WO2000057089A1 - Joint hermetique - Google Patents

Joint hermetique Download PDF

Info

Publication number
WO2000057089A1
WO2000057089A1 PCT/US2000/007692 US0007692W WO0057089A1 WO 2000057089 A1 WO2000057089 A1 WO 2000057089A1 US 0007692 W US0007692 W US 0007692W WO 0057089 A1 WO0057089 A1 WO 0057089A1
Authority
WO
WIPO (PCT)
Prior art keywords
seal
flanges
band
maintain
metallic annular
Prior art date
Application number
PCT/US2000/007692
Other languages
English (en)
Inventor
Dominick G. More
Stephen S. Stone
Original Assignee
The Advanced Products Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Advanced Products Company filed Critical The Advanced Products Company
Priority to AU40221/00A priority Critical patent/AU4022100A/en
Priority to EP00919558A priority patent/EP1179150A1/fr
Publication of WO2000057089A1 publication Critical patent/WO2000057089A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
    • F16J15/0887—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing the sealing effect being obtained by elastic deformation of the packing
    • F16J15/0893—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing the sealing effect being obtained by elastic deformation of the packing the packing having a hollow profile

Definitions

  • This invention relates to seals, and more particularly to metallic vacuum seals.
  • Vacuum seals are commonly held under compression between two opposed flanges of the elements being sealed to each other. Vacuum seals may be used in a variety of industrial applications including semiconductor fabrication and processing.
  • One basic vacuum seal is formed substantially as a large flat washer of a soft, malleable, metal such as copper.
  • An example of this seal is sold by Varian Vacuum Products Lexington of Lexington, Massachusetts, USA under the trademark CONFLAT.
  • Such a seal may be used with flanges having an annular machined knife edge. When the seal is compressed between the flanges, the knife edges embed into the seal to provide the sealing.
  • the flanges must be hard and strong enough to withstand the necessary compression force. This type of seal has little tolerance for relative motion of the flanges.
  • c-seal Another class of metallic vacuum seals is the so-called c-seal.
  • This is an annular seal of generally c-shaped cross-section which can compress between the flanges to be sealed.
  • An advanced version of the c-seal is sold by EG&G Pressure Science, Inc. of Beltsville, Maryland, USA under the trademark ALPHA.
  • the ALPHA seal utilizes a relatively stiff core member plated with relatively malleable silver to provide improved sealing with the flanges.
  • a somewhat similar seal is disclosed in U.S. Pat. No. 4,261,584.
  • the DELTA seal has two metallic jackets surrounding a tightly wound helical spring which provides the seal with longitudinal elasticity.
  • the inner jacket, or lining may be formed of stainless steel or a superalloy.
  • the outer jacket is made of a more ductile material such as aluminum and has a pair of machined delta-sectioned knife edges for engaging the respective flanges. When the seal is compressed between the flanges, the delta edges are crushed to seal against the flanges.
  • the invention is directed to an annular metallic vacuum seal having a nested inner and outer c-sectioned members.
  • the inner member provides longitudinal compression strength and elasticity and the outer member has a pair of oppositely-directed ridges for sealing with a pair of flanges.
  • One of the advantages of the invention is that the seal is relatively easy to clean, particularly for those surfaces on the low pressure side of the seal. The presence of crevices or other hard to clean areas on the vacuum side may be minimized.
  • the longitudinal elastic compliance provided by the inner member and the longitudinal plastic compliance provided by the outer member may combine to provide an excellent seal between mating flanges at relatively low compressive forces which reduces the need to make the flanges out of ultra high strength material and of robust dimensions while also reducing the number of bolts needed to maintain compression between the flanges.
  • Preferred leakage rates are less than 8x10 "13 cm 3 /s-mm under standard conditions utilizing a helium mass spectrometer to monitor leakage.
  • FIG. 1 is a top plan view of a seal according to principles of the invention.
  • FIG. 2 is a cross-sectional view of the seal of FIG. 1, taken along line 2-2.
  • FIG. 3 is a cross-sectional view of the seal of FIG. 2, shown compressed between mating flanges.
  • FIG. 4 is a top view of an alternate seal according to principles of the invention.
  • FIG. 5 is a cross-sectional view of the seal of FIG. 4, taken along line 5-5.
  • Like reference numbers and designations in the various drawings indicate like elements.
  • FIG. 1 shows a vacuum seal 20 for maintaining a seal between first and second opposed flanges (not shown) to maintain an internal pressure less than an external pressure.
  • the seal is of generally annular configuration, being angularly symmetric about a central longitudinal axis 500. When viewed in longitudinal radial section (i.e., along a central longitudinal plane 501 outward from the axis 500) the seal is generally c-shaped and open radially outward (FIG. 2). The seal is substantially symmetric about a transverse centerplane 502.
  • the seal has nested inner and outer members or jackets 22 and 24, respectively. Both are generally c-shaped and open radially outward.
  • the inner member has inner and outer surfaces 26 and 28 joined by edge surfaces 30A and 30B.
  • the outer member has inner and outer surfaces 32 and 34, respectively.
  • a line 503 (a cylindrical construct when not viewed in cross-section) designates the radial location of the maximum longitudinal span of the inner member 22.
  • the outer member Proximate the annular ends of the outer member 24, the outer member includes longitudinally-projecting protuberances 40A and 40B which provide annular ridges. These protuberances project slightly beyond the adjacent portions of the outer surface 34.
  • the longitudinal extremities 42 A and 42B of the ridges 40 A and 40B engage the adjacent flanges 100A and 100B (FIG. 3) to form a seal and may be exactly or nearly coaligned with the line 503.
  • the outer member 24 need not extend substantially radially beyond the line 503.
  • the inner member advantageously extends slightly farther therebeyond, e.g., to an exemplary 30° beyond the line 503.
  • the inner member 22 provides the primary structural integrity of the seal and is formed of a material and with dimensions effective to maintain compressive engagement with the flanges. This will be achieved by making the inner member substantially thicker than the outer member.
  • a preferred material for the inner member is sold by INCO Alloys International, Inc. under the trademark INCONEL Alloy 718.
  • Other "superalloys" having a nickel base and significant amounts of iron and chromium (for corrosion resistance) may also provide advantageous performance.
  • High strength, high gall-resistance stainless steels such as that sold under trademark ULTIMET by Haynes International, Inc. of Kokomo, IN may also be used.
  • a preferred material for the outer jacket is aluminum 1100 (99.0% Al minimum), a substantially pure aluminum.
  • Various aluminum alloys may also be utilized as can other ductile metals.
  • the inner member may have a relaxed longitudinal length L 2 of about 0J6 inches (0.41 cm) and a thickness of about 0.024 inches (0.061 cm).
  • a broader thickness range is 0.015-0.035 inches (0.038-0.089 cm).
  • the ridges may have a longitudinal extent L 3 of about 0.005 inch (0.013 cm).
  • a thickness of the outer member (away from the ridges) may be about 0.01 inches (0.025 cm), a thickness well under half the exemplary thickness of the inner member.
  • a broader thickness range is 0.005-0.020 inches (0.0123-0.051 cm).
  • the radial extent or span S, of the outer member may be about 0J0 inches (0.25 cm).
  • the ridge extremities 42A and 42B form a pair of flat annuli with a radial span S 3 of about 0.006 inches (0.015 cm).
  • the longitudinal span L, of the outer member at the line 503 between the extremities 42A and 42B may be an exemplary 0J9 inch (0.48 cm).
  • the ridges When compressed between opposed flat annular surfaces 102A and 102B of flanges 100A and 100B, the ridges are both plastically and elastically deformed to form a seal and the inner member is plastically and elastically longitudinally compressed (e.g., by about 0.044 inch (0J 1 cm) so that compressed overall and inner member lengths L,' and L 2 ' are about 0J6 inch (0.41 cm) and 0J4 inch (0.36 cm) to bias the ridges into engagement with the flanges.
  • An exemplary compressive engagement force on the seal is 400-1000 lbs/inch (7-17.5 N/m) of contact length (seal circumference at the ridges).
  • An exemplary process for production of the seal is as follows. Strip stock of the material for the inner member is cut to correct length and width. The ends of the strip stock are welded together to form a hoop or band. The band is then roll formed to circularize it. It is then die formed to produce the basic c-shaped section. It is then heat treated to increase strength. It is then cleaned and electroplated with copper or other decorative/appearance enhancing-material. Alternatively, instead of plating, the jacket may be electropolished.
  • the band may be formed by welding ends of a strip (e.g., by laser, tungsten inert gas (TIG), electron beam (EB), and the like).
  • TIG tungsten inert gas
  • EB electron beam
  • One such band is then placed radially within the inner jacket and roll formed to wrap it into the c-shaped section around the inner jacket.
  • a second roll step forms the ridges.
  • the seal is then flat lapped to provide the ridges with the desired degree of parallelism, planarity, surface uniformity, and longitudinal separation. Finally, the seal is cleaned and packaged in contamination-resistant packaging.
  • FIGS. 4 and 5 show an alternate embodiment of a seal 120 having nested inner and outer members 122 and 124, respectively.
  • the outer member 124 may be substantially identical to the outer member 24 and its portions are not, therefore, referenced with distinct numerals.
  • the inner member 122 has inner and outer surfaces 126 and 128 adjoined by edge surfaces 130 A and 130B.
  • the inner member 122 is formed having a central arcuate portion 150 and a pair of distal straight portions 150A and 150B extending from opposite ends of the arcuate portion. The distal portions are oriented substantially parallel to each other directed radically outward so as to provide a pair spaced-apart flat flanges.
  • the distal portions extend beyond the line 503 by a distance which is a significant fraction of the total radial span of the inner member.
  • An exemplary distance would be between about a third and a half of this span.
  • the inboard transition between the ridges and the adjacent outer surface of the outer member is radiused to about 0.01 inch (0.025 cm) and the outboard radial ridges are chamfered to an angle of about 45 degrees by 0.005 inch (0.013 cm).
  • the inner jacket is formed from strip stock 0.0300+/-0.0010 inch (0.0762+/-0.0025 cm) thick and 0.405+/-0.003 inch (1.029+/-0.008 cm) wide.
  • the outer member is formed from strip stock 0.0120+/-0.0005 inch (0.0305+/-0.0013 cm) thick and 0.402+/-0.002 inch (1.021+/- 0.001 cm) wide.
  • compressed overall and inner member lengths L,' and L 2 ' would be about 0.197-0.199 inch (0.500-0.505 cm) and 0J73-0J75 inch (0.439-0.445 cm).

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)

Abstract

L'invention concerne un joint hermétique métallique annulaire (20, 120) disposant d'un élément intérieur imbriqué (22, 122) et d'un élément extérieur en forme de c (24, 124). L'élément intérieur (22, 122) produit une force et une élasticité de compression longitudinales, et l'élément extérieur (24, 124) comprend deux crêtes opposées (40A, 40B) servant à sceller deux rebords.
PCT/US2000/007692 1999-03-22 2000-03-21 Joint hermetique WO2000057089A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU40221/00A AU4022100A (en) 1999-03-22 2000-03-21 Vacuum seal
EP00919558A EP1179150A1 (fr) 1999-03-22 2000-03-21 Joint hermetique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12549399P 1999-03-22 1999-03-22
US60/125,493 1999-03-22

Publications (1)

Publication Number Publication Date
WO2000057089A1 true WO2000057089A1 (fr) 2000-09-28

Family

ID=22419975

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/007692 WO2000057089A1 (fr) 1999-03-22 2000-03-21 Joint hermetique

Country Status (3)

Country Link
EP (1) EP1179150A1 (fr)
AU (1) AU4022100A (fr)
WO (1) WO2000057089A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2823826A1 (fr) * 2001-04-23 2002-10-25 Commissariat Energie Atomique Joint d'etancheite metallique elastique ferme a parties saillantes desaxees
FR2823824A1 (fr) * 2001-04-23 2002-10-25 Commissariat Energie Atomique Joint d'etancheite metallique elastique ouvert a parties saillantes desaxees
EP2430335B1 (fr) * 2009-05-15 2013-11-27 Federal-Mogul Sealing Systems Gmbh Joint multi-couches
CN109899525A (zh) * 2018-08-23 2019-06-18 三井易艾斯机械有限公司 杆密封件
DE102022208857A1 (de) 2022-08-26 2024-02-29 Robert Bosch Gesellschaft mit beschränkter Haftung Zündkerze mit Dichtring

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3058750A (en) * 1959-03-04 1962-10-16 Dudley D Taylor Method of applying a sealing with c-shaped radial section
US3083023A (en) * 1959-03-02 1963-03-26 North American Aviation Inc Spring seal
US3188100A (en) * 1963-02-13 1965-06-08 Manuel M Delgado Seal provided with ribs
US4218067A (en) * 1979-02-02 1980-08-19 Pressure Science Incorporated Multi-ply sealing rings
US4261584A (en) * 1979-11-19 1981-04-14 International Business Machines Corporation Hermetic seal
US4477087A (en) * 1983-07-20 1984-10-16 Sutter Jr Leroy V Seal formed out of a hard metal with a plating of soft metals
US4561662A (en) * 1983-12-29 1985-12-31 Commissariat A L'energie Atomique Flexible metal sealing joint incorporating expendable projecting portions
US4915397A (en) * 1986-02-07 1990-04-10 Specialist Sealing Limited Hollow metallic sealing rings
US5022663A (en) * 1988-09-08 1991-06-11 Commissariat A L'energie Atomique Metal gasket or joint provided with an extremely high unit-area pressure

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3083023A (en) * 1959-03-02 1963-03-26 North American Aviation Inc Spring seal
US3058750A (en) * 1959-03-04 1962-10-16 Dudley D Taylor Method of applying a sealing with c-shaped radial section
US3188100A (en) * 1963-02-13 1965-06-08 Manuel M Delgado Seal provided with ribs
US4218067A (en) * 1979-02-02 1980-08-19 Pressure Science Incorporated Multi-ply sealing rings
US4261584A (en) * 1979-11-19 1981-04-14 International Business Machines Corporation Hermetic seal
US4477087A (en) * 1983-07-20 1984-10-16 Sutter Jr Leroy V Seal formed out of a hard metal with a plating of soft metals
US4561662A (en) * 1983-12-29 1985-12-31 Commissariat A L'energie Atomique Flexible metal sealing joint incorporating expendable projecting portions
US4915397A (en) * 1986-02-07 1990-04-10 Specialist Sealing Limited Hollow metallic sealing rings
US5022663A (en) * 1988-09-08 1991-06-11 Commissariat A L'energie Atomique Metal gasket or joint provided with an extremely high unit-area pressure

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2823826A1 (fr) * 2001-04-23 2002-10-25 Commissariat Energie Atomique Joint d'etancheite metallique elastique ferme a parties saillantes desaxees
FR2823824A1 (fr) * 2001-04-23 2002-10-25 Commissariat Energie Atomique Joint d'etancheite metallique elastique ouvert a parties saillantes desaxees
WO2002086359A1 (fr) * 2001-04-23 2002-10-31 Commissariat A L'energie Atomique Joint d'etancheite metallique elastique ouvert a parties saillantes desaxees
WO2002086358A1 (fr) * 2001-04-23 2002-10-31 Commissariat A L'energie Atomique Joint d'etancheite metallique elastique ferme a parties saillantes desaxees
US6631910B2 (en) 2001-04-23 2003-10-14 Commissariat A L'energie Atomique Elastic metal gasket with offset projecting parts
AU2002256756B2 (en) * 2001-04-23 2007-06-14 Commissariat A L'energie Atomique Open metal gasket with offset projecting portions
AU2002256755B2 (en) * 2001-04-23 2007-06-14 Commissariat A L'energie Atomique Closed elastic metal gasket with offset projecting parts
EP2430335B1 (fr) * 2009-05-15 2013-11-27 Federal-Mogul Sealing Systems Gmbh Joint multi-couches
CN109899525A (zh) * 2018-08-23 2019-06-18 三井易艾斯机械有限公司 杆密封件
DE102022208857A1 (de) 2022-08-26 2024-02-29 Robert Bosch Gesellschaft mit beschränkter Haftung Zündkerze mit Dichtring

Also Published As

Publication number Publication date
AU4022100A (en) 2000-10-09
EP1179150A1 (fr) 2002-02-13

Similar Documents

Publication Publication Date Title
US5669612A (en) Metallic seal rings
US7866040B2 (en) Pressure energized metallic seal
US8485534B2 (en) Metal gasket
US7004478B2 (en) Shallow metallic s-seal
US4218067A (en) Multi-ply sealing rings
US5354072A (en) Hollow metal sealing rings
US6322087B1 (en) Metallic seal for low load conditions
US20030164594A1 (en) Metal seal and retainer
US6905125B2 (en) Metal gasket
JPS6165966A (ja) リングシール
EP1179150A1 (fr) Joint hermetique
US20020153669A1 (en) Closed metal elastic gasket with offset projecting parts
EP1610041B1 (fr) Joint d'etancheite metallique annulaire
CA2048586A1 (fr) Joint torique creux en metal et procede de fabrication correspondant
US20030127807A1 (en) High temperature seal
JP2003156147A (ja) メタルガスケット
JP3028418B2 (ja) 圧力変形防止リング付き金属シール部材
US6566621B2 (en) Metal-ceramic composite and vacuum switch unit using the same
GB2259121A (en) Hollow metal sealing rings
JPH09264427A (ja) メタルガスケット
GB2221000A (en) Improvements relating to metallic sealing rings and their manufacture
JP2007032605A (ja) 金属ガスケット
JP2003194225A (ja) 金属ガスケット
JPH02186164A (ja) 弾性型メタルガスケット
JP2002235854A (ja) 金属リングガスケット

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WWE Wipo information: entry into national phase

Ref document number: 09937373

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 2000919558

Country of ref document: EP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

WWP Wipo information: published in national office

Ref document number: 2000919558

Country of ref document: EP

WWW Wipo information: withdrawn in national office

Ref document number: 2000919558

Country of ref document: EP