WO1998057088A1 - Flange connection - Google Patents

Flange connection Download PDF

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Publication number
WO1998057088A1
WO1998057088A1 PCT/EP1998/003209 EP9803209W WO9857088A1 WO 1998057088 A1 WO1998057088 A1 WO 1998057088A1 EP 9803209 W EP9803209 W EP 9803209W WO 9857088 A1 WO9857088 A1 WO 9857088A1
Authority
WO
WIPO (PCT)
Prior art keywords
ring
flange connection
connection according
flanges
channel
Prior art date
Application number
PCT/EP1998/003209
Other languages
German (de)
French (fr)
Inventor
Heinrich Engländer
Hans Rudolf Fischer
Wilhelm Walter
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Priority to JP50144899A priority Critical patent/JP2002503319A/en
Priority to EP98930759A priority patent/EP0988486A1/en
Publication of WO1998057088A1 publication Critical patent/WO1998057088A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/003—Auxiliary devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/006—Attachments
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/02—Flanged joints the flanges being connected by members tensioned axially
    • F16L23/036—Flanged joints the flanges being connected by members tensioned axially characterised by the tensioning members, e.g. specially adapted bolts or C-clamps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/502—Thermal properties
    • F05D2300/5024—Heat conductivity

Definitions

  • the invention relates to a flange connection with two flanges to be connected to one another and a ring arranged between the flanges.
  • flanges are usually part of the connecting piece with which the equipment and machines are equipped.
  • the flanges are attached to one another by means of screws passing through the flange edges or clamps encompassing the flange edges.
  • a housing for a turbomolecular vacuum pump is known from DE-A-35 08 483.
  • the present invention is based on the object of designing a flange connection of the type mentioned in the introduction in such a way that it can be used to influence the mutual temperature effects of the machine and the apparatus.
  • this object is achieved in that the ring arranged between the flanges can be tempered.
  • This solution enables two neighboring systems to be thermally decoupled in a very small space.
  • heat can also be dissipated or supplied to one or both systems.
  • Cooling the ring not only has the desired cooling effect, but also a heat-insulating function. A heat transfer from the apparatus to the machine or vice versa can be prevented by cooling the ring.
  • the ring is expediently constructed partly from a heat-conducting and partly from a heat-insulating material, the materials being assigned to one another in such a way that one is exclusively the first and the other only fits the second of the two flanges.
  • the flange connection is heat-insulating towards one connection side and thermally conductive towards the other connection side.
  • the flange connection is denoted by 1, the flanges to be connected to one another by 2 and 3, the associated connecting pieces by 4 and 5 and the ring located between the flanges 2, 3 by 6.
  • Clamping screws 7, which enclose the outer edges of the flanges 2, 3, serve to establish and maintain the desired connection.
  • a channel 8 This channel is expediently designed as a circumferential ring channel 8 and equipped with two connections.
  • Figures 1 to 3 only one hose connector 9 is shown, which covers a second connection.
  • the ring 6 has i.a. Centering function.
  • it is equipped in a known manner on its inside with centering edges 11, 12.
  • it has grooves 13, 14 for elastomer sealing rings 15, 16 facing the end faces of the flanges 2, 3 (see in particular FIG. 3).
  • Figure 1 shows a solution in which the ring 6 consists of a good heat-conducting material (aluminum, brass, copper or the like). This solution is useful if heat is to be dissipated from both flanges 2, 3, with the help of a coolant flowing through channel 8 (e.g. cold water).
  • a coolant flowing through channel 8 e.g. cold water
  • the ring 6 consists of two different materials.
  • One of the materials is a good, the other a bad heat conductor (e.g. stainless steel).
  • the materials are arranged in such a way that they are only in contact with one of the two flanges. In addition, it must be ensured that the good heat-conducting material forms at least part of the wall of the channel 8.
  • heat can be dissipated or supplied to one of the two flanges (the one that is in contact with the heat-conducting material), while the other flange is thermally insulated.
  • one half of the ring 6 consists of different materials, the dividing line of the materials being identical to the line of symmetry of the ring cross section.
  • the ring 6 is formed by two partial rings 6 'and 6' '. Partial ring 6 'forms the centering edges 11, 12, the grooves 13, 14 and two mutually adjacent walls of the channel 8, which is square in cross section, namely the inner wall and an end wall. Otherwise, the partial ring 6 'has thermal contact with only one of the flanges (flange 2).
  • the partial ring 6 ′′ forms the two further walls of the channel 8 (the outer wall and one wall located on the end face) and only touches the other flange (flange 3).
  • FIG. 3 shows the use of a flange connection according to the invention in a turbomolecular vacuum pump 17, the inlet opening of which is formed by the flange 3.
  • Flange 2 and connecting piece 4 are part of a connected vacuum chamber.
  • the solution can be chosen so that heat generated by the pump 17 is dissipated via the partial ring 6 ′′ and coolant flowing in the channel 8, which cannot load the connected equipment. In this case, the partial ring 6 "of good thermal conductivity, the partial ring 6 'from poor conductor material must pass.
  • the pump 17 are protected from the connected vacuum chamber from heat • that mentioned material properties must be reversed schaftlen. Since the ring 6 with its channel 8 can easily be adapted to all common normal dimensions, the invention offers the possibility of using the flange cooling or heating universally. It is particularly suitable for use in vacuum technology, since heat conduction through evacuated rooms is difficult in this area.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Thermal Insulation (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Pipe Accessories (AREA)

Abstract

The invention relates to a flange connection (1), comprising two flanges (2, 3) for interconnecting and a ring (6) located between said flanges. According to the invention, said ring (6) can be tempered, so that the flanges (2, 3), and consequently the devices which are interconnected by means of said flanges can be decoupled thermally.

Description

FlanschverbindungFlange connection
Die Erfindung bezieht sich auf eine Flanschverbindung mit zwei miteinander zu verbindenden Flanschen und einem zwischen den Flanschen angeordneten Ring.The invention relates to a flange connection with two flanges to be connected to one another and a ring arranged between the flanges.
Es ist bekannt, Apparaturen (Behälter, Kammern, Rezi- pienten oder dergleichen) und Maschinen (Kompressoren, Pumpen, insbesondere Vakuumpumpen, usw.) über Flansche miteinander zu verbinden. Die Flansche sind in der Regel Bestandteil von Anschlussstutzen, mit denen die Apparaturen und Maschinen ausgerüstet sind. Je nach Art der Flanschverbindung befinden sich zwischen den Flanschen Dicht- und/oder Zentrierringe. Über die Flanschränder durchsetzende Schrauben oder die Flanschränder umfassende Klammern erfolgt die gegenseitige Befestigung der Flansche.It is known to connect apparatuses (containers, chambers, recipients or the like) and machines (compressors, pumps, in particular vacuum pumps, etc.) to one another via flanges. The flanges are usually part of the connecting piece with which the equipment and machines are equipped. Depending on the type of flange connection, there are sealing and / or centering rings between the flanges. The flanges are attached to one another by means of screws passing through the flange edges or clamps encompassing the flange edges.
Aus der DE-A-35 08 483 ist ein Gehäuse für eine Turbomolekularvakuumpumpe bekannt. Um zu verhindern, dass Wärme von einem angeschlossenen Rezipienten das Gehäuse der Turbomolekularvakuumpumpe allzu stark erwärmt, wird vorgeschlagen, den Gehäusemantel der Turbomolekularvakuumpumpe zumindest im sich an den Anschlussflansch an- schliessenden Bereich so auszubilden, dass die Wärmeleitfähigkeit in diesem Bereich gering ist. Diese Lösung setzt eine aufwendige Fertigung des Pumpengehäuses voraus .A housing for a turbomolecular vacuum pump is known from DE-A-35 08 483. In order to prevent heat from a connected recipient from heating the housing of the turbomolecular vacuum pump too much, it is proposed to design the housing jacket of the turbomolecular vacuum pump at least in the area adjoining the connecting flange in such a way that the thermal conductivity in this area is low. This solution requires complex manufacture of the pump housing.
BESTATIGUNGSKOPIE Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Flanschverbindung der eingangs erwähnten Art derart auszubilden, dass mit ihr die gegenseitige Temperatureinwirkung von Maschine und Apparatur beeinflusst werden kann.CONFIRMATION COPY The present invention is based on the object of designing a flange connection of the type mentioned in the introduction in such a way that it can be used to influence the mutual temperature effects of the machine and the apparatus.
Erfindungsgemäß wird diese Aufgabe dadurch gelöst, dass der zwischen den Flanschen angeordnete Ring temperierbar ist. Diese Lösung ermöglicht es, zwei benachbarte Systeme auf engstem Raum thermisch zu entkoppeln. Dabei kann zusätzlich noch einem oder beiden Systemen Wärme ab- oder auch zugeführt werden.According to the invention, this object is achieved in that the ring arranged between the flanges can be tempered. This solution enables two neighboring systems to be thermally decoupled in a very small space. In addition, heat can also be dissipated or supplied to one or both systems.
Eine Kühlung des Ringes hat beispielsweise nicht nur die gewünschte kühlende Wirkung, sondern auch eine wärmeisolierende Funktion. Ein Wärmeübergang von der Apparatur zur Maschine oder umgekehrt kann durch die Kühlung des Ringes verhindert werden.Cooling the ring not only has the desired cooling effect, but also a heat-insulating function. A heat transfer from the apparatus to the machine or vice versa can be prevented by cooling the ring.
Soll Wärme sowohl von der Apparatur als auch von der Maschine abgeführt werden, dann ist es zweckmäßig, den Ring aus einem gut leitenden Werkstoff herzustellen. Soll jedoch die Wärme entweder nur von der Maschine oder nur von der Apparatur abgeführt werden, dann ist der Ring zweckmäßig zum Teil aus einem wärmeleitenden und zum Teil aus einem wärmeisolierenden Werkstoff aufgebaut, wobei die Werkstoffe derart einander zugeordnet sind, dass einer ausschließlich dem ersten und der andere ausschließlich dem zweiten der beiden Flansche anliegt. Dadurch ist die Flanschverbindung zu einer Anschlussseite hin wärmeisolierend und zur anderen Anschlussseite hin wärmeleitend.If heat is to be dissipated from both the apparatus and the machine, then it is expedient to produce the ring from a highly conductive material. However, if the heat is to be dissipated either only by the machine or only by the apparatus, then the ring is expediently constructed partly from a heat-conducting and partly from a heat-insulating material, the materials being assigned to one another in such a way that one is exclusively the first and the other only fits the second of the two flanges. As a result, the flange connection is heat-insulating towards one connection side and thermally conductive towards the other connection side.
Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand von den Figuren 1 bis 3 dargestellten Ausführungsbeispielen erläutert werden. In allen Figuren sind die Flanschverbindung mit 1, die miteinander zu verbindenden Flansche mit 2 und 3, die zugehörigen Anschlussstutzen mit 4 und 5 und der zwischen den Flanschen 2, 3 befindliche Ring mit 6 bezeichnet. Klammerschrauben 7, welche die äußeren Ränder der Flansche 2, 3 umfassen, dienen zur Herstellung und Aufrechterhaltung der gewünschten Verbindung.Further advantages and details of the invention will be explained with reference to the exemplary embodiments shown in FIGS. 1 to 3. In all figures, the flange connection is denoted by 1, the flanges to be connected to one another by 2 and 3, the associated connecting pieces by 4 and 5 and the ring located between the flanges 2, 3 by 6. Clamping screws 7, which enclose the outer edges of the flanges 2, 3, serve to establish and maintain the desired connection.
Um den Ring 6 temperieren zu können, ist er mit einem Kanal 8 ausgerüstet. Dieser Kanal ist zweckmäßig als umlaufender Ringkanal 8 ausgebildet und mit zwei Anschlüssen ausgerüstet. In den Figuren 1 bis 3 ist jeweils nur ein Schlauchanschlussstutzen 9 dargestellt, welcher einen zweiten Anschluss verdeckt.In order to be able to temper the ring 6, it is equipped with a channel 8. This channel is expediently designed as a circumferential ring channel 8 and equipped with two connections. In Figures 1 to 3, only one hose connector 9 is shown, which covers a second connection.
Bei den dargestellten Ausführungsbeispielen hat der Ring 6 u.a. Zentrierfunktion. Dazu ist er in bekannter Weise auf seiner Innenseite mit Zentrierrändern 11, 12 ausgerüstet. Außerdem weist er den Stirnseiten der Flansche 2, 3 zugewandte Nuten 13, 14 für Elastomerdichtringe 15, 16 auf (siehe insbesondere Figur 3) .In the illustrated embodiments, the ring 6 has i.a. Centering function. For this purpose, it is equipped in a known manner on its inside with centering edges 11, 12. In addition, it has grooves 13, 14 for elastomer sealing rings 15, 16 facing the end faces of the flanges 2, 3 (see in particular FIG. 3).
Figur 1 zeigt eine Lösung, bei der der Ring 6 aus gut wärmeleitendem Werkstoff (Aluminium, Messing, Kupfer oder dergleichen) besteht. Diese Lösung ist sinnvoll, wenn von beiden Flanschen 2, 3 Wärme abgeführt werden soll, und zwar mit Hilfe eines den Kanal 8 durchströmenden Kühlmittels (z.B. kaltes Wasser).Figure 1 shows a solution in which the ring 6 consists of a good heat-conducting material (aluminum, brass, copper or the like). This solution is useful if heat is to be dissipated from both flanges 2, 3, with the help of a coolant flowing through channel 8 (e.g. cold water).
Bei den Lösungen nach den Figuren 2 und 3 besteht der Ring 6 aus zwei verschiedenen Werkstoffen. Einer der Werkstoffe ist ein guter, der andere ein schlechter Wärmeleiter (z.B. Edelstahl). Die Werkstoffe sind derart angeordnet, dass sie jeweils nur mit einem der beiden Flansche Kontakt haben. Zusätzlich muss sichergestellt sein, dass der gut wärmeleitende Werkstoff zumindest einen Teil der Wandung des Kanals 8 bildet. Mit einer Lösung der beschriebenen Art kann einem der bei¬ den Flansche (demjenigen, der mit dem gut wärmeleitenden Werkstoff Kontakt hat) Wärme ab- oder zugeführt werden, während der andere Flansch wärmeisoliert ist.In the solutions according to FIGS. 2 and 3, the ring 6 consists of two different materials. One of the materials is a good, the other a bad heat conductor (e.g. stainless steel). The materials are arranged in such a way that they are only in contact with one of the two flanges. In addition, it must be ensured that the good heat-conducting material forms at least part of the wall of the channel 8. With In a solution of the type described, heat can be dissipated or supplied to one of the two flanges (the one that is in contact with the heat-conducting material), while the other flange is thermally insulated.
Beim Ausführungsbeispiel nach Figur 2 besteht jeweils eine Hälfte des Ringes 6 aus unterschiedlichen Werkstoffen, wobei die Trennlinie der Werkstoffe mit der Symmetrielinie des Ringquerschnittes identisch ist. Beim Ausführungsbeispiel nach Figur 3 wird der Ring 6 von zwei Teilringen 6' und 6'' gebildet. Teilring 6' bildet die Zentrierränder 11, 12, die Nuten 13, 14 und zwei aneinander angrenzende Wandungen des im Querschnitt viereckigen Kanals 8, und zwar die innere und eine stirnseitige Wandung. Im übrigen hat der Teilring 6' aber nur mit einem der Flansche (Flansch 2) Wärmekontakt. Teilring 6'' bildet die beiden weiteren Wandungen des Kanals 8 (die äußere und eine stirnseitig gelegene Wandung) und berührt nur den anderen Flansch (Flansch 3) .In the exemplary embodiment according to FIG. 2, one half of the ring 6 consists of different materials, the dividing line of the materials being identical to the line of symmetry of the ring cross section. In the exemplary embodiment according to FIG. 3, the ring 6 is formed by two partial rings 6 'and 6' '. Partial ring 6 'forms the centering edges 11, 12, the grooves 13, 14 and two mutually adjacent walls of the channel 8, which is square in cross section, namely the inner wall and an end wall. Otherwise, the partial ring 6 'has thermal contact with only one of the flanges (flange 2). The partial ring 6 ″ forms the two further walls of the channel 8 (the outer wall and one wall located on the end face) and only touches the other flange (flange 3).
Figur 3 zeigt den Einsatz einer erfindungsgemäßen Flanschverbindung bei einer Turbomolekularvakuumpumpe 17, deren Eintrittsöffnung vom Flansch 3 gebildet wird. Flansch 2 und Anschlußstutzen 4 sind Bestandteile einer angeschlossenen Vakuumkammer. Die Lösung kann so gewählt werden, dass von der Pumpe 17 erzeugte Wärme über den Teilring 6'' und im Kanal 8 strömendes Kühlmittel abgeführt wird, die angeschlossene Apparatur nicht belasten kann. In diesem Fall müssen der Teilring 6" aus gut wärmeleitendem, der Teilring 6' aus schlecht wärmeleitendem Material bestehen. Soll umgekehrt die Pumpe 17 vor Wärme • aus der angeschlossenen Vakuumkammer geschützt werden, müssen die erwähnten Werkstoffeigen- schaftlen vertauscht sein. Da der Ring 6 mit seinem Kanal 8 ohne weiteres an alle gängigen Normalabmessungen adaptierbar ist, bietet die Erfindung die Möglichkeit, die Flansch-Kühlung bzw. Heizung universell einzusetzen. Insbesondere ist sie für den Einsatz in der Vakuumtechnik geeignet, da auf diesem Gebiet die Wärmeleitung durch evakuierte Räume erschwert ist. FIG. 3 shows the use of a flange connection according to the invention in a turbomolecular vacuum pump 17, the inlet opening of which is formed by the flange 3. Flange 2 and connecting piece 4 are part of a connected vacuum chamber. The solution can be chosen so that heat generated by the pump 17 is dissipated via the partial ring 6 ″ and coolant flowing in the channel 8, which cannot load the connected equipment. In this case, the partial ring 6 "of good thermal conductivity, the partial ring 6 'from poor conductor material must pass. Conversely, when the pump 17 are protected from the connected vacuum chamber from heat • that mentioned material properties must be reversed schaftlen. Since the ring 6 with its channel 8 can easily be adapted to all common normal dimensions, the invention offers the possibility of using the flange cooling or heating universally. It is particularly suitable for use in vacuum technology, since heat conduction through evacuated rooms is difficult in this area.

Claims

FlanschverbindungPATENTANSPRÜCHE Flange connection PATENT REQUIREMENTS
1. Flanschverbindung (1) mit zwei miteinander zu verbindenden Flanschen (2, 3) und einem zwischen den Flanschen angeordneten Ring (6), dadurch gekennzeichnet, dass der Ring (6) temperierbar ist.1. Flange connection (1) with two flanges (2, 3) to be connected to one another and a ring (6) arranged between the flanges, characterized in that the ring (6) can be tempered.
2. Flanschverbindung nach Anspruch 1, dadurch gekennzeichnet, dass der Ring (6) Zentrier- und/oder Dichtfunktion hat.2. Flange connection according to claim 1, characterized in that the ring (6) has a centering and / or sealing function.
3. Flanschverbindung nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass der Ring (6) mit einem Kanal3. Flange connection according to claim 1 or 2, characterized in that the ring (6) with a channel
(8) für den Durchtritt eines Te perierfluids ausgerüstet ist.(8) is equipped for the passage of a Te perierfluids.
4. Flanschverbindung nach Anspruch 3, dadurch gekennzeichnet, dass der Kanal (8) mit zwei Anschlüssen4. Flange connection according to claim 3, characterized in that the channel (8) with two connections
(9) ausgerüstet ist.(9) is equipped.
5. Flanschverbindung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass der Ring (6) aus einem gut wärmeleitenden Werkstoff (Aluminium, Messing, Kupfer oder dergleichen) besteht.5. Flange connection according to one of claims 1 to 4, characterized in that the ring (6) consists of a good heat-conducting material (aluminum, brass, copper or the like).
6. Flanschverbindung nach einem der Ansprüche 1 bis 4', dadurch gekennzeichnet, dass der Ring (6) zum Teil aus einem gut wärmeleitenden und zum Teil aus einem schlecht wärmeleitenden Werkstoff (Edelstahl oder dergleichen) besteht, wobei die Werkstoffe derart einander zugeordnet sind, dass einer ausschließlich dem ersten und der andere ausschließlich dem zweiten der beiden Flansche (2, 3) anliegt.6. Flange connection according to one of claims 1 to 4 ', characterized in that the ring (6) partly from a good heat-conducting and partly from a poorly heat-conducting material (stainless steel or the like), the materials being assigned to one another such that one rests exclusively on the first and the other rests exclusively on the second of the two flanges (2, 3).
7. Flanschverbindung nach Anspruch 6, dadurch gekennzeichnet, dass jeweils die Hälfte des Ringes (6) aus den unterschiedlichen Werkstoffen besteht, wobei die Trennlinie der Werkstoffe mit der Symmetrielinie des Ringquerschnittes identisch ist.7. Flange connection according to claim 6, characterized in that half of the ring (6) consists of different materials, the dividing line of the materials being identical to the line of symmetry of the ring cross-section.
8. Flanschverbindung nach Anspruch 6, dadurch gekennzeichnet, dass der Ring (6) aus zwei Teilringen (6' und 6'') gebildet wird.8. Flange connection according to claim 6, characterized in that the ring (6) from two partial rings (6 'and 6' ') is formed.
9. Flanschverbindung nach Anspruch 8, dadurch gekennzeichnet, dass ein Teilring (6') Zentrierränder (11, 12), Nuten (13, 14) und zwei aneinander angrenzende Wandungen des im Querschnitt viereckigen Kanals (8) bilden und zwar die innere und eine stirnseitige Wandung, und dass der Teilring (6'') die beiden weiteren Wandungen des Kanals (8) (die äußere und eine stirnseitig gelegene Wandung) bildet.9. Flange connection according to claim 8, characterized in that a partial ring (6 ') centering edges (11, 12), grooves (13, 14) and two mutually adjacent walls of the cross-sectionally rectangular channel (8) form, namely the inner and one end wall, and that the partial ring (6 '') forms the two further walls of the channel (8) (the outer wall and a wall located on the end face).
10. Flanschverbindung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie sich zwischen einer Vakuumpumpe (17) und einer an die Vakuumpumpe angeschlossenen Kammer befindet.10. Flange connection according to one of the preceding claims, characterized in that it is located between a vacuum pump (17) and a chamber connected to the vacuum pump.
11. Flanschverbindung nach Anspruch 10, dadurch gekennzeichnet, dass die Vakuumpumpe eine Turbomolekularpumpe (17) ist, deren Eintrittsöffnung (18) von einem der Flansche (2, 3) der Flanschverbindung nach einem der Ansprüche 1 bis 9 gebildet wird. 11. Flange connection according to claim 10, characterized in that the vacuum pump is a turbomolecular pump (17), the inlet opening (18) of one of the flanges (2, 3) of the flange connection according to one of claims 1 to 9 is formed.
PCT/EP1998/003209 1997-06-10 1998-05-29 Flange connection WO1998057088A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP50144899A JP2002503319A (en) 1997-06-10 1998-05-29 Flange connection
EP98930759A EP0988486A1 (en) 1997-06-10 1998-05-29 Flange connection

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19724323.1 1997-06-10
DE19724323A DE19724323A1 (en) 1997-06-10 1997-06-10 Flange connection

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PCT/EP1998/003209 WO1998057088A1 (en) 1997-06-10 1998-05-29 Flange connection

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WO (1) WO1998057088A1 (en)

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DE10107341A1 (en) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh vacuum pump
DE10305038A1 (en) * 2003-02-07 2004-08-19 Pfeiffer Vacuum Gmbh Vacuum pumping arrangement
EP1837521A4 (en) * 2004-12-20 2009-04-15 Edwards Japan Ltd Structure for connecting end parts and vacuum system using the structure
KR102144152B1 (en) * 2017-09-29 2020-08-12 한국서부발전 주식회사 Assembly for installing blind flange

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US3563571A (en) * 1969-07-09 1971-02-16 Ladish Co Aseptic joints
DE3508483A1 (en) 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln HOUSING FOR A TURBOMOLECULAR VACUUM PUMP
US4778202A (en) * 1984-07-18 1988-10-18 W. C. Heraeus Gmbh Tubular component made out of quartz glass with a flange
DE9304435U1 (en) * 1993-03-24 1993-06-09 Leybold AG, 6450 Hanau High vacuum pump with inlet flange

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GB451417A (en) * 1935-02-04 1936-08-04 Brian Edmund Allen Vigers Improvements in or relating to gas-tight joints suitable for evacuated apparatus
US2571265A (en) * 1945-06-13 1951-10-16 Leufven Axel Gustav Edvard Hydraulic tensioning nut
DE1755224U (en) * 1956-06-22 1957-10-31 Leybold Hochvakuum Anlagen FLANGE CONNECTION FOR HIGHER TEMPERATURES, IN PARTICULAR VACUUM FLANGE.
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US3563571A (en) * 1969-07-09 1971-02-16 Ladish Co Aseptic joints
US4778202A (en) * 1984-07-18 1988-10-18 W. C. Heraeus Gmbh Tubular component made out of quartz glass with a flange
DE3508483A1 (en) 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln HOUSING FOR A TURBOMOLECULAR VACUUM PUMP
DE9304435U1 (en) * 1993-03-24 1993-06-09 Leybold AG, 6450 Hanau High vacuum pump with inlet flange

Non-Patent Citations (1)

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Title
EPIFANOV ET AL.: "FLANGE SEAL WITH RUBBER WASHER FOR AN ULTRAHIGH VACUUM", INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, vol. 18, no. 3, 1975, USA, pages 898, XP002077903 *

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EP0988486A1 (en) 2000-03-29
JP2002503319A (en) 2002-01-29

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