WO1999040397A1 - Device at piezoelectric crystaloscillator - Google Patents
Device at piezoelectric crystaloscillator Download PDFInfo
- Publication number
- WO1999040397A1 WO1999040397A1 PCT/SE1999/000051 SE9900051W WO9940397A1 WO 1999040397 A1 WO1999040397 A1 WO 1999040397A1 SE 9900051 W SE9900051 W SE 9900051W WO 9940397 A1 WO9940397 A1 WO 9940397A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- oscillators
- crystal
- piezoelectric
- frequency
- oscillator
- Prior art date
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 66
- 239000000463 material Substances 0.000 claims description 15
- 230000010355 oscillation Effects 0.000 claims description 13
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000003909 pattern recognition Methods 0.000 claims description 2
- 230000001419 dependent effect Effects 0.000 claims 2
- 238000004381 surface treatment Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 16
- 238000003380 quartz crystal microbalance Methods 0.000 description 12
- 238000005259 measurement Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 241000219495 Betulaceae Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002494 quartz crystal microgravimetry Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011345 viscous material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/13—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing having piezoelectric or piezoresistive properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU24449/99A AU2444999A (en) | 1998-01-23 | 1999-01-15 | Device at piezoelectric crystal oscillator |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9800189-4 | 1998-01-23 | ||
| SE9800189A SE9800189L (sv) | 1998-01-23 | 1998-01-23 | Anordning vid en piezoelektrisk kristalloscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1999040397A1 true WO1999040397A1 (sv) | 1999-08-12 |
Family
ID=20409960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/SE1999/000051 WO1999040397A1 (sv) | 1998-01-23 | 1999-01-15 | Device at piezoelectric crystaloscillator |
Country Status (3)
| Country | Link |
|---|---|
| AU (1) | AU2444999A (sv) |
| SE (1) | SE9800189L (sv) |
| WO (1) | WO1999040397A1 (sv) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2410645A (en) * | 2004-01-30 | 2005-08-03 | Smiths Group Plc | Multi resonant frequency transducer for acoustic level gauging |
| WO2011029593A1 (de) | 2009-09-09 | 2011-03-17 | Andreas Hettich Gmbh & Co. Kg | Vorrichtung zur durchführung von tests zur hämostase |
| WO2011033285A1 (en) | 2009-09-18 | 2011-03-24 | Cambridge Enterprise Limited | Apparatus and method for detecting target species in an analyte |
| WO2012076827A1 (fr) | 2010-12-10 | 2012-06-14 | Universite De Technologie De Troyes | Systeme et procede de detection d'especes biologiques ou chimiques bases sur un qcm transducteur |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2100950A (en) * | 1981-06-23 | 1983-01-06 | Standard Telephones Cables Ltd | Crystal filter |
| US4547748A (en) * | 1984-08-13 | 1985-10-15 | The United States Of America As Represented By The Secretary Of The Army | Frequency synthesizer using a matrix of selectable piezoelectric resonators |
| US4596697A (en) * | 1984-09-04 | 1986-06-24 | The United States Of America As Represented By The Secretary Of The Army | Chemical sensor matrix |
| US4760351A (en) * | 1986-08-22 | 1988-07-26 | Northern Illinois University | Multiple oscillator device having plural quartz resonators in a common quartz substrate |
| US4991151A (en) * | 1987-04-28 | 1991-02-05 | Edap International | Elastic pulse generator having a desired predetermined wave form |
| US4999284A (en) * | 1988-04-06 | 1991-03-12 | E. I. Du Pont De Nemours And Company | Enzymatically amplified piezoelectric specific binding assay |
| US5112342A (en) * | 1989-03-09 | 1992-05-12 | U.S. Philips Corp. | Depilator |
| US5200714A (en) * | 1990-07-07 | 1993-04-06 | Asahi Dempa Co., Ltd. | Crystal oscillator with quartz vibrator having temperature detecting faculty, quartz vibrator for use therein, and method of measuring temperature using quartz vibrator |
| WO1996035103A1 (en) * | 1995-05-04 | 1996-11-07 | Michael Rodahl | A piezoelectric crystal microbalance device |
| EP0783205A1 (en) * | 1995-07-27 | 1997-07-09 | Daishinku Corporation | Multiple-mode piezoelectric filter |
-
1998
- 1998-01-23 SE SE9800189A patent/SE9800189L/sv not_active Application Discontinuation
-
1999
- 1999-01-15 AU AU24449/99A patent/AU2444999A/en not_active Abandoned
- 1999-01-15 WO PCT/SE1999/000051 patent/WO1999040397A1/sv active Application Filing
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2100950A (en) * | 1981-06-23 | 1983-01-06 | Standard Telephones Cables Ltd | Crystal filter |
| US4547748A (en) * | 1984-08-13 | 1985-10-15 | The United States Of America As Represented By The Secretary Of The Army | Frequency synthesizer using a matrix of selectable piezoelectric resonators |
| US4596697A (en) * | 1984-09-04 | 1986-06-24 | The United States Of America As Represented By The Secretary Of The Army | Chemical sensor matrix |
| US4760351A (en) * | 1986-08-22 | 1988-07-26 | Northern Illinois University | Multiple oscillator device having plural quartz resonators in a common quartz substrate |
| US4991151A (en) * | 1987-04-28 | 1991-02-05 | Edap International | Elastic pulse generator having a desired predetermined wave form |
| US4999284A (en) * | 1988-04-06 | 1991-03-12 | E. I. Du Pont De Nemours And Company | Enzymatically amplified piezoelectric specific binding assay |
| US5112342A (en) * | 1989-03-09 | 1992-05-12 | U.S. Philips Corp. | Depilator |
| US5200714A (en) * | 1990-07-07 | 1993-04-06 | Asahi Dempa Co., Ltd. | Crystal oscillator with quartz vibrator having temperature detecting faculty, quartz vibrator for use therein, and method of measuring temperature using quartz vibrator |
| WO1996035103A1 (en) * | 1995-05-04 | 1996-11-07 | Michael Rodahl | A piezoelectric crystal microbalance device |
| EP0783205A1 (en) * | 1995-07-27 | 1997-07-09 | Daishinku Corporation | Multiple-mode piezoelectric filter |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2410645A (en) * | 2004-01-30 | 2005-08-03 | Smiths Group Plc | Multi resonant frequency transducer for acoustic level gauging |
| WO2011029593A1 (de) | 2009-09-09 | 2011-03-17 | Andreas Hettich Gmbh & Co. Kg | Vorrichtung zur durchführung von tests zur hämostase |
| DE102009040880A1 (de) | 2009-09-09 | 2011-03-31 | Andreas Hettich Gmbh & Co. Kg | Vorrichtung zur Durchführung von Tests zur Hämostase |
| WO2011033285A1 (en) | 2009-09-18 | 2011-03-24 | Cambridge Enterprise Limited | Apparatus and method for detecting target species in an analyte |
| WO2012076827A1 (fr) | 2010-12-10 | 2012-06-14 | Universite De Technologie De Troyes | Systeme et procede de detection d'especes biologiques ou chimiques bases sur un qcm transducteur |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2444999A (en) | 1999-08-23 |
| SE9800189D0 (sv) | 1998-01-23 |
| SE9800189L (sv) | 1999-07-24 |
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