WO2001068935A1 - Method for producing hard material layers - Google Patents
Method for producing hard material layers Download PDFInfo
- Publication number
- WO2001068935A1 WO2001068935A1 PCT/EP2001/001357 EP0101357W WO0168935A1 WO 2001068935 A1 WO2001068935 A1 WO 2001068935A1 EP 0101357 W EP0101357 W EP 0101357W WO 0168935 A1 WO0168935 A1 WO 0168935A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- hard material
- metal
- metal component
- material layer
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
Definitions
- the invention relates to a method for producing decorative hard material layers with high color stability in the gray-black color range and decorative hard material layers of this type.
- black decorative colors can be produced by anodizing, galvanized black chrome and black nickel, by titanium aluminum nitrides and amorphous carbon layers, but there is the disadvantage in all of these known processes that the achievable color variations are limited, in particular when a low temperature by means of galvanic pre-metallized plastic parts or when stable mechanical properties are required. Furthermore, with such decorative hard material layers in the gray or black color range, it is often difficult to ensure long-term stability of the respective color.
- the object of the present invention is to eliminate the disadvantages mentioned above and to make it possible to create color-stable hard material layers in the gray to black color range which allow a broad spectrum of coloration in this range and a high one Ensure color stability. It should be possible to produce these hard material layers by means of processes which also allow plastic parts with a correspondingly high color stability to be coated.
- This object is essentially achieved in that at least one metal carbonite and / or at least one metal carbonite oxide is deposited as a layer material on the substrate to be coated, the proportion of the metal component being in the range from about 15 at% to about 70 at% and the ratio of the MeC and MeN proportions m of the layer is selected in a ratio of about 0.2 to about 2.2.
- Nitrogen oxygen and carbon-containing gas can be easily varied in a wide range of colors, which range from gray to h to deep black.
- the corrosion stability of the layer can be significantly increased by choosing the metal content or the proportion of the metal component during the layer deposition.
- REPLACEMENT SHEET RULE 26 This permanent color stability is especially improved if an additional metal component that has little tendency to form oxides is installed in the layer.
- incorporation of chromium in conjunction with metal carbonitride or metal carbonitride oxide can lead to very advantageous results, the chromium fraction being in the range of about 5%, for example, and the metal component of the material forming the layer should have a proportion greater than 40 at%.
- a decorative hard material layer is applied, with a thickness greater than 1 ⁇ m, ZrCN being used as the layer material.
- the proportion of Zr is of the order of 50 at%.
- the reactive gas control is carried out in such a way that the resulting ratio of ZrC to ZrN in the layer is in the range from 0.2 to 2.2%.
- a metal component 2 in this case chrome with a concentration of 1 to 25 at%, is incorporated into the layer by simultaneous coating. In this way, the corrosion stability is further improved.
- the decorative hard material layer according to the invention can be constructed as an individual layer system, but also as a multilayer system. It is particularly advantageous if, in the case of multilayer layers, after the separation of individual layers, both an interruption to cool the substrate and an ion bombardment to clean the respectively deposited layer and Anchoring of the subsequent layer is carried out. In this case, ions are formed both by metals and by gases which are used in the entire coating process. Ion bombardment of this type is preferably carried out both at the start and at the end of the entire coating process. Such a process sequence is given, for example, in FIG. 1
- the Are technique is preferably used to perform the coating process, but the invention is not so limited.
- FIG. 2 shows a coating system of the applicants with six cathodes with the designation HTC 1800 in a schematic manner and with details of system details.
- a system of this type is particularly well suited for carrying out the method according to the invention, since it operates in both arc mode and UBM mode ( unbalanced magnetron mode) can be operated.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a method for producing decorative hard material layers having high colour stability in the grey-black colour range. A metal carbon nitride or a metal carbon nitride oxide is used as the layer material and coloration is also selected by predetermining the ratio of the NeC and MeN portions.
Description
VERFAHREN ZUR HERSTELLUNG. HARTSTOFFSCHICHTEN MANUFACTURING METHOD. HARTSTOFFTECHNIK LAYERS
Die Erfindung betrifft ein Verfahren zur Herstellung dekorativer Hartstoffschichten hoher Farbstabilität im grau- schwarzen Farbbereich sowie dekorative Hartstoffschichten dieser Art.The invention relates to a method for producing decorative hard material layers with high color stability in the gray-black color range and decorative hard material layers of this type.
Die Herstellung von Hartstoffschichten im grauen oder schwarzen Farbbereich ist bekannt und erfolgt nach unterschiedlichen Methoden und auch mit unterschiedlichen Schichtmaterialien. Beispielsweise kann durch Eloxieren, galvanisiertes Schwarzchrom und Schwarznickel, durch Ti- tanaluminiumnitride sowie amorphe Kohlenstoffschichten ein Herstellen schwarzer dekorativer Farben erfolgen, aber bei all diesen bekannten Verfahren besteht der Nachteil, daß die erzielbaren Farbvariationen beschränkt sind, und zwar insbesondere dann, wenn eine Niedrigtempera- turbeschichtung von galvanisch vormetallisierten Kunststoffteilen erfolgen muß oder wenn stabile mechanische Eigenschaften gefordert werden. Des weiteren bereitet es bei derartigen dekorativen Hartstoffschichten im grauen oder schwarzen Farbbereich häufig Schwierigkeiten eine Langzeitstabilität der jeweiligen Farbe sicherzustellen.The production of hard material layers in the gray or black color range is known and takes place according to different methods and also with different layer materials. For example, black decorative colors can be produced by anodizing, galvanized black chrome and black nickel, by titanium aluminum nitrides and amorphous carbon layers, but there is the disadvantage in all of these known processes that the achievable color variations are limited, in particular when a low temperature by means of galvanic pre-metallized plastic parts or when stable mechanical properties are required. Furthermore, with such decorative hard material layers in the gray or black color range, it is often difficult to ensure long-term stability of the respective color.
Aufgabe der vorliegenden Erfindung ist es, die vorstehend erwähnten Nachteile zu beseitigen und es zu ermöglichen, farbstabile Hartstoffschichten im grauen bis schwarzen Farbbereich zu schaffen, die ein in diesem Bereich breites Spektrum der Farbgebung zulassen und eine hohe
Farbstabüität gewährleisten. Die Erzeugung dieser Hartstoffschichten soll mittels solcher Verfahren möglich sein, die es gestatten, auch Kunststoff- teile mit entsprechend hoher Farbstabüität zu beschichten.The object of the present invention is to eliminate the disadvantages mentioned above and to make it possible to create color-stable hard material layers in the gray to black color range which allow a broad spectrum of coloration in this range and a high one Ensure color stability. It should be possible to produce these hard material layers by means of processes which also allow plastic parts with a correspondingly high color stability to be coated.
Gelöst wird diese Aufgabe nach der Erfindung im wesentlichen dadurch, daß auf dem jeweils zu beschichtenden Substrat als Schichtwerkstoff wenigstens ein Metallcarbonitπd und/ oder wenigstens ein Metallcarbonitπdoxid abgeschieden wird, wobei der Anteil der Metallkomponente im Bereich von etwa 15 at% bis etwa 70 at% und das Verhältnis der MeC- und MeN-An teile m der Schicht in einem Verhältnis von etwa 0,2 bis etwa 2,2 gewählt wird.This object is essentially achieved in that at least one metal carbonite and / or at least one metal carbonite oxide is deposited as a layer material on the substrate to be coated, the proportion of the metal component being in the range from about 15 at% to about 70 at% and the ratio of the MeC and MeN proportions m of the layer is selected in a ratio of about 0.2 to about 2.2.
Durch Variation der Anteile der Metalle und der Reaktivgase, z.B. Stickstoff, Sauerstoff und kohlenstoffhaltiges Gas, kann eine Variation der Farbgebung in einem weiten Bereich problemlos erfolgen, wobei dieser Bereich von grau bis h zu tiefschwarz reicht.By varying the proportions of the metals and the reactive gases, e.g. Nitrogen, oxygen and carbon-containing gas can be easily varied in a wide range of colors, which range from gray to h to deep black.
Von besonderem Vorteil ist, daß durch Wahl des Metallgehalts bzw. des Anteils der Metallkomponente während der Schichtabscheidung die Kor- rosionsstabilität der Schicht wesentlich gesteigert werden kann.It is particularly advantageous that the corrosion stability of the layer can be significantly increased by choosing the metal content or the proportion of the metal component during the layer deposition.
Insbesondere gelingt es im Rahmen der Erfindung, eine zu Farbveränderungen führende Nachoxidation an der Atmosphäre im grau-schwarzen Farbbereich zu verhindern und damit sicherzustellen, daß dauerhaft Farbveränderungen oder Farbumschläge vermieden werden können.In particular, it is possible within the scope of the invention to prevent post-oxidation in the atmosphere in the gray-black color range leading to color changes and thus to ensure that permanent color changes or color changes can be avoided.
ERSÄTZBLATT REGEL 26
Diese dauerhafte Farbstabüität wird speziell dadurch noch verbessert, wenn in die Schicht zusätzlich eine weitere Metallkomponente eingebaut wird, die wenig zu Oxidbildungen neigt.REPLACEMENT SHEET RULE 26 This permanent color stability is especially improved if an additional metal component that has little tendency to form oxides is installed in the layer.
So kann beispielsweise ein Einbau von Chrom in Verbindung mit Me- tallcarbonitrid oder Metallcarbonitridoxid zu sehr vorteilhaften Ergebnissen führen, wobei der Chromanteil beispielsweise im Bereich von etwa 5 % liegen kann und die Metallkomponente des die Schicht bildenden Stoffes einen Anteil größer 40 at% aufweisen sollte.For example, incorporation of chromium in conjunction with metal carbonitride or metal carbonitride oxide can lead to very advantageous results, the chromium fraction being in the range of about 5%, for example, and the metal component of the material forming the layer should have a proportion greater than 40 at%.
Weitere vorteilhafte Ausgestaltungen der Erfindung sind in den Unteransprüchen angegeben und sind auch der nachfolgenden Beschreibung zu entnehmen.Further advantageous embodiments of the invention are specified in the subclaims and can also be found in the description below.
Gemäß einem ersten Ausführungsbeispiel nach Figur 3 wird auf einAccording to a first exemplary embodiment according to FIG
Substrat im Are -Verfahren eine dekorative Hartstoffschicht aufgebracht, und zwar mit einer Dicke größer 1 μm, wobei als Schichtwerkstoff ZrCN eingesetzt wird. Der Anteil von Zr liegt in der Größenordnung von 50 at%. Die Reaktivgassteuerung erfolgt so, daß das entstehende Verhältnis von ZrC zu ZrN in der Schicht im Bereich von 0,2 bis 2,2 % liegt.In the Are process, a decorative hard material layer is applied, with a thickness greater than 1 μm, ZrCN being used as the layer material. The proportion of Zr is of the order of 50 at%. The reactive gas control is carried out in such a way that the resulting ratio of ZrC to ZrN in the layer is in the range from 0.2 to 2.2%.
Gemäß einem zweiten Ausführungsbeispiel, das auf Figur 4 bezugnimmt, wird analog zum Ausführungsbeispiel 1 vorgegangen, aber zusätzlich wird in die Schicht eine Metallkomponente 2, in diesem Fall Chrom mit einer Konzentration von 1 bis 25 at% durch simultane Beschichtung eingebaut. Auf diese Weise wird die Korrosions Stabilität weiter verbessert.According to a second exemplary embodiment, which refers to FIG. 4, the procedure is analogous to that of exemplary embodiment 1, but in addition a metal component 2, in this case chrome with a concentration of 1 to 25 at%, is incorporated into the layer by simultaneous coating. In this way, the corrosion stability is further improved.
ERSÄTZBLATT REGEL 26
Die dekorative Hartstoffschicht nach der Erfindung Kann als Emzel- schichtsystem, aber auch als Mehrschichtsystem aufgebaut sein Von besonderem Vorteil ist, wenn bei Mehrlagenschichten nach der Abscheidung einzelner Lagen sowohl eine Unterbrechung zur Abkühlung des Substrats als auch ein Ionenbombardement zur Säuberung der jeweils abgeschiedenen Schicht und zur Verankerung der jeweils nachfolgenden Schicht durchgeführt wird Ionen entstehen dabei sowohl durch Metalle als auch durch Gase, die im gesamten Beschichtungsprozeß verwendet werden Bevorzugt wird ein Ionenbombardement dieser Art sowohl beim Start als auch am Ende des gesamten Beschichtungsprozesses durchgeführt Eine deraruge Prozeßfolge ist beispielsweise in Fig 1 angegebenREPLACEMENT SHEET RULE 26 The decorative hard material layer according to the invention can be constructed as an individual layer system, but also as a multilayer system. It is particularly advantageous if, in the case of multilayer layers, after the separation of individual layers, both an interruption to cool the substrate and an ion bombardment to clean the respectively deposited layer and Anchoring of the subsequent layer is carried out. In this case, ions are formed both by metals and by gases which are used in the entire coating process. Ion bombardment of this type is preferably carried out both at the start and at the end of the entire coating process. Such a process sequence is given, for example, in FIG. 1
Zur Durchführung des Beschichtungsverfahrens wird bevorzugt die Are- Technik verwendet, aber die Erfindung ist darauf nicht beschränkt.The Are technique is preferably used to perform the coating process, but the invention is not so limited.
Fig 2 zeigt in schematischer Weise und unter Angabe von Anlagendetaüs eine Beschichtungsanlage der Anmeldeπn mit sechs Kathoden mit der Bezeichnung HTC 1800 Eine Anlage dieser Art eignet sich besonders gut zur Durchführung des erfindungsgemäßen Verfahrens, da sie sowohl im Arc- Modus als auch UBM-Modus (unbalanced magnetron-modus) betrieben werden kann.FIG. 2 shows a coating system of the applicants with six cathodes with the designation HTC 1800 in a schematic manner and with details of system details. A system of this type is particularly well suited for carrying out the method according to the invention, since it operates in both arc mode and UBM mode ( unbalanced magnetron mode) can be operated.
ERSÄTZBLATT REGEL 26
REPLACEMENT SHEET RULE 26
Claims
Patentansprüche claims
Verfahren zur Herstellung dekorativer Hartstoffschichten hoherProcess for the production of decorative hard material layers of high
Farbstabüität im grau- schwarzen Farbbereich, dadurch g e k e n n z e i c h n e t , daß auf dem jeweils zu beschichtenden Substrat als Schichtwerkstoff wenigstens ein Metallcarbonitrid und/ oder wenigstens ein Me- tallcarbomtπdoxid abgeschieden wird, wobei der Anteil der Metallkomponente im Bereich von etwa 15 at% bis etwa 70 at% und das Verhältnis der MeC- und MeN-Anteüe in der Schicht in einem Verhältnis von etwa 0,2 bis etwa 2,2 gewählt wirdColor stability in the gray-black color range, characterized in that at least one metal carbonitride and / or at least one metal carbomide oxide is deposited as layer material on the substrate to be coated, the proportion of the metal component being in the range from about 15 at% to about 70 at% and the ratio of the MeC and MeN contents in the layer is selected in a ratio of about 0.2 to about 2.2
Verfahren nach Anspruch 1, dadurch g e k e n n z e i c h n e t , daß der Anteil der Metallkomponente großer 40 at% gewählt wirdMethod according to claim 1, characterized in that the proportion of the metal component is chosen to be greater than 40 at%
Verfahren nach Anspruch 1 oder 2, dadurch g e k e n n z e i c h n e t , daß als Metallkomponente der Metallcarbonitπdschicht oder der Metallcarbonitπdoxidschicht die Metalle Ti, Zr, Hf, AI oder Cu oder Kombinationen daraus verwendet werdenMethod according to claim 1 or 2, characterized in that the metals Ti, Zr, Hf, Al or Cu or combinations thereof are used as the metal component of the metal carbonite layer or the metal carbonite layer
Verfahren nach Anspruch 1, 2 oder 3, dadurch g e k e n n z e i c h n e t , daß während der Schichtabscheidung zusatzlich zumindest ein
weiteres Metall als zweite Metallkomponente in die Schicht eingelagert wird.Method according to Claim 1, 2 or 3, characterized in that at least one additionally during the layer deposition additional metal is embedded in the layer as a second metal component.
5. Verfahren nach Anspruch 4, dadurch g e k e n n z e i c h n e t , daß als zusätzliche zweite Metallkomponente die Metalle Ta, Cr, Nb, V oder W oder Kombinationen daraus verwendet werden.5. The method according to claim 4, characterized in that the metals Ta, Cr, Nb, V or W or combinations thereof are used as an additional second metal component.
6. Verfahren nach Anspruch 5, dadurch g e k e n n z e i c h n e t , daß die zusätzliche zweite Metallkomponente mit einer Konzentration von etwa 1 at% bis 25 at% in die Schicht eingelagert wird.6. The method according to claim 5, characterized in that the additional second metal component is incorporated into the layer at a concentration of approximately 1 at% to 25 at%.
7. Verfahren nach Anspruch 6, dadurch g e k e n n z e i c h n e t , daß als zusätzliche zweite Metallkomponente das Metall Chrom in einer Konzentration von etwa 3 bis 7 at%, insbesondere in einer Konzentration von etwa 5 at% eingelagert wird.7. The method according to claim 6, characterized in that the metal chromium is incorporated as an additional second metal component in a concentration of about 3 to 7 at%, in particular in a concentration of about 5 at%.
8. Verfahren nach einem der vorhergehenden Ansprüche, dadurch g e k e n n z e i c h n e t , daß die Schichtabscheidung in Form einer Einzelschicht oder in Form einer Mehrlagenschicht erfolgt.8. The method according to any one of the preceding claims, characterized in that the layer deposition takes place in the form of a single layer or in the form of a multilayer layer.
9. Verfahren nach Anspruch 8, dadurch g e k e n n z e i c h n e t , daß vor Beginn der Schichtablagerung und/ oder am Ende des je-
weüigen Beschichtungsprozesses ein Ionenbombardement zu Säu- berungs- und/ oder Verankerungszwecken durchgeführt wird.9. The method according to claim 8, characterized in that before the start of layer deposition and / or at the end of each required coating process, ion bombardment is carried out for cleaning and / or anchoring purposes.
10 Verfahren nach einem der vorhergehenden Ansprüche, dadurch g e k e n n z e i c h n e t , daß bei der Bildung von Mehrlagenschichten nach der Abscheidung einzelner Lagen eine Unterbrechung zur Abkühlung des Substrats und/ oder ein Iδnenbombardement zur Säuberung der abgeschiedenen Schichten und zur Verankerung der Folgeschicht durchgeführt wrd.10 The method according to any one of the preceding claims, characterized in that when multilayer layers are formed after the deposition of individual layers, an interruption to cool the substrate and / or ion bombardment to clean the deposited layers and to anchor the subsequent layer is carried out.
11 Verfahren nach einem oder mehreren der vorhergehenden Ansprüche, dadurch g e k e n n z e i c h n e t , daß zur Schichtabscheidung das Are-Verfahren oder das Sputter-11 Method according to one or more of the preceding claims, characterized in that the are method or the sputtering method is used for the layer deposition.
Verfahren oder Kombinationen dieser Verfahren verwendet werden.Methods or combinations of these methods can be used.
12. Dekorative Hartstoffschicht mit hoher Farbstabüität im grauschwarzen Farbbereich, dadurch g e k e n n z e i c h n e t , daß die Hartstoffschicht aus einem Metallcarbonitrid oder einem Metallcarbonitridoxid besteht, wobei der Anteil der Metallkomponente im Bereich von 15 at% bis 70 at% gelegen und vorzugsweise größer als etwa 40 at% ist.12. Decorative hard material layer with high color stability in the gray-black color range, characterized in that the hard material layer consists of a metal carbonitride or a metal carbonitride oxide, the proportion of the metal component being in the range from 15 at% to 70 at% and preferably being greater than about 40 at% ,
ERSÄTZBLATT E
Dekorative Hartstoffschicht nach Anspruch 12, dadurch g e k e n n z e i c h n e t , daß Ti, Zr, Hf, AI oder Cu als Metallkomponente in der Metallcaroo- nitπdschicht oder der Metallcarbonitπdoxidschicht vorgesehen istREPLACEMENT LEAF E Decorative hard material layer according to claim 12, characterized in that Ti, Zr, Hf, Al or Cu is provided as the metal component in the metal caronite layer or the metal carbonite layer
Dekorative Hartstoffschicht nach einem der Ansprüche 12 und 13, dadurch g e k e n n z e i c h n e t , daß m der Hartstoffschicht Ta, Cr, Nb, V oder W als zusätzliche weitere bzw zweite Metallkomponente eingelagert istDecorative hard material layer according to one of Claims 12 and 13, characterized in that Ta, Cr, Nb, V or W is embedded in the hard material layer as an additional or second metal component
Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 14, dadurch g e k e n n z e i c h n e t , daß als zusatzliche zweite Metallkomponente Chrom in einer Kon- zentraüon von 3 bis 7 at%, insbesondere einer Konzentration von etwa 5 at% in die Schicht eingelagert istDecorative hard material layer according to one of claims 12 to 14, characterized in that chromium is incorporated as an additional second metal component in a concentration of 3 to 7 at%, in particular a concentration of about 5 at%, in the layer
Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 15, dadurch g e k e n n z e i c h n e t , daß die Hartstoffschicht m Form einer Einzelschicht aufgebaut istDecorative hard material layer according to one of claims 12 to 15, characterized in that the hard material layer is constructed in the form of a single layer
Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 15, dadurch g e k e n n z e i c h n e t , daß die Hartstoffschicht als Mehrlagenschicht aufgebaut ist.Decorative hard material layer according to one of claims 12 to 15, characterized in that the hard material layer is constructed as a multilayer layer.
Dekorative Hartstoffschicht nach Anspruch 17, dadurch g e k e n n z e i c h n e t , daß die einzelnen Lagen der Mehrlagenschicht gleichartig aufgebaut
Decorative hard material layer according to claim 17, characterized in that the individual layers of the multilayer layer are constructed in the same way
ERSÄTZBLATT RE E 26
Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 18, dadurch g e k e n n z e i c h n e t , daß der Anteil der Metallkomponente bei Mehrlagenschichten zur Schichtoberfiäche hm zunimmt.REPLACEMENT SHEET RE E 26 Decorative hard material layer according to one of claims 12 to 18, characterized in that the proportion of the metal component increases with multilayer layers to the layer surface hm.
Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 19, dadurch g e k e n n z e i c h n e t , daß zumindest in der äußersten Schicht der Mehrlagenschicht der Anteil der Metallkomponente größer 40 at% gewählt istDecorative hard material layer according to one of claims 12 to 19, characterized in that at least in the outermost layer of the multilayer layer the proportion of the metal component is selected to be greater than 40 at%
ERSÄTZBLATT REGEL 26
REPLACEMENT SHEET RULE 26
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2000111597 DE10011597A1 (en) | 2000-03-10 | 2000-03-10 | Production of decorative hard layers comprises depositing a metal carbonitride and/or a metal carbonitride oxide on a substrate |
| DE10011597.7 | 2000-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2001068935A1 true WO2001068935A1 (en) | 2001-09-20 |
Family
ID=7634162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2001/001357 WO2001068935A1 (en) | 2000-03-10 | 2001-02-08 | Method for producing hard material layers |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE10011597A1 (en) |
| WO (1) | WO2001068935A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006002034A1 (en) | 2006-01-13 | 2007-07-19 | Hauzer Techno-Coating B.V. | An article comprising a relatively soft substrate and a relatively hard decorative layer, and methods of making the same |
| DE102011112288A1 (en) * | 2011-09-05 | 2013-03-07 | Oerlikon Trading Ag, Trübbach | Trim part for motor vehicles |
| WO2024133736A1 (en) * | 2022-12-23 | 2024-06-27 | Oerlikon Surface Solutions Ag, Pfäffikon | Deep black decorative coating with increased thermal stability |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55120936A (en) * | 1979-02-27 | 1980-09-17 | Hitachi Metals Ltd | Covered tool |
| GB2170226A (en) * | 1985-01-30 | 1986-07-30 | Leybold Heraeus Gmbh & Co Kg | Coating machine parts and tools with high hardness material |
| GB2212820A (en) * | 1987-04-23 | 1989-08-02 | Nisshin Steel Co Ltd | Decorative panel building material |
| JPH0874036A (en) * | 1994-08-31 | 1996-03-19 | Kobe Steel Ltd | Hard ceramic coated member excellent in wear resistance |
| EP0846784A2 (en) * | 1996-12-04 | 1998-06-10 | Sumitomo Electric Industries, Ltd. | Coated tool and method of manufacturing the same |
-
2000
- 2000-03-10 DE DE2000111597 patent/DE10011597A1/en not_active Withdrawn
-
2001
- 2001-02-08 WO PCT/EP2001/001357 patent/WO2001068935A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55120936A (en) * | 1979-02-27 | 1980-09-17 | Hitachi Metals Ltd | Covered tool |
| GB2170226A (en) * | 1985-01-30 | 1986-07-30 | Leybold Heraeus Gmbh & Co Kg | Coating machine parts and tools with high hardness material |
| GB2212820A (en) * | 1987-04-23 | 1989-08-02 | Nisshin Steel Co Ltd | Decorative panel building material |
| JPH0874036A (en) * | 1994-08-31 | 1996-03-19 | Kobe Steel Ltd | Hard ceramic coated member excellent in wear resistance |
| EP0846784A2 (en) * | 1996-12-04 | 1998-06-10 | Sumitomo Electric Industries, Ltd. | Coated tool and method of manufacturing the same |
Non-Patent Citations (3)
| Title |
|---|
| PATENT ABSTRACTS OF JAPAN vol. 004, no. 171 (M - 044) 26 November 1980 (1980-11-26) * |
| PATENT ABSTRACTS OF JAPAN vol. 1996, no. 07 31 July 1996 (1996-07-31) * |
| YEONG Y G ET AL: "The tribological characteristics of titanium nitride, titanium carbonitride and titanium carbide coatings", THIN SOLID FILMS,CH,ELSEVIER-SEQUOIA S.A. LAUSANNE, vol. 302, no. 1-2, 20 June 1997 (1997-06-20), pages 193 - 200, XP004115522, ISSN: 0040-6090 * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE10011597A1 (en) | 2001-09-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3506623C2 (en) | Process for coating a thermally resistant object | |
| DE69523950T2 (en) | DECORATIVE ELEMENT | |
| DE102016108734B4 (en) | Coated body and method of making the body | |
| DE2825513A1 (en) | EXTERNAL GOLD TONE ITEM | |
| DE69310334T2 (en) | Hard carbon coated material | |
| EP3423609A1 (en) | Hydrogen-free carbon coating having zirconium adhesive layer | |
| DE3535022C2 (en) | Metallic article with coating layers and method for the production by ion vapor deposition | |
| DE3811907C1 (en) | ||
| WO2020064041A1 (en) | Method for producing a multiple-coat anti-erosion and anti-corrosion coating, and component with a corresponding protective coating | |
| CH664377A5 (en) | DECORATIVE BLACK WEAR PROTECTIVE LAYER. | |
| DE102012107130A1 (en) | Cutting tool with wear detection layer | |
| EP0832993A1 (en) | Layer system, process for manufacturing it and metal substrate with such a layer system | |
| DE4205017A1 (en) | Prodn. of decorative gold@ alloy layers - with process parameter alteration to modify layer characteristics | |
| EP0385283B1 (en) | Process for coating hard metal substrates, and hard metal tool produced by the process | |
| WO2001068935A1 (en) | Method for producing hard material layers | |
| EP1116799A1 (en) | Method for making a coating by PVD | |
| WO1998003694A1 (en) | Process for coating brass with hard, multicolored layers | |
| EP3728695A1 (en) | Corrosion- and erosion-resistant coating for turbine blades of gas turbines | |
| DE19514538C2 (en) | Process for making engraved rollers and plates | |
| EP3074550B1 (en) | Coating comprising a mo-n-based layer in which the molybdenum nitride is provided as a delta phase | |
| WO2015096882A2 (en) | Coating comprising a mo-n-based layer in which the molybdenum nitride is provided as a delta phase | |
| EP0320706A1 (en) | Process for producing layers resistant against corrosion, wear and compaction | |
| EP0430874A1 (en) | Object with a decorative layer | |
| EP2753727B1 (en) | Decorative part for motor vehicles | |
| WO1986000649A1 (en) | Method for improving the colour effect of titanium nitride layers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AK | Designated states |
Kind code of ref document: A1 Designated state(s): CA US |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR |
|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
| DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
| 122 | Ep: pct application non-entry in european phase |