WO2002007484A3 - Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it - Google Patents

Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it Download PDF

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Publication number
WO2002007484A3
WO2002007484A3 PCT/EP2001/007658 EP0107658W WO0207484A3 WO 2002007484 A3 WO2002007484 A3 WO 2002007484A3 EP 0107658 W EP0107658 W EP 0107658W WO 0207484 A3 WO0207484 A3 WO 0207484A3
Authority
WO
WIPO (PCT)
Prior art keywords
implementing
gas
discharge plasma
wave radiation
producing short
Prior art date
Application number
PCT/EP2001/007658
Other versions
WO2002007484A2 (en
Inventor
Vladimir Mikhailovich Borisov
Oleg Borisovich Khristoforov
Original Assignee
Lambda Physik Ag
Vladimir Mikhailovich Borisov
Oleg Borisovich Khristoforov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from RU2000117336/09A external-priority patent/RU2206186C2/en
Application filed by Lambda Physik Ag, Vladimir Mikhailovich Borisov, Oleg Borisovich Khristoforov filed Critical Lambda Physik Ag
Priority to EP01965060A priority Critical patent/EP1300056A2/en
Priority to JP2002513245A priority patent/JP4880179B2/en
Priority to AU2001285797A priority patent/AU2001285797A1/en
Publication of WO2002007484A2 publication Critical patent/WO2002007484A2/en
Publication of WO2002007484A3 publication Critical patent/WO2002007484A3/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
PCT/EP2001/007658 2000-07-04 2001-07-04 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it WO2002007484A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP01965060A EP1300056A2 (en) 2000-07-04 2001-07-04 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it
JP2002513245A JP4880179B2 (en) 2000-07-04 2001-07-04 Method for generating short wavelength radiation from gas discharge plasma and apparatus therefor
AU2001285797A AU2001285797A1 (en) 2000-07-04 2001-07-04 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
RU2000117336 2000-07-04
RU2000117336/09A RU2206186C2 (en) 2000-07-04 2000-07-04 Method and device for producing short-wave radiation from gas-discharge plasma
US09/693,490 2000-10-20
US09/693,490 US6414438B1 (en) 2000-07-04 2000-10-20 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it

Publications (2)

Publication Number Publication Date
WO2002007484A2 WO2002007484A2 (en) 2002-01-24
WO2002007484A3 true WO2002007484A3 (en) 2002-04-25

Family

ID=26654057

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/007658 WO2002007484A2 (en) 2000-07-04 2001-07-04 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it

Country Status (4)

Country Link
EP (1) EP1300056A2 (en)
AU (1) AU2001285797A1 (en)
TW (1) TW503669B (en)
WO (1) WO2002007484A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10139677A1 (en) * 2001-04-06 2002-10-17 Fraunhofer Ges Forschung Method and device for generating extremely ultraviolet radiation and soft X-rays
FR2841684B1 (en) * 2002-06-28 2004-09-24 Centre Nat Rech Scient RADIATION SOURCE, ESPECIALLY ULTRAVIOLET WITH DISCHARGES
DE10238096B3 (en) * 2002-08-21 2004-02-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gas discharge lamp for extreme UV lithography or X-ray microscopy has tapered electrode opening for transport of charge carriers from external region to discharge space
DE10310623B8 (en) 2003-03-10 2005-12-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and apparatus for generating a plasma by electrical discharge in a discharge space

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01296596A (en) * 1988-05-25 1989-11-29 Hitachi Ltd Plasma x-ray generating device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01296596A (en) * 1988-05-25 1989-11-29 Hitachi Ltd Plasma x-ray generating device

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
HONG D ET AL: "Study of a fast ablative capillary discharge dedicated to soft X-ray production", REVIEW OF SCIENTIFIC INSTRUMENTS, JAN. 2000, AIP, USA, vol. 71, no. 1, pages 15 - 19, XP002186243, ISSN: 0034-6748 *
MOOSMAN B ET AL: "Measurements of gas preionization for plasma radiation sources", 12TH TOPICAL CONFERENCE ON HIGH TEMPERATURE PLASMA DIAGNOSTICS, PRINCETON, NJ, USA, 7-11 JUNE 1998, vol. 70, no. 1, pt.1-2, Review of Scientific Instruments, Jan. 1999, AIP, USA, pages 672 - 676, XP002186244, ISSN: 0034-6748 *
OHZU A: "Enhancement of soft X-ray emission from a pinch plasma using a rotating plasma for pre-ionization", OPTICS AND LASER TECHNOLOGY, ELSEVIER SCIENCE PUBLISHERS BV., AMSTERDAM, NL, vol. 32, no. 5, July 2000 (2000-07-01), pages 379 - 383, XP004219834, ISSN: 0030-3992 *
PATENT ABSTRACTS OF JAPAN vol. 014, no. 085 (E - 0890) 16 February 1990 (1990-02-16) *

Also Published As

Publication number Publication date
EP1300056A2 (en) 2003-04-09
TW503669B (en) 2002-09-21
WO2002007484A2 (en) 2002-01-24
AU2001285797A1 (en) 2002-01-30

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