WO2000010195A3 - Preparation of metal-precipitates permeable insulator for soi substrate - Google Patents
Preparation of metal-precipitates permeable insulator for soi substrate Download PDFInfo
- Publication number
- WO2000010195A3 WO2000010195A3 PCT/US1999/018085 US9918085W WO0010195A3 WO 2000010195 A3 WO2000010195 A3 WO 2000010195A3 US 9918085 W US9918085 W US 9918085W WO 0010195 A3 WO0010195 A3 WO 0010195A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- metal
- precipitates
- preparation
- soi substrate
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Element Separation (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU54742/99A AU5474299A (en) | 1998-08-10 | 1999-08-10 | Process for preparation of silicon on insulator substrates with improved resistance to formation of metal precipitates |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9587898P | 1998-08-10 | 1998-08-10 | |
US60/095,878 | 1998-08-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2000010195A2 WO2000010195A2 (en) | 2000-02-24 |
WO2000010195A3 true WO2000010195A3 (en) | 2000-05-18 |
Family
ID=22254002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1999/018085 WO2000010195A2 (en) | 1998-08-10 | 1999-08-10 | Preparation of metal-precipitates permeable insulator for soi substrate |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU5474299A (en) |
WO (1) | WO2000010195A2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7987716B2 (en) * | 2008-03-26 | 2011-08-02 | Endevco Corporation | Coupled pivoted acceleration sensors |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5860697A (en) * | 1981-09-30 | 1983-04-11 | Nec Corp | Forming method of silicon single crystal film |
JPS60144949A (en) * | 1984-01-06 | 1985-07-31 | Nec Corp | Manufacture of semiconductor device |
JPH02237121A (en) * | 1989-03-10 | 1990-09-19 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH05129309A (en) * | 1991-10-31 | 1993-05-25 | Nec Corp | Pasted substrate |
US5672526A (en) * | 1993-12-28 | 1997-09-30 | Nippon Steel Corporation | Method of fabricating a semiconductor device using element isolation by field shield |
US5753560A (en) * | 1996-10-31 | 1998-05-19 | Motorola, Inc. | Method for fabricating a semiconductor device using lateral gettering |
US5753353A (en) * | 1994-11-07 | 1998-05-19 | Nec Corporation | Soi Substrate |
US5757063A (en) * | 1994-03-25 | 1998-05-26 | Kabushiki Kaisha Toshiba | Semiconductor device having an extrinsic gettering film |
US5840590A (en) * | 1993-12-01 | 1998-11-24 | Sandia Corporation | Impurity gettering in silicon using cavities formed by helium implantation and annealing |
JPH1126735A (en) * | 1997-07-04 | 1999-01-29 | Texas Instr Japan Ltd | Bonded soi wafer |
US5894037A (en) * | 1995-11-22 | 1999-04-13 | Nec Corporation | Silicon semiconductor substrate and method of fabricating the same |
-
1999
- 1999-08-10 WO PCT/US1999/018085 patent/WO2000010195A2/en active Application Filing
- 1999-08-10 AU AU54742/99A patent/AU5474299A/en not_active Abandoned
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5860697A (en) * | 1981-09-30 | 1983-04-11 | Nec Corp | Forming method of silicon single crystal film |
JPS60144949A (en) * | 1984-01-06 | 1985-07-31 | Nec Corp | Manufacture of semiconductor device |
JPH02237121A (en) * | 1989-03-10 | 1990-09-19 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH05129309A (en) * | 1991-10-31 | 1993-05-25 | Nec Corp | Pasted substrate |
US5840590A (en) * | 1993-12-01 | 1998-11-24 | Sandia Corporation | Impurity gettering in silicon using cavities formed by helium implantation and annealing |
US5672526A (en) * | 1993-12-28 | 1997-09-30 | Nippon Steel Corporation | Method of fabricating a semiconductor device using element isolation by field shield |
US5757063A (en) * | 1994-03-25 | 1998-05-26 | Kabushiki Kaisha Toshiba | Semiconductor device having an extrinsic gettering film |
US5753353A (en) * | 1994-11-07 | 1998-05-19 | Nec Corporation | Soi Substrate |
US5894037A (en) * | 1995-11-22 | 1999-04-13 | Nec Corporation | Silicon semiconductor substrate and method of fabricating the same |
US5753560A (en) * | 1996-10-31 | 1998-05-19 | Motorola, Inc. | Method for fabricating a semiconductor device using lateral gettering |
JPH1126735A (en) * | 1997-07-04 | 1999-01-29 | Texas Instr Japan Ltd | Bonded soi wafer |
Non-Patent Citations (1)
Title |
---|
WOLF S.: "Silicon Processing for the VLSI Era", LATTICE PRESS, vol. 1, 1986, SUNSET BEACH, CA, pages 61 - 72, XP002925678 * |
Also Published As
Publication number | Publication date |
---|---|
WO2000010195A2 (en) | 2000-02-24 |
AU5474299A (en) | 2000-03-06 |
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