WO2000028215A1 - Reseau de pompage a activation electrostatique - Google Patents

Reseau de pompage a activation electrostatique Download PDF

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Publication number
WO2000028215A1
WO2000028215A1 PCT/US1998/023658 US9823658W WO0028215A1 WO 2000028215 A1 WO2000028215 A1 WO 2000028215A1 US 9823658 W US9823658 W US 9823658W WO 0028215 A1 WO0028215 A1 WO 0028215A1
Authority
WO
WIPO (PCT)
Prior art keywords
cell
conduit means
diaphragm
mesopump
electrode
Prior art date
Application number
PCT/US1998/023658
Other languages
English (en)
Inventor
Cleopatra Cabuz
Original Assignee
Honeywell Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc. filed Critical Honeywell Inc.
Priority to AT98965368T priority Critical patent/ATE350580T1/de
Priority to EP98965368A priority patent/EP1163446B1/fr
Priority to CNB988143828A priority patent/CN1327132C/zh
Priority to PCT/US1998/023658 priority patent/WO2000028215A1/fr
Priority to DE69836836T priority patent/DE69836836T2/de
Priority to CA002350076A priority patent/CA2350076C/fr
Publication of WO2000028215A1 publication Critical patent/WO2000028215A1/fr
Priority to HK02108446.1A priority patent/HK1046945B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Definitions

  • the present invention relates to a mesoscopic pump. More particularly the invention relates to a mesoscopic pump based upon bistable electrostatically activated diaphragm
  • MEMS pumps The pumping capability of MEMS pumps is placed in the microliters to tens of milliliters per minute range. This makes them useful for applications such as implantable systems for drug delivery or micro dosage in chemical analysis systems but such pumping speeds are many orders of magnitude smaller than those required in sampling applications.
  • a coupled membrane system in which a first silicon membrane is switched by electrostatic force which, in turn, presses air through a channel to push the second silicon membrane up.
  • Another advantage would be if a mesopump would be available that used materials that are compatible with most, if not all, materials likely to be processed.
  • the present invention provides a mesopump that comprises an array of elementary cells.
  • Each cell includes a shaped chamber, a diaphragm and interconnecting conduits.
  • the invention includes bistable diaphragms, bi-directional electrostatic activation with electrode cavities shaped to conform to the diaphragm deflection, a built in valve action that provides a strongly rectifying mechanism for flow of fluid, and serial connectability in a compact array.
  • the elementary cells are formed by a body with an electrode cavity having an upper electrode and a lower electrode, each having a curved surface facing toward the other electrode to define the cavity.
  • the body includes a source of electrical activation for selectively energizing the electrodes.
  • the bistable diaphragm is mounted and grounded in the body such that a major portion of the diaphragm is located in the cavity between the curved surfaces. The diaphragm deflects toward the upper and lower electrode curved surfaces to conform thereto when voltage is applied to the specific electrode and the grounded diaphragm.
  • the elementary cells may also be formed by a body with an electrode cavity having at least one electrode on either the upper or lower portion of the cavity, with both sides of the cavity having a curved surface facing toward the other surface to define the cavity.
  • the body includes a source of electrical activation for selectively energizing the electrode.
  • a diaphragm is mounted under a tensile load and grounded in the body such that a major portion of the diaphragm is located in the cavity between the curved surfaces to conform thereto when voltage is applied to the specific electrode and the grounded diaphragm. Because the diaphragm is under tensile load, it returns to its original position upon release of the voltage, thereby giving the needed push-pull function forming the pumping action of the device.
  • fluid flows through a lateral conduit at one or both ends of the body, acting as an inlet end conduit or an outlet end conduit for the cavity.
  • the lateral conduits are each operably connect to the portion of the diaphragm mounted in the body so they may be opened and closed by movement of the diaphragm.
  • fluid flows through vertical conduit means operatively connected to the curved surface of an electrode, and this flow is also controlled by movement of the diaphragm into and out of contact with the vertical conduit on that electrode curved surface.
  • the cells are connected together to form units, whereby activation of the electrodes causes movement of the diaphragm between the curved surfaces of the electrodes to move fluid into and out of the mesopump.
  • the mesopump will normally further include a vertical back pressure control conduit on the opposite electrode and on the other side of the diaphragm from the vertical conduit.
  • the diaphragm is flexibly elastic to conform its surface area to the curved surfaces or the diaphragm is buckled to increase its surface area.
  • the diaphragm is flexibly elastic, it is formed from a polymeric material having elastomeric properties sufficient to permit movement between the curved surfaces.
  • Movement of the diaphragm from the curved surface of one electrode to the curved surface of the other electrode cooperates with the lateral conduit to open one of the inlet end conduit and outlet end conduit and closing the other of the inlet end conduit and outlet end conduit.
  • a preferred mesopump of this invention includes a plurality of sets of elementary cells that cooperatively function together.
  • the set includes a first cell having an inlet end lateral conduit connected to a source of fluid and a fluid outlet formed by its vertical conduit means.
  • the second cell is connected to the first cell vertical means by its vertical conduit, serving as its inlet source. Its outlet end lateral conduit serves as its fluid outlet to a third cell connected at its inlet end lateral conduit.
  • the third cell fluid outlet is formed such that its outlet end lateral conduit means is its fluid outlet.
  • Movement of the various diaphragms upon application of appropriate voltage causes fluid to pass from cell to cell upon activation of the electrodes.
  • a voltage is applied between a grounded diaphragm and an upper electrode of the first and second cells, whereby suction is created to cause fluid to enter through the first cell.
  • Voltage is switched to the lower electrodes of the first and second cells, whereby fluid moves to the second cell.
  • Switching voltage back to the upper electrode in the second cell and applying voltage to the upper electrode in the third cell causes fluid to transfer through the second cell outlet into the third cell through the third cell.
  • Applying a voltage between a grounded diaphragm and an upper electrode of the third cell creates pressure to cause fluid to exit the third cell.
  • the inlet lateral conduit of each cell is closed by the cell diaphragm upon movement of the diaphragm from one electrode to the other electrode.
  • the vertical conduit of each cell is closed by the cell diaphragm upon movement of the diaphragm into contact with the electrode curved surface having the vertical conduit.
  • the mesopump sets are connected in series to produce a build up of pressure sequentially along the series.
  • the sets may be connected in parallel to produce high throughput.
  • One preferred embodiment includes as array wherein the sets are connected in three dimensional series/parallel arrays to produce a buildup of pressure and to produce high throughput.
  • These array type structures may be realized as a single unit or as an array of up to 100 parallel channels, so that pumping rates may be achieved from lOml/min to 10 1/min.
  • the power consumption may be kept below 5mV/channel and below 0.5W per 100 channel array.
  • the actuation voltages can be kept below 50 volts, particularly because of the specific shape of the electrodes. As an example, a 100 channel array will have a size of only one cubic inch.
  • Another embodiment contemplates the sets being connected in a tree-configuration for operation as a vacuum pump. Such a tree-configuration operates to reduce back streaming pressure without affecting pumping speed.
  • FIG. 1 is a schematic illustration of an electrostatically actuated mesopump, in accordance with the invention
  • FIG. 2 is a an enlarged schematic view of one cell of the mesopump shown in FIG. 1;
  • FIG. 3 is a schematic of one pumping channel of the mesopump shown in FIG. 1 ;
  • FIG. 4 is a schematic illustration of the operation of fluid flow through a single cell of the type shown in FIG. 2;
  • FIG. 5 is a schematic diagram of the voltage applied to one electrode in the pumping cycle shown in FIG. 4;
  • FIG. 6 is a tree like serial connection in accordance with the present invention, with controlled backside pressure for compressor applications and the like;
  • FIG. 7 is an enlarged cut-away section of the cell shown in FIG. 2, illustrating a preferred embodiment of the invention.
  • FIG. 8 is a schematic illustration of the electrode pattern for the cell section shown in FIG. 7.
  • FIG. 9 is a schematic illustration of an alternative embodiment of the present invention.
  • the mesopumps of the present invention is best illustrated in terms of an array of elementary cells, where each cell includes a shaped chamber, a diaphragm and interconnecting conduits.
  • the mesopumps of the present invention are particularly advantageous because they may be manufactured from existing materials using existing manufacturing technologies. Thin film techniques already used for MEMS can be combined with existing polymer technology.
  • FIG. 1 illustrates a mesopump that has been fabricated in a one cubic inch configuration, and which uses the plurality of cells in series.
  • the mesopump, 10 generally, consists of a plurality of cells 11 that efficiently and effectively transfer fluid from an inlet 13 to an outlet 15.
  • This specific mesopump 10 has an upper channel 17 and a lower channel 19, arranged in parallel relationship, with both channels functioning in the same manner, in accordance with the invention.
  • the body 21 is constructed by molding a high temperature plastic such as ULTEM®, CELAZONE® or KETRON®.
  • the electrodes themselves are formed by plating or EB deposition of metal followed by patterning by using dry film resist, as is known in the art.
  • Low temperature organic and inorganic dialectic is used as an insulator between the actuating electrodes as shown below.
  • each channel 11 of the mesopump of FIG. 1 has a molded pump body 21 with an upper actuation electrode 23 and a lower actuation electrode 25.
  • Body 21 also mounts an electrically grounded diaphragm 27 such that diaphragm 27 is capable of movement inside chamber 29 between upper electrode curved surface 31 and lower electrode curved surface 33.
  • Body 21 also includes an inlet lateral conduit 35 and an outlet lateral conduit 37.
  • Diaphragm 27 conforms to curved surfaces 31 and 33 when it is electrostatically driven to one or the other surfaces through application of a voltage to the particular electrode via voltage source 39 for upper electrode 23 and voltage source 41 for lower electrode 25. Diaphragm 27 and the curved surfaces 31 and 33 are coated with thin dielectric layers (not shown) for electrical insulation and protection
  • Mesopump body 21 also includes a vertical conduit 43 in curved surface 33 which permits material in chamber 29 between diaphragm 27 and the lower electrode 25 to be discharged when voltage is applied to move diaphragm into substantial contact with surface 33.
  • Body 21 also includes a back pressure control conduit 45 in the upper electrode curved surface 31.
  • diaphragm be formed in a prebuckled shape, so that in the interim location between electrodes, the buckles compress and the shape is somewhat irregular.
  • the buckled diaphragm straightens out to form a smooth, uniform surface that fully engages the curved surface.
  • Buckled diaphragms have a larger volume per stroke that cam be obtained with reduced actuation force when compared to stretched or tensile loaded diaphragms. It is almost stress free in both of its stable positions, and this results in a system that is less sensitive to temperature variations or mismatches.
  • the diaphragm may be made from metal coated KAPTON®, metal that has been buckled to permit conformation with the curved surfaces, or a conductive flexibly elastic polymer that permits it to conform its surface area to the curved surfaces.
  • a conductive flexibly elastic polymer that permits it to conform its surface area to the curved surfaces.
  • polymeric material have elastomeric properties sufficient to permit movement between said curved surfaces.
  • fabrication of the diaphragm is based upon technology developed for keyboard and flexible circuits that are produced in huge quantities, although not for mesopumps at this time, making the process well optimized.
  • Preferred diaphragms are made from polymer films such as KAPTON® or MYLAR® polymers that are commercially available.
  • Electrostatic actuation is not used in conventional diaphragm pumps because of the large distance (at least tens of microns) between the diaphragm and an electrode on the pump body.
  • electrostatic actuation is by far the most efficient actuation method in terms of power consumption and structural simplicity.
  • Electrostatic pressure is well known for its strong dependence on the spacing between the electrodes. It is given by:
  • E is the electric field in the air gap between the diaphragm and the pump body and V and d are the corresponding voltage and distance.
  • a voltage of 100 volts across a one micron thick film with a dielectric constant of 6 gives an electrostatic pressure of 5.2 atmospheres at the rolling contact point.
  • a high electrostatic pressure and a large displacement can be obtained at the same time, due to the special configuration that allows the diaphragm to roll against the chamber wall as described above.
  • the point of high electrostatic pressure advances from the edge toward the center, producing rolling motion of the contact point on the cavity wall.
  • One particular advantage of the present invention is that there is a minimal dead volume. As the diaphragm 27 moves from intimate contact with the upper curved surface 31 to the lower curved surface 33, all the air in the cavity is displaced. Thus it is easy to get chamber-to-channel volumes ratios (i.e., compression ratios) of up to 75 or more.
  • the dielectric material is a key element in the rolling contact electrostatic actuators. It must supply electrical isolation, passivation of the metal electrodes, low adhesion energy to prevent stiction, and a chemically stable surface. Dielectrics such as silicon dioxide and silicon nitride and materials known as Diamond Like Nanocomposites (DLN) are suitable dielectrics. These latter DLN materials have high dielectric strength, low surface energy and high corrosion resistance.
  • DLN Diamond Like Nanocomposites
  • the high electrostatic pressure created between the diaphragm and the curved walls not only evacuates air from the cavity but also provides a sealing mechanism.
  • the configuration of the access channels into the cavity allows this sealing capability to act as a built-in valve, providing high flow rectification. This is of particular advantage in applications where back streaming is needed, such as in vacuum pumps and compressors.
  • Each pumping channel in FIG. 3 consists of a stack of three flat rectangular plates with identical diaphragms between them.
  • the top plate 49 and bottom plate 51 are identical, having on one side depressions for the cavities and slots, and holes for back pressure control on the other side.
  • the middle plate 53 has depressions on both sides and also has slots and holes for the interconnecting conduits.
  • the pump 47 in FIG. 3 is a parallel stacking of cells to provide increased pumping capability.
  • FIG. 4 Operation of the mesopump as a peristaltic, positive displacement is shown in FIG. 4, where the diaphragm of chamber A moves up to thereby draw a fluid packet (such as a gas) into the lower part of chamber A through the lateral inlet.
  • a fluid packet such as a gas
  • the diaphragm of chamber B is acting as a valve, firmly closing the vertical conduit between chambers A and B. No back streaming is allowed from the output.
  • these two diaphragms move down together. As it rolls down on the lower wall of chamber A, the diaphragm of chamber A closes the intake conduit, acting as a valve and also pushes the fluid into chamber B.
  • FIG. 5 illustrates the driving voltages applied to the upper (u) and lower (1) electrodes of each chamber in the phases of the pumping cycle described above with reference to FIG. 4.
  • One advantage of the present invention is that the diaphragm is subjected to a snapping action as it converts from contact with one electrode curved surface to the other.
  • Test analyses were run for a nominal 10mm diameter by 25 ⁇ m thick diaphragm with 75 ⁇ m deep upper and lower chambers. The expected rolling action was observed. As voltage was increased, the diaphragm-electrode contact begins at the outer perimeter and moves in toward the center, with complete diaphragm contact at 50 volts. There was a snapping action evident between 48 and 50 volts, and is due to the nonlinear, position dependent force as well as the bistable nature of the diaphragm. Electrostatic force is proportional to the square of the actuation voltage, so it is expected that the required actuation voltage would vary as the square root of voltage, and this behavior has been found to be roughly correct.
  • the present invention may also be placed in a tree-type arrangement, shown in FIG. 6.
  • This provides increased capability for applications that require large pressure differences and back pressure control.
  • the back pressure on the diaphragms in each stage has to be correspondingly controlled.
  • FIG. 6 illustrates a tree like serial connection of cells with controlled backside pressure, with the quantities in the circles representing backside pressures.
  • This embodiment contemplates connection of the backsides of all diaphragms in a system of chambers having pressures that vary between the output pressure and the input pressure, such that no more than one atmosphere appears across any diaphragm.
  • the present invention is also capable of producing a vacuum pump for vacuums in the millitorr range by connecting cells to be fabricated in three-dimensional series/parallel arrays. Series operation allows the build up of significant pressure ratios while parallel operation provides high throughput.
  • the device of FIG. 6 may also be used as a vacuum pump, but backside pressure is no longer an issue as the diaphragms can work against one atmosphere pressure. This configuration also has the capability to reduce the back streaming pressure without affecting pump speed for a given pump size.
  • FIG. 7 an embodiment is shown that insures proper evacuation of fluid from the second chamber, such as chamber B of FIG. 4, into a third chamber, such as chamber C again of FIG. 4.
  • the upper electrode 55 shown in FIG. 7 includes a shallow channel 57 between electrode 55 and diaphragm 59 that leads to the evacuation channel between chambers B and C of FIG. 4, for example.
  • FIG. 8 An alternative means for improved evacuation of such a second chamber is shown in FIG. 8, where an upper chamber 61 contains curved electrode surfaces that are slightly oval in shape, at 63.
  • the embodiment of this invention shown in Fig. 9 represents an embodiment in which only one electrode is used for each cell.
  • the cells are formed as described above, using materials and methods of construction as set forth herein.
  • only one electrode is used in each cell.
  • the device comprises pair of a cell forming bodies 71 and 73, wherein one cell 71 includes a dielectric material forming an electrode, and the other body 73 does not have an electrostatic function.
  • a diaphragm 77 is stretched between portions of bodies 71 and 73 to divide the thus formed cavities of cells into half.
  • An inlet conduit 79, lateral conduit 81 and outlet conduit 83 formed in the bodies 71 and 73, to allow fluid flow through the device.
  • the mesopumps of the present invention have a wide variety of applicable end uses.
  • a variety of missions require detection of chemical and biological agents and explosives. These include battlefield warning, counter proliferation and treaty monitoring.
  • Detection technology is needed for rapid identification and quantification of the entire suite of chemical and biological agents, as well as the detection of precursors, degradation products and solvents associated with their manufacture and distribution.
  • the present invention provides sensor technology that is sufficiently sensitive and low enough in power and cost to be available for use with a variety of ongoing programs.
  • enzyme-based electrochemical sensors aerosol collectors to monitor aerosol sizes and concentrations using cascade impactors
  • UV- induced fluorescence- based sensors for biological detection and chemical sensors for detection of volatile organic compounds in explosives and chemical agents.
  • Biological species identification based on DNA techniques have been demonstrated using the polymerase chain reaction and capillary electrophoresis.
  • the present invention is also admirably suited for use with mass spectrometers and other vacuum-based instruments in compact fieldable detection systems because, for the first time, vacuum pumps are available that are compatible in size, weight and power with the rest of the instrument. Also now possible for the first time are mesoscopic compressors made in accordance with the present invention that are suitable for miniature refrigeration or cooling systems, or to pressurize pneumatic chambers for microfluid handling systems, such as a fieldable DNA analysis system that might include metering, sample filtration, PCR reagent injection and sample/reagent transport.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Saccharide Compounds (AREA)
  • Steroid Compounds (AREA)
  • Seal Device For Vehicle (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)

Abstract

L'invention concerne un réseau de pompage présentant une pluralité de cellules élémentaires, un procédé de fabrication du réseau et un procédé de pompage de fluides utilisant ce réseau de pompage. Les cellules ont chacune un corps formant une cavité contenant des électrodes supérieure et inférieure, alimentées sélectivement par les connexions électriques et présentant des surfaces courbées faisant face à l'autre électrode. Une membrane bistable est montée de sorte que sa partie principale se trouve logée dans la cavité entre les électrodes de manière que cette membrane soit déviée vers les surfaces supérieure et inférieure afin de s'y adapter. Une conduite latérale est placée au niveau d'au moins une extrémité du corps en vue d'une communication fluidique avec la cavité. Les conduites latérales sont reliées de manière opérationnelle à une partie de la membrane montée dans le corps et sont ouvertes et fermées par un mouvement de la membrane. La membrane régule l'écoulement de fluide en entrant en contact avec ou en s'éloignant d'une conduite verticale reposant sur au moins une surface courbée. Les cellules sont interconnectées pour former un réseau de pompage dans lequel l'activation des électrodes fait bouger la membrane entre les électrodes et fait entrer ou sortir le fluide du corps. Le réseau de pompe préféré comprend des ensembles de trois groupes de cellules de sorte que le fluide s'écoule dans une première cellule à partir d'une source de fluide, qu'il soit expulsé vers une seconde cellule à travers une conduite verticale, puis expulsé via une conduite latérale vers une troisième cellule pour en être ensuite expulsé. L'écoulement du fluide s'effectue par l'activation des électrodes.
PCT/US1998/023658 1998-11-06 1998-11-06 Reseau de pompage a activation electrostatique WO2000028215A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
AT98965368T ATE350580T1 (de) 1998-11-06 1998-11-06 Elektrostatisch betätigte pumpenarray
EP98965368A EP1163446B1 (fr) 1998-11-06 1998-11-06 Reseau de pompage a activation electrostatique
CNB988143828A CN1327132C (zh) 1998-11-06 1998-11-06 中型泵、其制造方法及其用途
PCT/US1998/023658 WO2000028215A1 (fr) 1998-11-06 1998-11-06 Reseau de pompage a activation electrostatique
DE69836836T DE69836836T2 (de) 1998-11-06 1998-11-06 Elektrostatisch betätigte pumpenarray
CA002350076A CA2350076C (fr) 1998-11-06 1998-11-06 Reseau de pompage a activation electrostatique
HK02108446.1A HK1046945B (zh) 1998-11-06 2002-11-21 中型泵、其製造方法及其用途

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1998/023658 WO2000028215A1 (fr) 1998-11-06 1998-11-06 Reseau de pompage a activation electrostatique

Publications (1)

Publication Number Publication Date
WO2000028215A1 true WO2000028215A1 (fr) 2000-05-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/023658 WO2000028215A1 (fr) 1998-11-06 1998-11-06 Reseau de pompage a activation electrostatique

Country Status (7)

Country Link
EP (1) EP1163446B1 (fr)
CN (1) CN1327132C (fr)
AT (1) ATE350580T1 (fr)
CA (1) CA2350076C (fr)
DE (1) DE69836836T2 (fr)
HK (1) HK1046945B (fr)
WO (1) WO2000028215A1 (fr)

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CN113482893B (zh) * 2021-06-10 2022-04-01 浙江大学 一种基于介电弹性材料的柔性泵

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HK1046945A1 (en) 2003-01-30
CN1354823A (zh) 2002-06-19
HK1046945B (zh) 2008-05-23
EP1163446A1 (fr) 2001-12-19
EP1163446B1 (fr) 2007-01-03
DE69836836T2 (de) 2007-06-28
ATE350580T1 (de) 2007-01-15
CN1327132C (zh) 2007-07-18
CA2350076A1 (fr) 2000-05-18
DE69836836D1 (de) 2007-02-15
CA2350076C (fr) 2008-12-30

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