WO2000070297A2 - Humidity chamber for scanning atomic force microscope - Google Patents
Humidity chamber for scanning atomic force microscope Download PDFInfo
- Publication number
- WO2000070297A2 WO2000070297A2 PCT/US2000/013658 US0013658W WO0070297A2 WO 2000070297 A2 WO2000070297 A2 WO 2000070297A2 US 0013658 W US0013658 W US 0013658W WO 0070297 A2 WO0070297 A2 WO 0070297A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- chamber
- humidity chamber
- afm
- humidity
- sample
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
- G01Q30/12—Fluid environment
- G01Q30/14—Liquid environment
Definitions
- the present invention relates to environmental control for atomic force microscopes, and in particular to controlling the humidity level of the environment local to the probe and sample during scanning with a scanning stylus atomic force microscope.
- the Atomic Force Microscope allows high-resolution imaging at the subnanometer level, and in a liquid environment at the atomic level.
- the basic objective of the operation of the AFM is to measure the forces (at the atomic level) between a sharp probing tip (which is attached to a cantilever spring) and a sample surface. Images are taken by scanning the sample relative to the probing tip and measuring the deflection of the cantilever as a function of lateral position.
- the AFM probe is scanned across the sample surface to generate an image. As the scan progresses the AFM measures the small upward and downward movements that are needed to maintain a constant force of contact. Because the AFM senses the surface by "touch", it allows imaging of nonconducting materials such biological and molecules, plastics, ceramics, and insulating materials like glass or diamond, with nanometer resolution.
- the AFM is widely recognized as an important tool for evaluating materials and materials-enabled engineering systems.
- the ability to image materials in a variety of environments, including under ambient conditions and in liquids enables high resolution imaging of biomaterials and polymers without causing significant deterioration of the materials or introducing artifacts related to the extensive sample preparation used in other high resolution microscopes.
- surface contamination will occur due to the presence of moisture in the form of humidity that will adsorb onto the sample surface.
- the amount of adsorbed moisture which will depend on the ambient relative humidity, can affect AFM imaging and force measurements.
- the existing commercially available humidity chamber is limited to a particular type of scanned sample AFMs, where the AFM probe and detection system are fixed and the sample is moved by the scanners.
- the currently available humidity chamber is limited to scanned sample AFMs and cannot be used with scanned stylus AFMs, where the sample is fixed and the probe is rastered across the sample by the scanners.
- the head of the scanned stylus AFM has a much more complicated geometric design than the scanned sample AFM, thus rendering the design of a humidity chamber a much more difficult task.
- the present invention overcomes these problems and provides a humidity chamber which can be used in conjunction with a scanned stylus AFM, and similar microscopes.
- FAM atomic force microscope
- a locking clip is inserted between the chamber and the bottom portion of the sample platform to secure the sample platform and base-plate.
- the spring-loaded base allows the z-directional motors of the AFM to be used to position the sample just below the AFM scanning tip (probe) prior to scanning, while at the same time providing a snug fit between the chamber and the AFM scanning head.
- the humidity chamber comprises a chamber of specified geometry within which the AFM scanning head assembly is placed, and an integrated sample platform and spring-loaded base-plate which allow samples to be loaded and unloaded without removal of the chamber from the AFM scanning head assembly.
- the humidity chamber comprises a chamber of specified geometry which allows the use of an optical system to locate and focus on a probe and/or sample surface.
- the humidity chamber includes adjacent entry and exit ports that allow humid air to be delivered into the chamber, fill the chamber, and exit the chamber.
- the sample platform extends up from the base-plate and is inserted into the chamber, and includes a magnetic sample port comprising a magnet securely attached to the base-plate.
- a locking pin secures the sample platform and base-plate once the sample platform is positioned inside the chamber.
- the humidity chamber includes a port configured to allow for the use of an optical system.
- the humidity chamber includes a large side-entry port configured to allow access to an optical microscope lens.
- one or more of the AFM scanner, tip assembly (probe), optical lever detection system, sample, and side-mounted optical microscope objective lens (camera) are fully enclosed.
- a magnetic sample port is configured to provide a snug fit between the chamber and the AFM scanning head assembly.
- Figures 1 and 2 provide prospective views of the humidity chamber of the present invention.
- Figure 2 the integrated sample platform and base are shown removed from the chamber.
- Figures 3-6 provide block views of the top, sides, and front of the humidity chamber of the present invention.
- Figures 7-11 provide engineering drawings of an embodiment of the humidity chamber of the present invention configured to accommodate a scanned-stylus AFM having an optical lever such as that described in U.S. Patents Nos. 6,032,518; 5,714,682; 5,560,244; and 5,463,897.
- Figures 8-10 provide engineering drawings of the integrated sample platform and base (the spring positions and magnet are not shown).
- Figure 11 provides an engineering drawing of a securing plate used to mount a rubber strip used as a seal around the optical microscope lens.
- the present invention comprises a humidity chamber which can be used to provide a humidity-free environment, or alternatively a humidity intense environment in which a specified humidity level can be maintained.
- the humidity chamber of the present invention is suitable for use with an atomic force microscope (AFM), or other commercially available microscopes.
- a preferred embodiment of the humidity chamber of the present invention employs an intricate geometrical design which accommodates a scanned-stylus AFM having an optical lever such as that described in U.S. Patents Nos. 6,032,518; 5,714,682; 5,560,244; and 5,463,897.
- the geometrical design of the humidity chamber of the present invention allows the AFM scanner, tip assembly (probe), optical lever detection system, sample, and if necessary, a side-mounted optical microscope objective lens (camera), to be fully enclosed without degrading significantly the ability to operate the AFM or the related systems.
- the invention generally comprises a means for using, and for accessing, an optical system to locate and focus on one of more of a probe and a sample surface, the means preferably including, but not limited to, a chamber within which the AFM scanning head assembly is placed, an integrated sample platform, and a spring-loaded base-plate that allows samples to be loaded and unloaded without removal of the chamber from the AFM scanning head assembly.
- a locking pin can be inserted between the chamber and the bottom portion of the sample platform to secure the sample platform and base-plate.
- the invention includes means for using an optical system to locate and focus on one or more of a probe and sample surface, the means preferably including, but not limited to, a spring-loaded base which allows the z- directional motors of the AFM to be used to position the sample just below the probe prior to scanning while at the same time providing a snug fit between the chamber and the AFM scanning head.
- An embodiment of the present invention is also suitable for use with a means for controlling relative humidity, such as a humidity-generating device, (for instance, the humidity generator manufactured by VTI Corporation), which allows precise control of relative humidity.
- a humidity-generating device for instance, the humidity generator manufactured by VTI Corporation
- An embodiment of the present invention is also suitable for use with a means for sensing relative humidity, such as a commercially available humidity-sensing device, (for instance, the Thin-Film Capacitance Sensor manufactured by Vaisala).
- a means for sensing relative humidity such as a commercially available humidity-sensing device, (for instance, the Thin-Film Capacitance Sensor manufactured by Vaisala).
- An embodiment of the present invention is shown in Figures 1 through 11.
- Figures 1 and 2 present perspective views of the chamber of the present invention.
- Figures 3-6 presents two-dimensional side, top, bottom, front, and back views of the humidity chamber.
- the chamber of the present invention is preferably constructed of Teflon.
- the top of the chamber 1 is open to allow insertion of the AFM scanning head assembly.
- the opening (port) 2 is uniquely geometrically configured so as to envelope the head and provide a snug and essentially air tight fit while allowing normal operation of the AFM.
- a snug and essentially air tight fit is achieved through the use of a precisely-sized opening 2 relative to the AFM scanning head assembly, and/or a rubber membrane or gasket (not shown).
- a side-entry port 4 at the left side of the chamber allows for insertion of the AFM optical microscope objective lens (camera).
- a rubber membrane or gasket 5 is provided around the camera port 4 in order to facilitate a snug and essentially air tight fit here also, while allowing normal operation of the AFM.
- the rubber membrane or gasket 5 can be held in place by use of a membrane retainer plate 6 and screws 3, as shown in Figure 1, or any other suitable means.
- the chamber of the present invention can be used with any type of AFM, or microscope generally, so long as ports 2 and 4 are adapted to conform to the particular AFM or microscope to provide a snug and essentially air-tight fit while allowing normal operation of the AFM or microscope.
- the overall dimensions of the humidity chamber are not critical. However, because the humidity chamber "sits" on the stage of the AFM or microscope, the overall dimensions of the humidity chamber are limited by the constraints of the particular AFM or microscope selected.
- the top of the chamber includes an optional lip 22 which matches a lip on the head of the scanned- stylus AFM described in U.S. Patents Nos. 6,032,518; 5,714,682; 5,560,244; and 5,463,897.
- the right side 7 of the humidity chamber of the present invention is adapted to allow the use of a commercially available humidity sensor (not shown), such as the Thin-Film Capacitance Sensor manufactured by Vaisala, and a commercially available humidity generator (not shown), such as the humidity generator manufactured by VTI Corporation.
- the chamber is adapted to include means for receiving and retaining signals from the humidity sensor, the means preferably being, but not limited to, a two-wire cable 8 which can take humidity readings from the chamber and transmit the readings to the humidity generator.
- a cable (“a humidity sensor”) is generally included as part of commercially available humidity sensing devices.
- the chamber is adapted to receive the humidity sensor 8 securely.
- a secure attachment of the humidity sensor 8 to the chamber is facilitated by the use of a mounting mechanism constructed of a block 11 of Teflon, or other suitable material, which is attached to the side of the chamber by screws 12, and which includes a threaded hole (not shown) adapted to allow the threaded end 21 of the humidity sensor 8 to be screwed in place.
- the use of such a mounting mechanism is preferable due to the thinness of the walls of the humidity chamber.
- Other suitable mounting means would be within the scope of the present invention and might be more appropriate depending on the configuration of a particular humidity sensor.
- the right side of the chamber is constructed to allow for attachment of a conditioned air input 9 tube and a conditioned air output 10 tube from a commercially available humidity generator (tubes are not shown). Attachment can be facilitated by any appropriate means, such as the use of appropriately sized hose-barbs 9 and 10 as shown in Figures 1-6. Other appropriate attachment mechanisms would include screws, or the like.
- the present invention includes an integrated sample platform and a spring loaded base-plate.
- the bottom 13 of the chamber includes a sample porthole 15 and one or more compression springs 14 mounted to the bottom of the chamber, one on each side of the sample porthole 15.
- the sample porthole 15 is appropriately shaped to facilitate insertion of a separate sample platform 16.
- the sample platform 16 contains a sample stage 20 which extends up from a base-plate 17 and which can be inserted into the chamber via the sample porthole 15.
- the base-plate 17 of the sample platform 16 is of an appropriate size so as to be able to "sit" on the stage (not shown) of the selected AFM or microscope.
- the sample stage 20 is adaptable for particular types of samples (not shown).
- the sample can be set on the sample stage 20 after the sample platform 16 is inserted in the sample porthole 15 and the locking clip 19 is in place over the sample porthole 15, thereby allowing for samples to be loaded and unloaded without removal of the entire chamber.
- the AFM, or microscope, head assembly is not in the chamber at the time of the insertion of the sample.
- the AFM optical microscope objective lens, or camera is also not in place in the side-port 4 at the time of the insertion of the sample.
- the entire chamber-head assembly unit can be raised up by raising the head assembly in the normal fashion, and a the sample stage 20 dropped out for insertion of a new sample.
- the upper portion of the sides of the sample porthole 15 include cut-outs (or grooves) 18 configured to facilitate insertion of a separate retaining clip 19 (a "locking clip” 19) which, when in place, locks the sample platform 16 into the sample porthole 15.
- a separate retaining clip 19 a "locking clip” 19
- the locking clip 19 is inserted over the sample porthole 15, such that the notched portions 30 of the locking clip 19 are inserted in the cut-outs 18 of the sample port-hole 16 thereby holding the sample platform 16 in place.
- the sample stage retaining clip 19 can be made of any suitable material, such as stainless steel.
- the base-plate 17 of the sample platform 16 can optionally include a magnet (not shown) attached to the base-plate 17 to assist in securing the sample platform 16 to the sample porthole 15 prior to insertion of the locking clip 19.
- the upper 0.1875 in. of the sample platform has a larger diameter than the lower 0.375 in. (see Figure 8). This feature allows an alternative u-shaped locking pin (not shown in the figures), to be inserted into edge notches in the porthole (see Figure 7), thereby keeping the sample platform from falling back out of the chamber.
- the compression springs 14 are slightly compressed, and the base-plate 17 of the sample platform 16 is a distance apart from the base 31 of the chamber.
- the compression springs 14 act to keep the sample platform 16 from moving further up into the chamber. However, additional force can be applied to the base-plate 17 of the sample platform 16 to move the sample platform further up into the chamber. Alternatively, the sample platform 16 can move up from the point where the sample stage retaining clip 19 holds the sample platform 16 in the chamber, at which time the base-plate 17 of the sample platform 16 will come into contact with the bottom edge 32 of the sample porthole 15 and the compression springs 14 will be almost fully compressed. During normal operation of the AFM, the AFM head assembly is lowered in very small increments towards the sample.
- a means for positioning a sample prior to scanning is provided in which the normal operation of the z- directional motor of the AFM can be used to position the sample just below the AFM scanning probe tip prior to scanning.
- chamber walls 25 which are thicker than those shown in the preferred embodiment is within the scope of the present invention and in fact may be preferable in that thicker walls will better insulate the chamber, which may be desirable.
- insulation can be achieved by the use of heat pads, or a heating element, applied to the chamber (not shown). For instance, in situation where a heated environment is desired, warm air with a controlled relative humidity percentage (if desired), can be blown into the chamber through the conditioned air input 9 port, and in order to avoid condensation, the chamber can be maintained at the same temperature by the application of heating pads, or heating elements, to the outside of the chamber.
- FIGS 7-11 provide the precise dimensions of an embodiment of the humidity chamber configured to accommodate a scanned-stylus AFM such as that manufactured by Digital Instruments, or as described in U.S. Patents Nos. 6,032,518; 5,714,682; 5,560,244; and 5,463,897.
- a hole in the front of the chamber is shown which accommodates the particular optical system used on a current commercially available scanned stylus AFM similar to that described in the aforementioned U.S. Patents.
- This particular optical system contains a camera with an objective lens that is positioned at an angle approximately 15° from the horizontal plane. Note that the hole in the chamber has a larger diameter than the camera lens.
- a 2 mm thick piece of silicon rubber (not shown) is mounted on the front of the chamber with the securing plate shown in Figure 11.
- the securing plate has a hole with dimensions larger than the camera lens, but the diameter of the hole in the silicon rubber is slightly smaller than the camera lens, so that the rubber fits snugly around the camera lens to prevent air from escaping.
- the securing plate and silicon rubber sheet are fastened to the front of the chamber under the overhang (see Figure 7) using screws in the positions indicated in Figure 11.
- Two holes are tapped through the back wall of the chamber, as shown in Figure 7. These holes are entry and exit ports for humid air to flow into and out of the chamber.
- humid air presumably with a controlled relative humidity percentage, can come in through the entry port and fill up the chamber volume as the ambient air evacuates through the exit port. This process will continue until an equilibrium humidity level is reached in the chamber, at which time, the humid air will continue to flow steadily through the entry port, into the chamber, and out the exit port.
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU51411/00A AU5141100A (en) | 1999-05-19 | 2000-05-18 | Humidity chamber for scanning stylus atomic force microscope with cantilever tracking |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13488599P | 1999-05-19 | 1999-05-19 | |
US60/134,885 | 1999-05-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2000070297A2 true WO2000070297A2 (en) | 2000-11-23 |
WO2000070297A3 WO2000070297A3 (en) | 2002-10-03 |
Family
ID=22465458
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2000/013658 WO2000070297A2 (en) | 1999-05-19 | 2000-05-18 | Humidity chamber for scanning atomic force microscope |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU5141100A (en) |
WO (1) | WO2000070297A2 (en) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4892830A (en) * | 1987-04-02 | 1990-01-09 | Baylor College Of Medicine | Environmentally controlled in vitro incubator |
US5393980A (en) * | 1993-05-11 | 1995-02-28 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Quality monitor and monitoring technique employing optically stimulated electron emmission |
JPH0963525A (en) * | 1995-08-22 | 1997-03-07 | Nikon Corp | Scanning electron microscope |
US5675154A (en) * | 1995-02-10 | 1997-10-07 | Molecular Imaging Corporation | Scanning probe microscope |
US5767514A (en) * | 1994-06-23 | 1998-06-16 | Lloyd; Grongar Wynn | Scanning probe and an approach mechanism therefor |
JPH10241620A (en) * | 1997-02-27 | 1998-09-11 | Nikon Corp | Environment control type scanning-type electronic microscope |
WO1999062097A1 (en) * | 1998-05-22 | 1999-12-02 | Euro-Celtique, S.A. | Dissolution stage for an environmental scanning electron microscope |
US6051825A (en) * | 1998-06-19 | 2000-04-18 | Molecular Imaging Corporation | Conducting scanning probe microscope with environmental control |
-
2000
- 2000-05-18 WO PCT/US2000/013658 patent/WO2000070297A2/en active Application Filing
- 2000-05-18 AU AU51411/00A patent/AU5141100A/en not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4892830A (en) * | 1987-04-02 | 1990-01-09 | Baylor College Of Medicine | Environmentally controlled in vitro incubator |
US5393980A (en) * | 1993-05-11 | 1995-02-28 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Quality monitor and monitoring technique employing optically stimulated electron emmission |
US5767514A (en) * | 1994-06-23 | 1998-06-16 | Lloyd; Grongar Wynn | Scanning probe and an approach mechanism therefor |
US5675154A (en) * | 1995-02-10 | 1997-10-07 | Molecular Imaging Corporation | Scanning probe microscope |
JPH0963525A (en) * | 1995-08-22 | 1997-03-07 | Nikon Corp | Scanning electron microscope |
JPH10241620A (en) * | 1997-02-27 | 1998-09-11 | Nikon Corp | Environment control type scanning-type electronic microscope |
WO1999062097A1 (en) * | 1998-05-22 | 1999-12-02 | Euro-Celtique, S.A. | Dissolution stage for an environmental scanning electron microscope |
US6051825A (en) * | 1998-06-19 | 2000-04-18 | Molecular Imaging Corporation | Conducting scanning probe microscope with environmental control |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 07, 31 July 1997 (1997-07-31) & JP 09 063525 A (NIKON CORP), 7 March 1997 (1997-03-07) * |
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 14, 31 December 1998 (1998-12-31) & JP 10 241620 A (NIKON CORP), 11 September 1998 (1998-09-11) * |
Also Published As
Publication number | Publication date |
---|---|
AU5141100A (en) | 2000-12-05 |
WO2000070297A3 (en) | 2002-10-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1102304A2 (en) | Particle-optical apparatus including a low-temperature specimen holder | |
US5410910A (en) | Cryogenic atomic force microscope | |
US6490913B1 (en) | Humidity chamber for scanning stylus atomic force microscope with cantilever tracking | |
US20080163702A1 (en) | Device for Receiving a Test Sample | |
CN106461515A (en) | Miniature serial sectioning microtome for block-face imaging | |
WO1994025888A1 (en) | Optically guided macroscopic-scan-range/nanometer resolution probing system | |
JP2011508388A (en) | Microscope specimen mount | |
Marinello et al. | Thermal drift study on different commercial scanning probe microscopes during the initial warming-up phase | |
US6051825A (en) | Conducting scanning probe microscope with environmental control | |
US11908655B2 (en) | Cryotransfer holder and workstation | |
KR19990087941A (en) | Tribometer | |
US7253408B2 (en) | Environmental cell for a scanning probe microscope | |
US10416190B2 (en) | Modular atomic force microscope with environmental controls | |
WO2000070297A2 (en) | Humidity chamber for scanning atomic force microscope | |
Baselt et al. | Scanned‐cantilever atomic force microscope | |
JP4364817B2 (en) | Surface information measuring apparatus and surface information measuring method | |
Radenović et al. | A low-temperature ultrahigh vacuum atomic force microscope for biological applications | |
Binggeli et al. | Atomic-scale tribometer for friction studies in a controlled atmosphere | |
KR20110069552A (en) | Apparatus for inspecting sample | |
JP3108860B2 (en) | Scanning probe microscope | |
Oulevey et al. | Simple low-drift heating stage for scanning probe microscopes | |
JPH0821845A (en) | Sample measuring probe device | |
Thibado et al. | Scanning tunneling microscope combined with scanning electron microscope for the study of grain boundaries | |
US3535913A (en) | Differential thermal analysis apparatus | |
US8782811B2 (en) | Cleaning station for atomic force microscope |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
AK | Designated states |
Kind code of ref document: A3 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A3 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG |
|
122 | Ep: pct application non-entry in european phase | ||
NENP | Non-entry into the national phase |
Ref country code: JP |