is a perspective view for explaining a fourth embodiment of the display device according to the present invention.

FIG. 56 is a diagram showing an example of an electron-emitting portion provided on a cathode substrate of a display device according to the present invention, wherein (a) is a plan view thereof, and (b) is a C—C of (a). It is sectional drawing drawn along the line.

FIG. 57 is an explanatory view showing an example of the electron emission type display device. (A) is a perspective view showing a state in which the display device is disassembled, and (b) is a view before disassembling the display device shown in (a). The cross-sectional views are shown along the X-z plane in each state. FIG. 58 is a diagram illustrating a field emission display device using a Spindt-type electron source. (A) is an equivalent circuit diagram, (b) is a plan view of the electron emission portion,

(c) is a cross-sectional view of the electron emission portion of (b) taken along the line C-C. FIG. 59 is a diagram for explaining a field emission display device using a surface conduction electron source. (A) is an equivalent circuit diagram, (b) is a plan view of the electron emission portion, (c) (B) is a cross-sectional view when the electron emission portion of (b) is cut along the line CC.

FIG. 60 is a perspective view schematically showing a periphery of a pixel (electron emitting portion) of a conventional field emission display device. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the present invention will be described with reference to the drawings.

FIG. 1 is an explanatory diagram for conceptually explaining a first display device according to the present invention, and schematically shows an arrangement near a pixel (electron emission portion) of the display device. FIG. 1 omits the following parts which are not directly related to the first display device according to the present invention in order to emphasize the structural characteristics thereof.

(1) Partition wall material (wall member) 3 and partition wall connection holding plate (connection member) 4, or partition wall member 3 and partition wall / control electrode connection holding plate (connection member, described later) , adhesive) . ''

(2) A means for hermetically sealing the support frame (sidewall) 3, the negative electrode substrate 1, and the positive electrode substrate 2 for keeping the inside of the field emission display device at a vacuum.

(3) A method for fixing the partition wall member 3 and the cathode substrate 1 or the partition wall member 3 and the anode substrate 2.

(4) A mechanism (for example, an exhaust port provided in the housing) for vacuum-sealing the inside of the field emission display device (the inside of the housing where electrons travel).

(5) A getter material for maintaining a high vacuum inside the field emission display.

(6) Means for electrically connecting the cathode substrate 1, the anode substrate 2, the partition wall connecting and holding plate 4, or the partition wall and control electrode connecting and holding plate 4.

(7) Means (the above-described electron emitting portion) for emitting electrons provided on the cathode substrate 1 into a vacuum (in the above housing). These components are omitted in other drawings referred to in the embodiments of the present invention (hereinafter, referred to as embodiments), which will be described later, but any one of the components or a combination thereof has a feature. It is shown as appropriate in the drawings that refer to an embodiment.

The field emission display device having the structure shown in FIG. 1 has a space (housing) surrounded by a cathode substrate 1, an anode substrate 2, and a support frame (side wall) not shown. It has airtightness and strength to keep the space in a vacuum. Referring to FIG. 57 (b), the cathode substrate 1 (shown as a glass substrate 6) and the anode substrate 2 are caused by the pressure difference between the above-mentioned space and the atmospheric pressure applied to each. It is strong enough not to be damaged by stress (bending) in the z-axis direction. Positive (positive) potential is applied to the anode substrate 2 with respect to the cathode substrate 1, and the anode substrate 2 has a phosphor 11 that emits light by receiving electrons flying from the cathode substrate 1. Between them, a bulkhead material aggregate 17 composed of a plurality of bulkhead materials 3 and a bulkhead material connecting / holding plate 4 in which these are mechanically connected is arranged. The partition wall material 3 has a surface along the traveling direction of the electrons, and the lower side of this surface is brought into contact with the cathode substrate 1 and the upper side of this surface is brought into contact with the gap electrode substrate 2, whereby There are various examples of the form of connection between the partition wall member 3 and the partition wall connection holding plate 4 that form a desired gap between the anode substrate 2 and the partition wall member 3. Also, the shape and arrangement of the partition wall member 3 and the partition wall connection holding plate 4 may have various forms. Representative embodiments of these combinations will be described in the following embodiments, but only the embodiments described here do not realize the features of the present invention. FIG. 2 is an explanatory diagram for conceptually explaining a second display device according to the present invention, and the arrangement of the display device in the vicinity of a pixel (electron emission portion) is simply shown as in FIG.

The field emission display having the structure shown in FIG. 2 has a space (housing) surrounded by a cathode substrate 1, an anode substrate 2, and a support frame (side wall) (not shown). It has airtightness and strength to keep the space in a vacuum. The cathode substrate 1 has a means for emitting electrons into the space (vacuum), and has airtightness and strength capable of keeping this space vacuum. The anode substrate 2 has a phosphor 11 applied with a positive (positive) potential with respect to the cathode substrate 1 and emitting light upon receiving electrons flying from the cathode substrate 2. Like the cathode substrate 1, the anode substrate 2 has airtightness and strength capable of maintaining the above-mentioned space in a vacuum. Between the cathode substrate 1 and the anode substrate 2, there are a plurality of partition members 3, a partition wall connecting and holding plate 4 in which these are mechanically connected, and a partition member composed of control electrodes 5 and a control electrode assembly 1. 8 are located. The partition wall material 3 has a surface along the traveling direction of electrons, and the control electrode 5 fixed to the lower side of this surface is brought into contact with the cathode substrate 1 and the upper side of this surface is brought into contact with the anode substrate 2. A desired gap is provided between the cathode substrate 1 and the anode substrate 2. There are various examples of the connection form between the partition wall material 3 and the partition wall connection holding plate 4. There are many forms in the shape and arrangement of the partition wall material 3, the partition wall connection holding plate 4, and the control electrode 5. Representative embodiments of these combinations will be described in the following embodiments, but only the embodiments described here do not realize the features of the present invention.

The partition member 3 provided in each of the above-described first and second display devices according to the present invention is provided in the above-described space (for example, in the housing) maintained in a vacuum (for example, a pressure of 10 to ⁵ to 10 to ⁷ Torr). ) Does not need to be completely partitioned along the X-axis direction or the Y-axis direction shown in Fig. 57, and the vacuum exhaust conductor in the housing is interposed between this and the cathode substrate 1 or anode substrate 2. Even if the shape is such that an opening suitable for increasing the impedance is formed, it does not hinder the implementation of the present invention. In addition, in order that the partition wall material 3 does not hinder the traveling of electrons in the above-mentioned housing, its traveling direction (extending direction of a virtual line drawn from the anode substrate 1 raw surface to the anode substrate 2 main surface, FIG. It is desirable to use a plate-shaped member having a surface (for example, the y-z plane or the X-z plane in FIG. 2) extending along the z-axis direction in FIG. The surface along the traveling direction of the electrons may show an inclination with respect to the traveling direction of the electrons within a range that does not hinder the traveling of the electrons. In addition, along the traveling direction of electrons of the partition wall material 3, By making the area of the surface (the y-z surface in the example of Fig. 2) larger (wider) than the area of the other surface that touches each side of this surface, the display screen (the second The area ratio of the electron traveling area (in other words, the electron irradiation area on the anode substrate 2) on the X-y plane in the figure can be increased. The surface (wider than the other surface) of the partition wall material 3 formed in this way along the traveling direction of electrons is also referred to as “principal surface of the partition wall material”. Increasing the area ratio of the electron traveling region on the display screen is desirable for increasing the number of surface elements of the display device, and has the advantage of increasing the brightness of each pixel. The partition wall member 3 may be provided with an opening as long as its strength is not impaired. The member called the partition wall material 3 is specified by this name in the specification of the present application based on its visual characteristics. However, depending on the embodiment of the display device, a wall member, a plate-like member, a plate (plate) is used. ). The partition connection holding plate 4 provided in each of the first and second display devices according to the present invention described above does not fix the plurality of partition members 3 to the cathode substrate 1 or the anode substrate 2. In order to arrange between these substrates, it is formed so as to be mechanically fixed to each partition material 3. The mechanical fixing of the partition wall connection holding plate 4 and the partition wall member 3 is performed, for example, by providing an opening in the partition wall connection holding plate 4 and fitting the protrusion provided on the partition wall member 3 into the opening. This can be achieved by fixing the surface of the partition wall material 3 to the surface of the partition wall connection holding plate 4 with an adhesive or solder. The deflection of the cathode substrate 1 or the anode substrate 2 due to the atmospheric pressure generated when exhausting the space where electrons travel in the display device is absorbed by the partition material 3, but the partition material 3 is not fixed to these substrates. In this case, the position of each of the partition wall members 3 may be changed in order to reduce the stress applied from the substrate. Such a variation is disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 2000-213335 in which two types of partition members 3 whose respective surfaces along the traveling direction of electrons cross each other are combined. It occurs even in one example. This fluctuation changes the shape and volume of the electron traveling area for each surface element, and changes the electron irradiation conditions on the anode substrate for each pixel. obtain. However, the partition connection holding plate 4 provided in the display device according to the present invention has a surface (for example, as shown in FIG. 2) that extends so as to intersect with the electron traveling direction (the z-axis direction in FIG. 2) in the housing. (The X_y plane) is joined to each of the plurality of partition members 3. For example, the above-described opening is provided on a surface of the partition connection holding plate 4 that intersects with the electron traveling direction, and the above-described projection provided on each of the partition wall members 3 and protruding along the traveling direction of the electron is fitted into the opening. Confuse. By such bonding, the stress (in the z-axis direction in FIG. 2) that is greatly applied to the specific partition wall material 3 is transferred to the partition wall 4 in a plane intersecting the electron traveling direction (in FIG. 2, X — Dispersed into other partition material 3 through the (y-plane) to suppress the difference in electron traveling conditions between pixels. In addition, a surface of the partition connection holding plate 4 that intersects with the electron traveling direction has a plurality of openings corresponding to each of the electron emission portions provided on the cathode substrate 2 (separate from the opening in which the above-described protrusion is fitted). ) Is established. Since the electrons (charged particles) emitted from the electron-emitting portion have a charge, they undergo a space charge effect from the cathode substrate: 1 to the anode substrate 2. Fig. 58 (c) and Fig. 58 5 9 Run along the prescribed trajectory as shown in Fig. (C). For this reason, the opening provided in the partition wall connecting support plate 4 acts as a so-called electron lens (or the like) that shapes the electron trajectory, rather than restricting the electrons reaching the anode substrate 2. Good. Therefore, by providing the openings corresponding to the electron emitting portions in the partition wall connecting support plate 4 in the same shape, the electron traveling conditions for each electron emitting portion (in other words, for each surface element) are uniform. This solves the problem that the electron irradiation on the anode substrate is different for each pixel, and the phosphor of each pixel can emit light without variation over the screen of the display device. This effect has a great advantage of displaying a surface image without “unevenness” on the display device. It is desirable that the partition wall connecting and holding plate 4 having a surface intersecting with the electron traveling direction (the z-axis direction in FIG. 2) in such a housing is formed in a plate shape. The partition connection holding plate 4 formed as a plate-like member has an area of a plane (X-y plane in the example of FIG. 2) intersecting the traveling direction of the electrons. The area is larger (wider) than the area of the other surface (X-z plane or y-z plane in the example in Fig. 2) that touches each side. The surface (wider than the other surfaces) of the partition connection holding plate 4 formed in this way, which intersects the traveling direction of electrons, is also referred to as a “raw surface of the partition connection holding plate”. The partition connection holding plate 4 formed in a plate shape does not impair the performance of connecting and holding the plurality of partition members 3 due to its raw surface, and the electron traveling area (the z-axis in FIG. 2) in the housing. Direction) can be spread sufficiently. When the traveling area of the electrons in the housing is widened, the trajectories of the electrons largely depend on the lens effect provided by the opening provided on the main surface of the partition connection holding plate 4 described above. For this reason, as long as the shape of the opening provided in the main surface of the partition connection holding plate 4 is designed to be uniform in correspondence with each of the electron emission portions of the cathode substrate 2, any of the electron emission portions (pixels) can be used. Electrons can travel in a similar trajectory from the cathode substrate 1 to the anode substrate 2, and as a result, variations in luminance between pixels are eliminated. Further, in the second display device according to the present invention, the base material of the partition wall connection holding plate 4 is formed of an insulating material, and a film of a conductive material is formed so as to surround the opening of the main surface. Thus, a control electrode can be formed. The member called the partition connection holding plate 4 is specified in this specification by this name on the basis of its visual characteristics, but according to the embodiment, a connection member, a connection plate, and a It can also be called Joiner.

Further, the functions of the cathode, anode (metal back), and control electrode in the above and below descriptions depend on the form of the electron emission section (electron source) provided in the display device and the driving method thereof, as already described. It can change more. Therefore, the cathode, the anode, and the control electrode are, in this order, the first electrode (for emitting electrons from the electron emitting portion), the second electrode (for receiving the emitted electrons), and the third electrode (from the first electrode). Adjusting the flow of electrons to the second electrode). However, in each of the following examples, 3: “partition material”, 4: “partition material connection holding plate”, or simply “connection plate”, 5: “control electrode”, 7 : "Cathode", 8: "insulating material for control electrode" or simply " Edge member ”, 10: For convenience, it is called“ metal back ”or“ anode ”. Further, the space in which electrons travel in the display device (the above-described housing) has a function of keeping the inside thereof vacuum, and thus is also referred to as a vacuum chamber or airtight means.

FIG. 3 to FIG. 5 are diagrams illustrating a first embodiment of the present invention. In FIG. 1, a cathode substrate 1 is composed of a cathode glass substrate 6, a cathode 7, a control electrode insulating material (hereinafter, insulating material) 8 and a control electrode 5. The anode substrate 2 includes an anode glass substrate 13, a phosphor 11, a black matrix 12, and a metal back 10. FIG. 4 shows a cross section taken along line CD of FIG. In the cathode substrate 1, the cathode 7 and the control electrode 5 are arranged so as to cross each other, and a material having conductivity is selected for each. An insulating material 8 is provided for the purpose of insulating the two types of electrodes. The cathode 7 has a function of emitting electrons into a vacuum space when a positive potential is applied to the control electrode 5, and is a diamond using carbon atoms; a film, a graphite film, or a carbon nanotube. In addition to (Carbon Nano Tube; CNT), a so-called Spindt structure that emits electrons from the conical tip and a material that uses the quantum tunnel effect are used. The control electrode 5 is provided with a control electrode hole 9 as shown in FIG. In this embodiment, the control electrode hole 9 is formed in a circular shape. As a means to install the control electrode 5. as shown in the figure, the metal plate is machined, laser-processed, or photo-etched (a pattern is drawn on the workpiece by photolithography, and this is used as a mask. The control electrode holes 9 are formed and arranged by etching the workpiece.

On the other hand, in the anode substrate 2, phosphors 11 that emit red (R), green (G), and blue (B) due to the incidence of electrons are spatially painted on the anode glass substrate 13. . A black matrix 12 is arranged between the three color phosphors 11 to prevent color mixing. In addition, these phosphors 11 and On the matrix 12, there is conductivity, and electrons that travel from the cathode substrate 1 are transmitted and collide with the phosphor 11, and the emitted light is used as the anode glass. A metal back (anode) 10 having a function of reflecting light to the substrate 13 side is formed on the front surface.

Between the cathode substrate 1 and the anode substrate 2 having the above-described configuration, there is a partition material assembly 17 composed of the partition material 3 and the partition material connection holding plate (hereinafter, connection plate) 4 connected thereto. In order to actually assemble a field emission display, in addition to these three components, a side wall for shielding the atmosphere, means for connecting these four parts while maintaining airtightness, means for vacuum sealing, gettery And means for electrically connecting the cathode 7, the control electrode 5, the partition wall assembly 17 (Assemblage), and the metal back 10 will be described. Omitted from the description. In this way, the partition wall member 3 and the connecting plate 4 connected to the partition wall member 3 are mechanically (physically) combined into a single component called the aggregate member 17 of the partition wall member. A: Assembly is extremely easy. In FIG. 3, the section A- _; B of the partition wall assembly 17 is shown in FIG.

FIG. 5 shows a structure in which the partition wall material 3 partially penetrates the partition wall connection holding plate (connecting plate) 4 and is fixed to the cathode 7 side with an adhesive 15. The connection plate 4 has an electron beam passage hole (opening) 14, and most of the electrons reach the anode substrate 2 through this opening.

Since the partition wall material 3 is provided to separate the cathode substrate 1 ′ and the anode substrate 2 from each other, its electrical characteristics are an insulator. However, if necessary, the surface may be appropriately made conductive to prevent the surface from being charged by electrons. The appropriate conductivity may be given only to the surface of the partition wall material 3 instead of the entire volume. Ceramics, inorganic glass, crystallized glass, and the like are used as the material of the partition wall material 3. Pre-sintered / solidified or semi-sintered / solidified ceramics, inorganic glass, crystallized glass partition material 3 is fixed to connecting plate 4 by adhesive 15. The connecting plate 4 can use an insulator, a semiconductor, and a metal material. In the case where the electron is attached and the whole or local charge is caused and the electric field distribution of the surface element becomes unstable, it is connected to an electrical device that has appropriate conductivity and controls the potential. It is desirable that In this first embodiment, the potential is maintained at the potential of the anode substrate 2 in FIG. 3, specifically, the potential of the metal back 10 as shown in FIG. It is easiest to set the same as the anode potential, but a potential different from the anode potential may be selected in order to maintain the electron focusing state more appropriately.

The connecting plate 4 is preferably made of an insulator having a conductive film formed on the surface, or a member made of a metal material. In any case, it is desirable that the linear thermal expansion coefficients of the cathode glass substrate 6 and the anode glass substrate 13 substantially coincide with each other. When a ceramic or glass plate is used as an insulator, an electron beam: passage hole 14 and a partition wall material insertion hole 21 ′ are formed in the plate. These holes can be formed by existing processing methods such as laser processing, mechanical processing, or photo-etching.The mica plate has excellent heat resistance, insulation resistance, elasticity, and can be formed in a vacuum. This is one of the materials suitable for manufacturing the connecting plate 4 because the generation of gas is small. In order to impart electrical conductivity to the insulating member, for example, sogel metal

(Ni) and tantalum metal (Ta) films are formed by sputtering. When one of the main surfaces of the connecting plate 4 is made conductive, it is preferable to provide a metal layer on the side of the cathode substrate 1 where electrons easily collide. On the other hand, as a conductive material suitable for manufacturing the connecting plate 4, for example, iron (Fe), iron / Nigel alloy (FeNi), iron / Nigel / chrome alloy (FeNiCr), or iron / nickel / cobalt Alloy

(FeNiCo) and Invar.

FIG. 6 shows a second embodiment in which the bulkhead assembly 17 shown in FIG. 3 is fixed to the bulkhead material connecting and holding plate 4 on the anode substrate side with an adhesive agent 15, and FIG. This is shown as a C-D section in Fig. 3. Supply adhesive 15 to the anode substrate side Thus, this can be prevented from being directly exposed to the flow of electrons.

7 and 3 were assembled by using mechanical friction and elastic deformation between the partition wall material 3 and the partition wall connection holding plate 4 without using an adhesive. A third embodiment is shown as a cross section taken along line CD of FIG. In this embodiment, it can be implemented by forming at least one of the partition wall members 3 or the partition wall connection holding plate (connection plate) 4 from a resilient material. FIG. 8 is a plan view showing a main surface of an example of the connecting plate 4 used in the present embodiment, and a partition material insertion hole (hereinafter referred to as an opening) for inserting the partition material 3 into the main surface. 2 1 is provided. This opening 21 is shown in an enlarged manner in each of FIGS. FIG. 9 (a) shows an example in which the opening 21 has a bent shape rather than a rectangle within the length la of the partition wall insertion hole 21. Here, 'ta is not zero (0). FIG. 9 ('b) shows an example in which a part lb (a part of length lb) of the opening 21 is bent. This example is also characterized in that tb is not zero.

An example of an elastic material is mica plate. Iron connecting plate 4, a system alloy, a barrier rib material 3 when respectively formed by mica, the opening 2 the first barrier rib material ^3; fitted et portion is elastically deformed, the connecting plate 4 by its elastic frictional force Join. The present embodiment has an advantage that the partition wall assembly 17 can be manufactured only by mechanical processing and assembly without using an adhesive. Further, both the connecting plate 4 and the partition wall material 3 may be formed of mica plates.

FIG. 10 shows a fourth embodiment in which the partition wall assembly 17 of FIG. 3 is assembled in another connection mode. In this embodiment, the partition wall material 3 is inserted into the partition wall connection holding plate 4 and fixed by mechanical frictional force, but the end thereof substantially coincides with one surface of the partition wall connection holding plate 4. I have. The partition wall insertion hole 21 may be formed into the shape shown in FIGS. In this structure, since there is no unevenness on one main surface of the partition wall connecting support plate 4, the partition wall member 3 is supported on a flat work table. Can be inserted into the partition material insertion hole 21.

FIG. 11 shows a fifth embodiment in which the partition wall assembly 17 of FIG. 3 is assembled by another bonding method. The partition material 3 is inserted into the partition material insertion hole (opening) 21 provided in the partition material holding plate 4 and substantially matches the rear surface of the partition material holding plate 4 (the main surface on the anode substrate 2 side). The insertion end (upper part) of 3 is fixed to the partition wall holding plate 4 with an adhesive 15. In this structure, the application area of the adhesive 15 is substantially flat, so that assembling workability and application accuracy are improved.

Fig. 12 shows the partition wall aggregate 17 of Fig. 3 provided with ceramics before sintering, and the partition wall material 3 consisting of sintered ceramics is called green sheets. A sixth embodiment in which the partition walls are arranged on the main surface of the connection holding plate (connection plate) 4 and the ceramics are sintered at a predetermined temperature to assemble them will be described. For the production of the connecting plate 4 of the present embodiment, a metal, ceramics, powder, glass, or the like that can withstand the above sintering temperature is used. In addition, the ceramics before sintering are connected. On the main surface of the plate 4, as a method of arranging the ceramics material by the 'screen printing' method on the raw surface of the connection plate 4. There are a method in which the supply is repeated a plurality of times, and a method in which a roll type in which the green sheet is embedded is pressed against the main surface of the connecting plate 4 to transfer. Whichever method is adopted, a plurality of partition members 3 can be simultaneously formed on the connecting plate 4. This is suitable for improving the production efficiency of the display device.

FIG. 13 shows a display device of a seventh embodiment having a cathode substrate structure different from that of the above-described embodiment. FIG. 14 shows a C-D cross section of FIG. The control electrode 5 has a control electrode hole 9, but does not cover the corresponding opening 8 9 of the insulating material 8. In other words, the contour of the control electrode hole 9 does not enter the opening 8 9 of the insulating material 8. In this embodiment, a control electrode hole 9 is formed on a metal plate by machining, laser processing, or a photo-etching method. Electrode 5 is prepared. Further, even if a metal material is supplied on the insulating material 8 by vapor deposition, sputtering, ion plating, or the like to form a metal film, and a control electrode hole pattern is formed thereon by photoetching, Alternatively, the control electrode 5 can be manufactured by applying a conductive paste-like material on the insulating material 8 and forming a pattern directly on the paste-like material by a screen printing method.

FIG. 15 shows an eighth embodiment having a partition structure different from that of the above-described embodiment, which is characterized in that the partition material 3 is divided in the longitudinal direction. The partition wall member 3 does not need to be continuous over the entire field emission display device, and is divided so as to reduce the difference in thermal expansion coefficient between the partition wall member 3 and the partition wall member connection holding plate 4. Since the resulting stress can be alleviated, the selection range of the material used for the partition wall material 3 is expanded. '

FIG. 16 shows a ninth embodiment in which the partition wall material 3 is arranged so as to intersect (orthogonally) the direction in which the control electrode 5 extends. With such an arrangement, the control electrode 5 is pressed by the partition wall aggregate 17 to enhance the structural stability of the display device.

FIG. 17 shows a tenth embodiment in which the partition wall member 3 of the ninth embodiment is divided in the longitudinal direction and is divided in the longitudinal direction. As in the case of the eighth embodiment, the stress generated between the partition wall member 3 and the partition wall member holding plate 4 due to the difference in thermal expansion coefficient therebetween can be reduced, so that the selection range of the material used for the partition wall member 3 is expanded.

FIG. 18 shows an eleventh embodiment in which the control electrode 5 of the ninth embodiment is formed in a rod shape. FIG. 19 shows a C-D section of FIG. As shown in FIG. 18, the control electrode 5 of the present embodiment has a pair of a first control electrode 19 and a second control electrode 20 to emit electrons from each of the cathodes 7. Control. When the first control electrode 19 and the second control electrode 20 are set to the same potential, In order to increase the mechanical strength of the first control electrode 19 and the second control electrode 20 at positions other than the opening 89 of the insulating film 8 (where the electron emission portion is disposed), May be connected. The number of rod-shaped electrodes constituting the control electrode 5 may be increased to three or more according to the area of the cathode 7. Although the control electrode 5 shown in FIG. 19 has a rectangular cross section, this cross section may be circular or elliptical. The advantage of the structure of the present embodiment is that not only the above-mentioned rod-shaped control electrode is machined, laser-processed, or photo-etched, but also a plurality of wires are connected to each other by using a component connected at each end. Can also be formed. In addition, since the control electrode 5 is pressed from above by the partition wall 3, the structural stability of the field emission display is increased.

FIG. 20 shows a 12th embodiment using a partition assembly having a shape different from that of the above-described embodiment, and FIG. 21 shows a cross section taken along a line AB in FIG. In this embodiment, the partition wall member 3 is not fitted to the partition wall insertion hole (opening) 21 of the connecting plate 4 but is fixed to the main surface of the cathode substrate 1 side with an adhesive 15. In the structure of the present embodiment, one main surface (the upper surface in FIG. 21) of the connecting plate 4 is kept flat, so that the work of connecting the partition wall material 3 thereto can be performed on a flat work table. Since the opening 21 is not provided, the connection plate 4 can be easily processed.

Example 13

FIG. 22 shows a partition wall aggregate 17 similar to that of the first embodiment applied between the main surface of the connecting member 4 and the end surface of the partition wall member 3 mainly with the adhesive '15. Example 13 is shown below. The structure of this embodiment has the same advantages as the first and second embodiments because one main surface (the upper surface shown) of the connecting member 4 is kept flat and the formation of the opening 21 is unnecessary. In addition, the adhesive 15 is applied to the flat surface, so that the efficiency of the assembling work is increased.

FIG. 23 shows that the partition wall material 3 is formed of sintered ceramics, and these are greased. The ceramics before sintering is placed on the main surface of the partition wall connecting and holding plate (connecting plate) 4 coated with the ceramic before sintering called the sheet etc. at a predetermined temperature. The 14th embodiment of sintering and fixing the partition wall material 3 to the main surface of the connecting plate 4 to assemble the partition wall material assembly will be described. As the material of the connecting plate 4, any one of a metal, a ceramic, and a glass resistant to the sintering temperature is selected. As a method of arranging the ceramics before sintering on the raw surface of the connecting plate 4, as in the sixth embodiment, the screen printing method is repeated and green sheets are filled. There is a method of pressing the inserted roll against the raw surface of the connecting plate 4 and transferring the roll. In the structure of this embodiment, one of the raw surfaces of the connecting plate 4 is kept flat, and it is not necessary to form the opening (partition material insertion hole) 21. In addition to this, by simultaneously fixing a plurality of partition members 3 to the partition member connection holding plate 4, there is an advantage that the display device production efficiency (throughput) is improved.

FIG. 24 shows a fifteenth embodiment in which the partition wall assembly 17 has a different structure from the first and the second embodiments. As shown in FIG. 24, the partition wall material 3 is not disposed for each of the electron beam passing holes 14, but is thinned out for each of the plurality (three in the illustrated example) of the electron beam passing holes 14. Placed. The structure of the present embodiment is possible as long as the partition wall material 3 has sufficient strength so as not to be deformed or broken by the atmospheric pressure applied through the cathode substrate 1 or the anode substrate 2. In addition, the structure of this embodiment also has the advantages of reducing the materials used and simplifying the assembly process.

FIG. 25 shows a 16th embodiment in which the partition wall material 3 is arranged so as to intersect the direction in which the control electrode 5 extends. This embodiment has the same advantages as the ninth embodiment because the control electrode 5 is pressed by the aggregate 17 of the partition walls.

Figure 26 shows two types of raw surfaces (for example, X — Combining the z-plane and the y-z-plane), the cross section (opposed to the main surface of the cathode substrate 1 or the anode substrate 2, for example, the X-y plane) shows a cross shape (spreads in two dimensions) The 17th embodiment configured as described above is shown. In the present embodiment, the strength of the partition wall member 3 against the force applied from the normal direction of the main surface of the cathode substrate 1 or the anode substrate 2 is increased, and the partition wall member 3 falls down on the main surface of the partition wall connection holding plate 4. Since it is difficult, the efficiency of the assembling work of the partition wall assembly 17 is also increased.

FIG. 27 shows the 18th embodiment in which the insulating material 8 is formed without covering the entire surface of the cathode 7. The insulating material 8 is formed by direct patterning by thick film printing. A known method combining photolithography with this method, the formation of an insulating film by CVD and photo, etching, or an insulating member processed into a rod shape is applied to a glass substrate 6. It can be formed either by juxtaposition on the upper part of the frame. The control electrode 5 is formed in a rod shape extending in the direction in which the insulating material 8 extends. The rod-like control electrodes 5 are paired with each other, shown in parentheses, and constitute one pixel together with each of the cathodes 7 intersecting the pair. When the same potential is applied to each pair of rod-shaped control electrodes 5, each pair of control electrodes 5 is mechanically connected at a position other than on the cathode 7 to reinforce them mechanically. May be. Further, as in the first embodiment, the number of the pair of control electrodes 5 constituting one pixel for each intersecting cathode 7 may be increased to three or more according to the area of the cathode 7. Further, the cross section of the control electrode 5 is not limited to the illustrated rectangle, and a circular or elliptical shape does not impair the function as the control electrode 5. One of the advantages of the structure shown in this embodiment is that, after arranging a plurality of wires connected to each other at the ends on the insulating material 8 and then cutting these ends, a plurality of rods are formed. The point is that the control electrode 5 can be efficiently formed at once. One of the other advantages of the present embodiment is that the capacitance between the cathode 7 and the control electrode 5 can be kept small, so that a high-frequency signal can be input to the cathode 7 and the control electrode 5. And the display characteristics of the field emission display device are further improved. Is done.

FIG. 28 shows a nineteenth embodiment in which the partition wall member 3 is arranged so as to intersect the extending direction of the control electrode 5 in the structure of the eighteenth embodiment. Therefore, in addition to the advantages of the eighteenth embodiment, the structural stability of the field emission display device is enhanced by pressing the control electrode 5 with the partition wall aggregate 17.

<20th embodiment>

FIG. 29 shows a 20th embodiment in which the insulating material 8 is formed in a sheet shape extending over a plurality of control electrode holes 8 in the structure of the 18th embodiment. The insulating material 8 can be provided as one sheet in the entire emission type display device. One of the advantages of this embodiment is that the insulating material 8 is previously processed and formed as a separate member from the cathode substrate 1 and then accurately and appropriately arranged on the cathode 7 to form the cathode substrate 1. As a result, the manufacturing process of the cathode substrate 1 is simplified, and the range of selection of the insulating material that can be used as the base material of the insulating material 8 of the present embodiment is expanded. As one of the base materials that can be used in the present embodiment, there is mica that can be easily made thin and can form an opening corresponding to the control electrode hole 9 and has good insulating properties.

FIG. 30 shows that the insulating material 8 was formed in a sheet shape over a plurality of control electrode holes8 in the same manner as in the 20th embodiment, and the control electrode 5 was directly formed on the insulating material 8. A second embodiment will be described. In the structure of this embodiment, the control electrode 5 is processed and formed together with the insulating material 8, and a laminate of the insulating material 8 having the control electrode hole 9 and the control electrode 5 (a member different from the main body of the cathode substrate 1). The cathode substrate 1 can be completed by accurately and appropriately arranging it on the cathode 7, so that the production efficiency of the cathode substrate 1 (throughput) can be obtained in addition to the advantages of the 20th embodiment. This has the advantage of improving

<Second Embodiment> FIG. 31 shows a second embodiment in which the partition wall material 3 is in contact with the anode 10 of the anode substrate 2. As shown in the figure, the partition wall connecting and holding plate 4 is in contact with the control electrode 5 and is formed of an insulating material, or a metal plate is used and an insulating film or an insulating layer is formed on the main surface of the control electrode 5 side. To form In this embodiment, since the electron beam passage hole 14 is located near the control electrode 5, the partition wall assembly 17 can be easily arranged without obstructing the traveling of electrons. As a result, the anode substrate 2 The amount of electrons jumping into the surface can be increased. Fig. 31 shows the cathode substrate 1 of the 21st embodiment as an example, but the structure is not limited to this. Any of the cathode substrates 1 shown in the embodiments can be used.

FIG. 32 shows a 23rd embodiment characterized by the shape of the partition wall assembly 17 having the second partition wall 16 in addition to the partition wall 3. In this example, the shape of the partition wall aggregate 17 is as follows. By appropriately setting the heights of these two kinds of partition walls 3 and 6 and the potential applied to the partition wall connection holding plate 4, the focusing condition of the electrons emitted from the cathode 7 is optimized, and the field emission display is performed. The display characteristics of the device can be improved. The height of the partition wall member 3 (the dimension in the z-axis direction in FIG. 32) may be lower than that of the second partition wall member 16 to bring the partition wall connection holding plate 4 closer to the control electrode.

FIG. 33 shows the second bulkhead material 16 on the main surface of the bulkhead material connecting plate 4 on the side opposite to the main surface to which the bulkhead material 3 is joined (shown as the y-z plane). A second embodiment is shown in which the crossing is made so as to intersect the main surface (shown as the X-z plane) of the partition wall material 3. The structure of the present embodiment, in addition to the advantages of the second and third embodiments, structurally stabilizes the display device against stress caused by atmospheric pressure, and facilitates the assembly of the partition wall assembly 17. Bring the advantage.

<Example 25> FIG. 34 shows a twenty-fifth embodiment in which the control electrode 5 is fixed to the partition wall member 3 fixed to the partition wall member connecting plate 4 to form an assembly called a partition wall member / control electrode assembly 18. Is shown. Fig. 35 shows a cross section C-D of Fig. 34. By providing the control electrode 5 on the partition wall material / control electrode assembly 18 without providing the control electrode 5 on the cathode substrate 1, the structure of the cathode substrate 1 is simplified and easy to manufacture. The shape of the control electrode 5 is not limited to the illustrated bar shape, and may be changed to another shape used in the above-described embodiment. Further, the shape of the cathode substrate 1 may be changed according to any of the above-described embodiments.

FIG. 36 shows a partition wall material / control electrode assembly 18 in which the control electrode 5 is fixed to the second partition wall material 16 coupled to the partition wall material connecting plate 4 together with the partition wall material 3. The following shows an example. In addition, in addition to the partition wall member 3, there is a through hole of the second partition wall member 16. In the present embodiment, the flexibility of the partition wall member / control electrode assembly 18 was increased by making the height of the second partition wall member 16 (the dimension in the z-axis direction smaller than that of the partition wall member 3).

FIG. 37 shows a twenty-seventh embodiment in which the twenty-sixth embodiment and the seventeenth embodiment are combined. FIG. 37 shows the strength and the cross-section (x_ (in the y-plane) (they are hard to fall), the efficiency of the joining work of these ^;

FIG. 38 shows a thirty-eighth embodiment using a plate-like control electrode 5 in which a plurality of control electrode holes 9 are formed in a partition wall material / control electrode assembly 18 of the twenty-sixth embodiment. .

<Twenty-ninth embodiment>

Fig. 39 shows a second embodiment in which an insulating connecting material 22 is provided on the main surface of the partition material connecting and holding plate (connecting plate) 4 on the side of the cathode substrate 1 and the control electrode 5 is fixed thereto. Here is an example. The insulating connecting material 22 connects the connecting plate 4 and the control electrode 5 so as not to be electrically short-circuited. Instead of forming the insulating connecting member 22 on the main surface of the connecting plate 4, the connecting plate 4 itself may be made of an insulating material and the insulating connecting member 22 and the connecting plate 4 may be integrated. '

FIG. 40 shows a 30th embodiment in which the control electrode 5 of the 29th embodiment is formed on the insulating connecting member 22 by using a method of growing a thick film or a thin film. Also in this embodiment, instead of forming the insulating connecting member 22 on the main surface of the partition wall connecting and holding plate 4, the partition wall connecting and holding plate 4 is made of an insulating material and is insulated from the partition wall connecting and holding plate 4. The function of the sexual connection material 22 may be added.

FIG. 41 shows a grid-type partition member 3 in which a grid-like partition member 3 is fixed to a partition member connection holding plate (connection plate) 4 made of an insulating material, and a control electrode 5 is directly formed on the connection plate 4. Example 3 is shown. The structure of the grid-like partition wall material 3 is illustrated in detail in FIG. Grooves 23 are formed in each of the partition walls 3 orthogonal to each other, and these are fitted as shown in the figure, so that the partition walls 3 are hard to fall down and hard to be crushed. The partition member 3 having this structure can be used not only in this embodiment but also in all other embodiments according to the present invention.

FIG. 43 shows a 32nd embodiment in which the 20th embodiment is combined with the 30th embodiment. In this embodiment, the insulating material 8 extends over the plurality of control electrode holes 9.

Since it is formed as a sheet (provided with a plurality of openings 89 corresponding to these), the same advantages as those of the 20th embodiment are obtained. The sheet-like insulating material 8 is preferably made of mica, for example. In addition, a single sheet can be formed for the entire field emission display device. Further, the partition wall connecting and holding plate 4 itself is made of such a sheet-like insulating base material (preferably, having a film thickness larger than that of the insulating material 8). It may have 22 functions. <Third embodiment>

FIG. 44 shows a 33rd embodiment in which the partition wall connecting and holding plate 4 of the 32nd embodiment is formed of an insulator, and the control electrode 5 is formed on the raw surface of the cathode substrate 1 side. 3 4 Example>

In FIG. 45, the partition wall connecting and holding plate (connecting plate) 4 of the embodiment of FIG. 31 is formed of an insulating material, and the control electrode 5 is formed on the raw surface of the connecting plate 4 on the anode substrate 2 side. A thirty-fourth embodiment will now be described. The connecting plate 4 of this embodiment also has the function of the above-mentioned insulating material 8 (hence, it is indicated by reference numerals 4 and 8), and a part of the partition wall material 3 is provided on the connecting plate 4 via the control electrode 5. Is fixed. The structure of the present embodiment has the advantages of reducing the number of materials and parts required for assembling the display device and completing the display device easily (with a small number of steps).

FIG. 4 6 shows that the partition wall connecting and holding plate 4 is formed of an insulating material, which also has the function of the insulating material '.8, and the control electrode 5 is formed on the main surface of the anode substrate 2 side. Further, a third embodiment in which the partition wall material 3 is fixed to the anode substrate 2 side of the control electrode 5 is shown. ^ The structure of this embodiment is required for assembling the display device as in the 34th embodiment. It is suitable for reducing the number of materials, parts, and the number of assembling processes, and thus has the advantage of increasing the production efficiency of the display device. It can be manufactured separately from the partition wall material and the partition wall connection holding plate 4 by a processing method such as etching.

Third Embodiment>

FIG. 47 shows a structure in which a pair of first and second control electrodes 19 and 20 each having a surface covered with an insulating material 8 and having a control electrode 5 fixed to a partition wall connecting and holding plate 4. The following shows an example. In the structure of this embodiment, the first control electrode 19 and the second control electrode 20 can be prepared or prepared in advance as a wire coated with an insulating film, so that the production efficiency of the display device can be improved. It is desirable for improvement.

<Embodiment 37> FIG. 48 shows a pair of a first control electrode 19 and a second control electrode 20 forming a control electrode 5, each of which is coated with an insulating material 8 on a glass substrate 6 (cathode substrate 1). A fixed 37th embodiment is shown. Also in the structure of the present embodiment, since the first control electrode 19 and the second control electrode 20 can be prepared or prepared in advance as a wire covered with an insulating film, the production efficiency of the display device is improved. Is brought.

FIG. 49 shows a third embodiment in which the partition wall connecting and holding plate 4 is made of an insulating material, and the control electrode 5 is formed on the main surface of the cathode substrate 1 side, and the insulating material 8 is formed on the control electrode 5. Example 8 is shown. The structure of the present embodiment simplifies the structure of the cathode substrate 1 to increase its production efficiency, and allows the partition wall material and the control electrode assembly 18 to be freely processed separately from the cathode substrate 1 and the anode substrate 2. It has the advantage of being manufactured. The control electrode hole 9 is not limited to an example in which a plurality of rectangular openings are regularly arranged as shown in the figure, and may have a different shape and arrangement according to another embodiment according to the present invention. .

<Thirty-ninth embodiment>

FIG. 50 shows a thirty-ninth embodiment in which the partition wall connecting and holding plate 4 is made of an insulator, and the control electrode 5 is formed on the main surface of the cathode substrate 1 side. The structure of the present embodiment is such that the partition wall material 3, the partition wall material connecting / holding plate 4, and the control electrode 5 are fixed to each other, and the partition wall material and the control electrode assembly 18 are different from the cathode substrate 1 and the anode substrate 2. The advantage is that it can be processed or assembled separately. Although an example is shown in which a plurality of openings having a substantially circular shape are regularly arranged as the control electrode holes 9, the shape may be changed to a rectangular or elliptical shape, and the arrangement of the array may be changed. It is possible.

The 40th embodiment>

FIG. 51 shows a 40th embodiment in which the partition wall connecting and holding plate 4 is made of an insulating material, and the control electrode 5 and the insulating material 8 are formed in this order on the main surface of the cathode substrate 1 side. Here is an example. The structure of this embodiment allows the cathode substrate 1 to have an extremely simple structure, and allows the partition wall material and the control electrode assembly 18 to be freely processed and manufactured separately from the cathode substrate 1 and the anode substrate 2. The advantage is that Although an example in which a plurality of openings having a substantially rectangular shape are regularly arranged as the control electrode holes 9 is illustrated, even if these shapes are changed to circular or elliptical shapes, etc. Modifications may be made in accordance with other embodiments of the present invention.

FIG. 52 shows a 41st embodiment in which the partition wall connecting and holding plate 4 is made of an insulating material, and the rod-shaped control electrode 5 is fixed to the main surface on the cathode substrate side. The structure of the present embodiment has an advantage that the partition wall material / control electrode assembly 18 can be freely processed and manufactured separately from the cathode substrate 1 and the anode substrate 2. A notable advantage of the structure of this embodiment is that the partition wall material << the control electrode assembly 18 can be manufactured without using a so-called thin film technique or thick film technique. Although an example is shown in which the control electrode 5 has a rectangular cross section orthogonal to its long axis direction (X-axis direction in the figure), this cross section can be changed to a circular, elliptical, or polygonal shape. It does not prevent implementation of the present invention.

Fig. 53 shows that the partition wall connecting and holding plate 4 is made of an insulating material, the control electrode 5 is provided on the main surface on the cathode substrate 1 side, and the insulating material is insulated so as to fill the gap between the control electrodes on this main surface. A fourth embodiment in which the material 8 is partially formed is shown. The structure of this embodiment has an advantage that the structure of the cathode substrate 1 is extremely simplified, and the partition wall material and the control electrode assembly 18 can be freely processed and manufactured separately from the cathode substrate 1 and the anode substrate 2. Bring. In addition, since the relative permittivity of the insulating material 8 is usually larger than 1, the area where the insulating material 8 is arranged on the main surface of the partition wall connecting and holding plate 4 is limited to the gap between the control electrode 5 and the periphery thereof. Thus, as a result of the partial formation of the insulating material 8, the capacitance between the cathode 7 and the control electrode 5 was reduced. Since the capacitance between the cathode 7 and the control electrode 5 becomes smaller, The frequency of the signal (control signal) supplied to these electrodes (conductors) can be increased. Therefore, the display device having the structure of the present embodiment can easily display a high-definition image (the change in peripheral devices of the display device required for high-definition image display can be reduced). Although an example in which a plurality of openings having a substantially rectangular shape are regularly arranged as the control electrode holes 9 is illustrated, even if these shapes are changed to a circular or elliptical shape, or an arrangement of these shapes, The mode may be changed.

Example 43>

FIG. 54 shows a fourth embodiment in which the partition wall connecting and holding plate 4 is made of an insulating material and the control electrode 5 is formed on the main surface of the cathode substrate 1 side. The structure of the present embodiment has an advantage that the partition wall material / control electrode assembly 18 can be freely processed and manufactured separately from the cathode substrate 1 and the anode substrate 2. In this embodiment, the insulating material 8 is partially formed so as to fill the gap between the cathodes 7 on the main surface of the glass substrate 6. Therefore, the shape of the cathode substrate 1 is similar to that of the eighteenth embodiment (FIG. 27). Since the relative permittivity of the insulating material 8 is usually larger than 1, the insulating material 8 is limited so that the area where the insulating material 8 is arranged or formed on the main surface of the glass substrate 6 is limited. When the insulating material 8 is partially formed on the cathode 7, the capacitance between the cathode 7 and the control electrode 5 is reduced. As described in the 42nd embodiment, since the capacitance between the cathode 7 and the control electrode 5 is reduced, a high-frequency control signal can be supplied by them. As a result, the definition of a display image on the display device is improved, or high-definition image display is easily realized. Although an example in which a plurality of openings having a substantially circular shape are regularly arranged as the control electrode holes 9 is shown, these shapes are changed to rectangular or elliptical shapes, and the arrangement of the present invention is changed. <Fourth and Fourth Embodiment>

FIG. 55 shows a fourth embodiment in which the partition wall connecting and holding plate 4 is made of an insulating material and a plurality of sets of a pair of rod-shaped control electrodes 5 are fixed to the main surface of the cathode substrate 1 side. Show. The structure of the present embodiment provides an advantage that the partition wall material * control electrode assembly 18 can be freely processed and manufactured separately from the cathode substrate 1 and the anode substrate 2. Further, by providing the insulating material 8 partially on the raw surface of the cathode substrate 1 as in the fourth embodiment, even if the relative permittivity of the insulating material 8 is larger than 1, The capacitance between the cathode 7 and the control electrode 5 can be made as small as possible to supply a high-frequency control signal to at least one of them. Therefore, a higher-frequency control signal can be used for the image display operation of the display device, and as a result, a high-definition image display by this display device can be easily realized. Furthermore, a notable advantage of the structure of this embodiment is that the partition wall material and the control electrode assembly 18 can be manufactured without using a so-called thin film technology or a thick film technology (growth method). And Although an example is shown in which the cross section orthogonal to the extending direction of the control electrode 5 (the X-axis direction in the figure) is square, the implementation of the present invention is prevented even if the cross section is changed to a circle, an ellipse, or a polygon. Not.

Finally, FIG. 56 shows an electron source using a carbon nanotube 'nano' tube suitable as an electron emission part of the above-mentioned display device according to the present invention. Fig. 56.

(a) is a plan view of the electron source, and FIG. 56 (b) is a cross-sectional view of the electron source taken along line BB of FIG. 56 (a). The structure and operation of this electron source is similar to the Spindt type electron source already described with reference to FIGS. 58 (b) and (c), but the emitter cone 10 Instead of 0, it uses rod-shaped carbon molecules called carbon nanotubes 102 '. Carbon 'nano' tube 1 0 2, as its name, longitudinally several nm including the size of the - is a (nano meter = 1 0 ⁹ m) very fine material a few tens nm from Figure 56 (a) and (b) show this in an enlarged manner. When fixing such a fine substance to the cathode 7, the illustrated electron source disperses a plurality of carbon nanotubes 102 into a conductive paste such as silver, and disperses the carbon nanotubes 102 in an insulating material 8. Then, the conductive paste is hardened to form a conductive film 103 by dripping onto the upper surface of the cathode 7 exposed from the opening or the gap of the cathode 7. This As a result, the carbon nano tube 102 is fixed to the surface of the conductive film 103. In this way, the portion of the carbon nanotube 102 fixed to the conductive film 103, particularly the portion protruding from the conductive film 103, is affected by the potential difference ΔV generated between this and the control electrode 5. In response, it emits electrons. As described above, an electron source using a carbon nanotube 102 can be formed by a simpler process than a Spindt-type electron source, as shown in Figs. 58 (c) and 56. As is clear from comparison with (b), many electron-emitting portions can be formed. Therefore, the field emission display device using the carbon nanotube 102 is suitable for mass production and has an advantage that an image can be displayed brighter. The above-described display device (field emission display device) according to the present invention is a “partition material connection holding plate” that collectively connects and holds partition materials 3 in which the anode substrate 1 and the anode substrate 2 are arranged at a fixed distance from each other. Is provided, so that the partition wall member 3 can be efficiently and accurately arranged and placed without impairing the image display performance of the display device.

In addition, the second display device and the like according to the present invention control the flow of electrons emitted from the cathode substrate, and the partition member 3 that arranges the cathode substrate 1 and the anode substrate 2 at a fixed distance from each other. Since the “partition material / control electrode connection holding plate” for connecting and holding the electrode (control electrode) 5 at a time is provided, the partition material 3 and the control electrode can be maintained without impairing the image display performance of this display device. 5 and can be arranged efficiently and accurately.

Although some embodiments according to the present invention have been shown and described, the present invention is not limited to these embodiments, and various modifications and improvements can be made within a range known to those skilled in the art. It is understood to be acceptable. It is therefore intended that the scope of the claims appended hereto be limited to the details shown and described, and that it include all such modifications and improvements.

Claims

The scope of the claims

1. A cathode substrate having a control means for emitting electrons by an electric field on one main surface, and a cathode substrate disposed at a distance from the cathode substrate so as to face the cathode substrate, and having one main surface absorbing the electrons to emit light. An anode substrate having a means for performing the above, airtight means for maintaining a space between the cathode substrate and the anode substrate in a vacuum, a plurality of partition members for maintaining a gap between the cathode substrate and the anode substrate, A display device comprising a connection holding means for connecting and holding the plurality of partition members on a surface along any one of the cathode substrate and the cathode substrate.

10 2. The display device according to claim 1, wherein the connection holding means is formed of a conductive material.

···

3. In Claim 1, the connection holding means is formed of an insulating material.

'Display device.

4. The display device according to claim 3, wherein a region made of a conductive material is formed in the fifteen-step conductive material made of the insulating material.

5. The display device according to claim 1, wherein the connection holding means has a main surface along a main surface of either the cathode substrate or the anode substrate.

20 6. In Claim 5, each of the plurality of partition members is held by the connection holding means by being bonded to the main surface of the connection holding means. Display device.

7. In Claim 5, the main surface of the connection holding means is provided with a plurality of openings, each of the plurality of partition members is provided with a projection, and each of the 25 plurality of partition members is A display device wherein the projection is inserted into any one of the plurality of openings of the connection holding means and held by the connection holding means.

8. A cathode substrate having a means for emitting electrons by an electric field on one of the main surfaces, and a means for absorbing and emitting light by absorbing the electrons on one of the raw surfaces, the cathode substrate being opposed to and separated from the cathode substrate. An anode substrate; airtight means for maintaining a vacuum between the cathode substrate and the anode substrate in a vacuum; a plurality of partition members for maintaining a gap between the cathode substrate and the anode substrate; A connection holding unit that connects and holds the plurality of partition members on a surface along any one of the main surfaces of the anode substrate; and a control unit that controls electron emission from the cathode substrate. A display device fixed to the partition wall material and disposed between the cathode substrate and the anode substrate, 9. a cathode substrate having a means for emitting electrons by an electric field on one main surface. And facing the cathode substrate An anode substrate having a means for absorbing the electrons and emitting light on one of the raw surfaces, an airtight means for maintaining a vacuum between the cathode substrate and the anode substrate, A plurality of partition members for maintaining a gap between the cathode substrate and the anode substrate; and a connection holding for connecting and holding the plurality of partition members on a surface along one of the main surfaces of the cathode substrate or the anode substrate. Means for controlling electron emission from the cathode substrate, wherein the connection holding means is provided with control means for controlling electron emission from the cathode substrate.

10. A first substrate having a first main surface, a second substrate having a second main surface opposed to the first main surface, the first substrate and the second substrate A support member connected to and surrounding a space sandwiched between the first main surface and the second main surface; and a support member disposed in the space and extending from the first main surface to the second front surface. A plurality of wall members having a surface extending along a virtual line; a cathode formed on the first main surface; a phosphor formed on the second raw surface; and formed to cover the phosphor. A display device comprising: a plurality of wall members, each of the plurality of wall members being connected to a connecting member having a surface extending along the first main surface or the second main surface.

11. The wall member is characterized in that the wall member is formed in a plate shape having a main surface extending along a virtual line from the first raw surface to the second main surface. Item 10. The display device according to Item 10.

12. The connection member according to claim 1, wherein the connection member is formed in a plate shape having a main surface extending along the first main surface or the second main surface. The display device according to item 0.

13. An electrode for controlling electron emission from the cathode is provided on the first main surface, and the electrode for controlling electron emission is disposed on an upper surface of an insulating member provided above the cathode. 10. The display device according to claim 10, wherein:

14. A surface of the connecting member extending along the first main surface or the second main surface is provided with an opening facing the negative electrode. The display device according to item 10 ′.

15. The display device according to claim 10, wherein an electrode for controlling electron emission of the cathode is provided around the opening of the connecting member.

1 6. A first substrate having a first main surface and a second substrate having a second main surface, the second main surface being spaced from the first substrate such that the second main surface faces the first main surface. A second substrate, a support member connecting the first substrate and the second substrate, and surrounding a gap between the first surface and the second main surface; A plurality of wall members arranged between the second main surface and having a main surface along the gap separating the front surfaces, a cathode formed on the first main surface, and a second main surface. A phosphor formed and an anode formed so as to cover the phosphor. Each of the plurality of wall members has a connection having a main surface along the first raw surface or the second main surface. A display device, which is connected to a member.

17. The display device according to claim 16, wherein an opening facing a cathode provided on the first substrate is provided on a main surface of the connecting member. .

18. The plurality of wall members, wherein the plurality of wall members are provided on each of the first substrate-side main surface and the second substrate-side main surface of the connection member. The display device according to item.

19. A group of the plurality of wall members provided on the first substrate-side main surface of the connecting member and another of the plurality of wall members provided on the second substrate-side main surface of the second substrate. 19. The display device according to claim 18, wherein the groups are arranged such that their main surfaces intersect.

20. A group of the plurality of wall members provided on the first substrate side main surface of the connection member and another of the plurality of wall members provided on the second substrate side main surface. 19. The display device according to claim 18, wherein a height of each of the groups along the gap is different from that of the group.