WO1999062095A1 - Ecran d'affichage a ions de champ - Google Patents

Ecran d'affichage a ions de champ Download PDF

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Publication number
WO1999062095A1
WO1999062095A1 PCT/CN1999/000068 CN9900068W WO9962095A1 WO 1999062095 A1 WO1999062095 A1 WO 1999062095A1 CN 9900068 W CN9900068 W CN 9900068W WO 9962095 A1 WO9962095 A1 WO 9962095A1
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WO
WIPO (PCT)
Prior art keywords
plate
field ion
microchannel
electrode
ion emission
Prior art date
Application number
PCT/CN1999/000068
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English (en)
French (fr)
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WO1999062095A8 (fr
Inventor
En Ze Luo
Hong Luo
Wei Lou
Original Assignee
En Ze Luo
Hong Luo
Wei Lou
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by En Ze Luo, Hong Luo, Wei Lou filed Critical En Ze Luo
Priority to EP99920538A priority Critical patent/EP1081736B1/en
Priority to CA002332967A priority patent/CA2332967A1/en
Priority to US09/701,166 priority patent/US6570315B1/en
Priority to DE69921992T priority patent/DE69921992D1/de
Priority to AU38090/99A priority patent/AU3809099A/en
Priority to JP2000551414A priority patent/JP2002517067A/ja
Priority to KR1020007013161A priority patent/KR20010071308A/ko
Publication of WO1999062095A1 publication Critical patent/WO1999062095A1/zh
Publication of WO1999062095A8 publication Critical patent/WO1999062095A8/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/48—Electron guns
    • H01J29/482—Electron guns using electron multiplication
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/46—Arrangements of electrodes and associated parts for generating or controlling the electron beams

Definitions

  • the present invention relates to basic electrical components, and in particular to a field ion display (Held Ion Display, referred to as FID). It can be used for color or black-and-white flat panel display of TV or computer, and can also be used as other graphic display as required. Background technique
  • the wave of informationization is sweeping the world.
  • the display occupies an extremely important position.
  • the image quality is the best, and the cathode ray fluorescent picture tube CRT is still pushed.
  • the disadvantage of CRT is that it is too bulky and must be flattened.
  • the existing flat panel displays such as liquid crystal display LCD, plasma display PDP, and field emission display FED, have their own disadvantages in principle and technology.
  • the common disadvantage is that the image quality is not high. , The process is difficult, so the cost performance ratio can not reach the level of CRT.
  • LCD uses electrical signals to change the arrangement of liquid crystal molecules and modulate external light to achieve display purposes.
  • PDP which uses gas glow discharge to generate ultraviolet light to excite color phosphors to emit light, but because its glow affects the color purity of the image, and to ensure brightness, the pixels cannot be made too small, so it is in the color fidelity and It is impossible to reach the level of CRT in terms of clarity.
  • large-screen TVs of about 1 square meter are made, but because of their low cost performance, the outlook is not optimistic.
  • An object of the present invention is to provide a field ion display screen FID, which is provided with a field ion emission plate, a micro-channel plate, and a fluorescent display plate, which can have good color image quality, high efficiency, and low cost, and can overcome the foregoing problems. There are deficiencies in technology. Summary of the Invention
  • the present invention adopts the following technical solutions:
  • a field ion display screen having a fluorescent display panel 3 is characterized in that:
  • a field ion emission plate 1 and a microchannel plate 2 are also provided.
  • the field ion emission plate 1, the microchannel plate 2 and the fluorescent display plate 3 are sequentially spaced apart by a certain gap, and are arranged in parallel to face the combination. Sealed, filled with thin gas;
  • the field ion emission plate 1 has an X-column line electrode series 4 deposited on the inner side of the field ion emission plate 1.
  • the X-column line electrodes are all formed by connecting a plurality of slender strip electrodes in parallel;
  • the microchannel plate 2 has a Y line electrode series 5 vapor-deposited on one side opposite to the field ion emission plate 1 and an accelerating electrode 6 on the other side.
  • each Y The row-line electrodes are orthogonally opposed to the X-column line electrodes on the field ion emission plate 1, respectively forming an addressing point, and on the microchannel plate 2, each of the addressing points penetrates a plurality of microchannel holes 8;
  • the inner side of the fluorescent display panel 3 is directly facing each of the site selection points, and high-pressure color phosphor pixels 9 are processed, and a thin aluminum film is vapor-deposited thereon as the screen electrode 7.
  • the field ion emission plate 1 and the micro-channel plate 2 are each made of an insulating material as a substrate.
  • the fluorescent display 3 uses a transparent insulating material as a substrate.
  • the X-Y electrode series 4, 5 use X-Y coding to select the address, the leads of the X-Y electrode series, the leads of the acceleration electrode 6 and the leads of the screen electrode 7 are all left in the sealed field.
  • the thin gas filled therein is an inert gas ( ⁇ ⁇ 4 ⁇ ⁇ - 5 ).
  • a method for manufacturing a field ion display screen includes a fluorescent display panel 3, which is characterized in that: a field ion emission panel 1 and a microchannel plate 2 are further provided, which include the following steps:
  • an X-column line electrode series 4 is vapor-deposited, and each of the column-line electrodes is formed by a plurality of spike-shaped elongated electrodes in parallel;
  • the line electrode series 5 is vapor-deposited on the side opposite to the field ion emission plate 1, and the acceleration electrode 6 is evaporated on the other side.
  • each The line electrode and the X column line electrodes on the field ion emission plate 1 are orthogonally opposed to each other to form an addressing point.
  • each of the addressing points penetrates a plurality of microchannel holes 8. ;
  • the fluorescent display panel 3 On the inside of the fluorescent display panel 3 is directly facing each site, high-pressure color phosphor pixels 9 of three primary colors of red, green, and blue are processed, and a thin aluminum film is evaporated as a screen electrode 7;
  • the field ion emission plate 1, the micro-channel guide plate 2, and the fluorescent display plate 3 are spaced apart in order from each other, and are arranged in parallel to face the combination.
  • the periphery is sealed, and a thin inert gas (10 ⁇ 4 ⁇ 10 ⁇ 5 ) is filled in.
  • the X — ⁇ electrode series 4, 5 use X— ⁇ coding to select the address.
  • the field ion emission plate 1 and the micro-channel plate 2 each use an insulating material as a substrate, and the fluorescent display plate 3 uses a transparent insulating material as a substrate.
  • the mechanism of the field ion display screen of the present invention is as follows:
  • the inert gas atoms near the site on the emission board are ionized to generate a positive field ion emission, which forms a positive ion current, which is accelerated by the electric field and penetrates the microchannel.
  • the hole 8 hits the wall of the hole, causing multiple secondary electron emission to multiply, and is accelerated by the acceleration electrode 6 at the other end of the microchannel hole 8 to form a strong electron beam. After flying out of the microchannel hole 8, it is then screen electrode 7 Accelerate and focus, bombard The high-pressure color phosphor pixels corresponding to the light screen are illuminated and imaged.
  • Field ion emission is easier to achieve than field electron emission. This is because when a gas molecule is near the tip of a charged conductor, it is polarized to form a dipole and is attracted to a small distance. The field strength between it and the tip can be Actively step up to a large value to ionize the gas atoms. Therefore, the emitter of the field ion display screen (FID) of the present invention does not need to be made into a conical array with grid holes, it only needs to be made into a series of spike-shaped strips. The grid holes are at the entrance of the microchannel plate, and the field ions The display does not require ultra-high vacuum, which makes the FID processing process much simpler than FED. Therefore, the field ion display (FID) can overcome the disadvantages of the FED processing of the field emission display, the uneven emission, low yield, and high price. ;
  • the field ion display of the present invention uses a microchannel plate to convert a positive ion current into a strong electron beam, which can directly excite high-pressure color phosphors, and the microchannel plate is used for color separation, and the color image quality can reach the cathode ray.
  • Level of tube (CRT) and its structure is simple, no additional parts, low cost, and has the potential advantages of competing with CRT and LCD;
  • the field ion display screen of the present invention uses field ion cold emission, has no preheating delay, consumes little energy, and works in a gas dark discharge area.
  • the power it consumes is almost all used to accelerate ions and electrons, so power consumption Very low. Can reach the equivalent level of LCD.
  • the field ion display screen of the present invention has high definition, and can achieve 100 pixels per square millimeter, reaching the same level of FED.
  • FIG. 1 is an overall structural diagram of the present invention
  • FIG. 2 is a schematic diagram of a partial structure of the present invention. The best mode of the present invention:
  • the back plate 1 is a field ion emission plate
  • the panel 3 is a fluorescent display plate
  • the inner plate 2 between the back plate 1 and the panel 3 is a microchannel plate.
  • the field ion emission plate 1, the micro-channel plate 2, and the fluorescent display plate 3 are made of insulating materials, for example, glass materials can be used.
  • each X-column line electrode series 4 is vapor-deposited, and each X-column line electrode is formed by a plurality of (for example, a dozen or so) spike-shaped elongated electrodes connected in parallel.
  • the opposite side of the microchannel plate 2 and the field ion emission plate 1 is in the direction of the arrangement of the microchannel holes.
  • a Y-line electrode series 5 is vapor-deposited, and an acceleration electrode 6 is vapor-deposited on the other side.
  • each Y row line electrode and each X column line electrode on the field ion emission plate 1 are orthogonally opposed to each other to form an addressing point.
  • each of the addressing points runs through There are a plurality of microchannel holes 8 having a diameter of several tens of micrometers. These microchannel holes 8 pass through the microchannel plate 2 at an angle perpendicular to the microchannel plate, and the angle may be 5 ° to 20 °.
  • the inner side of the fluorescent display panel 3 is directly facing each site, and processed with high-pressure color phosphor pixels 9 with three primary colors of red, green, and blue, and a thin aluminum layer (0.05 to 0.1 4 11) is vapor-deposited thereon as a screen. Pole 7.
  • the gap between the field ion emission plate 1 and the microchannel plate 2 is several micrometers, and the gap between the microchannel plate 2 and the fluorescent display plate 3 is several hundred micrometers, which are sequentially faced in parallel, and the periphery is sealed.
  • each plate electrode lead left out, so that the drive circuit is connected to the display screen, which the inert gas filling lean (10_ 4 to 5 ⁇ 10) as the imaging gas, the gas should be selected image forming low ionization potential, electron negative
  • An inert gas with a large affinity and a small atomic number can also introduce a small amount of molecular gas into it. It becomes the overall structure shown in FIG.
  • the total thickness of the display screen is 5 mm to 20 mm according to the size of the screen.
  • the field ion emission plate 1 has X column line electrode series 4 with field ion evaporated and etched, and the center distance between each two X column line electrodes. And the width of each column line can be determined according to the required clarity of the display. For example, when the resolution of the display is required to be 100 pixels per square millimeter, the center distance between the two X-column lines should be 100 microns, and the width of each X-column line can be 60 microns. It consists of more than a dozen 1 ⁇ 2 micron wide slender slender electrodes in parallel.
  • the microchannel plate 2 has a thickness of about 2 millimeters.
  • a Y-row line electrode series 5 is vapor-deposited on the side of the microchannel plate 2 opposite to the field ion emission plate 1.
  • the center distance of each two Y-row lines and each The width of each of the Y row lines is the same as the center distance of the X column line electrodes on the transmitting board 1 and the width of each X row line.
  • Each Y row line electrode is orthogonally opposed to the X column line electrode and constitutes One site, each site contains a number of microchannel holes (grid holes) 8 with a diameter of about 10-50 microns, and the microchannel holes 8 are at an angle (such as 5 ° to 20 °) perpendicular to the microchannel plate. °)
  • the entire microchannel plate 2 is penetrated, and the acceleration electrode 6 is vapor-deposited on the other side of the microchannel plate 2.
  • the inside of the fluorescent display panel 3 is directly facing each site, and the high-pressure color phosphor pixels 9 with three primary colors of red, green, and blue are processed, and an aluminum film with a thickness of about 0.1 micron is evaporated as a screen electrode. 7.
  • the processing technology is basically similar to that of the color phosphor screen in the CRT.
  • the inert gas molecules near the site on the emission board are ionized to generate positive field ion emission, which forms a positive ion current and is accelerated by the electric field.
  • the microchannel hole 8 hits the wall of the hole, causing multiple secondary electron emission to multiply, forming an electron flow and being accelerated by the acceleration electrode 6 at the other end of the microchannel hole 8, forming a strong electron beam. After flying out of the microchannel hole 8, It is accelerated and focused by the screen electrode 7 again.
  • the microchannel plate has the same color separation effect as the shadow mask plate in the CRT.
  • the electrons bombard the red, green, and green corresponding to the phosphor screen.
  • the blue pixels emit light to form a color image.
  • the field ion display in the present invention uses an inert gas, so it has no chemical effect on other materials in the display, and the inert gas has a negative electron affinity, and it is easy to form positive ions.
  • the electron flow is accelerated by the electric field and bombards the fluorescent screen
  • the positive ions accelerate in the reverse direction and do not bombard the phosphor screen, causing damage to the phosphor screen.
  • a display screen with a diagonal of 150 mm is taken as an example.
  • the DC voltage of each electrode is:
  • Y line electrode 5 on microchannel plate 2 0V (ground)
  • Acceleration electrode 6 on the microchannel plate 2 + 1000V
  • the X-Y code is used for address selection.
  • a bias voltage is applied between the Xi column line and the ⁇ row line, and the signal voltage, the inert gas atoms at the address point ( ⁇ ,, ⁇ are ionized to form a signal that changes according to the strength of the signal. Positive ion current is emitted.
  • the secondary electron emission multiplication of the micro-channel hole 8 and the voltage across it are used to convert the ion current into a strong electron current.
  • the high voltage on the screen electrode 7 is used to further strengthen the electron beam energy and directly excite the high-pressure color phosphor.
  • the color separation of the microchannel plate 2 is used to realize color image display.
  • the above embodiment mainly uses a display screen with a diagonal of 150 mm as an example. If the diagonal size is changed, the above parameters will also be changed accordingly.
  • the present invention has a wide range of uses due to its simple processing technology, low cost, high efficiency, and high-quality color images.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Description

场离子显示屏 技术领域
本发明涉及基本电气元件， 具体地说是一种场离子显示屏（Held Ion Display 简称 FID) 。 其可用于电视机或计算机的彩色或黑白平 板显示， 也可根据需要用作其它图文显示。 背景技术
当前， 信息化浪潮正席卷全球。 作为人机交换信息的窗口， 显 示器占有极其重要的地位。 目前各种显示器中， 图象质量最优良的， 仍推阴极射线荧光显象管 CRT。 但 CRT的缺点是体积过大， 必需实 现平板化。 而现有的各种平板显示屏， 如液晶显示屏 LCD, 等离子 体显示屏 PDP和场发射显示屏 FED 等， 由于在原理和技术上存在 各自的困难， 其共同的缺点是图象质量不高， 工艺难度大， 因此性 能价格比都达不到 CRT 的水平。 例如 LCD, 利用电信号改变液晶 分子排列， 调制外界光照以实现显示目的， 当前日本虽已将这一技 术发展到了十分成熟的地步， 占领了全世界 95 %的市场。 但至今它 的图象质量在许多指标方面都达不到 CRT的水平， 虽其驱动电压和 功耗低， 但由于必需采用背光源， 故总体电压和功耗并不低。 又如 PDP， 利用气体辉光放电产生紫外线以激发彩色荧光粉发光， 但因 其辉光影响图象的色纯度， 又为保证亮度， 象素不能作得太小， 故 它在彩色逼真度和清晰度上都不可能达到 CRT的水平。 目前多作成 1 平方米左右的大屏幕电视， 但因其性价比低， 前景不容乐观。 又 如当前国际上最先进的 FED, 它将 CRT中的热电子枪改换为平面场 电子发射尖端阵列， 应是 CRT平板化的优良方案， 但由于尖端阵列 工艺难度大， 大面积均匀发射电子困难， 且电子束流能量低， 只能 激发低压彩色荧光粉， 其彩色逼真度， 远达不到 CRT的水平， 而且 其要求超高真空， 造价太高， 故 90年代以来， 国际上虽集中了雄厚 的资金和技术， 全力开发， 但仍迟迟未能进入市场。
本发明的目的在于提供一种场离子显示屏 FID, 其设有场离子 发射板、 微通道板和 荧光显示板， 其可具有彩色图象质量好、 功效 高、 且造价低， 能克服上述己有技术中的不足。 发明内容
为达到上述目的， 本发明采取以下技术方案：
场离子显示屏， 其具有荧光显示板 3， 其特征在于：
还设有场离子发射板 1和微通道板 2， 其由所述场离子发射板 1、 所述微通道板 2和所述荧光显示板 3依次相隔一定间隙， 平行面对 组合设置， 且周边密封， 内充有稀薄气体；
所述场离子发射板 1， 其内侧蒸镀有 X列线电极系列 4， 每一条
X列线电极都由多条尖劈形细长条电极并联而成；
所述微通道板 2， 其与所述场离子发射板 1相对的一面蒸镀有 Y 行线电极系列 5， 另一面蒸镀有加速电极 6， 在所述微通道板 2上， 在各 Y行线电极与场离子发射板 1上的各 X列线电极正交相对处， 分别构成一个选址点， 在微通道板 2 上， 所述各选址点贯穿有多个 微通道孔 8;
所述荧光显示板 3 的内侧正对每一个选址点， 加工有高压彩色 荧光粉象素 9， 并在其上蒸镀有薄铝膜， 作为屏极 7。
所述的场离子显示屏， 其特征在于：
所述场离子发射板 1和所述微通道板 2分别由绝缘材料作基板。 而荧光显示屏 3用透明绝缘材料作基板。
所述的场离子显示屏， 其特征在于：
所述 X— Y电极系列 4、 5采用 X— Y编码选址， 所述 X— Y电 极系列的引线、 加速电极 6 的引线和屏极 7 的引线都留在密封场离 子显示屏的外面， 以便与该显示屏的驱动电路连接。
所述的场离子显示屏， 其特征在于：
其内充稀薄气体为惰性气体 （ιο·4〜ιο-5 ) 。
一种场离子显示屏的制造方法， 其包括荧光显示板 3， 其特征在 于： 还设有场离子发射板 1和微通道板 2, 其包括以下步骤：
在所述场离子发射板 1 内侧， 蒸镀有 X列线电极系列 4， 其每 条列线电极都由多条尖劈形细长条电极并联形成；
在所述微通道板 2上， 与场离子发射板 1相对的一面上蒸镀有 Υ行线电极系列 5， 其另一面上蒸鍍有加速电极 6， 在所述微通道板 2上,各 Υ行线电极和场离子发射板 1上的各 X列线电极正交相对处， 分别构成一个选址点， 在微通道板 2 上， 所述各选址点贯通有多个 微通道孔 8 ;
在所述荧光显示板 3 的内侧正对每个选址点， 加工有红、 绿、 兰三原色相间的高压彩色荧光粉象素 9， 并蒸镀有薄铝膜作为屏极 7; 将所述场离子发射板 1、 微通导板 2和荧光显示板 3依次相隔 一定间隙， 平行面对组合设置， 将其周边密封， 内充有稀薄惰性气 体 （10·4〜10·5 ) ， 所述 X— Υ电极系列 4、 5采用 X— Υ编码选址。
所述的场离子显示屏的制造方法， 其特征在于：
所述场离子发射板 1 和所述微通道板 2分别采用绝缘材料作基板， 荧光显示板 3采用透明绝缘材料作基板。 本发明的场离子显示屏的机理如下：
当某一选址点 （¾， Yj ) 加有信号电压时， 发射板上的选址点 附近的惰性气体原子被电离产生正场离子发射， 形成正离子流， 并 被电场加速， 穿入微通道孔 8 撞击到孔壁上， 引起多重二次电子发 射倍增， 并被微通道孔 8另一端的加速电极 6加速， 形成强电子束 流， 由微通道孔 8 飞出后， 再被屏幕电极 7加速并聚焦， 轰击到荧 光屏对应的高压 彩色荧光粉象素上发光成象。
本发明具有如下优点：
( 1 ) 场离子发射比场电子发射容易实现， 这是因为当气体分子 靠近带电导体尖端时， 被极化形成偶极子， 并被吸引到很小的距离, 它与尖端间的场强可主动加强到很大的值， 使气体原子电离。 故本 发明的场离子显示屏（FID)的发射极不必作成带有栅孔的尖锥阵列， 只需作成尖劈形长条系列即可， 其栅孔在微通道板的入口， 而且场 离子显示屏不要求超高真空,从而使 FID加工工艺比 FED大为简化， 故场离子显示屏 （FID) 能够克服场发射显示屏 FED 加工难度大， 发射不均匀， 成品率低， 价格昂贵等缺点；
( 2 ) 本发明的场离子显示屏利用微通道板将正离子流转换为强 电子束流， 可直接激发高压彩色荧光粉， 而且利用微通道板进行分 色,彩色图象质量可达到阴极射线管 （CRT) 的水平， 且其结构简单， 无附加零件， 成本低， 具有与 CRT和 LCD竞争的潜在优势；
( 3 )本发明的场离子显示屏采用场致离子冷发射， 无预热延迟， 消耗能量小， 且工作在气体暗放电区， 其消耗的电能几乎全部用于 加速离子和电子， 故功耗很低。 能够达到 LCD的同等水平。
(4) 本发明的场离子显示屏具有很高的清晰度， 能够作到每平 方毫米 100个象素， 达到 FED同等水平。
( 5 ) 加大微通道板的厚度， 并按微通道板厚度与微通道孔的孔 径的比例为 40: 1 来加大微通道孔的直径， 可做成大面积的微通道 板。 因此本发明的场离子显示屏容易实现大屏幕化。 附图简述
图 1是本发明的整体结构图；
图 2是本发明的局部结构示意图； 本发明的最佳实施方式：
图 1， 图 2中， 背板 1是场离子发射板， 面板 3是荧光显示板， 背板 1 与面板 3之间的内板 2为微通道板。 所述场离子发射板 1、 微通道板 2和荧光显示板 3 分别采用绝缘材料制成， 例如， 可采用 玻璃材料。
场离子发射板 1 的内侧蒸镀有 X列线电极系列 4， 每一条 X列 线电极都由多条 （例如可为十几条） 尖劈形细长条电极并联而成。 其表面功函数愈大愈好， 例如镀铂膜或溅射类石墨膜等。 以增大其 功函数。
微通道板 2与场离子发射板 1 相对的一面顺微通道孔排列方向 蒸镀有 Y行线电极系列 5， 另一面蒸镀有加速电极 6。
在微通道板 2上， 各 Y行线电极和场离子发射板 1上各 X列线 电极正交相对处， 分别构成一个选址点， 在微通道板 2 上， 所述各 选址点贯穿有直径为几十微米的多个微通道孔 8， 这些微通道孔 8 以与微通道板垂直方向成一定角度穿过微通道板 2， 该角度可为 5 ° 〜20° 。
荧光显示板 3 的内侧正对每个选址点， 加工有红、 绿、 兰三原 色相间的高压彩色荧光粉象素 9， 其上蒸镀有薄铝层(0.05〜0.1 4 11 )， 作为屏极 7。
图 2中， 将场离子发射板 1与微通道板 2相隔间隙为几个微米， 而微通道板 2与荧光显示板 3相隔间隙为数百微米， 依次平行面对 组合， 其周边密封，将各板电极的引线留在外面， 以便与显示屏的驱 动电路相连接， 其内充稀薄惰性气体 (10_4~10·5)作为成像气体， 该成 象气体应选择离化势低,负电子亲和势大， 且原子序数小的惰性气 体， 也可在其中惨入少量的分子性气体。 则成为图 1 所示的整体结 构， 其中 10是微通道板 2上的 Υ行线电极的引出线， 1 1是场离子 发射板 1上的 X列线电极的引出线， 采用 X— Υ编码选址。 显示屏的总厚度根据屏面大小为 5毫米至 20毫米， 其中场离子 发射板 1上蒸镀和刻蚀有发射场离子的 X列线电极系列 4， 每两条 X 列线电极的中心距和每条列线的宽度可根据显示屏要求的清晰度 而定。 例如要求显示屏的清晰度为每平方毫米 100 个象素时， 则两 条 X列线的中心距应为 100微米， 每条 X列线的宽度可取 60微米， 又每一条 X列线电极实际由十几条 1〜2 微米宽的尖劈形细长条电 极并联而成。
所述微通道板 2， 其厚度约为 2毫米， 在微通道板 2上正对场离 子发射板 1的一面蒸镀有 Y行线电极系列 5， 每两条 Y行线的中心 距和每条 Y行线的宽度， 与发射板 1上的 X列线电极的中心距和每 条 X行线的宽度相同， 每条 Y行线电极上， 与 X列线电极正交相对 处， 分别构成一个选址点， 每个选址点包含有多个直径约 10〜50微 米的微通道孔 （栅孔） 8， 微通道孔 8以与微通道板垂直方向成一定 角度 （如 5 ° 〜20° ) 穿通整个微通道板 2， 微通道板 2的另一面蒸 镀有加速电极 6。
所述荧光显示板 3， 其内侧正对每个选址点， 加工有红、 绿、 兰 三原色相间的高压彩色荧光粉象素 9，并蒸镀有约 0.1微米厚的铝膜， 作为屏幕电极 7， 且作为荧光粉的保护层与反光层， 其加工工艺与 CRT中彩色荧光屏的加工工艺基本类似。
当某一选址点 （Xi， Yj ) 加有偏压和信号电压时， 发射板上的 选址点附近的惰性气体分子被电离产生正场离子发射， 形成正离子 流并被电场加速， 穿入微通道孔 8 撞击到孔壁上， 引起多重二次电 子发射倍增， 形成电子流并被微通道孔 8另一端的加速电极 6加速， 形成强电子束流， 由微通道孔 8飞出后， 再被屏幕电极 7加速并聚 焦。 微通道板除能将离子流转换成强电子流之外， 而且具有与 CRT 中荫罩板相同的分色作用， 利用微通道板 2 的分色作用,电子轰击到 荧光屏对应的红、 绿、 兰象素上发光， 形成彩色图象。 本发明中的场离子显示屏， 采用惰性气体， 因此对显示屏内的 其他材料不产生化学作用， 而且惰性气体具有负电子亲合势， 容易 形成正离子， 当电子流被电场加速轰击荧光屏时， 正离子反向加速， 不致轰击荧光屏， 造成对荧光屏的损坏。
本实施例中， 是以对角线为 150mm的显示屏为例， 各电极的直 流电压为：
场离子发射板 1上的 X列线电极 4: +30V〜300V
微通道板 2上的 Y行线电极 5 : 0V (接地）
微通道板 2上的加速电极 6 ： + 1000V
荧光显示板 3上的屏极 7： +6000V
采用 X— Y编码选址， 当 Xi列线与 η行线间加有偏压， 以及信 号电压时， 选址点 （χ,, γ 间的惰气体原子被电离， 形成按信号强 弱变化的正离子流发射。
利用微通道孔 8 的二次电子发射倍增以及其两端电压将离子流 转换为强电子流。
利用屏极 7 上的高压， 进一步加强电子束流能量， 直接激发高 压彩色荧光粉。
利用微通道板 2的分色作用， 实现彩色图象显示。
利用增大微通道孔 8 的直径， 并按比例 （1 : 40 ) 增大微通道板
2 的厚度， 以增大微通板 2 的面积， 从而实现场离子显示屏的大屏 幕化。 以上实施例主要是以对角线为 150mm的显示屏为例， 若对角 线尺寸改变， 以上各参数也将做相应变化。 工业实用性
如上所述， 本发明由于加工工艺简单、 成本低， 效率高且又能 实现高质量彩色图象， 因此， 具有广泛的使用价值。

Claims

权利要求书
1、 场离子显示屏， 其具有荧光显示板 （3) ， 其特征在于： 还设有场离子发射板 （1) 和微通道板 （2) , 其由所述场离子发 射板 （1) 、 所述微通道板 （2) 和所述荧光显示板 （3) 依次相隔一 定间隙，平行面对组合设置， 且周边密封， 内充有稀薄气体；
所述场离子发射板 （1) ， 其内侧蒸镀有 X列线电极系列 （4) ， 每一条 X列线电极都由多条尖劈形细长条电极并联而成；
所述微通道板 （2) ， 其与所述场离子发射板 （1) 相对的一面 蒸镀有 Y行线电极系列 （5) ， 另一面蒸镀有加速电极 （6) ， 在所 述微通道板 （2) 上， 各 Y行线电极与场发射板 （1) 上的各 X列线 电极正交相对处， 分别构成一个 X— Y编码选址点， 在微通道板（2) 上， 所述各选址点贯穿有多个微通道孔 （8) ；
所述荧光显示板 （3) 的内侧对应于上述各选址点， 加工有高压彩色 荧光粉象素 （9) ， 所述荧光粉象素 （9) 上蒸镀有薄铝膜， 作为屏 极 （7) 。 ·
2、 如权利要求 1所述的场离子显示屏， 其特征在于：
所述场离子发射板 （1) 和所述微通道板 （2) 分别由绝缘材料 作基板， 而荧光显示板 （3) 由透明绝缘材料作基板。
3、 如权利要求 1所述的场离子显示屏， 其特征在于：
所述 X— Y电极系列 （4、 5) 采用 X—Y编码选址， 所述 X— Y 电极系列的引线、 加速电极 （6) 的引线和屏极 （7) 的引线都留在 密封显示屏的外面， 以便与显示屏驱动电路连接。
4、 如权利要求 1所述的场离子显示屏， 其特征在于：
其内充稀薄气体为惰性气体 （10_4~10-5 ) 。
5、 一种场离子显示屏的制造方法， 其包括荧光显示板 （3) ， 其特征在于： 还设有场离子发射板 （1) 和微通道板 （2) ，其包括以 下步骤： 在所述场离子发射板 （1) 内侧， 蒸镀有 X列线电极系列 （4) ， 其每一条 X列线电极都由多条尖劈形细长条电极并联形成；
在所述微通道板 （2) 上， 与场离子发射板 （1) 相对的一面上 蒸镀有 Y行线电极系列 （5) ， 其另一面上蒸镀有加速电极 （6) ， 在所述微通道板 （2) 上,各 Y行线电极与场离子发射板 （1) 上各 X 列线电极正交相对处， 分别构成一个选址点， 所述各选址点在微通 道板 （2) 上贯通有多个微通道孔 （8) ；
在所述荧光显示板 （3) 的内侧正对所述各选址点， 加工有红、 绿、兰三原色相间的高压彩色荧光粉象素（9)， 所述荧光粉象素（9) 上蒸镀有薄铝膜， 作为屏极 （7) ；
将所述场离子发射板 （1) 、 微通导板 （2) 和荧光显示板 （3) 相隔 一定间隙， 依次平行面对组合设置， 将其周边密封， 内充有稀薄惰 性气体 （ΙίΤ^ΙΟ-5 ） 。
6、如权利要求 4所述的场离子显示屏的制造方法，其特征在于： 所述场离子发射板 （1) 所述微通道板 （2) 分别采用绝缘材料作基 板， 而荧光显示板 （3) 采用透明绝缘材料作基板。
7、 如权利要求 4所述的场离子显示屏的制造方法， 其特征在于： 所述 Χ-Υ电极系列采用 X— Υ编码选址。
PCT/CN1999/000068 1998-05-22 1999-05-12 Ecran d'affichage a ions de champ WO1999062095A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
EP99920538A EP1081736B1 (en) 1998-05-22 1999-05-12 Field ion display device
CA002332967A CA2332967A1 (en) 1998-05-22 1999-05-12 Field ion display device
US09/701,166 US6570315B1 (en) 1998-05-22 1999-05-12 Field ion display device
DE69921992T DE69921992D1 (de) 1998-05-22 1999-05-12 Feldionen anzeigevorrichtung
AU38090/99A AU3809099A (en) 1998-05-22 1999-05-12 Field ion display device
JP2000551414A JP2002517067A (ja) 1998-05-22 1999-05-12 フィールドイオンディスプレイ装置
KR1020007013161A KR20010071308A (ko) 1998-05-22 1999-05-12 필드 이온 디스플레이 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN98232734U CN2340088Y (zh) 1998-05-22 1998-05-22 场离子显示屏
CN98232734.X 1998-05-22

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AU (1) AU3809099A (zh)
CA (1) CA2332967A1 (zh)
DE (1) DE69921992D1 (zh)
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CN2340088Y (zh) 1999-09-22
EP1081736B1 (en) 2004-11-17
EP1081736A1 (en) 2001-03-07
CA2332967A1 (en) 1999-12-02
EP1081736A4 (en) 2003-02-05
DE69921992D1 (de) 2004-12-23
RU2000129516A (ru) 2002-11-27
CN1120515C (zh) 2003-09-03
AU3809099A (en) 1999-12-13
CN1302446A (zh) 2001-07-04
KR20010071308A (ko) 2001-07-28

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