WO2001044853A3 - Verfahren zur herstellung einer sonde für die optische rasternahfeldmikroskopie und mit diesem verfahren hergestellte sonde - Google Patents

Verfahren zur herstellung einer sonde für die optische rasternahfeldmikroskopie und mit diesem verfahren hergestellte sonde Download PDF

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Publication number
WO2001044853A3
WO2001044853A3 PCT/EP2000/012660 EP0012660W WO0144853A3 WO 2001044853 A3 WO2001044853 A3 WO 2001044853A3 EP 0012660 W EP0012660 W EP 0012660W WO 0144853 A3 WO0144853 A3 WO 0144853A3
Authority
WO
WIPO (PCT)
Prior art keywords
probe
producing
produced according
optical microscopy
field optical
Prior art date
Application number
PCT/EP2000/012660
Other languages
English (en)
French (fr)
Other versions
WO2001044853A2 (de
Inventor
Thomas Held
Stephanie Emonin
Original Assignee
Zeiss Carl Jena Gmbh
Thomas Held
Stephanie Emonin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Jena Gmbh, Thomas Held, Stephanie Emonin filed Critical Zeiss Carl Jena Gmbh
Publication of WO2001044853A2 publication Critical patent/WO2001044853A2/de
Publication of WO2001044853A3 publication Critical patent/WO2001044853A3/de

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Surface Treatment Of Glass (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Herstellung einer Sonde für die optische Rasternahfeldmikroskopie und eine mit diesem Verfahren hergestellte Sonde. Hierzu wird die als Sonde zu verwendende Glasfaser nach dem Ätzprozeß naß abgeschliffen, um eine sehr scharfe Spitze mit einem kleinen Spitzenradius im Nanometer-Bereich und gleichzeitig eine glatte oberfläche zu erhalten. Der Konuswinkel der Sonde läßt sich durch Variation des Schleifwinkels im Bereich zwischen 20° und 90° einstellen. Die derart hergestellten Sonden ermöglichen Untersuchungen mit einem hohen Transmissionsverhältnis in der Größenordnung von mindestens 10-3 und einer Auflösung deutlich unter 100 nm.
PCT/EP2000/012660 1999-12-15 2000-12-13 Verfahren zur herstellung einer sonde für die optische rasternahfeldmikroskopie und mit diesem verfahren hergestellte sonde WO2001044853A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19960476.2 1999-12-15
DE19960476A DE19960476A1 (de) 1999-12-15 1999-12-15 Verfahren zur Herstellung einer Sonde für die optische Rasternahfeldmikroskopie und mit diesem Verfahren hergestellte Sonde

Publications (2)

Publication Number Publication Date
WO2001044853A2 WO2001044853A2 (de) 2001-06-21
WO2001044853A3 true WO2001044853A3 (de) 2002-02-14

Family

ID=7932748

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2000/012660 WO2001044853A2 (de) 1999-12-15 2000-12-13 Verfahren zur herstellung einer sonde für die optische rasternahfeldmikroskopie und mit diesem verfahren hergestellte sonde

Country Status (2)

Country Link
DE (1) DE19960476A1 (de)
WO (1) WO2001044853A2 (de)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4124090A1 (de) * 1990-07-20 1992-01-23 Olympus Optical Co Rastertunnelmikroskop
US5270543A (en) * 1991-07-05 1993-12-14 Drukker International B.V. Electronic probe and method for its manufacture
US5333495A (en) * 1990-05-30 1994-08-02 Hitachi, Ltd. Method and apparatus for processing a minute portion of a specimen
WO1996007946A1 (de) * 1994-09-09 1996-03-14 Ulrich Fischer Mikroskopischer sender oder detektor elektromagnetischer strahlung
US5664036A (en) * 1994-10-13 1997-09-02 Accuphotonics, Inc. High resolution fiber optic probe for near field optical microscopy and method of making same
DE19628141A1 (de) * 1996-07-12 1998-01-22 Inst Mikrotechnik Mainz Gmbh Optische Nahfeldsonde und Verfahren zu ihrer Herstellung
EP0938012A1 (de) * 1998-02-23 1999-08-25 Seiko Instruments Inc. Sonde für optisches Nahfeldmikroskop, Verfahren zu ihrer Herstellung und optisches Nahfeldrastermikroskop

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5333495A (en) * 1990-05-30 1994-08-02 Hitachi, Ltd. Method and apparatus for processing a minute portion of a specimen
DE4124090A1 (de) * 1990-07-20 1992-01-23 Olympus Optical Co Rastertunnelmikroskop
US5270543A (en) * 1991-07-05 1993-12-14 Drukker International B.V. Electronic probe and method for its manufacture
WO1996007946A1 (de) * 1994-09-09 1996-03-14 Ulrich Fischer Mikroskopischer sender oder detektor elektromagnetischer strahlung
US5664036A (en) * 1994-10-13 1997-09-02 Accuphotonics, Inc. High resolution fiber optic probe for near field optical microscopy and method of making same
DE19628141A1 (de) * 1996-07-12 1998-01-22 Inst Mikrotechnik Mainz Gmbh Optische Nahfeldsonde und Verfahren zu ihrer Herstellung
EP0938012A1 (de) * 1998-02-23 1999-08-25 Seiko Instruments Inc. Sonde für optisches Nahfeldmikroskop, Verfahren zu ihrer Herstellung und optisches Nahfeldrastermikroskop

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
LAMBELET P ET AL: "Chemically etched fiber tips for near-field optical microscopy: a process for smoother tips", APPLIED OPTICS, vol. 37, no. 31, 1 November 1998 (1998-11-01), USA, pages 7289 - 7292, XP001020469 *
OESTERSCHULZE E: "On the Development and Potential of Cantilever-Based Probes for SNOM Applications", OPTICAL MEMORY & NEURAL NETWORKS, vol. 7, no. 4, 1998, Allerton Press, USA, pages 251 - 265, XP001023493 *
SAYAH A ET AL: "Fiber tips for scanning near-field optical microscopy fabricated by normal and reverse etching", ULTRAMICROSCOPY, vol. 71, no. 1-4, March 1998 (1998-03-01), Elsevier, Netherlands, pages 59 - 63, XP001020456 *

Also Published As

Publication number Publication date
WO2001044853A2 (de) 2001-06-21
DE19960476A1 (de) 2001-07-12

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