WO2001024279A1 - Method for the production of a semiconductor device - Google Patents

Method for the production of a semiconductor device Download PDF

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Publication number
WO2001024279A1
WO2001024279A1 PCT/NL2000/000613 NL0000613W WO0124279A1 WO 2001024279 A1 WO2001024279 A1 WO 2001024279A1 NL 0000613 W NL0000613 W NL 0000613W WO 0124279 A1 WO0124279 A1 WO 0124279A1
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Prior art keywords
doping
regions
substrate
barrier material
highly doped
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PCT/NL2000/000613
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French (fr)
Inventor
Jan Hendrik Bultman
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Stichting Energieonderzoek Centrum Nederland
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Application filed by Stichting Energieonderzoek Centrum Nederland filed Critical Stichting Energieonderzoek Centrum Nederland
Priority to JP2001527368A priority Critical patent/JP2003510852A/en
Priority to US10/070,172 priority patent/US6756290B1/en
Priority to EP00963124A priority patent/EP1208608A1/en
Priority to AU74576/00A priority patent/AU7457600A/en
Publication of WO2001024279A1 publication Critical patent/WO2001024279A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/914—Doping
    • Y10S438/92—Controlling diffusion profile by oxidation

Definitions

  • the invention relates to a method for making a semiconductor device having a pattern of highly doped regions located some distance apart in a semiconductor substrate and regions of low doping located between the highly doped regions, wherein a doping material is applied to the substrate, at least in the location of the highly doped regions, the substrate is subjected to a diffusion step in which atoms diffuse from the doping material into the substrate, and - conducting contacts are made above the highly doped regions.
  • a method for making a selective emitter in a p-type crystalline Si substrate, with which a diffusion material in the form of a doping paste, such as phosphorus paste, is applied to the substrate by screen printing is described in J. Horzel, J. Szlufcik, J. Nijs and R. Mertens, "A simple processing sequence for selective emitters", 26 th PVSC, Sept. 30 - Oct 3; Anaheim, CA; 1997 IEEE pp 139-142.
  • the substrate is then dried on a conveyor belt and placed in a diffusion furnace. During the diffusion step the doping materials diffuse into the substrate whilst diffusion material moves to the regions outside the imprint of doping material via the gas atmosphere in the furnace.
  • Relatively deep diffusion zones having a phosphorus concentration varying from 10 2 at the surface of the substrate to 10 17 at a depth of 0.5 ⁇ m below the substrate surface are formed below the imprinted dope material.
  • Shallow diffusion zones having a low phosphorus concentration, varying from 10 19 at the substrate surface to 10 18 at a depth of 0.2 ⁇ m, are formed outside the region of the imprint.
  • the disadvantage of the known method in particular in the case of the production of solar cells in which the highly doped regions are arranged in a pattern of a series of parallel tracks or fingers, is that the diffusion between the tracks having a high concentration is highly sensitive to the atmosphere in the diffusion furnace, as a result of which the diffusion method is insufficiently stable as a production process. Furthermore the ratio between the high and low doping is dependent and therefore local doping cannot be adjusted to the optimum. To obtain good contact with the metalisation placed on the highly doped regions, which metalilsation is frequently applied by screen printing, a low surface resistance, and thus as high as possible a doping, is desired.
  • One aim of the present invention is therefore to provide a method for making a semiconductor device, in particular a solar cell, with which regions of high and low doping can be applied efficiently in accurately determined positions on the substrate.
  • a further aim of the invention is to provide a method with which the concentrations of the doping material in the regions of high and low doping can be adjusted relatively independently of one another.
  • the method according to the invention is characterised in that before the diffusion step a diffusion barrier material is applied to the substrate at the location of the regions of low doping by imprinting with the barrier material in the pattern of the regions of low doping.
  • the substrate regions located beneath the barrier material are shielded by the latter from the diffusion material applied to the neighbouring regions.
  • concentration in the regions of low doping can be freely adjusted accurately and independently of the concentration in the highly doped regions.
  • the barrier material can delay the diffusion of the underlying diffusion material or it can have etching properties, so that the underlying diffusion during the diffusion step is etched out of the substrate.
  • a barrier material which has etching properties is, for example, ZnO.
  • the barrier material is first applied by screen printing, stencil printing, offset printing or tampon printing or using other printing techniques known per se to those regions of the substrate which are to have low doping.
  • the doping material can then be applied as a single layer by spraying, spinning, immersing, vapour deposition or from the gas phase (such as, for example, by means of POCl 3 gas in a crystal tube) on top of the substrate and on top of the barrier material.
  • the doping material can also be printed selectively onto the regions of the substrate for high doping, before or after applying the barrier material.
  • the barrier material is, for example, a dielectric material such as Si 3 N 4 , SiO 2 or TiO 2 , to which an n-type doping material, such as 5 phosphorus (P), arsenic (As), antimony (Sb) or bismuth (Bi) can have been added, or a p- type doping material such as boron (B), aluminium (Al), gallium (Ga), indium (In) or thallium (Th). This material is printed onto the substrate in paste form and then sintered at temperatures between 200 °C and 1000 °C.
  • n-type doping material such as 5 phosphorus (P), arsenic (As), antimony (Sb) or bismuth (Bi)
  • a p- type doping material such as boron (B), aluminium (Al), gallium (Ga), indium (In) or thallium (Th).
  • the surface resistance in the highly doped regions is, for
  • the surface resistance of the regions with low doping is between
  • Fig. 1 shows a diagrammatic representation of a method according to the prior art
  • Figs 2a , 2b and 2c show a first embodiment of a method according to the present 20 invention using a uniform layer of doping material
  • Figs 3 a, 3 b and 3 c show an alternative embodiment of a method according to the invention with selective application of the doping material
  • Figs 4a, 4b and 4c show an embodiment of the method according to the invention where the barrier material has etching properties and >5 Fig. 5 shows a concentration profile of a semiconductor device produced according to the invention.
  • Fig. 1 shows a p-type substrate consisting of, for example, silicon doped with n-type atoms.
  • a doping material in the form of a paste such as a phosphorus paste, is applied by means of screen printing to the substrate 1 above those regions of the substrate 1 which are 0 to have high doping.
  • a diffusion step at approximately 900 °C in a diffusion furnace there are highly doped regions 3 and regions 4, 4' of low doping, formed by lateral diffusion from the phosphorus paste 2 via the atmosphere in the diffusion furnace, in substrate 1.
  • Fig. 1 shows a p-type substrate consisting of, for example, silicon doped with n-type atoms.
  • a doping material in the form of a paste such as a phosphorus paste
  • FIG. 2a shows a first step of the method according to the invention, in which a barrier material 5, 5', 5" is applied by means of a printing technique, such as, for example, screen printing, to the p-type crystalline silicon substrate 1 above those regions of the substrate 1 which are to have low doping.
  • the barrier material 5 - 5" comprises, for example, a dielectric material such as Si 3 N 4 , SiO 2 or TiO 2 in paste form. After imprinting the paste the barrier material 5 - 5" is sintered at a temperature between 200 °C and 1000 °C. The doping material 2 is then applied uniformly over the substrate 1 and over the barrier material 5 - 5", as shown in Fig. 2b.
  • the doping material can be applied in very many different ways, for example in the form of an organic molecule (for example triethyl phosphate) or in the form of phosphoric acid.
  • the doping material 2 can be applied by means of spraying, spinning, immersion, vapour deposition or from a gas phase.
  • the semiconductor device according to Fig 2b is then placed in a diffusion furnace and subjected to a diffusion step at, for example, approximately 1000 °C.
  • a diffusion step at, for example, approximately 1000 °C.
  • highly doped regions 6, 6' which are located between regions 7, 7', 7" of low doping, are formed in the substrate 1.
  • the regions 7, 7', 7" of low doping are located beneath the barrier material 5 - 5".
  • conducting contracts 8, 8' for example consisting of aluminium, are applied, likewise by means of a printing technique, to the doping material 2 on top of the highly doped regions 6, 6'.
  • Fig. 3a shows an embodiment with which the barrier material 5 - 5" is first of all printed on the substrate 1 in the desired pattern of regions of low doping and highly doped regions, after which the n-type doping material is applied between the barrier material 5 - 5".
  • the metal contacts are applied at 8, 8' to the doping material 2 above the highly doped regions 6, 6' by a printing technique.
  • etching agent to the barrier material 5 - 5" in the embodiments according to Fig. 2a - Fig. 3c in order to etch away any doping material that has diffused beneath the barrier material.
  • Fig. 4a shows an embodiment with which the doping material 2 is first applied over the substrate 1, after which the barrier material 5 - 5" is deposited in the desired pattern onto the doping material 2 by imprinting.
  • the barrier material can comprise an etching agent such as, for example, ZnO.
  • the etching agent from the barrier material will etch away the diffusion regions located beneath this, so that the highly doped regions 6, 6' remain in the substrate in positions where the barrier material 5 - 5" is absent.
  • Metal contacts 8, 8' can then be applied above the highly doped diffusion regions 6, 6', as shown in Fig. 4c.
  • This method has the advantage that an optical difference which can be used when aligning the metalisation pattern is produced between the positions of the barrier material and neighbouring locations. Furthermore, reduced reflection can be obtained with the construction according to Fig. 4c. It is pointed out that although the method has been described with reference to a p- type substrate and an n-type doping material the method is also suitable for use with n-type substrates with p-type doping material.
  • Fig. 5 shows a plot of the concentration against the depth below the substrate surface for a semiconductor device produced in accordance with the present invention.
  • the process conditions for the production of the semiconductor device having the concentration profile according to Fig. 5 were as follows:
  • the barrier layer was applied from a print paste which was sintered in air at approximately 400 °C. This leads to a layer of approximately 1 ⁇ m thick SiO 2 of low porosity (> 80% volume of SiO 2 ). It is important that the paste shows few cracks in order to achieve a maximum gain in efficiency. Partial coverage of the wafer with a barrier layer leads to a lower efficiency but not to short-circuiting of the cell, as is the case when a selective emitter is made with the aid of a resist to protect the locations where a highly doped emitter is needed.
  • a phosphorus-containing layer was applied by spin coating using a phosphorus source in the liquid phase. Diffusion into the wafer was then carried at 900 °C for 10 minutes, which led to the pattern below the barrier layer as is indicated in Fig. 5.
  • silver lines with a width of approximately 100 ⁇ m are then printed within the area previously etched by the barrier layer.
  • the size of this etched area has been chosen to be relatively large to prevent the risk of short-circuiting with the regions of low doping.- This etched area is at least 150 ⁇ m wide. It can be seen from Fig. 5 that the concentration of donor atoms in the highly doped regions 6, 6' is appreciably higher and extends over a greater depth than the concentrations of doping material in regions below the barrier material 5 - 5".
  • the low donor concentrations at the surface, as are shown in Fig. 5, are outstandingly suitable for surface passivation. This can lead to a significant rise in efficiency of the order of 5%, relative.

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Abstract

The invention relates to a method for making a semiconductor device having a pattern of highly doped regions (6, 6') located some distance apart in a semiconductor substrate (1) and regions (7, 7', 7') of low doping located between the highly doped regions (6, 6'). According to the invention a diffusion barrier material (5, 5', 5') is applied to the semiconductor substrate at the location of the regions of low doping by means of imprinting with the barrier material in the pattern of the regions of low doping. The doping material is applied after or before imprinting with the barrier material so that the highly doped regions are formed essentially between the barrier material in the substrate. With the method according to the invention the doping concentrations in the regions of low doping and in the highly doped regions can be freely adjusted independently of one another so that a relatively low surface resistance can be obtained for the highly doped regions to give good conducting contact with the metalisation and a high surface resistance can be achieved in the regions of low doping.

Description

Method for the production of a semiconductor device
The invention relates to a method for making a semiconductor device having a pattern of highly doped regions located some distance apart in a semiconductor substrate and regions of low doping located between the highly doped regions, wherein a doping material is applied to the substrate, at least in the location of the highly doped regions, the substrate is subjected to a diffusion step in which atoms diffuse from the doping material into the substrate, and - conducting contacts are made above the highly doped regions.
A method for making a selective emitter in a p-type crystalline Si substrate, with which a diffusion material in the form of a doping paste, such as phosphorus paste, is applied to the substrate by screen printing is described in J. Horzel, J. Szlufcik, J. Nijs and R. Mertens, "A simple processing sequence for selective emitters", 26th PVSC, Sept. 30 - Oct 3; Anaheim, CA; 1997 IEEE pp 139-142. The substrate is then dried on a conveyor belt and placed in a diffusion furnace. During the diffusion step the doping materials diffuse into the substrate whilst diffusion material moves to the regions outside the imprint of doping material via the gas atmosphere in the furnace. Relatively deep diffusion zones having a phosphorus concentration varying from 102 at the surface of the substrate to 1017 at a depth of 0.5 μm below the substrate surface are formed below the imprinted dope material. Shallow diffusion zones having a low phosphorus concentration, varying from 1019 at the substrate surface to 1018 at a depth of 0.2 μm, are formed outside the region of the imprint.
The disadvantage of the known method, in particular in the case of the production of solar cells in which the highly doped regions are arranged in a pattern of a series of parallel tracks or fingers, is that the diffusion between the tracks having a high concentration is highly sensitive to the atmosphere in the diffusion furnace, as a result of which the diffusion method is insufficiently stable as a production process. Furthermore the ratio between the high and low doping is dependent and therefore local doping cannot be adjusted to the optimum. To obtain good contact with the metalisation placed on the highly doped regions, which metalilsation is frequently applied by screen printing, a low surface resistance, and thus as high as possible a doping, is desired. For the regions located between the metalisation an increase in yield is possible, for example in the case of n-p- type solar cells, by passivation of the surface with thermal SiO2 or PECVD SiN, as a result of which recombination of charge carriers at the surface is counteracted. This increase in yield can be achieved only if the doping is low.
One aim of the present invention is therefore to provide a method for making a semiconductor device, in particular a solar cell, with which regions of high and low doping can be applied efficiently in accurately determined positions on the substrate. A further aim of the invention is to provide a method with which the concentrations of the doping material in the regions of high and low doping can be adjusted relatively independently of one another. To this end the method according to the invention is characterised in that before the diffusion step a diffusion barrier material is applied to the substrate at the location of the regions of low doping by imprinting with the barrier material in the pattern of the regions of low doping.
During the diffusion step, which usually will be carried out at temperatures of approximately 900 °C, the substrate regions located beneath the barrier material are shielded by the latter from the diffusion material applied to the neighbouring regions. As a result the concentration in the regions of low doping can be freely adjusted accurately and independently of the concentration in the highly doped regions. Furthermore, with the method according to the invention a single screen printing step and a single drying step can suffice.
It is possible first to apply the doping material to the substrate as a uniform layer, for example by spraying, and then to print the barrier material by means of a printing technique onto the regions of the substrate with low doping, after which the diffusion step is carried out. In this embodiment the barrier material can delay the diffusion of the underlying diffusion material or it can have etching properties, so that the underlying diffusion during the diffusion step is etched out of the substrate. A barrier material which has etching properties is, for example, ZnO.
Alternatively, according to the invention the barrier material is first applied by screen printing, stencil printing, offset printing or tampon printing or using other printing techniques known per se to those regions of the substrate which are to have low doping. The doping material can then be applied as a single layer by spraying, spinning, immersing, vapour deposition or from the gas phase (such as, for example, by means of POCl3 gas in a crystal tube) on top of the substrate and on top of the barrier material. Although this is not to be preferred from the production standpoint, the doping material can also be printed selectively onto the regions of the substrate for high doping, before or after applying the barrier material. The barrier material is, for example, a dielectric material such as Si3N4, SiO2 or TiO2, to which an n-type doping material, such as 5 phosphorus (P), arsenic (As), antimony (Sb) or bismuth (Bi) can have been added, or a p- type doping material such as boron (B), aluminium (Al), gallium (Ga), indium (In) or thallium (Th). This material is printed onto the substrate in paste form and then sintered at temperatures between 200 °C and 1000 °C.
Following the diffusion step the surface resistance in the highly doped regions is, for
10 example, between 10 and 60 ohm square, for a concentration of doping atoms of between
1018 cm"3 and 1021 cm"3, for a diffusion depth beneath the substrate surface of between
0.1 μm and 0.5 μm. The surface resistance of the regions with low doping is between
17 3
40 ohm and 500 ohm square, for a concentration of doping atoms of between 10 cm and 1021 cm"3, for a diffusion depth of between 0.1 μm and 0.5 μm. 15 A few embodiments of the method according to the present invention will be explained in more detail by way of example with reference to the appended diagrammatic drawing. In the drawing:
Fig. 1 shows a diagrammatic representation of a method according to the prior art,
Figs 2a , 2b and 2c show a first embodiment of a method according to the present 20 invention using a uniform layer of doping material,
Figs 3 a, 3 b and 3 c show an alternative embodiment of a method according to the invention with selective application of the doping material,
Figs 4a, 4b and 4c show an embodiment of the method according to the invention where the barrier material has etching properties and >5 Fig. 5 shows a concentration profile of a semiconductor device produced according to the invention.
Fig. 1 shows a p-type substrate consisting of, for example, silicon doped with n-type atoms. A doping material in the form of a paste, such as a phosphorus paste, is applied by means of screen printing to the substrate 1 above those regions of the substrate 1 which are 0 to have high doping. Following a diffusion step at approximately 900 °C in a diffusion furnace there are highly doped regions 3 and regions 4, 4' of low doping, formed by lateral diffusion from the phosphorus paste 2 via the atmosphere in the diffusion furnace, in substrate 1. Fig. 2a shows a first step of the method according to the invention, in which a barrier material 5, 5', 5" is applied by means of a printing technique, such as, for example, screen printing, to the p-type crystalline silicon substrate 1 above those regions of the substrate 1 which are to have low doping. The barrier material 5 - 5" comprises, for example, a dielectric material such as Si3N4, SiO2 or TiO2 in paste form. After imprinting the paste the barrier material 5 - 5" is sintered at a temperature between 200 °C and 1000 °C. The doping material 2 is then applied uniformly over the substrate 1 and over the barrier material 5 - 5", as shown in Fig. 2b. The doping material can be applied in very many different ways, for example in the form of an organic molecule (for example triethyl phosphate) or in the form of phosphoric acid. The doping material 2 can be applied by means of spraying, spinning, immersion, vapour deposition or from a gas phase.
The semiconductor device according to Fig 2b is then placed in a diffusion furnace and subjected to a diffusion step at, for example, approximately 1000 °C. As a result of this the n-type atoms diffuse from the doping material 2 into the substrate 1, so that highly doped regions 6, 6', which are located between regions 7, 7', 7" of low doping, are formed in the substrate 1. The regions 7, 7', 7" of low doping are located beneath the barrier material 5 - 5". Finally, conducting contracts 8, 8', for example consisting of aluminium, are applied, likewise by means of a printing technique, to the doping material 2 on top of the highly doped regions 6, 6'. However, it is also possible to etch away the doping material 2 and the barrier material 5 - 5" after the diffusion step in Fig. 2b and then to apply a passivating layer consisting of, for example, SiO2 or PECVD SiN over the substrate 1.
Fig. 3a shows an embodiment with which the barrier material 5 - 5" is first of all printed on the substrate 1 in the desired pattern of regions of low doping and highly doped regions, after which the n-type doping material is applied between the barrier material 5 - 5".
After carrying out a diffusion step in Fig. 3b, the metal contacts are applied at 8, 8' to the doping material 2 above the highly doped regions 6, 6' by a printing technique.
It is possible to add an etching agent to the barrier material 5 - 5" in the embodiments according to Fig. 2a - Fig. 3c in order to etch away any doping material that has diffused beneath the barrier material.
Fig. 4a shows an embodiment with which the doping material 2 is first applied over the substrate 1, after which the barrier material 5 - 5" is deposited in the desired pattern onto the doping material 2 by imprinting. In this case the barrier material can comprise an etching agent such as, for example, ZnO. During the diffusion step, which is carried out in Fig. 4b, the etching agent from the barrier material will etch away the diffusion regions located beneath this, so that the highly doped regions 6, 6' remain in the substrate in positions where the barrier material 5 - 5" is absent. Metal contacts 8, 8' can then be applied above the highly doped diffusion regions 6, 6', as shown in Fig. 4c.
This method has the advantage that an optical difference which can be used when aligning the metalisation pattern is produced between the positions of the barrier material and neighbouring locations. Furthermore, reduced reflection can be obtained with the construction according to Fig. 4c. It is pointed out that although the method has been described with reference to a p- type substrate and an n-type doping material the method is also suitable for use with n-type substrates with p-type doping material.
Finally, Fig. 5 shows a plot of the concentration against the depth below the substrate surface for a semiconductor device produced in accordance with the present invention. The process conditions for the production of the semiconductor device having the concentration profile according to Fig. 5 were as follows:
The barrier layer was applied from a print paste which was sintered in air at approximately 400 °C. This leads to a layer of approximately 1 μm thick SiO2 of low porosity (> 80% volume of SiO2). It is important that the paste shows few cracks in order to achieve a maximum gain in efficiency. Partial coverage of the wafer with a barrier layer leads to a lower efficiency but not to short-circuiting of the cell, as is the case when a selective emitter is made with the aid of a resist to protect the locations where a highly doped emitter is needed.
After applying the barrier layer, a phosphorus-containing layer was applied by spin coating using a phosphorus source in the liquid phase. Diffusion into the wafer was then carried at 900 °C for 10 minutes, which led to the pattern below the barrier layer as is indicated in Fig. 5.
To make cells, silver lines with a width of approximately 100 μm are then printed within the area previously etched by the barrier layer. The size of this etched area has been chosen to be relatively large to prevent the risk of short-circuiting with the regions of low doping.- This etched area is at least 150 μm wide. It can be seen from Fig. 5 that the concentration of donor atoms in the highly doped regions 6, 6' is appreciably higher and extends over a greater depth than the concentrations of doping material in regions below the barrier material 5 - 5". The low donor concentrations at the surface, as are shown in Fig. 5, are outstandingly suitable for surface passivation. This can lead to a significant rise in efficiency of the order of 5%, relative.

Claims

Claims
1. Method for making a semiconductor device having a pattern of highly doped regions (6, 6') located some distance apart in a semiconductor substrate (1) and regions (7, 7', 7") of low doping located between the highly doped regions (6, 6'), wherein a doping material (2) is applied to the substrate, at least in the location of the highly doped regions, the substrate is subjected to a diffusion step in which atoms diffuse from the doping material into the substrate, and conducting contacts (8, 8') are made above the highly doped regions, . characterised in that before the diffusion step a diffusion barrier material (5, 5', 5") is applied to the substrate at the location of the regions (7, 7', 7") of low doping by imprinting with the barrier material in the pattern of the regions of low doping.
.5
2. Method according to Claim 1, characterised in that the barrier material (5, 5', 5") is first applied to the substrate (1), after which the doping material (2) is applied.
3. Method according to Claim 2, characterised in that the doping material (2) is applied !0 over the barrier material (5, 5', 5") and over regions of the substrate (1) located between the barrier material.
4. Method according to Claim 1 or 2, characterised in that the doping material (2) is applied virtually exclusively to regions located between the barrier material (5, 5', 5").
15
5. Method according to Claims 1 and 4, characterised in that the doping material (2) is first applied to the substrate at the location of the highly doped regions (6, 6'), after which the barrier material (5, 5', 5") is applied to the substrate at least at the location of the regions of low doping.
■0
6. Method according to one of the preceding claims, characterised in that the diffusion barrier material (5, 5', 5") is a dielectric material in paste form that is sintered after being applied to the substrate (1).
7. Method according to Claim 6, characterised in that doping material has been added to the barrier material.
8. Method according to one of the preceding claims, characterised in that the surface resistance of the highly doped regions is between 10 and 60 ohm square and the surface resistance of the regions of low doping is between 40 and 500 ohm square.
9. Method according to Claim 8, characterised in that the concentration of the doping material in the highly doped regions is between 10 18 cm -3 and 1021 cm" 3 , whilst the diffusion depth is between 0.1 μm and 0.5 μm, and in that the concentration of the doping
17 3 21 1 mmaatteeririaall iinn tthhee rreeggiioonnss ooff llooww ddooppiing is between 10 cm" and 10 cm" for a diffusion depth of between 0.1 μm and 5 μm.
10. Method according to one of the preceding claims, characterised in that an etching material is added to the diffusion barrier material (5, 5', 5") to etch away the substrate.
PCT/NL2000/000613 1999-09-02 2000-09-01 Method for the production of a semiconductor device WO2001024279A1 (en)

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WO2007082760A1 (en) * 2006-01-23 2007-07-26 Gp Solar Gmbh Method for fabricating a semiconductor component having regions with different levels of doping
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