WO2001059343A1 - Ensemble de dispositifs fluidiques - Google Patents

Ensemble de dispositifs fluidiques Download PDF

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Publication number
WO2001059343A1
WO2001059343A1 PCT/US2001/003967 US0103967W WO0159343A1 WO 2001059343 A1 WO2001059343 A1 WO 2001059343A1 US 0103967 W US0103967 W US 0103967W WO 0159343 A1 WO0159343 A1 WO 0159343A1
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WO
WIPO (PCT)
Prior art keywords
fluid
fluid device
devices
manifold
assembly
Prior art date
Application number
PCT/US2001/003967
Other languages
English (en)
Inventor
Stephen A. Geibel
Brian Palermo
William L. Murphy
Original Assignee
Pall Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pall Corporation filed Critical Pall Corporation
Priority to AU2001234907A priority Critical patent/AU2001234907A1/en
Publication of WO2001059343A1 publication Critical patent/WO2001059343A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements

Definitions

  • This invention relates to fluid device assemblies. More particularly, the invention relates to fluid device assemblies used in gas or liquid systems, such as a gas delivery system used in the manufacture of semiconductors.
  • a fluid device assembly is often used in various fluid systems.
  • an in-line fluid device assembly is often installed in a tubing line for carrying gases used in the manufacture of semiconductors.
  • a conventional fluid device assembly typically includes a long, narrow manifold and a number of fluid devices that are mounted on only one surface of the manifold and arranged in a straight line.
  • the fluid devices may include, for example, a manual valve, a regulator, a transducer, a filter and a pressure valve.
  • Each fluid device includes an inlet port and an outlet port.
  • the manifold includes a number of V-shaped fluid conduits, and each V-shaped fluid conduit provides fluid communication between two fluid devices and allows the fluid to flow from one fluid device to the other fluid device.
  • the conventional fluid device assembly may be installed in a fluid system, such as a tubing line for carrying gases used in the manufacture of semiconductors.
  • the gas enters the manifold through an inlet at one end of the manifold and then enters the first fluid device through its inlet port.
  • the gas subsequently exits the first fluid device through its outlet port and enters the second fluid device through its inlet port via a V-shaped conduit connecting the two fluid devices.
  • the gas then exits the second fluid device and enters the third fluid device via a V-shaped conduit, and so on.
  • the gas exits the final fluid device and then exits the fluid device assembly through an outlet at the other end of the manifold.
  • the conventional fluid device assembly has a number of drawbacks.
  • a conventional fluid device assembly is generally rather long because the fluid devices are arranged on only one surface and in a straight line.
  • a long fluid device assembly occupies a large segment of the tubing line and may be difficult to accommodate in cases where the space requirement is stringent, such as in the manufacture of semiconductors.
  • the manifold of a conventional fluid device assembly may be costly and difficult to manufacture.
  • the V-shaped fluid conduits are costly and difficult to drill because each leg of the V — shaped conduit must be drilled at an angle.
  • it is difficult to add additional fluid devices to the assembly The addition of additional fluid devices requires the replacement of the existing manifold with a longer manifold. The replacement of a manifold requires the disassembly and re-assembly of the fluid device assembly.
  • a fluid device assembly comprises a manifold having a plurality of surfaces, and a plurality of fluid devices mounted on the surfaces of the manifold.
  • the manifold also includes a plurality of fluid conduits, including at least first and second fluid conduits.
  • the first and second fluid conduits extend between two surfaces of the manifold.
  • the plurality of fluid devices includes at least first, second and third fluid devices.
  • Each fluid device includes a base surface that has an inlet port and an outlet port.
  • the base surfaces of the first, second and third fluid devices are standardized.
  • the fluid devices are mounted to the surfaces of the manifold with the base surface of each fluid device facing one surface of the manifold.
  • a fluid device assembly comprises a manifold having a cylindrical surface, and a plurality of fluid devices mounted on the cylindrical surface of the manifold.
  • the manifold also includes a plurality of fluid conduits, including at least first and second fluid conduits. Each fluid conduit communicates with the cylindrical surface.
  • the plurality of fluid devices includes at least first, second and third fluid devices.
  • Each fluid device includes a base surface that has an inlet port and an outlet port. The base surfaces of the first, second and third fluid devices are standardized.
  • the fluid devices are mounted to the surfaces of the manifold with the base surface of each fluid device facing the cylindrical surface of the manifold.
  • the base surfaces of the fluid devices are angularly spaced from one another.
  • the outlet port of the first fluid device is in fluid communication with the inlet port of the second fluid device through the first fluid conduit.
  • the outlet port of the second fluid device is in fluid communication with the inlet port of the third fluid device through the second fluid conduit.
  • a fluid device assembly comprises a plurality of fluid devices mounted to each other.
  • the plurality of fluid devices includes at least first, second and third fluid devices.
  • Each fluid device includes a base surface that has an inlet port and an outlet port.
  • the first fluid device is mounted to the second fluid device with the base surfaces of the first and second fluid devices facing each other.
  • the outlet port of the first fluid device is in fluid communication with the inlet port of the second fluid device.
  • the second fluid device is mounted to the third fluid device with the base surfaces of the second and third fluid devices facing each other.
  • the outlet port of the second fluid device is in fluid communication with the inlet port of the third fluid device.
  • a fluid device assembly comprises a plurality of fluid devices mounted to one another.
  • the fluid devices are arranged in a helical configuration.
  • a fluid device assembly comprises a plurality of fluid devices mountable to one another and a support assembly operatively associated with the plurality of fluid devices.
  • the support assembly is adapted to hold together the fluid devices.
  • a fluid device assembly comprises a manifold having at least one surface, and a plurality of fluid devices. Each fluid device has a surface, and the fluid devices are mounted to the manifold with the surface of each fluid device facing a surface of the manifold.
  • a fluid device assembly comprises a plurality of fluid devices.
  • Each fluid device has at least one surface, and the fluid devices are mounted to each other with the surface of one fluid device facing the surface of at least one other fluid device.
  • Fluid device assemblies embodying the present invention have a number of advantages over the conventional fluid device assemblies.
  • the size, e.g., the length, of the fluid device assembly of the present invention may be significantly less than that of a conventional fluid device assembly.
  • fluid device assemblies embodying the invention may occupy a shorter segment of the tubing line and, thus, more easily accommodate stringent space requirements.
  • a fluid device for use in a fluid device assembly may include an operative portion and a mounting portion.
  • the mounting portion includes a standardized region adapted to couple the fluid device to a manifold or another fluid device.
  • Figure 1 is an elevation view of one embodiment of a fluid device assembly of the present invention.
  • Figure 2 is a view of the base surface of a fluid device (i.e., a bottom view of a fluid device) used in the fluid device assembly shown in Figure 1.
  • a fluid device i.e., a bottom view of a fluid device
  • Figure 3 is an elevation view of a fluid device assembly with a shunt and a cap in place of missing fluid devices.
  • Figure 4 is an elevation view of a fluid device assembly with shunts in place of missing fluid devices.
  • Figure 5 is an elevation view of another embodiment of a fluid device assembly of the present invention.
  • Figure 6 is a view of the base surface of a fluid device (i.e., a bottom view of a fluid device) used in the fluid device assembly shown in Figure 5.
  • Figure 7 is a view of the base surface of a fluid device having a key structure for aligning the fluid device.
  • Figure 8 is an elevation view of a fluid device assembly with a shunt in place of a missing fluid device.
  • Figure 9 is a perspective view of a fluid device assembly including a support assembly.
  • Figure 10 is an elevation view of another embodiment of a fluid device assembly of the present invention.
  • Figure 11 is a view of the base surface of a fluid device (e.g., a bottom view of a fluid device) used in the fluid device assembly shown in Figure 10.
  • a fluid device e.g., a bottom view of a fluid device
  • the present invention relates to fluid device assemblies, such as an in-line fluid device assembly.
  • One example of the fluid device assembly 10, as shown in Figure 1, includes a manifold 20 having one or more surfaces 22, and a plurality of fluid devices 40 mounted to the surfaces 22 of the manifold 20.
  • Each fluid device 40 preferably includes at least one inlet port 44 and/or at least one outlet port 46.
  • the manifold 20 may also include a plurality of fluid conduits 30, which provide fluid communication among the ports of the fluid devices 40.
  • the manifold may have any suitable configuration that allows the manifold to function as a base on which the fluid devices may be mounted.
  • the manifold may have any suitable configuration that includes one or more surfaces on which the fluid devices may be mounted. Each of the surfaces may include one or more device mounting areas which receive the fluid devices and may have a shape similar to the base surface of the fluid device.
  • the manifold may have the configuration of a rectangular parallelepiped or a polygonal cylinder, for example.
  • the manifold may have a more complex configuration.
  • the manifold may include several rectangular parallelepipeds of different sizes, which parallelepipeds are attached to each other to form the manifold.
  • the manifold may have other types of surfaces for mounting fluid devices, such as curved or stepped surfaces.
  • the manifold may have the configuration of a circular cylinder, and the fluid devices may be mounted on the curved side surface of the circular cylinder.
  • the manifold may have stepped surfaces for mounting fluid devices.
  • the manual valve 40a shown in Figure 1 may be mounted on a raised surface so that the access to the handle of the manual valve 40a is not obstructed by other fluid devices 40, and an operator can easily access the handle of the manual valve 40a to open or close it.
  • the fluid conduits of the manifold may be variously configured as long as the fluid conduits provide fluid communication among the fluid devices.
  • a fluid conduit may be straight, L-shaped, Y-shaped or V-shaped.
  • the cross section of a fluid conduit may be circular or rectangular or may be of any other suitable configuration.
  • the cross section of a fluid conduit may also have a non-uniform configuration. For example, at one segment the cross section of a fluid conduit may have a circular configuration while at another segment the cross section of the fluid conduit may have a rectangular configuration.
  • Each fluid conduit preferably intersects one or more manifold surfaces. Where a fluid conduit intersects a manifold surface, an opening of the fluid conduit is formed on the manifold surface.
  • Each device mounting area of a surface of the manifold preferably has as many fluid openings as the fluid device has ports.
  • the fluid conduits may be variously configured, preferably fluid conduits are straight, have a circular cross section, and intersect a manifold surface substantially perpendicularly. Fluid conduits of this type have a number of advantages.
  • the inner surfaces of the fluid conduits can be easily polished because the fluid conduits do not have intersections.
  • the inner surfaces of fluid conduits are generally highly polished to reduce contaminants.
  • fluid conduits having inner surfaces that are easier to polish, such as fluid conduits without intersections are preferred.
  • the fluid conduits are easier and less costly to drill because they can be drilled with a drill positioned perpendicularly with the manifold surface.
  • the manifold 20 has the configuration of a rectangular parallelepiped and includes a number of straight fluid conduits 30 extending between two opposite side surfaces 22c, 22e of the manifold 20.
  • each of the fluid conduits 30 intersects substantially perpendicularly one or both of the opposite manifold surfaces 22c, 22e.
  • the cross sections of the fluid conduits 30 are circular but they may have any other suitable configurations.
  • the manifold may include an assembly inlet which may be connected to the upstream side of the tubing line, and the gas transmitted in the tubing line may enter the fluid device assembly through the assembly inlet.
  • the manifold may also include an assembly outlet which may be connected to the downstream side of the tubing line, and the gas, after passing through the fluid devices, may exit the fluid device assembly via the assembly outlet.
  • the fluid device assembly 10 shown in Figure 1 includes an assembly inlet 12 and an assembly outlet 14, which are mounted on different end surfaces 22a, 22b of the manifold 20.
  • the assembly inlet 12 and outlet 14 may also be mounted on the same manifold surface 22 which may be an end surface 22a, 22b or a side surface 22c, 22b, 22d, 22e, or they may be mounted respectively on two different side surfaces 22c, 22b, 22d, 22e or on an end surface 22c, 22b, 22d, 22e and a side surface 22a, 22b.
  • the assembly inlet and/or the assembly outlet may be mounted to one or more fluid devices.
  • the fluid devices may include one or more filter elements, valves, regulators, pressure sensors, temperature sensors, flow sensors and/or fluid devices of other types.
  • the fluid devices 40 include a manual valve 40a, a regulator 40b, a transducer 40c, a filter 40d, and a pressure valve 40e.
  • each fluid device 40 preferably includes an operative portion and a mounting portion.
  • the mounting portion may include a base 42 having a base surface 48, as shown in Figures 1 and 2.
  • Each base surface 48 preferably includes at least one inlet port 44 and/or at least one outlet port 44 on its base surface 48, through which inlet and outlet ports 44, 46 the fluid may enter or exit the fluid device 40, respectively.
  • each base surface 48 is generally flat, although it may have other suitable surface configuration that allows the fluid device 40 to be securely mounted to a surface of the manifold.
  • the fluid devices may be arranged in various manners. For example, all the fluid devices may be mounted on a single surface of the manifold. For example, the fluid devices may be mounted circumferentially on the side surface of a cylindrical manifold, and, as a result, the base surfaces of the fluid devices may be angularly spaced from each other. Alternatively, the fluid devices may be mounted on more than one surface of the manifold, and each of the manifold surfaces may accommodate one or more fluid devices. Generally, the fluid devices are not mounted on all surfaces of the manifold, and some manifold surfaces may not be adapted to receiving fluid devices. In the embodiment shown in Figure 1, the fluid devices 40 are arranged alternately on two opposite surfaces 22c, 22e of the manifold 20.
  • the alternate arrangement of the fluid devices 40 are desirable because, when a fluid device 40 is mounted on one surface 22 of the manifold 20, the inlet port 44 of the fluid device 40 can be aligned with the outlet port 44 of a second fluid device 40 mounted on a second manifold surface 22 via a straight fluid conduit 30. Similarly the outlet port 44 of the fluid device 40 can be aligned with the inlet port 44 of a third fluid device 40 mounted on the second manifold surface 22 via a straight fluid conduit 30.
  • the inlet port 44 of the regulator 40b is aligned with the outlet port 44 of the manual valve 40a via a straight fluid conduit 30, and the outlet port 44 of the regulator 40b is aligned with the inlet port 44 of the transducer 40c via a straight fluid conduit 30.
  • the fluid devices may be mounted on the manifold surfaces in various ways.
  • a fluid device 40 is bolted to a manifold surface 22.
  • the base 42 of a fluid device 40 may include one or more through holes 55
  • the manifold surface 22 on which the fluid device 40 is mounted may include one or more threaded holes 34.
  • a bolt 60 may extend through a through hole 55 of the base 42 of the fluid device 40 into a corresponding threaded hole 34 on the manifold surface 22 to bolt the fluid device 40 onto the manifold surface 22.
  • the manifold may include through holes (not shown), and the base surface of a fluid device may have through holes and/or threaded holes (not shown).
  • a bolt may extend through a through hole in the base of a fluid device mounted on a first surface of the manifold, through a through hole in the manifold, and into a threaded hole (not shown) on the base surface of another fluid device mounted to a manifold surface which is opposite to the first surface of the manifold.
  • the bolt may be fastened to mount both fluid devices 40 to the manifold 20.
  • both the manifold 20 and the fluid devices 40 may only have through holes.
  • a bolt may extend through a through hole in the base 42 of a fluid device 40, through a through hole in the manifold 20, and through a through hole in the base 42 of another fluid device 40 at the opposite side of the manifold 20.
  • a nut may be fastened to the end of the bolt to mount both fluid devices 40 to the manifold 20.
  • other means may be employed to mount the fluid devices 40 to the manifold 20, such as welding, bonding or clamping.
  • each of the fluid devices 40 is mounted to a manifold surface 22 with the base surface 48 of the fluid device facing the manifold surface 22.
  • each of the inlet outlet ports 44, 46 of the fluid device 40 is aligned with an opening 32 of a fluid conduit 30 so that the fluid device 40 can be in fluid communication with another fluid device 40 via the fluid conduit 30.
  • the fluid devices have standardized base surfaces, that is, the base surfaces have corresponding configurations, preferably substantially identical configurations.
  • the mounting areas of the manifold surfaces are correspondingly standardized.
  • a device mounting area is an area on a surface of a manifold for mounting a fluid device. Standardization of the base surfaces and the device mounting areas enhances the flexibility of the fluid device assembly so that the fluid devices may be interchangeably mounted at any desired location on the manifold surfaces.
  • the fluid device assembly may be easily reconfigured by switching fluid devices or by replacing a fluid device with another fluid device of a different type or with another fluid device of the same type but of a different capacity.
  • Standardized base surfaces and/or device mounting areas may have one or more substantially identical features.
  • each fluid device may be coplanar, and/or the distances between the inlet and outlet ports in the base surface of each fluid device may be substantially identical.
  • the base surfaces may have similar shapes, such as the shape of a square, as shown in Figures 1 and 2.
  • each base surface may have the same number of through holes, and the through holes on each base surface may be similarly arranged.
  • the standardized device mounting areas may be correspondingly configured.
  • the openings of the fluid conduits in each device mounting area communicating respectively with the inlet and outlet ports may also be coplanar, and/or the distances between the openings may be substantially identical and equal to the distance between the inlet and outlet ports.
  • each device mounting area may have the same number of threaded holes, and the threaded holes in each device mounting area may be similarly arranged.
  • Each base surface 48 may have a generally square configuration. There may be four through holes 55 in the base 42 of each fluid device 40, and the four through holes 55 may be placed near the four corners of the square base surface 48.
  • Each device mounting area 36 may include the openings 32 of two straight fluid conduits 30. The openings 32 of the straight fluid conduits 30 may be equally spaced, and the distance between the openings 32 may be substantially the same as the distance between the inlet and outlet ports 44, 46 of the base surfaces 48.
  • each device mounting area 36 may have four threaded holes 34, corresponding to the four through holes 55 on the base surfaces 48.
  • the threaded holes 34 may be similarly arranged, i.e., the four threaded holes 34 of each set may be arranged near the corners of each device mounting area 36.
  • the fluid devices 40 are mounted on two opposite surfaces 22c, 22e of the manifold 20 in Figure 1, the fluid devices 40 may be mounted on two neighboring side surfaces 22c, 22b, 22d, 22e. And the fluid conduits may have, for example, an L- shaped configuration and extend between the two neighboring side surfaces 22c, 22b, 22d, 22e to provide fluid communication among the fluid devices 40. Alternatively, the fluid devices 40 may be mounted on any of the manifold surfaces 22, and the fluid conduits may be configured to provide fluid communication among the fluid devices 40.
  • the fluid devices are arranged in series and define one fluid flow path, i.e., the gas passes through the fluid devices in series.
  • the fluid devices may be arranged in any desired way.
  • the fluid devices may define a plurality of fluid flow paths, i.e., some fluid devices may be arranged in parallel with other fluid devices.
  • seals 70 are provided to prevent leakage at the interface between a base surface 48 and a manifold surface 22.
  • an annular seal 70 is disposed around each flow path at the interface of each port and opening.
  • the annular seal 70 is compressed between a base surface 48 and a manifold surface 22 to seal the gap between the two surfaces 22, 48.
  • the annular seal 70 may be seated within a counterbore 49 on the base surface 48, within a counterbore 39 on the manifold surface 22, or within a counterbore 49 on the base surface 48 and a counterbore 39 on the manifold surface 22, as shown in Figure 1.
  • annular seal 70 may be of any suitable type, such as a Z-seal, a W-seal, a C-seal or an O-ring seal, and may be fabricated from any suitable material, such as a metal or an elastomer.
  • the counterbores 39, 49 or the grooves may be machined to accommodate the type of seal used because each type of seal may require a specific type of counterbore or groove.
  • annular seal instead of an annular seal, other sealing methods may be employed. For example, a flat gasket (not shown) with holes corresponding to the inlet and outlet ports 44, 46 and the through holes 55 may be placed between the base surface 48 and the manifold surface 22 to provide a seal.
  • a fluid device assembly may include one or more seal conversion blocks (not shown), each of which may be placed between a fluid device 40 and the manifold 20, e.g., between the base surface 48 and a device mounting area 36.
  • a seal conversion block may be used to mount a fluid device 40 to a device mounting area 36 when the fluid device 40 and the device mounting area 36 have different counterbores 39, 49 for receiving different types of seals 70.
  • the fluid device 40 may have counterbores 49 for receiving C-seals while the device mounting area 36 may have counterbores 39 for receiving W-seals.
  • a seal conversion block may have any suitable configuration.
  • a seal conversion block may have a shape similar to the base of a fluid device 40.
  • the seal conversion block may have a rectangular configuration with two opposite square surfaces.
  • the seal conversion block preferably has a number of fluid conduits extending between the two square surfaces and corresponding to the inlet and outlet ports 44, 46 of the fluid device 40.
  • each of the openings of the fluid conduits preferably includes a counterbore (or a groove) for receiving a seal.
  • the seal conversion block may also include a number of through holes extending between the two square surfaces and corresponding to the through holes 55 on the base surface 48 of a fluid device 40.
  • one of the surfaces of the seal conversion block faces the base surface 48 of the fluid device 40 and other square surface faces the manifold 20.
  • the base surface 48 of the fluid device 40 and the block surface facing the base surface 48 have the same type of counterbores for receiving the same type of seals.
  • the device mounting area 36 and the block surface facing the device mounting area 36 have the same type of counterbores for receiving the same type of seals. Consequently, if a fluid device 40 and the corresponding device mounting area
  • a seal conversion block may be used to mount the fluid device 40 to the device mounting area 36.
  • a fluid device assembly embodying the invention may include an arrangement which ensures that a fluid device is properly oriented when it is mounted to the fluid device assembly, i.e., that the inlet port of the fluid device can only communicate with the inlet fluid conduit, and the outlet port with the outlet fluid conduit, but not vice versa.
  • the inlet and outlet fluid conduits are two fluid conduits in the device mounting area, through which fluid conduits the fluid enters and exits the fluid device, respectively.
  • the arrangement for ensure proper alignment of a fluid device to a fluid device assembly may have a variety of configurations.
  • the pattern of the through holes 55 on a base surface 48 (and/or the pattern of the threaded holes 34 in a device mounting areas 36) may be arranged asymmetrically with respect to the centerline.
  • the distance between the two through holes 55 on the inlet port half 148a may be different from that on the outlet port half 148b.
  • a fluid device 40 may be mounted to a device mounting area 36 in only one way with its inlet port 44 communicating with the inlet fluid conduit 30.
  • the arrangement may include a key structure on a fluid device 40 and/or a device mounting area 36.
  • the key structure may have a variety of configurations.
  • the key structure may include a depression on the base surface 48 of a fluid device 40 and a corresponding protrusion in a device mounting area 36, or vice versa, and preferably the depression is asymmetrical with respect to the center of the base surface 48 of the fluid device 40.
  • the fluid device 40 can be properly mounted to the device mounting area 36, ensuring that the inlet and outlet ports 44, 46 on the base surface 48 of the fluid device 40 communicate respectively with the inlet and outlet fluid conduits 30 in the device mounting area 36.
  • the arrangement may include only marks on a fluid device 40 and/or on the manifold 20 so that an operator may ensure the fluid device 40 is properly mounted on the manifold 20 by visual inspection.
  • a fluid device assembly may have fewer active fluid devices than the manifold can accommodate.
  • the fluid device assembly 10 shown in Figure 1 may have only the filter 40d and the pressure valve 40e.
  • passive fluid devices such as shunts 80 and/or caps 82, may be installed to provide fluid communication between the assembly inlet 12 and outlet 14 (see Figures 3 and 4).
  • a shunt is a fluid device with a fluid passage for communicating between openings in the manifold, and a cap is a fluid device which blocks fluid flow through an opening in the manifold.
  • shunts 80 and/or caps 82 may be used to provide fluid communication between the assembly inlet 12 and the inlet port 44 of the filter 40d.
  • each shunt 80 may be used to bridge two (or more) device mounting areas and provide the fluid communication between the assembly inlet 12 and the inlet port 44 of the filter 40d, and a cap 82 may be used to bridge one (or more) device mounting areas and block flow through the intermediate fluid conduits.
  • a cap 82 may be used to bridge one (or more) device mounting areas and block flow through the intermediate fluid conduits.
  • three shunts 82 and no caps may be used to provide the fluid communication between the assembly inlet 12 and the inlet port 44 of the filter 40d.
  • each shunt and cap preferably includes a base surface corresponding to the device mounting area(s) it overlies
  • the fluid device assembly 10 shown in Figure 1 may be installed, for example, in the tubing line for carrying gases used in the manufacture of semiconductors.
  • the assembly inlet 12 preferably is connected to the upstream side of the tubing line and the assembly outlet 14 preferably is connected to the downstream side of the tubing line.
  • the gas may be introduced in the fluid device assembly 10 through the assembly inlet 12.
  • the gas then enters the manual valve 40a through its inlet port 44.
  • the manual valve 40a if it is open
  • the gas exits the manual valve 40a through its outlet port 46.
  • the gas then passes though the straight fluid conduit 30 and enters the regulator 40b through its inlet port 44.
  • the gas may then similarly flow through the regulator 40b, the transducer 40c, the filter 40d, and the pressure valve 40e.
  • the fluid device assembly 110 comprises a plurality of fluid devices 140 mounted to each other.
  • Each fluid device 140 may include an operative portion and a mounting portion.
  • the mounting portion may include a base 142 having a base surface 148, as shown in Figures 5 and 6.
  • the base surface 148 of each fluid device 140 faces the base surface 148 of at least one other fluid device 140.
  • the filter 140d is mounted to the transducer 140c and the pressure valve 140e with the base surface 148 of the filter 140d facing the base surfaces to each other, the base surface 148 of one fluid device 140 may contact the base surface 148 of the other fluid device 140.
  • the base surfaces 148 of the fluid devices 140 may not contact each other, instead there may be one or more minor components between the base surfaces 148 of the fluid devices 140, such as a gasket and/or a seal conversion block described above.
  • the fluid device assembly 110 shown in Figure 5 may also include various types of fluid devices.
  • the fluid device assembly 110 includes a manual valve 140a, a regulator 140b, a transducer 140c, a filter 140d, and a pressure valve 140e.
  • Each fluid device 140 preferably includes an inlet port 144 and an outlet port 146 on its base surface 148.
  • Each base surface 148 may include a plurality of through holes 155 and a plurality of threaded holes 134.
  • a bolt 160 may extend through a through hole 155 on the base 142 of a fluid device 140 and into a corresponding threaded hole 134 on the base surface 148 of another fluid device 140.
  • the bolt 160 may then be fastened to mount the two fluid devices 140 to each other with their base surfaces 148 facing each other.
  • the bases 142 of the fluid devices 140 may only have through holes (not shown).
  • a bolt may extend through a through hole in the base 142 of a fluid device 140 and through a corresponding through hole in the base 142 of another fluid device 140.
  • a nut may be fastened to the bolt to mount the fluid devices 140 to each other.
  • other means such as welding, bonding or clamping, may be employed to mount the fluid devices 140 to each other.
  • the fluid devices 140 have standardized base surfaces, that is, the base surfaces have corresponding configuration, preferably substantially identical configurations.
  • Standardized base surfaces may have one or more substantially identical features.
  • the inlet and outlet ports 144, 146 of each fluid device 140 may be coplanar, and/or the distances between the inlet and outlet ports 144, 146 of the fluid devices 140 may be substantially identical.
  • the base surfaces 148 may have similar shapes, such as the shape of a square.
  • the through and threaded holes 155, 134 on the base surfaces 148 may be similarly arranged.
  • the standardized base surfaces 148 of the fluid devices 140 may have a generally square configuration and four through holes 155 placed near the four corners of the square base surface 148.
  • the base surfaces 148 may also have four threaded holes 134 placed near the center of the base surface 148.
  • each base surface 148 may be divided into two halves 148a, 148b— an inlet half 148a including the inlet port 144 and an outlet half 148b including the outlet port 146.
  • Each of the inlet and outlet halves 148a, 148b may include two through holes 155 and two threaded holes 134 placed, for example, near the four corners of the rectangular half 148a, 148b.
  • the two threaded holes 134 may be placed near the two corners at the center of the fluid device 140, and the two through holes 155 may be placed near the other two corners.
  • the inlet half 148a of a fluid device 140 is preferably mounted to the outlet half 148b of a second fluid device 140 with the inlet port 144 of the first fluid device 140 communicating with the outlet port 146 of the second fluid device 140.
  • the through holes 155 in the inlet half 148a of the first fluid device 140 may be aligned with the threaded holes 134 in the outlet half 148b of the second fluid device 140.
  • the threaded holes 134 in the inlet half 148a of the first fluid device 140 may be aligned with the through holes 155 in the outlet half 148b of the second fluid device 140.
  • the outlet half 148b of the fluid device 140 may be mounted to the inlet half 148a of a third fluid device 140 with the outlet port 146 of the first fluid device 140 communicating with the inlet port 144 of the third fluid device 140.
  • the through holes 155 in the outlet half 148b of the first fluid device 140 may be aligned with the threaded holes 134 in the inlet half 148a of the third fluid device 140.
  • the threaded holes 134 in the outlet half 148b of the first fluid device 140 may be aligned with through holes 155 in the inlet half 148a of the third fluid device 140.
  • a bolt 160 may extend through each through hole 155 on one base surface 148 and into a corresponding threaded hole 134 on another base surface 148. The bolt 160 may then be fastened to mount the fluid devices 140 to each other.
  • seals 170 are provided to prevent leakage at the interface between two base surfaces 148 mounted to each other.
  • an annular seal 170 is disposed between the two base surfaces 148 and around each flow path at the interface of the ports.
  • the annular seal 170 may be seated within a counterbore 149 on one of the base surfaces 148 or a counterbore 149 on the other base surface 148, or within the two counterbores 149, as shown in Figure 5.
  • other means such as an annular groove (not shown), may be used to accommodate the annular seal 170.
  • the annular seal 170 may be of any suitable types, such as a Z-seal, a W-seal, a C-seal or an O-ring seal, and may be formed of any suitable material, such as a metal or an elastomer.
  • a flat gasket (not shown) with holes corresponding to the inlet and outlet ports 144, 146 and the through and threaded holes 155, 134 may be placed between the base surfaces 148 to provide a seal.
  • the fluid device assembly 110 may also include one or more seal conversion blocks (not shown) similar to those discussed in association with the fluid device assembly 10 shown in Figure 1.
  • a seal conversion block may be placed between two fluid devices mounted to each other when the fluid devices have different types of counterbores for receiving different types of seals.
  • the fluid device assembly 110 shown in Figure 5 may also include arrangement which ensures that, when a fluid device 140 is mounted to a fluid device assembly 110, the fluid enters the fluid device 140 through its inlet port 144 and exits the fluid device 140 through its outlet port 146.
  • the arrangement may have a variety of configurations. For example, on the base surfaces 148 of fluid devices 140, the pattern of the through holes 155 on the inlet halves 148a may be similar to the pattern of the threaded holes 134 on the outlet halves 148b. Likewise the pattern of the through holes 155 on the outlet half 148b may be similar to the pattern of the threaded holes 134 on the inlet half
  • the inlet half 148a of the base surface 148 of a fluid device 140 may only be mounted to the outlet half 148b of the base surface 148 of another fluid device 140 but cannot be mounted the inlet half 148a of another fluid device 140.
  • the outlet half 148b of the base surface 148 of a fluid device 140 may only be mounted to the inlet half 148a of the base surface 148 of another fluid device 140 but cannot be mounted the outlet half 148b of another fluid device 140.
  • the arrangement may include a key structure, which may have a variety of configurations.
  • the key structure may include a depression 157 and a protrusion 159 on the inlet half 148a of the base surface 148 of a fluid device 140, and corresponding protrusion 159 and depression 157 on the outlet half 148b.
  • the inlet half 148a of the base surface 148 of a fluid device 140 is mounted to the outlet half 148b of the base surface 148 of another fluid device 140, the depression 157 and protrusion 159 on the inlet half 148a are respectively aligned with the protrusion 159 and depression 157, allowing the fluid devices 140 to be properly mounted to each other.
  • the inlet half 140a of the base surface 148 of a fluid device 140 to the inlet half 140a of another fluid device 140, the protrusions 159 on the two inlet halves 148a would be aligned with each other, thus preventing the fluid devices 140 from being mounted to each other.
  • the arrangement may include only marks on the fluid devices 140 so that an operator may ensure the fluid devices 140 are properly mounted each other by visual inspection.
  • the fluid device assembly 110 in Figure 5 may also include a number of shunts and/or caps, as shown in Figure 8.
  • a shunt 180 may be installed in place of the transducer 140c.
  • the shunt 180 provides fluid communication between the outlet port 146 of the regulator 140b and the inlet port 144 of the filter 140d.
  • fluid devices 140 are mounted to each other in the fluid device assembly 110 shown in Figure 5, remaining fluid devices 140 may become separated from each other when one or more of the fluid devices 140 are dismounted (unbolted but not removed) or removed.
  • the fluid device assembly 110 may be separated into two separated segments. The first segment includes the manual valve 140a and the regulator 140b, and the second segment includes the filter 140d and the pressure valve 140e.
  • the fluid device assembly 110 may include a support assembly 190 as shown in Figure 9.
  • the support assembly 190 may be used to hold the remaining fluid devices 140 together when one or more fluid devices 140 are dismounted or removed or to mount the completed fluid device assembly in operation.
  • the support assembly may have any suitable configuration.
  • the support assembly may include a plurality of components, and each component may provide support to and hold together one or more fluid devices.
  • the support assembly may include only a single component which holds together the entire fluid device assembly.
  • the support assembly may be designed to hold together the fluid device assembly 110 when one or more fluid devices 140 are dismounted but not removed.
  • the support assembly may be designed to hold together the fluid device assembly 110 when one or more fluid devices 140 are removed from the assembly 110.
  • the support assembly may be attached to the fluid device assembly 110 whenever the fluid device assembly 110 is in use, or it may be attached to the fluid device assembly 110 only when one or more fluid devices 140 are dismounted or removed.
  • Figure 9 illustrates an exemplary embodiment of the support assembly.
  • the support assembly 190 includes a support base such as a bracket 192.
  • the bracket 192 may comprise a rectangular plate having upturned side walls 196 defining a lengthwise groove 194 on one of its flat surfaces.
  • the support assembly 190 may also include a rod 196 which conveniently supports the bracket 192 above a reference plane such as the ground 199.
  • the fluid device assembly 110 preferably is placed in the bracket 192 where the bracket 192 embraces the bases 142 of the fluid devices 140.
  • the length of the bracket 192 is sufficiently long to accommodate any suitable number of fluid devices.
  • the width of the groove 194 is preferably equal to or slightly greater than twice the thickness of the bases 142 of the fluid devices 140 so that the bases 142 of the fluid devices 140 can be placed within the groove 194.
  • the side walls 196 of the groove 194 may include a number of notches 197 to accommodate the heads of the bolts 160.
  • the support assembly 190 may include a device, such as one or more clips, which keep the fluid devices 140 in relative position.
  • the support assembly 190 includes a single clip 193, which keeps the regulator 140b in place when the regulator 140b is being mounted or dismounted.
  • the clip 193 clamps the base 142 of the regulator 140b to the base 142 of another fluid device 140 at the top to keep the loosened regulator 140b in place and prevent it from falling off the bracket 192.
  • the inlet and outlet ports of the fluid devices are on the base surfaces of the fluid devices.
  • the inlet and outlet ports of a fluid device may be placed anywhere on the fluid device.
  • a fluid device 240 may have an operative portion and a mounting portion.
  • the mounting portion may include a base surface 248 and one or more side surfaces 250, and one of the inlet and outlet ports 244, 246 of the fluid device 240 may be on the base surface 248 and the other one may be on a side surface 250.
  • both of the inlet and outlet ports may be on the same side surface of a fluid device or on different side surfaces. Even if both of the inlet and outlet ports are placed on the same surface, they may not be coplanar.
  • a side surface may include two surfaces at an angle, and the inlet and outlet ports may be placed separately on the two surfaces at an angle.
  • a side surface (or the base surface) may be a curved surface, and the inlet and outlet ports may be placed on the curved surface at an angle.
  • Each of the fluid devices 240 shown in Figures 10 and 11 has its inlet port 244 on a side surface 250 and its outlet port on the base surface 248.
  • the side and base surfaces 250, 248 may also include a number of through holes and threaded holes so that the fluid device 240 may be bolted to a manifold or to another fluid device.
  • the through and threaded holes 255, 234 of a fluid device 240 may be arranged in any suitable pattern which allows the fluid device to be securely mounted to a manifold or another fluid device.
  • the fluid device 240 may be mounted to a manifold or another fluid device in any suitable way, such as bonding, welding or clamping.
  • a fluid device assembly 210 may include a number of the fluid devices 240 attached to one another (or to a manifold).
  • the fluid devices 240 may be arranged in any suitable way.
  • the fluid devices 240 are arranged in a helical configuration, i.e., the centers of the base surfaces 248 of the fluid devices 240 form a helix with the base surfaces 248 of the fluid devices 240 preferably facing the center of the helix.
  • Each loop of the helix include four fluid devices 240, which are arranged with an angular interval of 90-degree, i.e., any two adjacent fluid devices 240 are at a 90-degree angle.
  • the first fluid device 240a may be mounted to the second fluid device 240b with the base surface 248a of the first fluid device 240a mounted to a side surface 250b of the second fluid device 240b.
  • the outlet port 246a and threaded holes 234a of the first fluid device 240a are in the area of the base surface 248a mounted to the side surface 250b of the second fluid device 240b.
  • the inlet port 244b and through holes 255b of the second fluid device 240b preferably are in the area of the side surface 250b mounted to the base surface 248a of the first fluid device 240a.
  • the outlet port 246a of the first fluid device 240a is in fluid communication with the inlet port 244b of the second fluid device 240b, and the threaded holes 234a of the first fluid device 240a are aligned with the through holes 255b of the second fluid device 240b.
  • a bolt 260 may extend through each through hole 255b of the second fluid device 240b into the corresponding threaded hole 234a of the first fluid device 240a. The bolt 260 may then be fastened to mount the fluid devices 240a, 240b to each other.
  • the through and threaded holes 255b, 234a may be arranged in any pattern that allows the two fluid devices 240a, 240b to be securely mounted to each other.
  • the first fluid device 240a may not be aligned with the second fluid device 240b, as shown in Figure 10.
  • the second fluid device 240b may be shifted from the first fluid device 240a in the direction of the centerline of the helix.
  • a portion of the side surface 255b of the second fluid device 240b may not be mounted to the base surface 248a of the first fluid device 240a.
  • the third fluid device 240c may be mounted to the second fluid device 240b with the side surface 250c of the third fluid device 240c mounted to the base surface 248b of the second fluid device 240b.
  • the third fluid device 240c is at a 90-degree angle with the second fluid device 240b and at a 180-degree angle with the first fluid device 240a.
  • the fifth fluid device 240e then is in parallel with the first fluid device 240a, and the distance between them is equal to the pitch of the helix.
  • the shift between any two adjacent fluid devices 240 is the same so that the fluid devices 240 are equally spaced along the centerline of the helix.
  • the fluid device assembly 210 shown in Figure 10 may have any and all of the patentable features discussed in association with other fluid device assemblies described in this description.
  • the fluid device assembly 210 may further include a support assembly that holds together the fluid devices 240 when the fluid devices 240 are dismounted.
  • each loop of the helix has a square configuration because each loop includes four fluid devices 240 with two adjacent fluid devices 240 mounted to each other at a 90-degree angle. Two adjacent fluid devices 240 are mounted to each other at a 90-degree angle because the side and base surfaces 250, 248 of the fluid devices 240 are at a 90-degree angle.
  • the angle between the side and base surfaces of the fluid devices may be of any suitable value, and each loop of the helix may have any other configuration, such as a triangular configuration (three fluid devices per loop) or any other polygonal configuration (more than four fluid devices per loop).
  • a fluid device assembly having a helical configuration may include a number of fluid devices having two opposite side surfaces at an angle.
  • the fluid devices may be mounted to each other with a side surface of one fluid device mounted to the opposite side surface of another fluid device.
  • the loop of the helix may have any polygonal configuration, depending on the angle between the two opposite side surfaces of the fluid devices.
  • the fluid device assemblies 110, 210 shown in Figures 5 and 10 may also include an assembly inlet and an assembly outlet. To avoid duplication, the assembly inlet and outlet will only be described in association with the fluid device assembly 110 shown in Figure 5.
  • each of the assembly inlet and outlet 112, 114 includes fittings 112a, 114a and a block 112b, 114b, as shown in Figure 5, although the assembly inlet and the assembly outlet may be configured in a wide variety of ways.
  • the fittings 112a allow the assembly inlet 112 and outlet 114 to be connected to the upstream and downstream sides of the tubing line, respectively.
  • the block 112b of the assembly inlet 112 may include a base surface mounted to the inlet half 148a of the base surface 148 of the first fluid device 140a.
  • the block 112b may include a fluid conduit 112c which opens onto the base surface of the block 112b and provides fluid communication between the upstream side of the tubing line and the inlet port 144 of the first fluid device 140a.
  • the block 114b of the assembly outlet 114 may include a base surface mounted to the outlet half 148b of the base surface 148 of the last fluid device 140el40a.
  • the block 114b may include a fluid conduit 114c which opens onto the base surface of the block 114b and provides fluid communication between the downstream side of the tubing line and the outlet port 146 of the last fluid device 140e.
  • the fluid device assembly 110 may not include the assembly inlet and outlet 112, 114.
  • the upstream side of the tubing line may be directly connected to the inlet port 144 of the first fluid device 140a, and the downstream side of the tubing line may be directly connected to the outlet port 146 of the last fluid device 140e.
  • the fluid device assembly shown in Figure 5 may be installed, for example, in the tubing line for carrying gases used in the manufacture of semiconductors.
  • the assembly inlet 112 preferably is connected to the upstream side of the tubing line and the assembly outlet 114 preferably is connected to the downstream side of the tubing line.
  • the gas may be introduced in the fluid device assembly 110 through the assembly inlet 112.
  • the gas then passes through the fluid conduit 112c of the assembly inlet 112 and enters the manual valve 140a through its inlet port 144.
  • the gas After passing through the manual valve 140a (if it is open), the gas exits the manual valve 140a through its outlet 146. The gas then enters the regulator 140b through its inlet port 144. The gas may then similarly pass through the regulator 140b, the transducer 140c, the filter 140d, and the pressure valve 140e. Finally the gas exits the fluid device assembly 110 through the assembly outlet 114.
  • a fluid device assembly without a manifold, as shown in Figure 5 or 10 has a number of advantages over a fluid device assembly with a manifold, as shown in Figure 1. For example, two or more fluid devices may be removed or replaced as an integral part without having to remove each fluid device individually. It is also much easier to expand the fluid device assembly by simply adding additional fluid devices to the assembly. Further, the fluid device assembly without a manifold has one less component — the manifold, thus occupying less space and having less weight. Furthermore, the fluid device assembly needs fewer seals. For example, six seals are used for a fluid device assembly 110 without a manifold, as shown in Figure 5, as opposed to ten seals for the fluid device assembly 10 with a manifold, as shown in Figure 1.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)

Abstract

La présente invention concerne un ensemble de dispositifs fluidiques (10) constitué d'une pluralité de dispositifs fluidiques (40) assujettis et montés sur un collecteur (20).
PCT/US2001/003967 2000-02-10 2001-02-08 Ensemble de dispositifs fluidiques WO2001059343A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001234907A AU2001234907A1 (en) 2000-02-10 2001-02-08 Fluid device assembly

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US18156700P 2000-02-10 2000-02-10
US60/181,567 2000-02-10

Publications (1)

Publication Number Publication Date
WO2001059343A1 true WO2001059343A1 (fr) 2001-08-16

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AU (1) AU2001234907A1 (fr)
WO (1) WO2001059343A1 (fr)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1523213A (fr) * 1967-01-27 1968-05-03 Seram Dispositif perfectionné de gerbage pour appareils hydrauliques
US3680589A (en) * 1969-06-19 1972-08-01 Newmark Ltd Louis Mounting block for fluid control valve
US4136713A (en) * 1975-04-01 1979-01-30 B & G Hydraulics Limited Hydraulic circuit units
EP0715112A2 (fr) * 1994-12-03 1996-06-05 A. und K. MÜLLER GmbH & Co. KG Appareil pour connexion simultanée d'électrovannes
US5975134A (en) * 1995-10-09 1999-11-02 Schwelm; Hans Valve system
WO2000003169A2 (fr) * 1998-07-08 2000-01-20 United States Filter Corporation Systeme de rampe de distribution de fluides a elements amovibles
US6125887A (en) * 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications
WO2000063757A1 (fr) * 1999-04-19 2000-10-26 Millipore Corporation Dispositif de commande modulaire de debit massique et de pression monte en surface
WO2001009513A1 (fr) * 1999-07-30 2001-02-08 Crs Services, Inc. Collecteur de pompe hydraulique

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1523213A (fr) * 1967-01-27 1968-05-03 Seram Dispositif perfectionné de gerbage pour appareils hydrauliques
US3680589A (en) * 1969-06-19 1972-08-01 Newmark Ltd Louis Mounting block for fluid control valve
US4136713A (en) * 1975-04-01 1979-01-30 B & G Hydraulics Limited Hydraulic circuit units
EP0715112A2 (fr) * 1994-12-03 1996-06-05 A. und K. MÜLLER GmbH & Co. KG Appareil pour connexion simultanée d'électrovannes
US5975134A (en) * 1995-10-09 1999-11-02 Schwelm; Hans Valve system
WO2000003169A2 (fr) * 1998-07-08 2000-01-20 United States Filter Corporation Systeme de rampe de distribution de fluides a elements amovibles
WO2000063757A1 (fr) * 1999-04-19 2000-10-26 Millipore Corporation Dispositif de commande modulaire de debit massique et de pression monte en surface
WO2001009513A1 (fr) * 1999-07-30 2001-02-08 Crs Services, Inc. Collecteur de pompe hydraulique
US6125887A (en) * 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications

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