WO2000062025A1 - Spectrometre - Google Patents

Spectrometre Download PDF

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Publication number
WO2000062025A1
WO2000062025A1 PCT/DK2000/000173 DK0000173W WO0062025A1 WO 2000062025 A1 WO2000062025 A1 WO 2000062025A1 DK 0000173 W DK0000173 W DK 0000173W WO 0062025 A1 WO0062025 A1 WO 0062025A1
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WO
WIPO (PCT)
Prior art keywords
spectrum
sample
spectrometer
medium
data
Prior art date
Application number
PCT/DK2000/000173
Other languages
English (en)
Inventor
Carsten Ridder
Original Assignee
Foss Electric A/S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Foss Electric A/S filed Critical Foss Electric A/S
Priority to AU38031/00A priority Critical patent/AU3803100A/en
Publication of WO2000062025A1 publication Critical patent/WO2000062025A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan

Definitions

  • the invention relates to a spectrometer and to the determination of properties of samples from their spectra. In its broadest aspects it may be applied for any kind of determinations by spectral analysis. It is however primarily intended for apparatus used for the determination of the contents of fat, protein, lactose, urea, etc in milk.
  • Prior art A dual beam spectrometer is known from US 5,652,654 showing a beam splitter and a chopper for sample and reference beams. All beams are detected by one single detector.
  • a multichannel system for monitoring a plurality of samples is known from US 5,002,392.
  • the use of optical fibres in spectrometers is known e.g. from US 5,450,194.
  • US 5,020,909 discloses an "In-line" spectral reference method for spectrometers, comprising (a) scanning with a single-beam spectrometer (b) rotating a wheel in synchronization and in an optical path with the single-beam spectrometer, the wheel having open segments alternating with segments comprising reference material, (c) producing alternate spectral scans of spectrometer and sample, and of spectrometer and sample and the reference material, (d) comparing said spectral scans in order to extract the spectrum of the reference material, and (e) using said extracted spectrum for real-time, dynamic spectral compensation to result in absolute correct sample spectrum.
  • the purpose of the present invention to make a simple spectrometer which inherently is wavelength standardised, i.e. the wavelength or wave number in a spectrum recorded by the new instrument may always be precisely derived from the recordings.
  • the spectral range may comprise NIR, MID-IR, Visual and/or UV light.
  • the present invention concerns a spectrometer for the analysis of an unknown object, comprising means for spectral scanning, i.e. providing a monochromatic beam scanning a specified waveband, means for directing the beam in at least two directions, wherein the directing means separates the monochromatic beam into at least two separate beams (19 and 23), a first beam (19) being arranged to be transmitted and/or reflected by the unknown object (20), and a second beam (23) being arranged to be transmitted and/or reflected by a reference medium (24), and the spectrometer is characterised by means for substantially simultaneously recording the spectral patterns representing the spectra of the unknown object (20) and the reference medium (24), wherein the reference medium shows a characteristic spectrum having remarkable maxima and/or minima at known fixed frequencies (or equivalent wave numbers or wavelengths) which are inherently determined by its properties, such as chemical, physical and/or mechanical properties, the simultaneously recordings of sample and reference spectra being performed during each single scan, means for correlating the substantially simultaneously recorded spectral patterns, in order to
  • the recording means comprises detectors means (22, 26, 40), for substantially simultaneously detecting the at least two transmitted and/or reflected beams (19, 23), data storage means (60), and data processing means (50), the detector means (22, 26, 40) being connected to the data storage means (60) for storing spectral patterns, said data storage means storing the substantially simultaneously recorded spectral patterns of the unknown object as well as of the reference medium, and wherein the stored data are processed in the data processing means (50)
  • this spectrometer does not need expensive mechanical guidance in order to present a linear characteristic, such as a smoothly varying wavelength versus time or versus angular position. And it does not need any regular adjustments.
  • recorded spectral patterns means any collection of information such as data representing an almost or substantially continuous monotone list of values representing a spectrum, not necessarily a linear spectrum, most likely a very non-linear spectrum, i.e. a varying number of measurements per time unit and/or per wavelength or wave number unit.
  • the means for providing a monochromatic beam scanning a specified optic range may be any optical means able to diffract or refract the light, such as a grating, a holographic grating, or a prism.
  • the reference medium is preferably a polystyrene film.
  • the spectrum of Polystyrene has a number of characteristic peaks and minima in the infrared range.
  • Other possible media are a Mylar film and a fluid such as a monostyren in a cuvette.
  • an etalon such as a Fabry Perot etalon may be useful. Such an etalon will provide a number of equally spaced peaks on a wave number-axis.
  • the spectrometer according to the invention is connected to calculation means arranged to locate and/or relate any recorded sample measurement to a specific point or defined section of the wave number-axis.
  • the unknown object may be a flow cuvette comprising a fluid passage, e.g. a MID-IR cuvette for analysis of dairy products such as milk, the measurement being performed either during a continued flow, or in periods in which the flow is stopped.
  • the stopped flow is preferred in the case of dairy products.
  • Figure 1 shows a schematic diagram of a simple spectrometer according to the invention.
  • Figure 2 shows an explanatory arrangement of data buffers for the spectrometer in Figure 1 , and three scans.
  • Figure 3 shows a schematic diagram of a further embodiment of a spectrometer according to the invention.
  • Figure 4 shows a explanatory arrangement of data buffers for the spectrometer in Figure 3.
  • Figure 5 illustrates the movement of a grating.
  • Figure 6 a spectrum of polystyrene.
  • Figure 7 a schematic spectrum of an Fabri Perot etalon.
  • Figure 8 a section of a spectrum of an unknown sample.
  • Figure 9 shows a four branched embodiment of a spectrometer according to the invention.
  • Figure 1 shows as an example a schematic diagram of a first embodiment of a spectrometer according to the invention.
  • the schematic spectrometer of Figure 1 comprises a light source 12, a slit 16, a rotary grating 14, a second slit 16, beam dividing and/or directing means 18 (e.g. a beam splitter or a beam chopper, or split optic fibres / a bunch of optic fibres split in at least two cores) providing at least two beams 19, 23, a sample compartment, cuvette, flow cell or holder 20 and a first detector 22, a reference object, e.g. a polystyrene film 24, and a second detector 26.
  • beam dividing and/or directing means 18 e.g. a beam splitter or a beam chopper, or split optic fibres / a bunch of optic fibres split in at least two cores
  • beam dividing and/or directing means 18 e.g. a beam splitter or a beam chopper, or split optic
  • the light source 12 may be any kind of light source providing a desired spectral range, i.e. a range being useful for the intended analysis.
  • the rotary grating may be replaced by any other scanning means, e.g. diffracting or refracting means, e.g. a prism.
  • the beam dividing and directing means may be a (number of) semi-reflecting mirror(s) or a beam chopper alternatively directing the beam into two, three or four different directions (chopping very fast), or a bunch of optic fibres having a common input and two, three or four separate output.
  • a beam divider the majority of the power,( i.e. intensity) of the light is directed towards the unknown sample. Only minor fractions are used for the reference purpose.
  • the sample cuvette 20 is arranged to receive a fluid sample between windows which are transparent to the selected waveband.
  • the reference object 24 is a material having a spectrum including easy recognisable peaks or valleys in the selected waveband, e.g. a polystyrene film.
  • the optional reference object 28 shown in Figure 4 is an etalon or empty cuvette having two parallel windows providing a plurality of resonance peaks and/or valleys useful for determining the wavelength-axis for a large range.
  • the detectors are connected to electronic driver circuits, converters and/or interface circuits 40, as well as electronic registration means, e.g. data buffers (60) and data processing equipment, such as a computer 50 (which may be of conventional art) arranged to store and process data representing the intensity of the light beams transmitted through the sample and the reference object(s), respectively.
  • electronic driver circuits e.g., converters and/or interface circuits 40
  • electronic registration means e.g. data buffers (60) and data processing equipment, such as a computer 50 (which may be of conventional art) arranged to store and process data representing the intensity of the light beams transmitted through the sample and the reference object(s), respectively.
  • a computer 50 which may be of conventional art
  • the data are stored in data buffers as shown schematically in Figure 2 and 4.
  • Figure 2 specifically shows 3 scans of the same sample and reference medium.
  • the three scans differ in that the same wavelength does not occur at the same location in the three scans. This is due to the use of very simple scanning means, causing an uncertainty of the actually provided frequency or wavelength.
  • a presently preferred embodiment of the new spectrometer is operated in the following way:
  • the light source 12 emits light in a specified waveband.
  • the light hits the rotary grating 14 and the slit 16.
  • the beam on the right side of slit 16 is a monochromatic light beam 17 which is split into two (or at least two) or preferable three beams by the beam splitter/divider 18 .
  • the two beams 19, 23 having exactly/(or almost in case of a beam chopper) the same wavelength hit the sample 20 and the reference object 24, respectively.
  • the light from the grating 14 enters a bunch of optical fibres 118.
  • the bunch is divided into three smaller fibre bunches or three single fibres, carrying three beams 119, 121 , 123 directed to hit the sample 20, and two reference objects 24, 28, respectively.
  • the detectors 22, 26, 30 and adjacent electronic registration equipment (not shown in Figure 3) measure the intensity of the light beams transmitted through the sample and the reference object(s), respectively.
  • the measurements are converted into digital numbers which are stored in data buffers. This is explained in further details below.
  • a plurality of intensities are recorded as a plurality of numbers stored in a plurality of locations in a data buffer, cf. Figure 2 and 4 in which each box represents a location, containing a number representing the intensity of light reaching the detector.
  • the wavelength of this light is so far unknown (the known apparatus often use a co- ordination between the angle of the moving grating and the wavelength, but this is either expensive or poor).
  • At least two scans are recorded simultaneously (or almost simultaneously in the case of a beam chopper), preferably using at least two detectors (22, 26).
  • the beam splitter 18 provides at least two continuous or chopped beams 19, 23, one beam passing through the sample, the other(s) through the reference medium (media).
  • the recorded spectra are stored in data buffers as indicated in Figure 2 and 4.
  • One of the reference media must be a known medium having easy recognisable peaks at well- defined wave numbers, preferably polystyrene.
  • Polystyrene is a good medium because the spectrum shows several peaks which are easy to identify as specific wave numbers.
  • Figure 6 shows a spectrum of polystyrene.
  • Figure 2 shows schematically data buffers storing data including peak values measured in 3 scans.
  • D1 indicates the data buffer storing the sample spectrum.
  • D2 indicates the data buffer storing the polystyrene spectrum.
  • Four distinct peaks of known wave numbers in the polystyrene spectrum are indicated by a hatching of the related location in the data buffer and are marked by v*-, v 2 , v 3 and v 4 . As shown in Figure 2 they do not occur at the same locations in the three scans. Due to the distinct values in the reference scan it is however possible to locate the peaks in every scan. Each peak corresponds to a specific wave number. It is known that the first peak is located at a wave number v-,.
  • the corresponding number "X representing the intensity of the signal detected by detector 1 can be interpreted as a measurement of either the absorption (or absorbance in), transmittance through, or reflectance by the sample at the wave number v, - dependend on the measurement arrangement.
  • the wave numbers v 2 , v 3 , v 4 are identified in the same way.
  • FIG. 7 shows schematically a spectrum of an etalon.
  • An empty cuvette having substantially parallel windows may be used as well.
  • D3 shows schematically the locations in the data buffer assigned to Detector 3 detecting the spectrum of an etalon.
  • the schematic diagram is intended to indicate that the data buffer D3 includes a plurality of locations (shown as hatched) containing registrations of spectral peaks or valleys providing a possibility to obtain an exact knowledge of the corresponding wave numbers when combined with the peaks and/or valleys of the polystyrene spectrum.
  • the knowledge of the two reference spectres allows for allocating a great number of (or even all) the boxes/locations in the data buffer representing the recorded sample spectrum to a specific substantially true wave number.
  • a necessary condition for using this method is that the number of recorded data in each scan is big.
  • the computer recognises a number of peaks belonging to the polystyrene spectrum, e.g. v ⁇ v 2 , v 3 , and v 4 .
  • v ⁇ v 2 e.g. v ⁇ v 2 , v 3 , and v 4 .
  • One of the repetitive peaks in D3 is substantially coincident with v-*.
  • Another peak in D3 is substantially coincident with v 3 .
  • the mutual distance is 7 ⁇ v.
  • ⁇ v (v 3 - v ⁇ / 7. Accordingly the wave numbers of all of the hatched sections in D3 may be determined as e.g. . v.- + n* ⁇ v, where n is an integer.
  • the chopping frequency When using chopping of the beam the chopping frequency must be much bigger than the scan frequency. It is essentially to have a great number of data for each scan, and essentially that these data are divided into at least two, (preferably three), almost equally big amounts representing sample data, reference data of polystyrene, and preferably (optionally) reference data for Fabry Perot element, respectively.
  • a fourth branch has been added to the embodiment of Figure 3.
  • the fourth branch includes a zero sample 32, (such as Zero cuvette containing a zero fluid), a detector D4 and electronic signal processing means, but no data buffer for evaluation of wave number.
  • the information is applied for the calculation of the data which are stored in the data buffers D1 , D2, ...Dn.
  • the light beam preferably emerged from a e.g. vertical slit, the upper and lower sections being deflected towards reference media and/or a zero medium, and the centre section proceeding towards the unknown sample.
  • Figure 5 illustrates that the movement of the grating can be fairly random. In the present invention there is no need for exact control of this movement.
  • the wave number of the light will or may vary, generally in a non-linear way. As it appears from Figures 2 and 4 an exact knowledge of specific wave numbers are established by use of a suitable reference medium according to the present invention.
  • the scanning means may include a variable bandpass filter.
  • the beam splitting is provided by chopping the direction of the beam, e.g. by a toggling mirror.
  • the chopping frequency is high compared to the scanning frequency.
  • the monocromatic beam is collected in a bunch of optic fibres which is split into e.g. four separate fibre bunches.
  • the source may comprise a single light source covering the desired waveband or a plurality of light sources each of the light sources covering .a specific portion of the desired waveband.
  • the scanning means may comprise an Acoustic Opto Tunable Filter (AOTF).
  • AOTF Acoustic Opto Tunable Filter
  • the light beam is preferably chopped by a rotary wing or a tilting/toggling mirror.
  • the beam chopping is preferred in order to provide for adequate detection of the light beams.
  • the chopping e.g. by a rotary wing
  • the chopping may be applied in advantageous manner to identify a co-ordination in time between the plurality of (or the at least two) storage means.
  • any differences in time delay in the means for recording the spectra may be compensated or taken into consideration when performing the analysis of the recorded values and the associated calculations leading to determinations of specified contents.
  • the detection means may be pyro-electric detectors such as LiTa0 3 .
  • For visual light Si detectors may be applied.
  • the preferred detectors are made of PbS or PbSe.
  • the spectrometer preferably includes means for thermostating the sample cuvette.
  • spectral information is applied to determine specific properties of the sample such as the content of fat in a milk sample.
  • Specific calibration software are applied for executing such a determination.
  • standardised equipment is meant that the spectrometric instrument measuring the new unknown sample is standardised in such a way that it provides measuring results which are identical to the results which would be obtained using the spectrometric instrument originally used when elaborating the calibrations.
  • the standard calibration provided for the determination of e.g. fat will be based on measurements corresponding to a specific set of wave numbers or frequencies.
  • the measurement results recorded for the unknown sample may be shifted by interpolations to values corresponding to the "standardised" wave numbers or frequencies, which were used for the standard calibration.
  • a standardisation of the frequency/wave number axis may imply an interpolation of all recorded sample values to be shifted to predefined "standardised” wave numbers or frequencies- corresponding to the supplied calibrations, which allow for an accurate determination of the content of a specific component such as fat, protein, lactose etc. in milk.
  • the calibration constants can be transformed to comply with the actual instrument (i.e. the actual ⁇ v of the etalon)
  • the measurements are standardised to a plurality of predetermined desired standardised wave number points.
  • Such standardisation may be accomplished by applying a plurality of identified measurement points below a desired standardised wave number point, as well as a plurality of identified measurement points above the desired standardised wave number point for calculating, by interpolation, e.g. cubic interpolation, the corresponding value (absorption or reflection) at the desired standardised wave number point.
  • Figure 8 illustrates such interpolation. For the sake of clarity only a small section of a spectrum is shown. The actually measured points are indicated by small circles "o" and the interpolated points at the desired "standardised” wave numbers are marked by small squares, " ⁇ ". All relevant portions of the spectrum (i.e. all portions to be applied for the purpose of the spectral analysis) should be handled in the same way, in order to determine the absorbances at a number of specified standardised wave numbers.
  • the standard calibration can be applied for determining the contents of the desired components.
  • a spectrometer which may be characterised as a post-determined wave number spectrometer i.e. a simple spectrometer, in which the wave numbers are determined after the scan.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un spectromètre qui comprend un dispositif destiné à fournir un faisceau monochromatique balayant une gamme d'ondes spécifiée, et un dipositif destiné à séparer le faisceau monochromatique en au moins un premier et un second faisceau (19, 23). Le premier faisceau (19) est conçu pour être transmis et/ou réfléchi par l'échantillon inconnu (20), et le second faisceau (23) est conçu pour être transmis et/ou réfléchi par un milieu de référence (24). Le spectromètre est caractérisé en ce qu'il dispose de moyens pour enregistrer simultanément les motifs spectraux représentant les spectres de l'échantillon inconnu (20) et du milieu de référence (24). Le milieu de référence doit comporter un spectre caractéristique doté de maxima et/ou de minima remarquables à des fréquences fixes connues. Les enregistrements simultanés des spectres d'échantillon et de référence doivent s'effectuer au cours de chaque balayage, et sont corrélés de façon à déterminer les nombres d'ondes dans le spectre de l'échantillon inconnu à partir du spectre du milieu de référence.
PCT/DK2000/000173 1999-04-14 2000-04-11 Spectrometre WO2000062025A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU38031/00A AU3803100A (en) 1999-04-14 2000-04-11 A spectrometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DKPA199900492 1999-04-14
DK199900492A DK199900492A (da) 1999-04-14 1999-04-14 Spektrometer

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WO2000062025A1 true WO2000062025A1 (fr) 2000-10-19

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2266630A1 (fr) * 2003-02-27 2010-12-29 Baxter International Inc. Dispositif de calibration dans une méthode pour l'inactivation certifiable de pathogènes dans un fluide biologique par irradiation
US7993580B2 (en) 2004-08-24 2011-08-09 Baxter International Inc. Methods for the inactivation of microorganisms in biological fluids, flow through reactors and methods of controlling the light sum dose to effectively inactivate microorganisms in batch reactors
US20140080232A1 (en) * 2006-10-31 2014-03-20 Applied Materials, Inc. Peak-based endpointing for chemical mechanical polishing
US9886026B2 (en) 2009-11-03 2018-02-06 Applied Materials, Inc. Endpoint method using peak location of spectra contour plots versus time
WO2021126077A1 (fr) * 2019-12-19 2021-06-24 Ams Sensors Singapore Pte. Ltd. Étalonnage de longueur d'onde de détecteur

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1069920A (en) * 1962-12-27 1967-05-24 Warner Lambert Pharmaceutical Automated spectrophotometric devices
US4696570A (en) * 1985-04-23 1987-09-29 Centre National De La Recherche Scientifique (C.N.R.S.) Spectrophotometer with statistically balanced light for very high resolution
US5020909A (en) * 1990-03-02 1991-06-04 Landa Issac J "In-line" spectral reference method for spectrometers
US5450194A (en) * 1993-04-06 1995-09-12 Cogema Optical measuring device, particularly using spectrophotometry

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1069920A (en) * 1962-12-27 1967-05-24 Warner Lambert Pharmaceutical Automated spectrophotometric devices
US4696570A (en) * 1985-04-23 1987-09-29 Centre National De La Recherche Scientifique (C.N.R.S.) Spectrophotometer with statistically balanced light for very high resolution
US5020909A (en) * 1990-03-02 1991-06-04 Landa Issac J "In-line" spectral reference method for spectrometers
US5450194A (en) * 1993-04-06 1995-09-12 Cogema Optical measuring device, particularly using spectrophotometry

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2266630A1 (fr) * 2003-02-27 2010-12-29 Baxter International Inc. Dispositif de calibration dans une méthode pour l'inactivation certifiable de pathogènes dans un fluide biologique par irradiation
AU2009201269B2 (en) * 2003-02-27 2012-02-02 Takeda Pharmaceutical Company Limited Method for the Validatable Inactivation of Pathogens in Biological Fluid by Irradiation
US8986607B2 (en) 2003-02-27 2015-03-24 Baxter International Inc. Method for the validatable inactivation of pathogens in a biological fluid by irradiation
US7993580B2 (en) 2004-08-24 2011-08-09 Baxter International Inc. Methods for the inactivation of microorganisms in biological fluids, flow through reactors and methods of controlling the light sum dose to effectively inactivate microorganisms in batch reactors
US8377375B2 (en) 2004-08-24 2013-02-19 Baxter International Inc. Methods for the inactivation of microorganisms in biological fluids, flow through reactors and methods of controlling the light sum dose to effectively inactivate microorganisms in batch reactors
US20140080232A1 (en) * 2006-10-31 2014-03-20 Applied Materials, Inc. Peak-based endpointing for chemical mechanical polishing
US9564377B2 (en) * 2006-10-31 2017-02-07 Applied Materials, Inc. Peak-based endpointing for chemical mechanical polishing
US9799578B2 (en) 2006-10-31 2017-10-24 Applied Materials, Inc. Peak-based endpointing for chemical mechanical polishing
US9886026B2 (en) 2009-11-03 2018-02-06 Applied Materials, Inc. Endpoint method using peak location of spectra contour plots versus time
US10948900B2 (en) 2009-11-03 2021-03-16 Applied Materials, Inc. Display of spectra contour plots versus time for semiconductor processing system control
WO2021126077A1 (fr) * 2019-12-19 2021-06-24 Ams Sensors Singapore Pte. Ltd. Étalonnage de longueur d'onde de détecteur

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DK199900492A (da) 2000-10-15
AU3803100A (en) 2000-11-14

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