WO2001090438A1 - A process and apparatus for plasma activated deposition in a vacuum - Google Patents
A process and apparatus for plasma activated deposition in a vacuum Download PDFInfo
- Publication number
- WO2001090438A1 WO2001090438A1 PCT/US2001/016693 US0116693W WO0190438A1 WO 2001090438 A1 WO2001090438 A1 WO 2001090438A1 US 0116693 W US0116693 W US 0116693W WO 0190438 A1 WO0190438 A1 WO 0190438A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gas
- substrate
- vapor
- stream
- cathode
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/228—Gas flow assisted PVD deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3132—Evaporating
- H01J2237/3137—Plasma-assisted co-operation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001264866A AU2001264866A1 (en) | 2000-05-23 | 2001-05-23 | A process and apparatus for plasma activated deposition in vacuum |
EP01939337A EP1409762A4 (en) | 2000-05-23 | 2001-05-23 | A process and apparatus for plasma activated deposition in a vacuum |
US10/297,347 US7014889B2 (en) | 2000-05-23 | 2001-05-23 | Process and apparatus for plasma activated depositions in a vacuum |
CA002411174A CA2411174C (en) | 2000-05-23 | 2001-05-23 | A process and apparatus for plasma activated deposition in a vacuum |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US20637900P | 2000-05-23 | 2000-05-23 | |
US60/206,379 | 2000-05-23 | ||
US23186900P | 2000-09-12 | 2000-09-12 | |
US60/231,869 | 2000-09-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2001090438A1 true WO2001090438A1 (en) | 2001-11-29 |
Family
ID=26901286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/016693 WO2001090438A1 (en) | 2000-05-23 | 2001-05-23 | A process and apparatus for plasma activated deposition in a vacuum |
Country Status (5)
Country | Link |
---|---|
US (1) | US7014889B2 (en) |
EP (1) | EP1409762A4 (en) |
AU (1) | AU2001264866A1 (en) |
CA (1) | CA2411174C (en) |
WO (1) | WO2001090438A1 (en) |
Cited By (13)
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EP1436441A2 (en) * | 2001-09-10 | 2004-07-14 | University Of Virginia Patent Foundation | Method and apparatus application of metallic alloy coatings |
WO2005047202A2 (en) * | 2003-07-29 | 2005-05-26 | University Of Virginia Patent Foundation | Method for application of a thermal barrier coating and resultant structure thereof |
WO2005089107A2 (en) * | 2004-01-08 | 2005-09-29 | University Of Virginia Patent Foundation | Apparatus and method for applying coatings onto the interior surfaces of components and related structures produced therefrom |
US7901739B2 (en) * | 2004-09-16 | 2011-03-08 | Mt Coatings, Llc | Gas turbine engine components with aluminide coatings and method of forming such aluminide coatings on gas turbine engine components |
WO2012138311A1 (en) * | 2011-04-08 | 2012-10-11 | Национальный Научный Центр "Харьковский Физико-Технический Институт" (Ннц Хфти) | Vacuum-arc evaporator for generating a cathode plasma |
US8541069B2 (en) | 2011-04-11 | 2013-09-24 | United Technologies Corporation | Method of guided non-line of sight coating |
US9133718B2 (en) | 2004-12-13 | 2015-09-15 | Mt Coatings, Llc | Turbine engine components with non-aluminide silicon-containing and chromium-containing protective coatings and methods of forming such non-aluminide protective coatings |
US9640369B2 (en) | 2009-02-24 | 2017-05-02 | University Of Virginia Patent Foundation | Coaxial hollow cathode plasma assisted directed vapor deposition and related method thereof |
US9745736B2 (en) | 2013-08-27 | 2017-08-29 | University Of Virginia Patent Foundation | Three-dimensional space frames assembled from component pieces and methods for making the same |
US10184759B2 (en) | 2015-11-17 | 2019-01-22 | University Of Virgina Patent Foundation | Lightweight ballistic resistant anti-intrusion systems and related methods thereof |
US10378861B2 (en) | 2014-09-04 | 2019-08-13 | University Of Virginia Patent Foundation | Impulse mitigation systems for media impacts and related methods thereof |
US20200385871A1 (en) * | 2017-07-17 | 2020-12-10 | Rolls-Royce Corporation | Thermal barrier coatings for components in high-temperature mechanical systems |
US11591686B2 (en) * | 2014-06-25 | 2023-02-28 | Universal Display Corporation | Methods of modulating flow during vapor jet deposition of organic materials |
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ITRM20010060A1 (en) * | 2001-02-06 | 2001-05-07 | Carlo Misiano | PERFECTION OF A METHOD AND APPARATUS FOR THE DEPOSITION OF THIN FILMS, ESPECIALLY IN REACTIVE CONDITIONS. |
US7556695B2 (en) * | 2002-05-06 | 2009-07-07 | Honeywell International, Inc. | Apparatus to make nanolaminate thermal barrier coatings |
US7509734B2 (en) * | 2003-03-03 | 2009-03-31 | United Technologies Corporation | Repairing turbine element |
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US7601294B2 (en) | 2006-05-02 | 2009-10-13 | Babcock & Wilcox Technical Services Y-12, Llc | High volume production of nanostructured materials |
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US8709160B2 (en) * | 2008-08-22 | 2014-04-29 | United Technologies Corporation | Deposition apparatus having thermal hood |
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US8399065B2 (en) * | 2009-08-24 | 2013-03-19 | Applied Materials, Inc. | In-situ deposition of battery active lithium materials by thermal spraying |
US8642140B2 (en) * | 2011-03-09 | 2014-02-04 | United Technologies Corporation | Ceramic coating deposition |
US20130011578A1 (en) * | 2011-07-07 | 2013-01-10 | Hass Derek D | Method and apparatus for applying a coating at a high rate onto non-line-of-sight regions of a substrate |
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Citations (2)
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US5436035A (en) * | 1991-12-05 | 1995-07-25 | Alusuisse-Lonza Services Ltd. | Coating a substrate surface with a permeation barrier |
US5846608A (en) * | 1994-04-14 | 1998-12-08 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Process for ion-supported vacuum coating |
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US5397428A (en) * | 1991-12-20 | 1995-03-14 | The University Of North Carolina At Chapel Hill | Nucleation enhancement for chemical vapor deposition of diamond |
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DE4235199C1 (en) * | 1992-10-19 | 1993-04-22 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
US5457298A (en) * | 1993-07-27 | 1995-10-10 | Tulip Memory Systems, Inc. | Coldwall hollow-cathode plasma device for support of gas discharges |
US5508368A (en) * | 1994-03-03 | 1996-04-16 | Diamonex, Incorporated | Ion beam process for deposition of highly abrasion-resistant coatings |
US5534314A (en) * | 1994-08-31 | 1996-07-09 | University Of Virginia Patent Foundation | Directed vapor deposition of electron beam evaporant |
DE19505268C2 (en) * | 1995-02-16 | 1999-02-18 | Fraunhofer Ges Forschung | CVD process for coating substrate surfaces |
DE19612344C1 (en) | 1996-03-28 | 1997-08-21 | Fraunhofer Ges Forschung | Apparatus for plasma-activated vapour coating at high rates |
DE19841012C1 (en) | 1998-09-08 | 2000-01-13 | Fraunhofer Ges Forschung | Apparatus for plasma-activated vapor coating of substrates in vacuum |
CA2305938C (en) * | 2000-04-10 | 2007-07-03 | Vladimir I. Gorokhovsky | Filtered cathodic arc deposition method and apparatus |
-
2001
- 2001-05-23 EP EP01939337A patent/EP1409762A4/en not_active Withdrawn
- 2001-05-23 AU AU2001264866A patent/AU2001264866A1/en not_active Abandoned
- 2001-05-23 WO PCT/US2001/016693 patent/WO2001090438A1/en active Application Filing
- 2001-05-23 CA CA002411174A patent/CA2411174C/en not_active Expired - Lifetime
- 2001-05-23 US US10/297,347 patent/US7014889B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US5436035A (en) * | 1991-12-05 | 1995-07-25 | Alusuisse-Lonza Services Ltd. | Coating a substrate surface with a permeation barrier |
US5846608A (en) * | 1994-04-14 | 1998-12-08 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Process for ion-supported vacuum coating |
Non-Patent Citations (1)
Title |
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See also references of EP1409762A4 * |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1436441A2 (en) * | 2001-09-10 | 2004-07-14 | University Of Virginia Patent Foundation | Method and apparatus application of metallic alloy coatings |
EP1436441A4 (en) * | 2001-09-10 | 2004-11-24 | Univ Virginia | Method and apparatus application of metallic alloy coatings |
US10260143B2 (en) | 2001-09-10 | 2019-04-16 | University Of Virginia Patent Foundation | Method and apparatus for application of metallic alloy coatings |
US8124178B2 (en) | 2001-09-10 | 2012-02-28 | University Of Virginia Patent Foundation | Method and apparatus application of metallic alloy coatings |
WO2005047202A2 (en) * | 2003-07-29 | 2005-05-26 | University Of Virginia Patent Foundation | Method for application of a thermal barrier coating and resultant structure thereof |
WO2005047202A3 (en) * | 2003-07-29 | 2005-08-25 | Univ Virginia | Method for application of a thermal barrier coating and resultant structure thereof |
WO2005089107A2 (en) * | 2004-01-08 | 2005-09-29 | University Of Virginia Patent Foundation | Apparatus and method for applying coatings onto the interior surfaces of components and related structures produced therefrom |
WO2005089107A3 (en) * | 2004-01-08 | 2006-01-19 | Univ Virginia | Apparatus and method for applying coatings onto the interior surfaces of components and related structures produced therefrom |
US8110043B2 (en) * | 2004-01-08 | 2012-02-07 | University Of Virginia Patent Foundation | Apparatus and method for applying coatings onto the interior surfaces of components and related structures produced therefrom |
US7901739B2 (en) * | 2004-09-16 | 2011-03-08 | Mt Coatings, Llc | Gas turbine engine components with aluminide coatings and method of forming such aluminide coatings on gas turbine engine components |
US8623461B2 (en) | 2004-09-16 | 2014-01-07 | Mt Coatings Llc | Metal components with silicon-containing protective coatings substantially free of chromium and methods of forming such protective coatings |
US9133718B2 (en) | 2004-12-13 | 2015-09-15 | Mt Coatings, Llc | Turbine engine components with non-aluminide silicon-containing and chromium-containing protective coatings and methods of forming such non-aluminide protective coatings |
US9640369B2 (en) | 2009-02-24 | 2017-05-02 | University Of Virginia Patent Foundation | Coaxial hollow cathode plasma assisted directed vapor deposition and related method thereof |
WO2012138311A1 (en) * | 2011-04-08 | 2012-10-11 | Национальный Научный Центр "Харьковский Физико-Технический Институт" (Ннц Хфти) | Vacuum-arc evaporator for generating a cathode plasma |
US8541069B2 (en) | 2011-04-11 | 2013-09-24 | United Technologies Corporation | Method of guided non-line of sight coating |
US9745736B2 (en) | 2013-08-27 | 2017-08-29 | University Of Virginia Patent Foundation | Three-dimensional space frames assembled from component pieces and methods for making the same |
US11591686B2 (en) * | 2014-06-25 | 2023-02-28 | Universal Display Corporation | Methods of modulating flow during vapor jet deposition of organic materials |
US10378861B2 (en) | 2014-09-04 | 2019-08-13 | University Of Virginia Patent Foundation | Impulse mitigation systems for media impacts and related methods thereof |
US10184759B2 (en) | 2015-11-17 | 2019-01-22 | University Of Virgina Patent Foundation | Lightweight ballistic resistant anti-intrusion systems and related methods thereof |
US20200385871A1 (en) * | 2017-07-17 | 2020-12-10 | Rolls-Royce Corporation | Thermal barrier coatings for components in high-temperature mechanical systems |
US11851770B2 (en) * | 2017-07-17 | 2023-12-26 | Rolls-Royce Corporation | Thermal barrier coatings for components in high-temperature mechanical systems |
Also Published As
Publication number | Publication date |
---|---|
US20040118347A1 (en) | 2004-06-24 |
CA2411174C (en) | 2008-05-06 |
EP1409762A1 (en) | 2004-04-21 |
EP1409762A4 (en) | 2007-02-28 |
US7014889B2 (en) | 2006-03-21 |
CA2411174A1 (en) | 2001-11-29 |
AU2001264866A1 (en) | 2001-12-03 |
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