WO2001004668A1 - Narrow-band optical interference filter - Google Patents
Narrow-band optical interference filter Download PDFInfo
- Publication number
- WO2001004668A1 WO2001004668A1 PCT/EP2000/006518 EP0006518W WO0104668A1 WO 2001004668 A1 WO2001004668 A1 WO 2001004668A1 EP 0006518 W EP0006518 W EP 0006518W WO 0104668 A1 WO0104668 A1 WO 0104668A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical
- interference
- layers
- filter according
- layer
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 48
- 239000010410 layer Substances 0.000 claims description 156
- 230000005540 biological transmission Effects 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 10
- 125000006850 spacer group Chemical group 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 239000002356 single layer Substances 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 238000013461 design Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910000484 niobium oxide Inorganic materials 0.000 description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
- G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
Definitions
- the invention relates to an interference optical narrowband filter for a wavelength ⁇ 0 with a plurality of dielectric layers according to the
- Preamble of claim 1 and the use of such a filter and a plasma pulse CVD method for producing such narrow-band interference optical filters.
- Narrow band dielectric filters with Fabry-Perot design are made of one
- Interference-optical narrowband filters are produced by alternately applying high and low refractive index layers of precisely defined layer thickness.
- the Fabry-Perot design has a symmetrical one
- the narrow band filter consists of several cavities, e.g. from three cavities.
- Layers are preferably made using optical means during production Methods monitored and controlled.
- One possibility for the targeted control of the layer growth is, for example, an extreme value switch-off, which interrupts the coating process precisely when the transmission or reflection of the layer system reaches an extreme value, that is to say when the layer thickness corresponds to that of a ⁇ / 4 layer or an integral multiple thereof.
- an extreme value switch-off which interrupts the coating process precisely when the transmission or reflection of the layer system reaches an extreme value, that is to say when the layer thickness corresponds to that of a ⁇ / 4 layer or an integral multiple thereof.
- In order to generate a specified filter characteristic using the classic approach ie from a large number of ⁇ / 4 layers with a specified material selection (ie specified refractive indices), it is often necessary to "overdimension" the layer system. This means that very many layers or very thick layers must be used. This is tantamount to an extension of the manufacturing time for the filter and therefore usually low economy.
- the interference filter according to US Pat. No. 4,756,602 was produced with the aid of continuous vapor deposition processes using a laser ellipsometric layer thickness monitoring, in which the exact thickness was determined after the layer was deposited and the subsequent layer was then re-optimized.
- a layer thickness monitoring is extremely complex and can only be used to a limited extent in practice.
- the object of the invention is to provide a very narrow-band Fabry-Perot filter with a predetermined pass characteristic, without having to accept the disadvantages of the prior art.
- a narrow-band interference filter is also possible Small overall thickness is aimed for in order to achieve a high level of economy in production.
- the object is achieved in that, in the case of an interference-optical narrow-band filter for a wavelength ⁇ 0, a number of layers of a multilayer system have an optical layer thickness deviating from ⁇ / 2 or ⁇ / 4.
- Such an optical narrowband filter according to the invention thus comprises alternately arranged dielectric layers, for example consisting of the materials titanium dioxide and silicon dioxide, preferably niobium oxide and silicon dioxide, the optical layer thicknesses of the individual layers being arbitrary fractions or multiples of ⁇ / 4.
- Such a design according to the invention offers the advantage that a transmission characteristic corresponding to predetermined specifications can be achieved with a smaller overall thickness than with designs consisting only of ⁇ / 4 layers.
- Nb 2 0 5 , Ti0 2 , Ta 2 O s , ZrO 2 and HfO 2 are preferably used as materials for the high-index layers.
- the transmission characteristic can be adapted to specified specifications, since the ratio of the refractive indices, the minimal reflection of the mirror layers and the position of the bandpass on the wavelength scale set narrow limits.
- the designs according to the invention overcome this disadvantage. Furthermore, by using layers whose optical layer thickness differs from ⁇ / 4 or multiples thereof, so-called non- ⁇ / 4 layers, it is possible to vary, in particular to minimize, indentations in the pass characteristic of the bandpass filter, so-called "ripples" ,
- the optical layer thickness of the layers deviating from ⁇ / 4 or ⁇ / 2 is selected in such a way that the total layer thickness of the interference-optical narrow-band filter is minimized for a given transmission characteristic.
- the interference-optical narrow-band filter comprises a plurality of stacks with a plurality of alternately high and low refractive index layers.
- Layers is arranged and at least one layer whose optical layer thickness deviates from ⁇ / 4 or ⁇ / 2.
- spacer layers are provided between the stacks, which can comprise one or more ⁇ / 2 layers, or else layers with optical layer thicknesses that deviate from ⁇ / 2.
- a method is also specified which enables such narrow-band filters to produce.
- a plasma pulse CVD (PICVD) process is used for this, the production parameters being selected such that, on average, significantly less than one monolayer of the dielectric layer is deposited on a substrate per microwave pulse. This makes it possible to count a predetermined number of pulses
- the number N of plasma pulses can first be determined in order to achieve a ⁇ / 4 or ⁇ / 2 layer and for producing a layer with optical ones deviating from ⁇ / 4 or ⁇ / 2 Layer thickness, the number of plasma pulses is increased or decreased by n compared to the predetermined number N, so that a somewhat thicker or thinner layer than a ⁇ / 4 layer is produced.
- a layer material used for the production of a ⁇ / 4 layer by a layer material with slightly different optical constants can be used to produce a layer with a layer thickness different from ⁇ / 4, without the edge steepness of the filter is adversely affected, since the switch to the other material can take place during a pulse pause.
- a predetermined layer thickness can then be set very precisely by counting the pulses.
- a change in the optical layer thickness is also possible by changing process parameters such as the substrate temperature or the process gas pressure or the coating rate.
- process parameters such as the substrate temperature or the process gas pressure or the coating rate.
- Substrate temperature or the process gas pressure or the coating rate for example, can achieve refractive index differences of 0.05 and more.
- Exemplary embodiments of Fabry-Perot narrow-band filters are to be described below, which comprise one or more layers with a layer thickness deviating from ⁇ / 4.
- Figure 1 shows a first target transmission curve of a layer system.
- Figure 2 shows the refractive index curve of a system that the first
- the target transmission curve comprises a large number of layers, the optical layers of which
- Figure 3 shows a second target transmission curve for a narrow band
- Figure 4 shows the transmission curve of a layer system with a total
- FIG. 5 shows the refractive index curve of the system according to FIG. 4.
- Figure 6 shows the transmission curve of a layer system based on ⁇ / 4 and ⁇ / 2 layers, which almost the target values acc.
- the system consists of 78 layers with a total thickness of approx. 27 ⁇ m.
- FIG. 7 shows the refractive index curve of the system according to FIG. 6
- FIG. 1 shows a first possible target transmission curve for a filter according to the invention.
- FIG. 2 shows the refractive index curve of a system according to the invention, which almost reproduces the curve of the first target transmission curve and comprises a large number of layers, the optical layer thickness of which deviates from ⁇ / 4 or ⁇ / 2.
- the system consists of a total of 112 layers with the following structure:
- H denotes a layer with a high refractive index n H , L a
- Layer with a low refractive index n L As materials for the high-index layers are preferably used Nb 2 O s , Ti0 2 , Ta 2 0 5 , Zr0 2 and Hf0 2 . Niobium oxide is particularly preferably used for the high-index layer and silicon dioxide for the low-index layer.
- a second target characteristic for a narrow-band interference filter is specified in FIG.
- FIGS. 4 and 5 show interference filters according to the invention which largely meet the required transmission curve according to the second target characteristic, as specified in FIG. 3.
- FIG. 4 shows the actual transmission curve of an interference filter according to the invention.
- the total layer thickness of the system according to FIG. 4 and FIG. 5 is almost 50% lower than the total layer thickness of a system which only comprises ⁇ / 4 and ⁇ / 2 layers.
- the refractive index curve of the system according to the invention for fulfilling the second target characteristic is shown in FIG. 5.
- the system according to FIG. 5 consists of a total of 66 individual layers with the following structure:
- L denotes layers with a low refractive index and H layers with a high refractive index.
- the refractive index was the high refractive index
- the material of the high-index layer preferably comprises Nb 2 0 5) the material of the low-index layer Si0 2 .
- FIG. 5 again shows the refractive index curve versus the layer thickness. The change between high and low refractive layers and the two spacer-like layers can be clearly seen.
- FIG. 6 shows the transmission curve of a so-called three-cavity filter according to the prior art, comprising exclusively ⁇ / 4 and ⁇ / 2 layers and multiples thereof.
- stacks 1, 2, 5 and 6 are constructed identically, stacks 3 and 4 have mirror layers consisting of 3/4 ⁇ layers.
- a stack denotes a multiplicity of ⁇ / 4 layers (or multiples thereof) with alternating high and low refractive index materials.
- a cavity comprises two stacks that pass through
- Spacer layers for example a ⁇ / 2 layer of high or low refractive index material, are separated.
- the coupling layers between the individual cavities can be low-refractive ⁇ / 4 layers, for example.
- the design according to the prior art also shows a good approximation to the predetermined second target filter characteristic, as can be seen from the comparison of FIG. 3 and FIG. 6.
- the individual layers and the two spacer layers are made significantly thicker. This leads to an almost 50% higher total layer thickness in the prior art compared to the designs according to the invention.
- Another advantage of the invention is the high slope and a higher transmission in the pass band.
- the layer systems shown with a changed optical thickness are preferably produced with the aid of the plasma pulse CVD
- the optical layer thickness can be changed by changing the process parameters during the pulse pause, which can be variably adjusted.
- the advantage of using the plasma pulse CVD method is that a very sharp transition can be achieved and it is possible in a simple manner inside the layer system to produce layers with an optical layer thickness deviating from ⁇ / 4. With the current continuous CVD processes, this is not possible without transitions.
- the very narrow-band filters produced with the invention whose edge steepness can be set in a very controlled manner, can be used as
- Edge filter with extreme slope or very flat gain flattening Filters are used. Furthermore, due to their precisely controllable transmission curve, the narrowband filters presented are suitable for multiplexers or demultiplexers in WDM (Wavelength Division Multiplex) or DWDM (Dense Wavelength Division Multiplex) systems in communications technology.
- WDM Widelength Division Multiplex
- DWDM Dense Wavelength Division Multiplex
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Optical Filters (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002379077A CA2379077A1 (en) | 1999-07-12 | 2000-07-10 | Narrow-band optical interference filter |
AU58268/00A AU5826800A (en) | 1999-07-12 | 2000-07-10 | Narrow-band optical interference filter |
EP00944023A EP1194799A1 (en) | 1999-07-12 | 2000-07-10 | Narrow-band optical interference filter |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19932082.9 | 1999-07-12 | ||
DE1999132082 DE19932082A1 (en) | 1999-07-12 | 1999-07-12 | Interference optical narrow band filter |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2001004668A1 true WO2001004668A1 (en) | 2001-01-18 |
Family
ID=7914238
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2000/006518 WO2001004668A1 (en) | 1999-07-12 | 2000-07-10 | Narrow-band optical interference filter |
PCT/EP2000/006519 WO2001004669A1 (en) | 1999-07-12 | 2000-07-10 | Narrow-band optical interference filter |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2000/006519 WO2001004669A1 (en) | 1999-07-12 | 2000-07-10 | Narrow-band optical interference filter |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1194799A1 (en) |
CN (1) | CN1360681A (en) |
AU (2) | AU5826800A (en) |
CA (1) | CA2379077A1 (en) |
DE (1) | DE19932082A1 (en) |
TW (1) | TW452666B (en) |
WO (2) | WO2001004668A1 (en) |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
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DE10143145C1 (en) * | 2001-09-03 | 2002-10-31 | Fraunhofer Ges Forschung | Production of layer system used for optical precision components comprises depositing individual layers on substrate in vacuum deposition chamber using pulsed magnetron sputtering stations at prescribed speed |
US8512796B2 (en) | 2009-05-13 | 2013-08-20 | Si02 Medical Products, Inc. | Vessel inspection apparatus and methods |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
US9545360B2 (en) | 2009-05-13 | 2017-01-17 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
US9554968B2 (en) | 2013-03-11 | 2017-01-31 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging |
US9664626B2 (en) | 2012-11-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Coating inspection method |
US9662450B2 (en) | 2013-03-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
US9863042B2 (en) | 2013-03-15 | 2018-01-09 | Sio2 Medical Products, Inc. | PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
US9903782B2 (en) | 2012-11-16 | 2018-02-27 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
US10189603B2 (en) | 2011-11-11 | 2019-01-29 | Sio2 Medical Products, Inc. | Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus |
US10201660B2 (en) | 2012-11-30 | 2019-02-12 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like |
US11066745B2 (en) | 2014-03-28 | 2021-07-20 | Sio2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
US11077233B2 (en) | 2015-08-18 | 2021-08-03 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
Families Citing this family (4)
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US20080037127A1 (en) * | 2006-03-31 | 2008-02-14 | 3M Innovative Properties Company | Wide angle mirror system |
CN102759768B (en) * | 2012-07-31 | 2014-12-31 | 杭州科汀光学技术有限公司 | Optical filter |
CN106597591B (en) * | 2017-01-25 | 2022-07-26 | 杭州科汀光学技术有限公司 | Quasi-rectangular narrow-band filter with high cut-off and low ripple |
CN111399104B (en) * | 2020-04-26 | 2021-02-09 | 腾景科技股份有限公司 | Double-peak ultra-narrow-band steep optical interference filter and manufacturing method thereof |
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DE3302565A1 (en) * | 1982-01-27 | 1983-08-11 | Kievskoe nauČno-proizvodstvennoe ob"edinenie "Analitpribor", Kiev | Frequency-limiting interference filter |
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WO1995026427A1 (en) * | 1994-03-29 | 1995-10-05 | Schott Glaswerke | Pcvd process and device for coating domed substrates |
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-
1999
- 1999-07-12 DE DE1999132082 patent/DE19932082A1/en not_active Withdrawn
-
2000
- 2000-07-10 CN CN 00810229 patent/CN1360681A/en active Pending
- 2000-07-10 AU AU58268/00A patent/AU5826800A/en not_active Abandoned
- 2000-07-10 EP EP00944023A patent/EP1194799A1/en not_active Withdrawn
- 2000-07-10 WO PCT/EP2000/006518 patent/WO2001004668A1/en not_active Application Discontinuation
- 2000-07-10 AU AU66906/00A patent/AU6690600A/en not_active Abandoned
- 2000-07-10 CA CA002379077A patent/CA2379077A1/en not_active Abandoned
- 2000-07-10 WO PCT/EP2000/006519 patent/WO2001004669A1/en active Application Filing
- 2000-08-17 TW TW89113814A patent/TW452666B/en not_active IP Right Cessation
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Cited By (36)
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DE10143145C1 (en) * | 2001-09-03 | 2002-10-31 | Fraunhofer Ges Forschung | Production of layer system used for optical precision components comprises depositing individual layers on substrate in vacuum deposition chamber using pulsed magnetron sputtering stations at prescribed speed |
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US9545360B2 (en) | 2009-05-13 | 2017-01-17 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
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US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
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Also Published As
Publication number | Publication date |
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AU5826800A (en) | 2001-01-30 |
WO2001004669A1 (en) | 2001-01-18 |
AU6690600A (en) | 2001-01-30 |
EP1194799A1 (en) | 2002-04-10 |
TW452666B (en) | 2001-09-01 |
CN1360681A (en) | 2002-07-24 |
DE19932082A1 (en) | 2001-01-18 |
CA2379077A1 (en) | 2001-01-18 |
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