WO2000000328A1 - Plaque de surface - Google Patents
Plaque de surface Download PDFInfo
- Publication number
- WO2000000328A1 WO2000000328A1 PCT/JP1999/003470 JP9903470W WO0000328A1 WO 2000000328 A1 WO2000000328 A1 WO 2000000328A1 JP 9903470 W JP9903470 W JP 9903470W WO 0000328 A1 WO0000328 A1 WO 0000328A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- stone
- layer
- surface plate
- spraying
- ceramic
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
Definitions
- the present invention relates to a surface plate, and more particularly, to a surface plate that provides a reference surface for performing precise measurement and high-precision work in, for example, a semiconductor or liquid crystal manufacturing process or a precision measurement process.
- the surface plate has a strict plane, and the plane is used as a reference plane in the manufacturing process of semiconductors and liquid crystals that require high precision and various measurements.
- the material of the surface plate is required to have a small change in shape with temperature change, high hardness, and a uniform and dense structure.
- conventional slabs are manufactured from natural stones with high hardness such as black granite and granite.
- An object of the present invention is to provide an inexpensive surface plate that can maintain high surface accuracy even during long-term use.
- a surface plate including a base stone material and a sprayed layer.
- the thermal spray layer is formed on at least a part of the surface of the stone material by a thermal spray material made of ceramic.
- the surface of the sprayed layer has a predetermined surface accuracy.
- a method for manufacturing a surface plate includes a step of degreasing and cleaning a stone having a predetermined shape, a step of spraying a sprayed ceramic material to form a sprayed layer on at least a part of the surface of the stone, and a step of spraying a surface of the sprayed layer. Polishing. BRIEF DESCRIPTION OF THE FIGURES
- FIG. 1 is a perspective view showing a surface plate having a sprayed layer according to one embodiment.
- FIG. 2 is a cross-sectional view taken along line 2-2 of FIG.
- FIG. 3 is a cross-sectional view for explaining the atmospheric plasma spraying method. BEST MODE FOR CARRYING OUT THE INVENTION
- the surface plate 10 has a rectangular parallelepiped stone 11 and a thermal spray layer 13.
- the stone material 11 is required to have high surface accuracy, little change in shape with temperature change, high hardness, fine structure, and uniform structure.
- natural stones such as black granite and black granite including Harbor Black, Rustenburg, Kurnool, Jin Pabwe, and Indian Black, or artificial stones are preferable.
- Indian Black, Harbor Black and Rustenburg are more preferred in that they have high hardness and a dense and uniform structure.
- the stone 11 has a rectangular recess 12 formed on its upper surface.
- the thermal spray layer 13 is disposed in the recess 12.
- Thermal spray layer 13 is formed to have a predetermined thickness by spraying a thermal spray material.
- the thickness of the thermal spray layer 13 is larger than the depth of the recess 12, and therefore, the thermal spray layer 13 has a bulging portion 14 protruding from the upper surface of the stone 11.
- the sprayed material preferably has a particle size and a high hardness within a predetermined range.
- a thermal spray material There are ceramics such as gray alumina, pure alumina, alumina titania, chromium oxide, and zirconia. Gray alumina is most preferred as a thermal spray material because of its small particle size and high hardness.
- the preferred particle size (average particle size) of the thermal spray material is 5 to 60 / m.
- a more preferred average particle size is 5 to 25 ⁇ . If the average particle size is larger than 25 ⁇ , gaps are formed between the particles. The gaps make the surface of the sprayed layer 13 rough and not smooth, so that the desired surface accuracy cannot be achieved. On the other hand, if the average particle size is less than 5 ⁇ m, the welding of the particles becomes incomplete, and the strength of the sprayed layer 13 decreases.
- the preferred hardness of the sprayed material is in the range of 100 to 1200 in Vickers hardness unit. If the Vickers hardness of the thermal spray material is less than 100, the thermal sprayed layer 13 has a low strength and cannot exhibit the desired wear resistance. On the other hand, if the Vickers hardness of the sprayed material is larger than 1200, the surface of the sprayed layer 13 cannot be sufficiently polished, and the desired surface accuracy cannot be obtained.
- gray alumina is employed as the thermal spray material.
- the average particle size of this gray alumina is 5 to 25 // m, and the Vickers hardness is 1800 to 1100.
- the procedure for forming the sprayed layer 13 is as follows: First, the stone 11 is degreased and washed. Next, the spray material is sprayed on the stone 11 by a method such as gas flame spraying, low pressure plasma spraying, wire spraying, or atmospheric plasma spraying. In the present embodiment, the thermal spray layer 13 is formed by an atmospheric plasma spray method.
- the atmospheric plasma spraying method will be described with reference to FIG.
- a mixed gas of argon and hydrogen is used as a carrier gas.
- the spray material is sent into the plasma flame together with the carrier gas.
- the sprayed material becomes particles in a molten or almost molten state in the plasma flame. These particles are emitted from nozzle 15 Warm Stone 1 1 Sprayed.
- Helium and nitrogen can be used as carrier gas in addition to argon and hydrogen.
- the thickness of the thermal spray layer 13 after thermal spraying is about 0.3 mm.
- the sprayed layer 13 is polished to a predetermined surface roughness.
- a preferred surface roughness is 0.1 0.6 m as a center line average roughness (Ra) value specified in Japanese Industrial Standard JISR1600.
- a more preferred Ra value is 0.1 0.3 Atm.
- the polishing process is performed stepwise, such as first grinding with an NC portal type flat surface grinder, followed by lap finishing using abrasive grains made of diamond or the like and a lapping machine.
- the Ra value after grinding by the NC portal type surface grinding machine is 0.76 0.82 / m
- the 1 & value after lapping is 0.10 0.44 ⁇ .
- the stone material 11 is cut out from a natural stone such as black granite.
- a recess 12 is formed at the center of the upper surface of the stone 11 by sandblasting using alumina powder or the like.
- the stone 11 is washed to remove oil and oxides on the surface, and subsequently, the portions other than the recesses 12 are masked. After masking, the stone 11 may be preheated. Then, the sprayed layer 13 is formed in the recess 12 by the above-described atmospheric plasma spraying.
- the swelling portion 14 is formed by spraying more thermal spray material than the volume of the recess 12.
- the bulging portion 14 of the thermal spray layer 13 is polished.
- minute irregularities on the surface are removed by an NC portal type surface grinder so that the Ra value of the surface is about 0.8 0.9 / zm.
- the surface is polished by lapping using an abrasive such as diamond and a lapping machine until the Ra value falls within the range of 0.10.6 ⁇ m.
- the surface of the sprayed layer 13 after finishing is almost mirror-like.
- the upper surface of the surface plate 10 manufactured by the above process is used as a reference surface for performing a precision measurement of a semiconductor, a liquid crystal, or the like or a work requiring accuracy.
- the surface plate 10 of the present embodiment is not limited to a surface plate dedicated to providing a reference surface for performing precision measurement and high-precision work, but includes a surface plate incorporated in the apparatus.
- the wear resistance of the platen 10 is improved. Therefore, even if the surface plate 10 is used for a long time, the surface surface of the surface plate 10 can be maintained at a high level.
- the production cost of the surface plate 10 of the present embodiment is lower than that of a conventional surface plate made of a ceramic material.
- the thermal spray layer 13 is formed from a predetermined thermal spray material. That is, the sprayed material is a ceramic having an average particle diameter in the range of 5 to 60 m and a hardness in the range of 100 to 1200 on the Vickers hardness scale. Therefore, the surface of the sprayed layer 13 has high wear resistance. Therefore, abrasion of the upper surface of the surface plate 10 is prevented, so that the surface surface of the surface plate 10 can maintain high surface accuracy even after long-term use.
- the surface accuracy of the sprayed layer 13 is set to 0.1 to 0.6 m as the Ra value indicating the center line average roughness, high surface accuracy can be maintained more effectively.
- the size of the stone 11 on which the sprayed layer 13 is formed is not limited.
- the thermal spray layer 13 can be formed on a part of the large stone 11 or on the entire surface of the stone 11.
- the depression 12 is formed on the surface of the stone 11 and the thermal spray layer 13 is formed in the depression 12, the peeling of the thermal spray layer 13 from the stone 11 is prevented.
- the adhesion of the sprayed material to the stone 11 is improved, and cracks and surface roughness due to rapid cooling of the thermal spray layer 13 are prevented.
- the upper surface of the thermal spray layer 13 is polished in a plurality of stages including lapping, higher surface accuracy can be obtained effectively.
- a coat layer may be provided between the stone material 11 and the thermal spray layer 13.
- the material of the coat layer is two It is desirable to use a nickel-aluminum alloy, molybdenum, or the like.
- the coating layer improves the adhesion between the stone material 11 and the thermal spray layer 13, so that the thermal spray layer 13 can be more reliably prevented from peeling off.
- the bulging portion 14 may be omitted, and the upper surface of the stone material 11 may be flush with the upper surface of the thermal spray layer 13. In this case, since there is no step at the boundary between the stone material 11 and the thermal spray layer 13, the entire upper surface of the surface plate 10 can be used as a work place.
- the recess 12 may be omitted, and the sprayed layer 13 may be formed on the upper surface of the stone 11. In this case, since the step of forming the recesses 12 is omitted, the manufacturing time of the surface plate 10 is reduced, and as a result, the surface plate 10 can be manufactured at lower cost.
- the sprayed layer 13 may be formed not only on the upper surface of the stone 11 but also on the entire outer surface of the stone 11. That is, the entire stone 11 may be coated with the thermal spray layer 13. In this case, the same high surface accuracy and abrasion resistance as the surface plate 10 of the present embodiment are maintained. Moreover, the surface plate can be manufactured at lower cost than the conventional ceramic surface plate.
- the recesses 12 may have a rough surface.
- the sprayed material is sprayed on the rough surface of the recess 12, so that the sprayed layer 13 is firmly joined to the stone 11.
- the shape of the stone 11 is a rectangular parallelepiped, but is not limited thereto.
- the shape of the stone material 11 may be a disk shape, a trapezoidal cross section, or a plate shape having a groove on its surface.
- the recesses 12 may be formed by sandblasting using powder of iron, stainless steel, aluminum, or the like, or by cutting.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Coating By Spraying Or Casting (AREA)
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU42906/99A AU4290699A (en) | 1998-06-30 | 1999-06-29 | Surface plate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18417898 | 1998-06-30 | ||
JP10/184178 | 1998-06-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000000328A1 true WO2000000328A1 (fr) | 2000-01-06 |
Family
ID=16148740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1999/003470 WO2000000328A1 (fr) | 1998-06-30 | 1999-06-29 | Plaque de surface |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU4290699A (ja) |
TW (1) | TW401343B (ja) |
WO (1) | WO2000000328A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007217748A (ja) * | 2006-02-16 | 2007-08-30 | Taiheiyo Cement Corp | マシナブルセラミックス基板への溶射皮膜の形成方法 |
CN115096675A (zh) * | 2022-06-07 | 2022-09-23 | 佛山科学技术学院 | 一种用于水下涡流检测的锆管标定样件及其制备方法 |
JP7412678B2 (ja) | 2020-03-16 | 2024-01-15 | 日本電気硝子株式会社 | ガラス板測定装置、ガラス板測定方法及びガラス板製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63161683U (ja) * | 1987-04-10 | 1988-10-21 | ||
JPH023381U (ja) * | 1988-06-09 | 1990-01-10 | ||
JPH0434268A (ja) * | 1990-05-30 | 1992-02-05 | Teikoku Piston Ring Co Ltd | 溶射ピストンリング |
JPH0551724A (ja) * | 1991-08-23 | 1993-03-02 | Toyota Motor Corp | 中空溶射層の形成方法 |
-
1999
- 1999-06-29 TW TW088110941A patent/TW401343B/zh not_active IP Right Cessation
- 1999-06-29 AU AU42906/99A patent/AU4290699A/en not_active Abandoned
- 1999-06-29 WO PCT/JP1999/003470 patent/WO2000000328A1/ja active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63161683U (ja) * | 1987-04-10 | 1988-10-21 | ||
JPH023381U (ja) * | 1988-06-09 | 1990-01-10 | ||
JPH0434268A (ja) * | 1990-05-30 | 1992-02-05 | Teikoku Piston Ring Co Ltd | 溶射ピストンリング |
JPH0551724A (ja) * | 1991-08-23 | 1993-03-02 | Toyota Motor Corp | 中空溶射層の形成方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007217748A (ja) * | 2006-02-16 | 2007-08-30 | Taiheiyo Cement Corp | マシナブルセラミックス基板への溶射皮膜の形成方法 |
JP7412678B2 (ja) | 2020-03-16 | 2024-01-15 | 日本電気硝子株式会社 | ガラス板測定装置、ガラス板測定方法及びガラス板製造方法 |
CN115096675A (zh) * | 2022-06-07 | 2022-09-23 | 佛山科学技术学院 | 一种用于水下涡流检测的锆管标定样件及其制备方法 |
CN115096675B (zh) * | 2022-06-07 | 2023-08-11 | 佛山科学技术学院 | 一种用于水下涡流检测的锆管标定样件及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
TW401343B (en) | 2000-08-11 |
AU4290699A (en) | 2000-01-17 |
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