WO2000026661A1 - Sensoranordnung zur ermittlung physikalischer eigenschaften von flüssigkeiten - Google Patents
Sensoranordnung zur ermittlung physikalischer eigenschaften von flüssigkeiten Download PDFInfo
- Publication number
- WO2000026661A1 WO2000026661A1 PCT/DE1999/003458 DE9903458W WO0026661A1 WO 2000026661 A1 WO2000026661 A1 WO 2000026661A1 DE 9903458 W DE9903458 W DE 9903458W WO 0026661 A1 WO0026661 A1 WO 0026661A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor arrangement
- arrangement according
- substrate
- measurement
- measuring
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/16—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/22—Measuring resistance of fluids
Definitions
- the invention relates to a sensor arrangement for determining physical properties of liquids according to the preamble of the main claim.
- SAW Surface Acoustic Wave
- An important area here is the measurement of electrical quantities, such as the dielectric constant and / or the conductivity, the measurement of mechanical quantities, such as the density and / or the viscosity.
- the known sensor arrangement is based on a measurement principle which is described, for example, in the article "A study of love-wave acoustic sensors", J.Du, GL Harding, PROgilvy and M.Lake in the specialist journal Sen- sors and Actuators A56 (1996), pages 211 to 219.
- a sensor is implemented that works with horizontally polarized acoustic shear waves, so-called leakage waves or surface skimming bulk waves (SSBW waves) or love waves.
- SSBW waves surface skimming bulk waves
- interdigital transducers which are also known per se from the prior art mentioned above, so that the desired sensor signal can be obtained from the propagation behavior on a propagation or measurement path.
- the sensor arrangement is used to determine the quality of engine or lubricating oils in a motor vehicle or comparable machines, it is often necessary to obtain a large number of measurement variables in order to evaluate them as input variables for corresponding control units. Above all, the viscosity, the temperature, the electrical conductivity and the dielectric constant of the oil are important for a useful statement, e.g. to monitor the oil change intervals.
- the sensor arrangement mentioned at the outset for determining physical properties of liquids is advantageously further developed according to the invention with the characterizing features of the main claim.
- a compact sensor arrangement is advantageously created, with which an integration of different individual measurement sensors on a substrate plate is made possible with low-cost production.
- the electro-acoustic transducers which generate and detect the surface acoustic waves with predetermined wave modes are advantageously arranged together with further measuring arrangements.
- a corresponding measured value is determined from the propagation behavior of the acoustic waves along a propagation path in the manner known per se.
- the basic sensor element is, for example, a substrate made of certain quartz, lithium tantalate and lithium niobate sections which are particularly suitable for the acoustic shear modes described at the beginning.
- a temperature-dependent resistor is advantageously attached adjacent to the substrate as a measuring arrangement for temperature measurement.
- the conductor track structure on the substrate is produced from a metallization layer, advantageously from platinum, whereby both the temperature-dependent resistance and the transmission and reception conductor track structures of the electro-acoustic transducer can be produced from this platinum layer, so that only a single metallization layer on the substrate is necessary is. Platinum is extremely chemically resistant, so that cover layers can be dispensed with under certain circumstances.
- a dielectric layer applied above the metallization layer on the substrate can, however, also be arranged as an acoustic waveguide layer for the electro-acoustic transducers in addition to the chemical passivation. It is also possible to use titanium or silicon or other intermediate layers as an adhesive layer between the substrate and the electro-acoustic wall learners as well as between the electro-acoustic transducers and other layers above.
- an arrangement for electrical conductivity measurement can advantageously also be produced from the metallization layer by means of uncovered electrodes.
- the conductivity measurement is carried out in a simple manner with a direct current or an alternating current which flows through the liquid.
- an arrangement for measuring the dielectric constant can advantageously be created from the same metallization layer by means of a capacitor structure.
- the capacitor structure can be in the form of an interdigital capacitor and, if appropriate, can be covered by an additional insulating layer; However, it is also possible to use it uncovered for better coupling to the liquid to be measured, wherein the chemical resistance of the metallization layer can be exploited.
- all measuring arrangements for determining the individual physical quantities can be contacted individually in a simple manner, and thus all four measuring methods can be carried out on a corresponding evaluation electronics for sequential measurement with a single substrate, which can be used particularly for construction forms which are favorable for production. Furthermore, the good heat coupling on the substrate is also advantageous, since the temperature of the various measuring sensors is available with particularly small deviations during signal evaluation, so that very precise compensation methods can be used.
- the schematic view according to the single figure shows the main component of the proposed sensor arrangement, namely a substrate plate 1 polished on one side from a piezoelectric material, in which horizontally polarized acoustic shear modes can be excited by an interdigital transducer 3 that can be contacted via electrical connections 2 and in an interdigital transducer 4 as an electro -acoustic transducers are detectable.
- the measuring arrangement described above with the electro-acoustic transducers for measuring the viscosity of a measuring liquid via the propagation of a surface wave and the measuring arrangements described below are structured from a metallization layer, preferably from platinum, and optionally adhesive layers.
- a dielectric layer (not shown here) can also be arranged above the electro-acoustic transducers 3 and 4 as an acoustic waveguide layer, which also enables chemical passivation.
- electrodes 5 for conductivity measurement are present on the substrate 1 and are supplied with a direct or alternating current.
- conductivity measurement could also be dispensed with in many application stalls.
- the temperature measurement is carried out here via a resistance meander 6, which is likewise structured from the metallization layer.
- the arrangement of the resistance meander 6 can also lie outside the propagation distance between the transducers 3 and 4, in a modification of the shape shown.
- a capacitor structure 7 which, for better coupling to the liquid to be measured, is either uncovered or provided with a cover layer 8 shown here in broken lines in order to improve the chemical resistance.
- the measurement of the dielectric constant and the conductivity can possibly also be carried out with the electro-acoustic transducers for determining the viscosity of the liquid a different excitation frequency than the frequency required to generate the surface wave is selected.
- the measuring liquid e.g.
- the engine oil of a motor vehicle flows past the substrate surface and possibly the cover layer to determine the physical properties, and the measurement signals obtained are taken at the contact points and an evaluation device (not shown here) for generating the necessary control and / or display signals, e.g. for the quality of the engine oil.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Acoustics & Sound (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU15490/00A AU749057B2 (en) | 1998-11-04 | 1999-10-28 | Sensor arrangement for detecting the physical properties of liquids |
JP2000579991A JP2003502617A (ja) | 1998-11-04 | 1999-10-28 | 液体の物理的性質を測定するためのセンサー装置 |
EP99957946A EP1127273A1 (de) | 1998-11-04 | 1999-10-28 | Sensoranordnung zur ermittlung physikalischer eigenschaften von flüssigkeiten |
KR1020017005559A KR20010090813A (ko) | 1998-11-04 | 1999-10-28 | 액체의 물리적 성질을 검출하기 위한 센서 장치 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19850799A DE19850799A1 (de) | 1998-11-04 | 1998-11-04 | Sensoranordnung zur Ermittlung physikalischer Eigenschaften von Flüssigkeiten |
DE19850799.2 | 1998-11-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000026661A1 true WO2000026661A1 (de) | 2000-05-11 |
Family
ID=7886644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1999/003458 WO2000026661A1 (de) | 1998-11-04 | 1999-10-28 | Sensoranordnung zur ermittlung physikalischer eigenschaften von flüssigkeiten |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1127273A1 (de) |
JP (1) | JP2003502617A (de) |
KR (1) | KR20010090813A (de) |
AU (1) | AU749057B2 (de) |
DE (1) | DE19850799A1 (de) |
WO (1) | WO2000026661A1 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102667085A (zh) * | 2009-11-26 | 2012-09-12 | 大陆汽车有限责任公司 | 用于确定还原剂箱中还原剂的状态的方法 |
GB2476317B (en) * | 2009-12-21 | 2014-02-12 | Wema System As | Quality sensor apparatus |
US9329163B2 (en) | 2010-07-02 | 2016-05-03 | Sartorius Stedim Fmt Sas | Device for sensing a parameter related to an electrical phenomenon of biopharmaceutical content and biopharmaceutical container comprising such a sensing device |
DE102015016887A1 (de) * | 2015-12-22 | 2017-06-22 | Dürr Somac GmbH | Vorrichtung zur Messung des Wassergehaltes in Bremsflüssigkeiten |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10152777A1 (de) | 2001-10-29 | 2003-05-15 | Hydac Electronic Gmbh | Vorrichtung und Verfahren zur Bestimmung der Qualität eines Mediums, insbesondere eines Schmier- und/oder Kühlmittels |
JP2005534894A (ja) * | 2002-06-08 | 2005-11-17 | エルジー イノテック カンパニー リミテッド | スリット弾性波を用いたsawセンサ素子およびその方法 |
DE102004049580A1 (de) * | 2004-10-12 | 2006-04-13 | Robert Bosch Gmbh | Verfahren zur Erfassung von Zustandsparametern einer Flüssigkeit |
DE102006015111A1 (de) * | 2006-03-31 | 2007-10-04 | Schaeffler Kg | Dreh-, Schwenk- oder Axiallager mit einem Schmierfett-Sensor |
AU2010335058B2 (en) * | 2009-12-21 | 2014-11-13 | Wema System As | Quality sensor apparatus |
DE102013009370A1 (de) | 2013-06-05 | 2014-12-11 | Hochschule Karlsruhe | Vorrichtung zur Messung von Fluideigenschaften und deren Verwendung |
EP3156620B1 (de) | 2015-10-13 | 2018-09-12 | Plastic Omnium Advanced Innovation and Research | Verfahren zur bestimmung der konzentration eines chemischen mittels in einer lösung basierend auf der geschwindigkeit einer druckwelle und system dafür |
CN109844469B (zh) * | 2016-09-13 | 2022-05-13 | 帕塞罗股份有限公司 | 用于确定和/或监控变压器油的击穿电压的方法和装置 |
NO20171589A1 (en) | 2017-10-05 | 2019-02-18 | Sentec As | Level sensor assembly |
DE102018210387B4 (de) * | 2018-06-26 | 2023-03-23 | Robert Bosch Gmbh | Sensorvorrichtung und Verfahren zum Detektieren von Gasen |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0361729A2 (de) * | 1988-09-29 | 1990-04-04 | Hewlett-Packard Company | Fühler und Messverfahren unter Benutzung von transversalen Oberflächenwellen |
US5741961A (en) * | 1993-08-18 | 1998-04-21 | Sandia Corporation | Quartz resonator fluid density and viscosity monitor |
DE19710358A1 (de) * | 1997-03-13 | 1998-09-24 | Bosch Gmbh Robert | Mikrostrukturierter Sensor |
-
1998
- 1998-11-04 DE DE19850799A patent/DE19850799A1/de not_active Withdrawn
-
1999
- 1999-10-28 WO PCT/DE1999/003458 patent/WO2000026661A1/de not_active Application Discontinuation
- 1999-10-28 EP EP99957946A patent/EP1127273A1/de not_active Withdrawn
- 1999-10-28 AU AU15490/00A patent/AU749057B2/en not_active Ceased
- 1999-10-28 KR KR1020017005559A patent/KR20010090813A/ko not_active Application Discontinuation
- 1999-10-28 JP JP2000579991A patent/JP2003502617A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0361729A2 (de) * | 1988-09-29 | 1990-04-04 | Hewlett-Packard Company | Fühler und Messverfahren unter Benutzung von transversalen Oberflächenwellen |
US5741961A (en) * | 1993-08-18 | 1998-04-21 | Sandia Corporation | Quartz resonator fluid density and viscosity monitor |
DE19710358A1 (de) * | 1997-03-13 | 1998-09-24 | Bosch Gmbh Robert | Mikrostrukturierter Sensor |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102667085A (zh) * | 2009-11-26 | 2012-09-12 | 大陆汽车有限责任公司 | 用于确定还原剂箱中还原剂的状态的方法 |
GB2476317B (en) * | 2009-12-21 | 2014-02-12 | Wema System As | Quality sensor apparatus |
US9329163B2 (en) | 2010-07-02 | 2016-05-03 | Sartorius Stedim Fmt Sas | Device for sensing a parameter related to an electrical phenomenon of biopharmaceutical content and biopharmaceutical container comprising such a sensing device |
DE102015016887A1 (de) * | 2015-12-22 | 2017-06-22 | Dürr Somac GmbH | Vorrichtung zur Messung des Wassergehaltes in Bremsflüssigkeiten |
Also Published As
Publication number | Publication date |
---|---|
EP1127273A1 (de) | 2001-08-29 |
DE19850799A1 (de) | 2000-05-11 |
KR20010090813A (ko) | 2001-10-19 |
AU749057B2 (en) | 2002-06-20 |
JP2003502617A (ja) | 2003-01-21 |
AU1549000A (en) | 2000-05-22 |
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