WO2001001024A1

WO2001001024A1 - Check valve structure and micro-pump using it

Info

Publication number: WO2001001024A1
Application number: PCT/JP2000/004113
Authority: WO
Inventors: Noriyasu Shimizu; Nobuhisa Hagiwara
Original assignee: Namiki Seimitsu Houseki Kabushiki Kaisha
Priority date: 1999-06-23
Filing date: 2000-06-23
Publication date: 2001-01-04

Abstract

A check valve structure which is suitable for the back-flow prevention of a micro-pump suitably used in a small, trace-amount fluid feeder used in a medical instrument and chemical analyzing instrument, and which prevents the back-flow of both gas and liquid; and a retaining structure for the check valve; wherein a valve forming body is provided with a convex portion (11) at the center of a half-split circle on the side opposite to a receiving member, and with an annular close-contact member (13) in close contact at the flat surface thereof with the receiving member and located on the outer periphery of a thin-walled portion (14) having a contact portion in linear contact with the entire periphery of a ridge line of an inlet circumference of a hole (20a, 20b) of the receiving member and extending from the convex portion (11) at the center of the valve forming body toward the circumference, and stopper portions acting as steps for receiving each other are provided at a part of the outer periphery of a cylindrical pushing member for bringing a valve seat into close contact with a valve receiving seat and at a part of the inner wall of a cylindrical hole on a valve case side for receiving thereinto the pushing member so as to keep constant the pushing-in depth of the small-diameter tip of the pushing member into the inner tube hole of the valve case.

Description

MECHANISM Check valve structure and microphone opening using it

The present invention relates to a small-sized microfluid supply device for use in, for example, medical equipment, chemical analysis equipment, and the like. Particularly, the present invention relates to a high-precision delivery device even when liquid Z gas and both fluids are used alternately. The present invention relates to a microport pump structure having a check valve mechanism for controlling the supply of pressure. This is a micro pump with a check valve mechanism that stably controls the supply of the feeder.Even if the check valve part is deteriorated or malfunctions, remove it immediately and repair it regularly. The present invention relates to a valve mechanism capable of easily performing maintenance and its assembly. Background art

Conventionally, there are a number of mechanism principles of a microphone port pump for sending a small amount of liquid, for example, a valve mechanism is a lead valve type nozzleless type, and a driving system using a small motor is disclosed in A small pump having a diaphragm-type mechanism, such as Japanese Patent No. 62-291484, is generally known. This type of micro-mouth pump is used as a microfluid supply device for medical equipment and chemical analysis equipment, and is used for the quantitative injection of chemicals and for transporting fluids such as reaction mixture gas. The development of a small and versatile microphone port pump that can be controlled is underway.

FIG. 7 is an example of a side sectional view of a conventional diaphragm-type micro pump developed by the present applicant. As shown in FIG. 7, a micropump 100 shown in a side cross section drives a small motor 110 such as a coreless motor as a driving unit side and a driving shaft rotation of a small motor 110 as a pump unit side. It has a force mechanism 120 that converts the reciprocating biston motion and a crankshaft 121 that transmits the reciprocating motion to the diaphragm 132. It comprises a pump head 130 having two suction and discharge valve mechanisms (check valves 150) at two locations.

The operating principle of the pump head 130 is as follows. As shown in the enlarged front view of FIG. 8, the pump head section 130 has a disk-shaped diaphragm 132 made of an elastic sheet material such as synthetic rubber that divides a chamber space 133 provided at the lower part of the valve case 131. An intermediate storage portion 137 is formed to temporarily store fluid therein, and a central portion of the diaphragm 132 is provided with a crank shaft 12 1 (FIG. 7) which reciprocates vertically. It is fixed to the tip, elastically deformed and can move with amplitude, and its outer circumference is held by the valve case 131 at the outermost circumference of the chamber 133. .

In addition, the valve structure following the suction hole 133a and the discharge hole 133b penetrating the upper two places of the interior of the chamber 133 has a valve sheet with a different hole shape made of elastic rubber via an O-ring 136. 15 1 and a valve receiving sheet 152 are configured as an on-off valve, and a circle in the valve case 131 is arranged so that the O-ring 136 is located downstream of the suction side and the discharge side of the valve mechanism in the flow direction. It has a structure in which it is stacked and filled in the cylindrical hole portion, and is further pressed and fixed by a pushing member 134.

Here, the pushing member 134 includes a suction passage 135a connecting the suction port 140a of the suction side nozzle 140 (the broken line in FIG. 8) and the suction hole 133a, and a discharge side nozzle 140 (cross section in FIG. 7). A discharge path 135b connecting the discharge port 140b and the discharge hole 133b is partially provided.

That is, the pump head section 130 moves the center plane portion of the diaphragm 132 up and down by the crankshaft 121 to increase or decrease the volume of the intermediate storage section 137, and the pressure in the chamber 133 generated at that time. This is a pump that sends a fluid in one direction by repeating a series of operations from the suction port 140a to the discharge port 140b using the fluctuation.

Here, the structure of the check valve as the on-off valve will be described in detail. As shown in FIGS. 10 and 11, the check valve 150 is a flat plate such as a rubber sheet. A valve sheet 151 made of an elastic elastic sheet, and a valve receiving sheet 152 made of rubber having the same diameter and stacked on an opposing surface on the upstream side in the flow direction of the valve sheet 151 are formed. This valve sheet 151 has a plurality of openings 151a at the concentric peripheral edge, and the valve receiving sheet 152 has a small-diameter hole 152a at the center, and has two sheets. The openings 151a and the holes 152a on both sides of the sheet are arranged so as not to communicate with each other.

That is, in the above configuration of the check valve 150, the operating principle of the two sheet-like valves is as follows. (In order to omit the description, only the suction side in Fig. 8 will be described below.)

First, when the diaphragm 132 is displaced downward, that is, when the volume of the chamber is increased, the inside of the chamber-vessel in a closed state is naturally reduced by the check valve 150 (open / close valve), so that the suction side ( The valve sheet 151 on the (in side) is pushed by the fluid sent from the external suction port 140a through the suction passage 135a, and the valve sheet 151 from the central hole 152a of the valve receiving sheet 152 is formed. When the pushing pressure exceeds the limit of the elastic deformation strength of the valve sheet 151, the valve sheet 151 elastically deforms in an arc shape. That is, the first chamber 133 deflects inward and expands.

At this time, a gap is formed on the facing surface between the valve sheet 151 and the valve receiving sheet 152. Since the hole 152a and the opening 151a are connected through the gap, the fluid flows from the suction port 140a to the suction path 135a. Then, the fluid flows into the intermediate storage portion 137 in the chamber 133 from the suction hole 133a through the check valve 150, and the chamber 133 closed by the diaphragm 132 is filled with fluid.

Next, when the diaphragm 132 is in a stationary state in which it is not displaced, or when the diaphragm 132 is displaced upward, that is, when the pressure on the suction passage 135a side and the intermediate storage part 137 side is equal across the check valve 150, or the intermediate storage part When the pressure on the 137 side increases due to the upward displacement of the diaphragm 132, the valve sheet 151 on the suction side returns to its original elastic deformation and completely closes the center hole 152a of the facing valve receiving sheet 152. Therefore, the structure is such that the fluid in the intermediate storage unit 137 does not flow backward to the suction passage 135a side. By combining this check valve structure, the pump function Is working normally.

By the way, the following three situations are conceivable not only for the above-mentioned diaphragm-type micropump but also for general use of the micropump. First, it is possible to envisage a total of three cases: a case where only a liquid flows and a case where only a gas flows, and a case where both liquid Z gases are alternately switched to flow. In the past, there was a liquid-only microphone pump and a gas-only micropump, but no functionally superior liquid / gas type micropump has been developed, and one special-purpose machine is used temporarily. There has been no alternative but to use the mosquitoes used separately, or alternately use separate liquid-only and gas-only machines by switching their paths.

However, if the gas dedicated machine is also used, the structure of the check valve 150 of the sheet-like elastic rubber (FIGS. 10 and 11) shown in FIGS. In the case where the liquid is temporarily stopped after switching, the gas is switched and the gas is intermittently flowed thereafter, and the liquid is paused for a certain period of time before the liquid dries, the liquid component remaining in the flow path or inside the pump is checked by the check valve. The air between the valve sheet 151 and the valve receiving sheet 152 is naturally dried, and the opposite faces of the flat valve sheet made of elastic rubber may be physically stuck to each other.

If this occurs, an operation failure (failure) occurs in which the on-off valve does not open when restarting, and it may become unusable. Therefore, the pump used in such a situation requires the disassembly and repair of the on-off valve part every time, but for the repair and maintenance, it is impossible to disassemble even a general model. In addition, special tools and specialized skills are required for disassembly repair and assembly, and replacement of a failed pump is also required, which requires a great deal of time and money, failure of the on-off valve part, and maintenance. (Maintenance) was a big problem. Also, the check valve 150 has a structural sealing effect by the surface contact between the valve sheet 151 and the valve receiver 152 sheet, so that the liquid dries on the opposing surfaces of the two valve sheets. However, when the liquid component is crystallized and precipitated, sufficient sealing pressure cannot be obtained as a check valve, and therefore the on-off valve or check valve effect is sufficient. May not be obtained. In such a case, there is a possibility that the fluid may flow backward from the intermediate storage unit 137 during the stop, and may flow out. (B) The responsiveness of the pump 100 may decrease.

Including such problems, it has been virtually impossible to flow both liquid and gas alternately using the same micropump.

Next, in the operation of a micropump using such an on-off valve, usually, the movement of the valve itself is fairly precise. Adjustments are subtly affected. That is, the check valve obtains a structural sealing effect by the surface contact between the valve sheet and the valve receiving sheet. Further, the check valve is sealed by an o-ring and the airtightness in the passage is maintained. Therefore, it is necessary to delicately adjust the squeeze allowance (clamp pressure) of the ring that forms the packing.

However, in the conventional structure shown in FIG. 18, the valve head 200 is mechanically screwed and fixed to the valve case 131 side via the gasket 220 member. As a result, the amount of pushing of the pushing member 134, that is, the allowance for tightening the outer peripheral portion (mainly the ring) of the on-off valve (in short, the clamping pressure applied to the O-ring) is not constant, and the screw tightening torque is subtle. Adjustment is required. Also, even when making adjustments, special jigs and measuring instruments were required, and it was not possible to adjust the squeeze allowance (clamp pressure) to a fixed amount and achieve a suitable arrangement. Including these problems, maintenance of pump on-off valves has not been easy in the past.

The present invention provides a non-return structure that does not cause a malfunction in the on-off valve portion even when both the gas Z liquid flows alternately, has excellent functionality, is easy to maintain, and can obtain a sufficient non-return effect. The purpose is to provide. Also, by using this non-return structure, it is possible to provide both a liquid and a gas satisfactorily and to provide a highly accurate, highly responsive, and trouble-free reliable micropump. Also aim.

In addition, the present invention is based on the harsh conditions of alternating gas / liquid flow. Even in the event of a malfunction of the on-off valve that occurs, it is excellent in the function of disassembly work, easy to clean (maintenance) of the on-off valve, and adjusts the clamping pressure for the o-ring of the opening and closing valve during assembly An object of the present invention is to provide a check valve holding structure that requires no work and that can obtain a sufficient check effect. In addition, by using this check valve holding structure, it is possible to transport both liquid Z gas satisfactorily without trouble even if the pump is disassembled and cleaned each time it is used for maintenance of the pump. Maintenance inspection of the on-off valve part of the pump becomes difficult. Another object of the present invention is to always provide a reliable microphone-free pump that can reduce repair and maintenance costs and is free from failures. Disclosure of the invention

In order to solve the above-mentioned problems, in the present invention,

A receiving member (e.g., flange sheet 20) having a hole (20a, 20b) at its center located at the inlet side of the fluid flow direction, and a receiving member located at the outlet side of the fluid flow direction; A valve molded body (for example, a check valve 10) having an opening (12) through which a fluid passes at a peripheral position on a concentric circle is faced with a combination in which the arrangement of the holes (20a, 20b) and the opening (12) does not overlap. In the check valve structure for preventing the fluid from flowing backward by bringing the valve molded body into close contact with the receiving member,

The valve molded body is provided with a convex portion (chuck portion 11) at the center of the center of the one-sided circle facing the receiving member, and a ridgeline at the entrance of the hole (20a, 20b) of the receiving member. A flat surface is formed on the receiving member that has a contact portion that makes linear contact with the entire circumference and is located on the outer circumference of a thin portion (14) that extends in the circumferential direction from the convex portion (chuck portion 11) at the center of the valve molded body. It also has a ring-shaped contact portion (for example, peripheral portion 13) to be in contact.

In the check valve structure described above, for example, the dome-shaped convex portion (chuck portion 11) -shaped contact portion A shown in FIGS. 1 and 2 passes through the holes (20 a, 20 b) of the receiving member 20. Receives pressure upstream of the flow direction. Therefore, when the fluid is sent with the pressure on the upstream side higher than that on the downstream side, the protrusion (chuck) is required. The portion 11) is pushed toward the downstream side, the contact portion A is separated, and the holes (20 a, 20 b) of the receiving member 20 are opened, so that fluid flows from the upstream side to the downstream side, that is, from the suction direction. The operation flows in the discharge direction, and this operation is sequentially repeated by the vertical movement of the diaphragm of the drive unit.

On the other hand, when the fluid is not flowing, that is, when the diaphragm is in a stopped state and the pressure on the upstream side is equal to or lower than the pressure on the downstream side, the contact portion A is the circumference of the entrance portion of the hole. No backflow of fluid occurs because it is pressed all around the ridgeline.

Here, the dome-shaped convex portion and the receiving member hole are combined to form a check valve mechanism, and are circumferentially in line contact with each other at a contact portion A, and are opposed to each other in other portions. The surfaces are in close contact with each other at the ring-shaped flat portion (for example, the peripheral portion 13) of the receiving member and the outer peripheral portion.

For this reason, the movable portion (chuck portion 11, thin portion 14) of the valve molded body (chuck valve 10) and the receiving member (flange sheet 20) are prevented from contacting each other on the opposing surfaces. . Therefore, even if the operation is temporarily stopped after the liquid and the gas are alternately flowed as described above, the valve molded body side and the receiving member side do not stick to each other due to a problem of liquid remaining, so that restart is immediately performed. Yes, it does not cause malfunction. Therefore, according to the present check valve structure, not only gas but also liquid can flow alternately.

In addition, since the contact portion and the peripheral portion of the hole are substantially in line contact rather than in conventional surface contact, the contact pressure per unit area, that is, the sealing pressure of the check valve, is lower than in the past. And therefore the check valve function is improved and there is no backflow of fluid.

More specifically, the check valve structure may be as follows.

In other words, in the check valve structure, the contact portion is formed upright from the conventional elastic valve sheet body to form a three-dimensional shape, and the central portion (chuck portion 11) has a dome-shaped, conical-shaped convex shape. A plug-shaped member that is arc-shaped or partially tapered toward the distal end side and is in line contact with the hole edge portion on the receiving member side at an angle on the same peripheral surface, and that fits into the hole of the receiving member. (For example, of the check part 11 in Fig. 3 It also includes a conical shape and a cork stopper shape in Fig. 4.

Here, if further added, the shape of the check portion (11) is, for example, a hemisphere or a cone when the hole has a circular cross-section in the radial direction, and a parabolic shape in the side cross-section. When these tops are cut horizontally, all of the same shape as the hole are included in the circular shape. However, the shape is not limited to only these shapes, and the cross-sectional shape of the hole (for example, an ellipse) is included. It can be arbitrarily deformed together. As described above, when a part or the entirety of the contact portion is formed to be narrower from the downstream side toward the upstream side, the contact portion and the inner wall of the hole have a line contact at an arbitrary position. Can be.

Further, in the following check valve structure, the opposite surface of the contact portion having the shape of the convex portion (checker portion 11), that is, the rear surface opposite to the surface of the checker portion in contact with the hole of the receiving member has a fifth surface. As shown in the figure, a valve body (check valve 10) that is hollowed out in a substantially hemispherical shape is combined.

In this case, the double-sided dome-shaped check portion 11 as the movable portion becomes lighter and its elastic property is improved, so that the contact portion is in close contact with the hole and is easy to separate from the hole, and therefore, a small pressure change. Responsiveness is good, and a check valve structure as a smaller and more precise micropump is possible.

Further, other check valve structures have a raised portion (21) which is formed by raising the entire periphery of one side of the hole of the receiving member (for example, the flange sheet 20), so that the end portion of the hole is formed. The contact portion of the valve molded body (for example, the check valve 10) can be brought into linear contact. In this case, even if the shape of the contact portion of the opposing valve member is a flat plate shape as in the related art, the contact portion comes into line contact with the peripheral edge portion (section) of the hole by the raised portion. Needless to say, the shape of the contact portion may be the structure described in claim 2 or claim 3.

Next, a valve receiving sheet, which is located at the inlet side of the fluid flow direction and has a hole through which the fluid flows, and an opening located at the outlet side of the fluid flow direction and through which the fluid passes are concentrically arranged. And a valve sheet having a peripheral position of These openings face each other in a non-overlapping combination, and these are placed inside a cylindrical hole of a valve case having a suction / discharge hole for transmitting the fluid at the bottom, and one at the outlet side in the flow direction. o In a check valve structure constituted by dropping through a ring, and further pushing a cylindrical pushing member of the same diameter into the valve case,

A part of an outer peripheral surface of a cylindrical pushing member for bringing the valve sheet into close contact with the valve receiving sheet, and a part of an inner wall of a cylindrical hole on a valve case side into which the pushing member is inserted, are attached to each other. A part of the stopper that serves as a receiving step is provided so that the pushing depth of the tip of the small diameter portion of the pushing member into the inside of the cylinder of the valve case is always constant.

In the check valve holding structure described above, for example, by providing a step portion (stopper portion D) shown in FIGS. 12 and 13, the tip side of the bushing member 134 with respect to the inner bottom position E of the valve case. The pressing depth of the bolt is always constant regardless of the screw tightening torque of the bolt 202 for fixing the valve head 200. For this reason, if the thickness of the valve sheet 151 and the valve receiving sheet 152 is always constant, the ring 136 receives the clamping pressure from the pushing member 134 side with a certain amount of squeezing allowance, and forms a packing while suitably elastically deforming. By maintaining the airtightness inside the fluid path, the suitable operation of the combined on-off valve (check valve) can be incorporated with good reproducibility.

Also, even if the fluid material is clogged due to unfavorable conditions and does not flow, the pump head 200 and the gasket 220 can be relatively easily removed by loosening the bolt 202 and disassembling and removing it. Simplifies disassembly and assembly of the internal on-off valve part, improving maintenance work efficiency and making it easy to repair the on-off valve part without special technical skills. Can be.

Here, the valve sheet 151, the valve receiving sheet 152, and the O-ring 136 are laminated in three stages in the suction and discharge directions as shown in FIG. When assembling the parts, care must be taken to ensure that the suction and discharge sides are aligned. More specifically, the check valve structure may have the following structure. As the stopper portion D, at least a portion of the valve case cylindrical hole at least at a bottom portion has a small diameter. And a second step formed by increasing the diameter of the upper receiving side of the pushing member inserted into the valve case hole. Have. In addition, the steps may be provided on the entire circumference or may be provided partially. Another effective means to function as a step portion is that the combined step portion is formed into a tapered surface with an inclination at the height position of the step portion, and the tapered surface is brought into contact with the tapered surface. It is also conceivable to use a method that works as a single step on the collar.

The present invention is a micro pump having a check valve structure of the above-described check mechanism. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 (A) is a schematic top view of a check valve 10 used for a check valve 1 according to an embodiment of the present invention, and FIG. 1 (B) is a schematic side sectional view of the check valve 10.

FIG. 2 is a schematic side sectional view of the check valve 1.

FIG. 3 is a schematic side sectional view of the check valve 1 for explaining a modification of the check valve 10.

FIG. 4 is a schematic side sectional view of the check valve 1 for explaining another modification of the check valve 10.

FIG. 5 is a schematic (A) top view and a schematic (B) side sectional view illustrating another modification of the check valve 10.

FIG. 6 is a schematic (A) top view and a schematic (B) side sectional view illustrating the configuration of the flange sheet 20 of the present invention.

FIG. 7 is a schematic diagram illustrating the configuration of a micropump 100 as a conventional example.

Fig. 8 shows the pump head 130, a component of the micropump 100. It is a schematic diagram explaining the composition of.

FIG. 9 is a schematic diagram illustrating the configuration of a pump head section 130 of a micropump incorporating the check valve 1 of the present invention.

FIG. 10 is a schematic (A) top view and a schematic (B) side sectional view of a valve sheet 151 constituting a check valve 150 of a conventional example.

FIG. 11 is a schematic (A) top view and a schematic (B) side sectional view of a valve receiving sheet 152 constituting a check valve 150 of a conventional example.

FIG. 12 is a schematic side sectional view showing a check valve holding structure according to an embodiment of the present invention.

FIG. 13 is a schematic front sectional view showing a check valve holding structure according to an embodiment of the present invention.

FIG. 14 is a schematic partial cross-sectional view showing the entire configuration of a pump using a check valve holding structure according to an embodiment of the present invention.

FIG. 15 is a schematic side sectional view for explaining the configuration of the stopper portion of the valve case of the present invention.

FIG. 16 is a front external view and a schematic side sectional view illustrating the configuration of the stopper portion of the pushing member of the present invention.

Figure 17 is a _c Fig. 18 is a side sectional schematic view illustrating the height when merging the valve case and the pushing member that is a component of the check valve holding structure of the present invention, the holding conventional check valve It is a front section schematic diagram showing a structure. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the holding structure of the elastic valve and the check valve of the check valve 1 using the check valve structure according to the present invention will be described in detail with reference to FIG. 1 and FIG. As shown in the schematic side sectional view of FIG. 2, the check valve 1 has a check valve 10 on a flange sheet 20 (elastic rubber receiving member) serving as a valve receiving material.

(Molded article made of elastic rubber) are stacked so that they face each other as shown in the figure, and are pressed down and adhered to each other on the circumferential surface of the peripheral portion 13. Here, the pressed adhesion on the circumferential surface is as shown in Fig. 2 With respect to the position indicated by the broken line, the contact portion with the edge of the central hole (the protruding portion 21) is set to be held in a state where it has elasticity in the direction of the facing surface.

Therefore, the check valve 10 closes the holes (20a, 20b) of the flange sheet 20 so as to be pressed down without receiving pressure from the fluid.

The check valve 10 is made of an elastic material such as rubber (in the case of the embodiment, a Viton rubber having excellent chemical resistance) is used as in the case of the conventional valve sheet 151, and is a schematic top view of FIG. 1 (A). As shown in the schematic side cross-sectional view of FIG. 1 (B), a substantially hemispherical plug-shaped portion (checker portion 11) is provided at the center of the disk shape, and the plug-shaped portion (checker portion 11) is further provided. ) Has three openings 12 at 120 ° distribution to allow fluid to pass around.

In addition, on the opposite surface side of the check valve 10, a thin portion 14 continuing from the check portion 11 is recessed with a step at the close contact portion side of the peripheral portion 13, and is designed to have a gap with the flange sheet 20. . In other words, when the chuck boss 10 is opposed to the flange sheet 20 and overlapped so as to fit into the check portion 11 force S hole (20a, 20b), the check portion 11 comes into line contact with the peripheral portion of the hole (20a, 20b). Will be.

As shown in the schematic cross-sectional views of FIGS. 12 and 13 and the partial cross-sectional view of the entire pump in FIG. 14, the check valve 150 is provided at the position of the pump section 130 of the microphone port pump mechanism section 100, for example. The valve seat 151 (elastic sheet) and the valve receiving sheet 152 that constitute the O-ring 136 and the check valve 150 are formed in the cylindrical holes provided in the metal valve case 131. Are inserted from the downstream side in the flow direction so as to be arranged in the above order, and a metal pushing member 134 is inserted and inserted into the hole.

Here, a gasket 220 and a metal valve head 200 are superimposed above the pushing member 134, as in the conventional example, and the valve head 200 is further bolted by a bolt 202. It is fixed to the case 131 side.

As shown in the schematic cross-sectional view of Fig. 15, the two cylindrical deep holes of the valve case 131 have a large diameter H on the opening side and a small diameter H on the circular side. K is connected, and the bottom of the deep hole passes through the chamber 133. Twist holes 133a and 133b are formed.

Further, as shown in FIG. 16 (external view and cross-sectional view), the two pushing members 134 combined with the push member 134 form an inlet passage 135a or a discharge passage 135b communicating with the suction / discharge port on the cylindrical side surface. The outer shape of the valve case 131 is a shape that fits into the large and small diameter steps of the inner diameter of the valve case 131, and the step formed by the small diameter section S and the large diameter section R on the cylindrical outer side. Section (stopper section D).

The non-return valve structure is used, for example, in small-scale microfluid supply devices used in medical equipment, chemical analysis equipment, etc., and in particular, high-precision micropumps that can alternately use liquid Z gas and both fluids. There is. More specifically, the microphone head pump 100 as shown in FIG. 7 is used instead of the conventional check valve structure of the pump head 130.

The shape of the check section 11 is not limited to a dome-shaped hemisphere, and may be, for example, as shown in the schematic cross-sectional views of FIGS. 3 and 4. As shown in the schematic diagram, the back layer 11a may be hollow with a shape similar to the surface layer, and all of them have the same effect.

Next, the valve receiving member (flange sheet) of the other side of the check valve structure will be described with reference to FIG.

The structure of the check valve 1 is substantially the same as that of the conventional check valve 150, except that the valve receiving sheet 152 is replaced by a new structure shown in FIG. 6 (A). The flange sheet 20 (receiving member) shown in the schematic side sectional view of Fig. (B) is newly adopted.

This flange sheet 20 is made of an elastic rubber like the check valve 10, for example, has holes (20a, 20b) for fluid to pass through the center of the disk, and has a conventional flat plate-like valve sheet. The receiving surface against which 1 abuts has a semicircular cross section at the periphery of the hole (20a, 20b), and a new protuberance 21 is provided at the top, which is higher than the periphery 23. A concave portion 22 formed by providing a step inside the circumference except for the portion 23 is newly added.

Fig. 9 shows the actual check valve 1 of the present invention incorporated in a micropump. Shown in

In the figure, the basic operating principle of the check valve structure is the same as that of the conventional one described above, and the description is omitted. However, although the check valve has a partially complicated shape, it has the same size. The valve case 131 is laminated and inserted into the cylindrical hole of the valve case.

Here, in the present embodiment, the novel check valve 10 as described above is used. However, even if a conventional flat plate valve sheet 151 of a conventional type is used instead, the effect can be sufficiently obtained. I have. That is, the conventional valve sheet 151 and the flange sheet 20 do not come into contact with each other except for the raised portion 21 and the peripheral portion 23, and the contact portion between the raised portion 21 and the valve sheet 151 still has a line contact. As a result, there is no close contact between the surfaces at the movable part.

As described above, in the present embodiment, the new check valve 10 and the new flange seat 20 are combined for the first time, but either one of the structures may be used in combination with the conventional valve seat 151 or the valve receiving seat 152. It is possible, and the above combinations can be freely selected according to cost and purpose of use.

Force to be added Here, the valve molded body (for example, the check valve 10) and the valve receiving member (for example, the flange sheet 20) of the present invention are made of an elastic rubber (for example, Viton rubber or the like) having excellent chemical resistance. Some or all parts may be made of metal.

For example, the check portion 11 is a small-diameter steel ball used for ball bearing and the like, and a thin metal plate having a panel-like property that covers the sphere from one side, and the thin portion 14 and the peripheral portion 13 of the above-described structure are press-formed integrally. It is also conceivable that the flanged sheet 20 or the flange sheet 20 may be made of a metal flange formed by treating the surfaces of the raised portion 21 and the peripheral portion 13 into a mirror-finished state.

This check valve made of metal is made of a hard mixed material of a few micron, regardless of liquid or fluid. It is also possible to send fluids containing powder, diamond powder, etc.).

Next, FIG. 17 shows a case where only the check valve holding part of the present invention is incorporated. In the figure, the basic dimensional setting management of the check valve holding structure is as follows.

The stopper portion D is a first step portion formed by reducing at least a portion of the valve case 13 1 at least a portion on the bottom side inside the cylindrical hole, and is pushed into the cylindrical hole. A second stepped portion formed by increasing the diameter of the upper receiving side of the pushing member 134 is provided.

With the configuration of the stopper portion D described above, the check valve holding structure accurately controls the height W of the portion W of each of the cylindrical holes of the valve case 131 and the dimensional control. In practice, the value of the dimension W of the check valve insertion portion is determined by the dimension T of the valve case 131 shown in FIG. 15 and the pushing member 134 shown in FIG. It is effectively controlled by the difference from the dimension V.

As a result, structural adjustments in the assembly work such as the height dimension management of the pushing member using the bolt tightening torque as in the past, and confirmation with a dedicated jig or measuring machine are no longer necessary with the above structure. Become. Similarly, it is easy to disassemble and repair due to failures and the like, and the crushing allowance (clamp pressure) for the O-ring laminated with the on-off valve is inevitably constant even for non-technical experts. Therefore, the inside airtightness is noticeable without fine adjustment, and the holding structure is excellent in maintenance.

As described above, according to the check valve structure of the present invention, the opening / closing valve operates in a line contact state between the contact portion of the check valve and the peripheral portion of the hole at the center of the flange sheet. The member and the flange sheet member do not adhere via the remaining liquid. Therefore, a check valve structure that can flow not only gas but also liquid in one device can be obtained.

Further, according to the check valve structure of the present invention, two parts constituting the on-off valve are provided. The contact pressure between the contact part of the product and the peripheral edge of the hole, that is, the check pressure, is that the entire circumference is in a line contact state in a ring shape, so the pressure per unit area is higher than before and the check valve As a result, the backflow blocking of the fluid is better. As a result, a high-precision control can be performed, and a compact and versatile micropump can be obtained.

In other words, the check valve structure according to the present invention does not cause a malfunction in the on-off valve portion even when both gas and liquid are alternately flowed, has excellent responsiveness in function, and is easy to maintain and is sufficient. To provide a highly reliable micropump that can achieve both a non-return effect and can alternately transport both liquid and gaseous Z and can control supply with high precision. be able to.

Furthermore, according to the check valve structure of the present invention, even in the problem of malfunction of the on-off valve portion caused by the severe condition of alternately flowing gas / liquid, the function of the disassembling operation is excellent, and Provides a check valve holding structure that facilitates cleaning (maintenance) of the on-off valve, does not require clamping pressure adjustment for the o-ring of the on-off valve during assembly, and has a sufficient check effect. can do.

In addition, the use of this check valve holding structure eliminates the hassle of disassembling and cleaning the pump every time it is used for maintenance. Maintenance inspection of the on-off valve part becomes difficult. In addition, repair and maintenance costs can be reduced, and a reliable microphone-free pump without any failure can always be provided. Industrial applicability

As described above, the check valve structure and the microphone pump using the same according to the present invention are useful for a small-sized microfluid supply device for use in medical equipment, chemical analysis equipment, and the like. Even when both fluids are used alternately, it is suitable for a microphone port pump structure that has a check valve mechanism that controls supply of feeder with high accuracy.

Claims

The scope of the claims

1. A receiving member which is located at the inlet side of the fluid flow direction and has a hole through which the fluid flows, and an opening which is located at the outlet side of the fluid flow direction and which allows the fluid to pass therethrough are located at concentric peripheral positions. A check valve that prevents fluid from flowing back by bringing the valve molded body into contact with the valve molded body in a combination in which the arrangement of the hole and the opening does not overlap with each other, and bringing the valve molded body into close contact with the receiving member. In the structure,

The valve molded body is provided with a convex portion (chuck portion 11) at the center of the center of the one-sided circle on the opposite side to the receiving member, and the periphery of the entrance of the hole (20 a, 20 b) of the receiving member. A flat surface is formed on the receiving member which has a contact portion which makes line contact all around the ridge line and which is located on the outer periphery of a thin portion (14) extending in the circumferential direction from a convex portion (chuck portion 11) at the center of the valve molded body. A check valve structure comprising: a ring-shaped contact portion (for example, a peripheral portion 13) with which the contact portion comes into close contact.

2. The contact part is erected from the disk-shaped elastic valve body, and the central part (chuck part 11) is convex, dome-shaped, conical, arc-shaped, or partially tapered toward the distal end. 2. The check member according to claim 1, wherein the stopper member is formed into a plug-like member which is line-contacted on the same peripheral surface at an angle to an edge portion of the hole on the receiving member side and fits into the hole of the receiving member. Valve structure.

3. The convex portion (chuck portion 11) at the center of the valve molded body is characterized in that the back layer is hollowed out in a substantially hemispherical concave shape except for the surface layer side in contact with the hole of the receiving member. 3. The check valve structure according to claim 2, wherein:

4. By providing a protruding portion that protrudes the entire periphery of the hole of the receiving member, the end of the hole and the protruding portion (chuck portion 11) of the valve molded body, or a flat plate-shaped elastic valve seat The check valve structure according to any one of claims 1 to 3, wherein a contact portion with the contact is in linear contact.

5. A valve receiving sheet positioned at the inlet side of the fluid flow direction and having a hole through which the fluid passes, and a concentric peripheral edge of the opening located at the outlet side of the fluid flow direction and passing the fluid The valve sheet at the position is faced with a combination in which the arrangement of the hole and the opening does not overlap, and these are placed inside the cylindrical hole of the valve case having a suction / discharge hole for transmitting the fluid at the bottom. However, in a check valve structure constituted by dropping through a single ring on each outlet side in the flow direction and further pushing a cylindrical pushing member having the same diameter into the valve case,

A part of the outer peripheral surface of the cylindrical pushing member for bringing the valve sheet into close contact with the valve receiving sheet, and a part of the inner wall of the cylindrical inner hole of the valve case side into which the pushing member is inserted, are mutually received. A check valve holding structure, characterized in that a part of a flange that forms a step is provided so that the depth of the tip of the small diameter portion of the pushing member is always constant with respect to the inside of the cylinder of the valve case. .

6. The stopper portion is a first step formed by reducing the diameter of at least a part of the bottom side inside the valve case cylindrical hole, and the pushing is pushed into the cylindrical hole. 6. The check valve holding structure according to claim 5, further comprising a second step portion formed by making the upper receiving side of the member larger in diameter.

7. A micropump comprising the check valve according to any one of claims 1 to 6.