WO1998033599A1 - System for supplying liquid to an apparatus in which a constant level is maintained - Google Patents

System for supplying liquid to an apparatus in which a constant level is maintained Download PDF

Info

Publication number
WO1998033599A1
WO1998033599A1 PCT/FR1998/000140 FR9800140W WO9833599A1 WO 1998033599 A1 WO1998033599 A1 WO 1998033599A1 FR 9800140 W FR9800140 W FR 9800140W WO 9833599 A1 WO9833599 A1 WO 9833599A1
Authority
WO
WIPO (PCT)
Prior art keywords
liquid
constant level
overflow
maintained
aerosol
Prior art date
Application number
PCT/FR1998/000140
Other languages
French (fr)
Inventor
Renaud Jolly
Jacques Legrand
Original Assignee
Commissariat A L'energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat A L'energie Atomique filed Critical Commissariat A L'energie Atomique
Publication of WO1998033599A1 publication Critical patent/WO1998033599A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0615—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced at the free surface of the liquid or other fluent material in a container and subjected to the vibrations
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
    • G05D9/02—Level control, e.g. controlling quantity of material stored in vessel without auxiliary power

Definitions

  • the present invention relates to a liquid supply system for an apparatus in which a constant level of liquid is maintained, said liquid supply system comprising a constant level liquid supply device connected to said apparatus and maintaining the same level therein. constant under the principle of communicating vessels.
  • Such a system applies in particular to ultrasonic aerosol generators, more particularly to ultrasonic aerosol generators used in installations which implement the process known as the "Pyrosol” process " as described for example in the document FR-A-2 110 622.
  • Devices for supplying liquid at constant level are for example used with aerosol generating apparatuses where they are intended to ensure a continuous supply of liquid at constant level to the aerosol generator pot.
  • aerosols of ultrasonic origin are obtained by focusing an ultrasound beam on the surface of the liquid that you want to nebulize.
  • the ultrasonic generator consists of an ultrasonic transmitter placed at the bottom of a po ⁇ containing the liquid to be sprayed.
  • FIG. 1 Such a device of the prior art, is shown in schematic vertical section in FIG. 1.
  • This device for supplying liquid at constant level is most often in the form of a burette 105 of constant level.
  • the constant level in the aerosol generator pot 101 is fixed by the level of liquid in the lower part 102 of the burette 105, according to the principle of communicating vessels via the tube 103.
  • the tube 104 ensures the maintenance of the same pressure in the pot and the lower part of the 10 2.
  • the stopper 106 isolates the contents of the burette from the external pressure.
  • the liquid level drops in the pot 101, it also drops in the lower part 102 of the burette 105, and when this level is such that the tube 107 is no longer immersed in the solution, the liquid coming from the part top of the burette 105 flows again into the part 102, and the liquid level in the lower part 102 rises to the level of the lower part of the tube 107.
  • the oven used in this process consists of several deposition zones, each zone itself being supplied by several generators of ultrasonic aerosol, filling, reloading of burettes with liquid leads to regular production stoppages with significant repercussions on productivity, the overall cost of the process and of the products produced.
  • the burette at constant level serves both as a storage tank and. liquid supply, and constant level device. Since the two roles played by the burette cannot be separated, each device, such as an ultrasonic aerosol generator, must be equipped with a burette, since a single burette cannot supply several devices.
  • the device described in FIG. 1 operates in a manner which cannot be considered entirely satisfactory since the level variation in the lower part 102 of the burette takes place suddenly, due in particular to the compulsory passage of bubbles. of air.
  • This sudden change in level in the lower part 102 results in the same sudden change in the corresponding level in the device supplied, for example the aerosol generator, with the consequence of a large variation in the aerosol flow rate which is particularly detrimental in if this aerosol is sent to a Pyrosol ® installation.
  • the device supplied is an ultrasonic aerosol generating pot
  • the liquid contained in the aerosol generating pot heats up under the influence of the ultrasound beam, this increase in temperature possibly reach up to several tens of degrees C.
  • the object of the present invention is therefore to provide a system for supplying pure liquid apparatus in which a constant level of liquid is maintained which overcomes the drawbacks of the devices and systems of the prior art.
  • a liquid supply system for an apparatus in which a constant level of liquid is maintained said liquid supply system comprising means for liquid storage, and a constant level liquid supply device connected to and holding said device.
  • said supply of liquid is carried out continuously; in that said liquid storage means are separate from said constant level liquid supply device; in that said constant level liquid supply device is an overflow device comprising a container permanently filled to its upper limit corresponding to the constant level to be maintained, and a recovery zone which permanently collects the overflowing liquid from said container, said container being connected to said apparatus, and being continuously supplied by means of continuous liquid supply, connected to said storage means; whereby a constant level is permanently ensured in the apparatus by the continuous circulation of the liquid.
  • the principle of the overflow device which is part of the system according to the invention differs fundamentally from that of the device of burette type at constant level of the prior art.
  • Such an overflow device which operates continuously, and which is permanently filled up to the desired constant level, guarantees that this same constant level is ensured permanently, without any variation, in the apparatus in which it is sought to maintain a constant level, by the continuous and permanent circulation of the liquid.
  • the liquid storage means are distinct, separate from the overflow device, and this overflow device is continuously supplied by means of continuous liquid supply. , connected to the storage means.
  • the liquid storage means generally comprise a reservoir preferably provided with means for measuring the quantity of liquid.
  • This tank being separate and playing strictly a storage role, it is very easy, at any time, and without causing any disturbance, to continuously measure the amount of liquid in this tank, and consequently the amount of liquid consumed in the device.
  • a single tank can supply several overflow devices, each of these devices being connected to an appliance.
  • a single tank with a judiciously chosen volume can supply up to 14 or more devices.
  • the tank in the case of the use of liquids requiring special handling and storage precautions, the tank can be stored in a suitable room, even far from the devices to be supplied. Such an arrangement, arising from the characteristics of the system according to the invention, ensures optimum operating safety.
  • the liquid used undergoes heating in the device as is the case, for example, in an aerosol generator pot
  • the permanent circulation of the liquid and its regular renewal in the device guarantee a constant temperature of the liquid.
  • both in the apparatus and in the system as a whole such a state of thermal equilibrium being obviously reached after a transient phase of a few minutes.
  • the properties of the liquid such as viscosity, surface tension, etc., remain substantially constant, which allows regular operation of the device, and for example the production of an aerosol with stable characteristics and constants.
  • the constant level of liquid in the device can be adjusted at any time by varying the relative altitude of the overflow device relative to the powered device. Such an adjustment cannot be carried out instantaneously with the systems of the prior art comprising a burette at constant level, and constitutes an additional advantage of the system according to the invention.
  • the overflow device comprises an overflow vessel, formed of an enclosure comprising a vertical partition, separating said enclosure into a first and a second
  • the overflow device According to a second embodiment of the system, according to the invention, the overflow device
  • the device is preferably an ultrasonic aerosol generator.
  • the invention therefore also relates to the ultrasonic aerosol generator powered by the
  • Such an ultrasonic aerosol generator is preferably used in a device or installation for implementing the so-called process. Pyrosol ® process for the production of thin layers of metal or a metal compound.
  • the invention therefore also relates to an installation for producing thin layers of metal or metal compound by depositing on a heated substrate an aerosol of solution of precursor of said metal or of metallic compound entrained by a carrier gas, said aerosol being created.
  • the ultrasonic aerosol generator characterized in that said ultrasonic aerosol generator is the ultrasonic aerosol generator described above.
  • the quality and homogeneity of the thin layers produced is greatly improved due to the production of aerosol which is much more homogeneous than with systems, for example burette systems of the prior art; the productivity of the process is improved thanks to the elimination of the stops necessary for recharging with liquid.
  • the consumption of liquid can be controlled much more precisely and much easier than in the prior art, for example, by continuously weighing the storage means such as a reservoir even during aerosol production.
  • FIG. 1, dice to described above, is a vertical sectional view schematically illustrating a liquid supply system of the prior art, for apparatus in which a constant level of liquid is maintained, said apparatus being an aerosol generating pot;
  • - Figure 2 is a vertical sectional view schematically illustrating a liquid supply system according to the invention, for apparatus in which a constant level of liquid is maintained, said apparatus being an aerosol generating pot, and the device constant level liquid supply being produced according to a first embodiment of the invention in the form of an overflow vessel;
  • - Figure 3A is a vertical sectional view illustrating more precisely a first embodiment of the liquid supply device at constant level of the system according to the invention, produced in the form of an overflow vessel;
  • - Figure 3B is a schematic sectional view along BB of the device of Figure 3A;
  • FIG. 4 is a vertical sectional view schematically illustrating a system liquid supply device according to the invention for an apparatus in which a constant level of liquid is maintained, said apparatus being an aerosol generating pot, and the constant level liquid supply device being produced according to a second mode of embodiment of the invention, in the form of a bent tube.
  • FIG. 2 therefore very schematically shows a supply system produced in accordance with the invention and intended to supply liquid to an appliance in which a constant level of liquid is maintained.
  • the device is an aerosol generator pot 1 of an ultrasonic aerosol generator, but the device supplied according to the invention can be any device in which it is desired to maintain a constant level of liquid.
  • the liquid could be any liquid, in the case of an aerosol generator for Pyrosol installation, the liquid is preferably a solution of metal precursor or metal compound.
  • the generator pot comprises an ultrasonic emitter 2 such as a piezoelectric ceramic, placed at the bottom of a generally cylindrical tank or pot 3, filled with liquid 4 which is preferably an alcohol or acetylacetone solution.
  • This enclosure can also include a certain number of sensors such as temperature sensors 5.
  • the ultrasound beam generated, directed towards the air-liquid interface 6, located at the constant level which it is desired to maintain, will form a geyser 7 which is accompanied by a mist or aerosol.
  • This aerosol has a relatively narrow particle size distribution, this homogeneity of the particle size around for example 6 ⁇ m, is particularly advantageous in the case where the ultrasonic aerosol generator is used in the context of a process for producing thin layers known as the Pyrosol process " described in document FR-A-2 110 622, incorporated herein by reference.
  • the aerosol formed is entrained towards the outlet duct of 9 by a carrier gas such as an inert gas or air, introduced by the tube 8, into the aerosol generating pot.
  • a carrier gas such as an inert gas or air
  • the constant level in the device is maintained by an overflow device connected to said device and maintaining the same constant level therein by virtue of the principle of communicating vessels.
  • the overflow device generally designated by the reference 10
  • the overflow device is connected to the base of the apparatus by the pipes or conduits 11, 12, the conduit 11 extending by the conduit 13, provided for example with a valve 14 drain.
  • the overflow device which is, in Figure 2, in accordance with a first embodiment of the invention, a device of the "overflow vessel" type is described in more detail in Figures 3A and 3B, and comprises a container overflowing 15 and a recovery zone 16.
  • the system according to the invention also comprises means for storing the liquid, which comprise, for example a reservoir 17 of adequate capacity, for example from 10 to 100 i in the case where the device is an aerosol-generating pot, and means for measuring the quantity of liquid such as a scale 18.
  • means for storing the liquid comprise, for example a reservoir 17 of adequate capacity, for example from 10 to 100 i in the case where the device is an aerosol-generating pot, and means for measuring the quantity of liquid such as a scale 18.
  • Other measuring means allowing the measurement at any time, and continuously of the quantity of liquid, such as a flow meter, can be envisaged.
  • a reservoir can supply several overflow devices, each being connected to an apparatus such as an aerosol generator pot, the number of apparatus supplied by a single reservoir can thus go up to 14 or more.
  • the system according to the invention also comprises means for continuously supplying the container 15, which essentially comprise means for circulating the liquid, for example a pump 19 such as a peristaltic pump or the like, and conduit means 20 , 21 essentially comprising, for example, a suction pipe 20 for the liquid contained in the reservoir 17, and a discharge pipe 21 from the pump 19 to the container 15.
  • a pump 19 such as a peristaltic pump or the like
  • conduit means 20 , 21 essentially comprising, for example, a suction pipe 20 for the liquid contained in the reservoir 17, and a discharge pipe 21 from the pump 19 to the container 15.
  • the system generally further includes pressure balancing means which include for example a conduit or pipe 22 ensuring the balancing of the pressure between the overflow device and the apparatus and connecting the latter.
  • the system generally comprises siphon means 23, connecting the recovery zone 16 to the liquid reservoir 17, and preventing the gas, for example air, in overpressure in the generator pot and the overflow device, from s' escape towards the reservoir 17.
  • siphon means 23 connecting the recovery zone 16 to the liquid reservoir 17, and preventing the gas, for example air, in overpressure in the generator pot and the overflow device, from s' escape towards the reservoir 17.
  • an overflow device of the "overflow vessel" type according to a first embodiment of the invention, is very schematically illustrated.
  • the overflow vessel 10 generally comprises an enclosure 24, separated by a vertical partition wall 25, in two parts, namely: an inner container 15 ensuring the constant level (level 6 of the apparatus 1) , and a recovery zone 16 for the liquid overflowing from the container 15.
  • a siphon 23, already mentioned above, connected to the recovery zone is connected to the liquid reservoir 17.
  • a nozzle 26 allows the emptying of the recovery zone 16, and is connected to a conduit 27 provided with a valve 28 (see FIG. 2), while a nozzle 29 is connected to the conduit 11 already mentioned, ensuring the constant level between the overflow device and the aerosol generator pot (conduit 12) and allowing the container 15 to be emptied (conduit 13).
  • the enclosure 24 generally has a flange 30 which allows the opening of the overflow vessel for its internal cleaning.
  • This flange defines a cover 31 comprising a first nozzle 32 receiving the delivery conduit 21 of the pump 19, which makes it possible to ensure continuous and permanent filling of the container 15, and a second nozzle 33 connected to the pipe or conduit pressure balancing 22.
  • the overflow vessel generally comprises a fixing device such as a fixing tail 34, ensuring positioning.
  • this fixing device is provided with means such as a laboratory lifting table making it possible to vary the relative attitude of the overflow device with respect to the powered device, such as the aerosol generator pot 1, and d '' thus simply adjust at any time this constant level of liquid in the device 1.
  • the altitude of the overflow device 10 can be adjusted more or less 10 mm relative to an average position.
  • Figure 4 is illustrated very schematically a liquid supply system according to the invention in which the overflow device is produced, according to a second embodiment of the invention, in the form of a bent tube.
  • bent tube 35 plays the role of container, and the role of recovery zone is played by the horizontal tube 36 and the vertical descending tube 37.
  • the liquid such as the liquid to be sprayed is contained in the reservoir 17. It is sucked in by the pump 19 which operates continuously.
  • the container 15 of the overflow vessel (FIG. 3) fills, and by virtue of the principle of communicating vessels, the aerosol generator pot 1 (FIG. 2) fills up to the level corresponding to the upper limit of the internal container 15 ( figure 3). Then, this container 15 overflows, the liquid then flows into the recovery zone 16. From the zone 16, the liquid returns to the reservoir 17. Thanks to the continuous operation, the liquid is constantly renewed in the aerosol generator pot. , the constant level of liquid can be adjusted at any time by varying the relative altitude of the overflow vessel 10 relative to the aerosol generator pot 1.
  • the overflow device can in particular take any form, in addition to the two embodiments described above.

Abstract

The invention concerns a system for the continuous supply of liquid to an apparatus (1) in which a constant level of liquid is permanently maintained, said liquid supply system comprising separate means for storing the liquid (17), and a device for supplying liquid at a constant level (10) connected to said apparatus and maintaining therein the same constant level according to the principle of communicating vessels. Said device for supplying liquid at a constant level is an overflow device (10) comprising a container (15) permanently filled to its upper limit corresponding to the constant level to be maintained, and a recuperating zone (16) which permanently collects the liquid overflowing from said container. Such a system is particularly applicable to ultrasound aerosol generators, such as those used in installations for depositing thin films by the so-called Pyrosol® method.

Description

SYSTEME D'ALIMENTATION EN LIQUIDE POUR APPAREIL DANS LEQUEL EST MAINTENU UN NIVEAU CONSTANT LIQUID SUPPLY SYSTEM FOR APPARATUS IN WHICH A CONSTANT LEVEL IS MAINTAINED
DESCRIPTIONDESCRIPTION
La présente invention concerne un système d'alimentation en liquide pour appareil dans lequel est maintenu un niveau constant de liquide, ledit système d'alimentation en liquide comprenant un dispositif d'alimentation en liquide à niveau constant relié audit appareil et y maintenant le même niveau constant en vertu du principe des vases communicants.The present invention relates to a liquid supply system for an apparatus in which a constant level of liquid is maintained, said liquid supply system comprising a constant level liquid supply device connected to said apparatus and maintaining the same level therein. constant under the principle of communicating vessels.
Un tel système s'applique en particulier aux générateurs d'aérosol ultrasonores, plus particulièrement aux générateurs d'aérosol ultrasonores utilisés dans les installations qui mettent en oeuvre le procédé dit procédé "Pyrosol"'" tel qu'il est décrit par exemple dans le document FR-A-2 110 622.Such a system applies in particular to ultrasonic aerosol generators, more particularly to ultrasonic aerosol generators used in installations which implement the process known as the "Pyrosol" process " as described for example in the document FR-A-2 110 622.
Des dispositifs d'alimentation en liquide à niveau constant sont par exemple utilisés avec des appareils générateurs d'aérosol où ils ont pour ob^et d'assurer une alimentation en liquide continue a niveau constant du pot générateur d'aérosol.Devices for supplying liquid at constant level are for example used with aerosol generating apparatuses where they are intended to ensure a continuous supply of liquid at constant level to the aerosol generator pot.
Rappelons que lés aérosols d'origine ultrasonore sont obtenus par focalisation d'un faisceau d'ultrasons à la surface du liquide que l'on souhaite nébuliser .Remember that aerosols of ultrasonic origin are obtained by focusing an ultrasound beam on the surface of the liquid that you want to nebulize.
Le générateur ultrasonore est constitué d'un émetteur ultrasons placé au fond d'un po~ contenant le liquide à pulvériser.The ultrasonic generator consists of an ultrasonic transmitter placed at the bottom of a po ~ containing the liquid to be sprayed.
Une description complète αe ces dispositifs figure dans un article de Spitz en Uny dans Applied Optics, Juillet 1968, pages 1345 à 1349. De tels dispositifs sont mis en oeuvre dans le cadre du procédé et du dispositif Pyrosol® décrit dans le document FR-A-2 110 622. Afin de garantir un débit homogène d'aérosol, il est indispensable que la hauteur de liquide au-dessus de l'émetteur ultrasons soit constante.A full description of these devices can be found in an article by Spitz en Uny in Applied Optics, July 1968, pages 1345 to 1349. Such devices are used in the context of the method and device Pyrosol ® described in document FR-A-2 110 622. In order to ensure a homogeneous flow of aerosol, it It is essential that the height of the liquid above the ultrasonic transmitter is constant.
Le document Thin Solid Films, Vol. 197, (1991), page 197 décrit des dispositifs d'alimentation pour pot générateur d'aérosol qui peuvent être utilisés par exemple dans le cas du procédé dit procédéThe document Thin Solid Films, Vol. 197, (1991), page 197 describes supply devices for an aerosol generator pot which can be used for example in the case of the process called process
Pyrosol .Pyrosol.
Un tel dispositif de l'art antérieur, est représenté en coupe verticale schématique sur la figure 1. Ce dispositif d'alimentation en liquide à niveau constant se présente le plus souvent sous la forme d'une burette 105 de niveau constant.Such a device of the prior art, is shown in schematic vertical section in FIG. 1. This device for supplying liquid at constant level is most often in the form of a burette 105 of constant level.
Le niveau constant dans le pot générateur d'aérosol 101 est fixé par le niveau de liquide dans la partie inférieure 102 de la burette 105, selon le principe des vases communicants par l'intermédiaire du tube 103. Le tube 104 assure le maintien de la même pression dans le pot et la partie inférieure de la 10 2. Le bouchon 106 isole le contenu de la burette de la pression extérieure.The constant level in the aerosol generator pot 101 is fixed by the level of liquid in the lower part 102 of the burette 105, according to the principle of communicating vessels via the tube 103. The tube 104 ensures the maintenance of the same pressure in the pot and the lower part of the 10 2. The stopper 106 isolates the contents of the burette from the external pressure.
Quand le niveau de liquide baisse dans le pot 101, il baisse également dans la partie inférieure 102 de la burette 105, et lorsque ce niveau est tel que le tube 107 n'est plus immergé dans la solution, le liquide en provenance de la partie supérieure de la burette 105 s'écoule de nouveau dans la partie 102, et le niveau de liquide dans la partie inférieure 102 remonte jusqu'au niveau de la partie inférieure du tube 107.When the liquid level drops in the pot 101, it also drops in the lower part 102 of the burette 105, and when this level is such that the tube 107 is no longer immersed in the solution, the liquid coming from the part top of the burette 105 flows again into the part 102, and the liquid level in the lower part 102 rises to the level of the lower part of the tube 107.
Un tel dispositif d'alimentation, décrit sur la figure 1, présente de nombreux inconvénients.Such a supply device, described in Figure 1, has many drawbacks.
Il est tout d'abord impossible de recharger en liquide la burette à niveau constant 105 il est nécessaire d'enlever le bouchon 106, ce qui provoque une rupture du niveau constant dans la partie inférieure de la burette 105 et par voie de conséquence dans le pot 101.First of all, it is impossible to reload the burette at constant level 105 with liquid, it is necessary to remove the plug 106, which causes the constant level to rupture in the lower part of the burette 105 and consequently in the pot 101.
Dans le cas où le générateur d'aérosol ultrasonore est utilisé dans le cadre du procédé dit procédé Pyrosol®, le four mis en oeuvre dans ce procédé est constitué de plusieurs zones de dépôt, chaque zone étant elle-même alimentée par plusieurs générateurs d'aérosol ultrasonores, le remplissage, le rechargement des burettes en liquide entraîne des arrêts réguliers de la production avec des répercussions importantes sur la productivité, le coût global du procédé et des produits fabriqués.In the case where the ultrasonic aerosol generator is used within the framework of the process known as the Pyrosol ® process, the oven used in this process consists of several deposition zones, each zone itself being supplied by several generators of ultrasonic aerosol, filling, reloading of burettes with liquid leads to regular production stoppages with significant repercussions on productivity, the overall cost of the process and of the products produced.
Ensuite, dans le dispositif de l'art antérieur, la burette à niveau constant sert à la fois de réservoir de stockage et . d' alimentation en liquide, et de dispositif à niveau constant. Du fait que les deux rôles joués par la burette ne peuvent être séparés, chaque appareil, tel qu'un générateur d'aérosol ultrasonore, devra être équipé d'une burette, car une seule burette ne peut alimenter plusieurs appareils.Then, in the device of the prior art, the burette at constant level serves both as a storage tank and. liquid supply, and constant level device. Since the two roles played by the burette cannot be separated, each device, such as an ultrasonic aerosol generator, must be equipped with a burette, since a single burette cannot supply several devices.
Par exemple, on compte jusqu'à quatorze générateurs d'aérosol associés à autant de burettes dans le cas d'une installation Pyrosol® ce qui entraîne des manipulations supplémentaires et un encombrement important .For example, there are up to fourteen aerosol generators associated with as many burettes in the case of a Pyrosol ® installation, which leads to additional handling and a large footprint.
Le dispositif décrit sur la figure 1 fonctionne d'une manière qui ne peut être considérée comme entièrement satisfaisante car la variation de niveau dans la partie inférieure 102 de la burette a lieu de manière brusque, du fait, en particulier, du passage obligatoire de bulles d'air. Cette variation brusque de niveau dans la partie inférieure 102 se traduit par une même variation brusque du niveau correspondant dans l'appareil alimenté, par exemple le générateur d'aérosol, avec pour conséquence une importante variation du débit d'aérosol qui est particulièrement préjudiciable dans le cas où cet aérosol est envoyé dans une installation Pyrosol®.The device described in FIG. 1 operates in a manner which cannot be considered entirely satisfactory since the level variation in the lower part 102 of the burette takes place suddenly, due in particular to the compulsory passage of bubbles. of air. This sudden change in level in the lower part 102 results in the same sudden change in the corresponding level in the device supplied, for example the aerosol generator, with the consequence of a large variation in the aerosol flow rate which is particularly detrimental in if this aerosol is sent to a Pyrosol ® installation.
En effet, comme cela est décrit dans le document FR-A-2 110 622, l'aérosol utilisé dans cette installation doit présenter des propriétés stables et constantes.In fact, as described in document FR-A-2 110 622, the aerosol used in this installation must have stable and constant properties.
Dans le cas décrit par l'art antérieur, l'appareil alimenté est un pot générateur d'aérosol ultrasonore, le liquide contenu dans le pot générateur d'aérosol se réchauffe sous l'influence du faisceau d'ultrasons, cette augmentation de température pouvant atteindre jusqu'à plusieurs dizaines de degrés C.In the case described by the prior art, the device supplied is an ultrasonic aerosol generating pot, the liquid contained in the aerosol generating pot heats up under the influence of the ultrasound beam, this increase in temperature possibly reach up to several tens of degrees C.
On sait que les caractéristiques de l'aérosol produit dépendent des propriétés intrinsèques des solutions telles que la viscosité et la tension de surface. Or ces propriétés varient en fonction de la température de manière importante. Le réchauffement du liquide contenu dans le pot se traduit donc par une évaporation de la phase solvant, rendant la solution de plus en plus concentrée, donc de plus en plus visqueuse ce qui conduit parfois à un arrêt complet de la production d'aérosol. De plus, chaque fois que le pot générateur est remis à niveau par le dispositif à niveau constant, constitué par la burette, la viscosité et la température du liquide qu'il contient diminuent, ce qui se traduit par une nouvelle variation des caractéristiques de l'aérosol produit, par exemple de nouveau extrêmement préjudiciable au fonctionnement de l'installation Pyrosol® et à la qualité des produits obtenus .We know that the characteristics of the aerosol produced depend on the intrinsic properties of solutions such as viscosity and surface tension. However, these properties vary depending on the temperature significantly. The heating of the liquid contained in the pot therefore results in a evaporation of the solvent phase, making the solution more and more concentrated, therefore more and more viscous, which sometimes leads to a complete cessation of aerosol production. In addition, each time the generator pot is leveled by the constant level device, consisting of the burette, the viscosity and the temperature of the liquid it contains decrease, which results in a new variation in the characteristics of the aerosol product such again extremely detrimental to the functioning of the Pyrosol ® installation and the quality of products obtained.
Enfin, et entre autres inconvénients, il est difficile d'évaluer de manière précise la quantité de liquide consommée par l'appareil alimenté par la burette 105. Ainsi, par exemple, pour évaluer la consommation totale en liquide dans un four de dépôtFinally, and among other drawbacks, it is difficult to accurately assess the quantity of liquid consumed by the device supplied by the burette 105. Thus, for example, to evaluate the total consumption of liquid in a deposition oven
Pyrosol®, il est nécessaire de connaître le volume de liquide consommé dans chaque burette de niveau constant puis de les additionner, ce qui nuit grandement à la précision de la mesure.Pyrosol ® , it is necessary to know the volume of liquid consumed in each burette of constant level and then to add them, which greatly affects the accuracy of the measurement.
Le but de la présente invention est donc de fournir un système d'alimentation en liquide pur appareil dans lequel est maintenu un niveau constant de liquide qui remédie aux inconvénients des dispositifs et systèmes de l'art antérieur.The object of the present invention is therefore to provide a system for supplying pure liquid apparatus in which a constant level of liquid is maintained which overcomes the drawbacks of the devices and systems of the prior art.
Ce but et d'autres encore, sont atteints, conformément à l'invention par un système d'alimentation en liquide pour appareil dans lequel est maintenu un niveau constant de liquide, ledit système d'alimentation en liquide comprenant des moyens de stockage du liquide, et un dispositif d'alimentation en liquide à niveau constant relié audit appareil et y maintenant le. même niveau constant en vertu du principe des vases communicants, caractérisé en ce que ladite alimentation en liquide est réalisé en continu ; en ce que lesdits moyens de stockage du liquide sont distincts dudit dispositif d'alimentation en liquide à niveau constant ; en ce que ledit dispositif d'alimentation en liquide à niveau constant est un dispositif à débordement comportant un récipient rempli en permanence jusqu'à sa limite supérieure correspondant au niveau constant à maintenir, et une zone de récupération qui recueille en permanence le liquide qui déborde depuis ledit récipient, ledit récipient étant relié audit appareil, et étant alimenté en continu par des moyens d'alimentation continue en liquide, reliés auxdits moyens de stockage ; moyennant quoi un niveau constant est assuré en permanence dans l'appareil par la circulation continue du liquide. Grâce au système selon l'invention les inconvénients des systèmes de l'art antérieur sont surmontés .This object and others still are achieved, in accordance with the invention by a liquid supply system for an apparatus in which a constant level of liquid is maintained, said liquid supply system comprising means for liquid storage, and a constant level liquid supply device connected to and holding said device. same constant level by virtue of the principle of communicating vessels, characterized in that said supply of liquid is carried out continuously; in that said liquid storage means are separate from said constant level liquid supply device; in that said constant level liquid supply device is an overflow device comprising a container permanently filled to its upper limit corresponding to the constant level to be maintained, and a recovery zone which permanently collects the overflowing liquid from said container, said container being connected to said apparatus, and being continuously supplied by means of continuous liquid supply, connected to said storage means; whereby a constant level is permanently ensured in the apparatus by the continuous circulation of the liquid. Thanks to the system according to the invention, the drawbacks of the systems of the prior art are overcome.
En effet, le principe du dispositif à débordement qui fait partie du système selon l'invention se différencie fondamentalement de celui du dispositif de type burette à niveau constant de l'art antérieur. Un tel dispositif à débordement, qui fonctionne en continu, et qui est rempli en permanence jusqu'au niveau constant souhaité, garantit que ce même niveau constant soit assuré en permanence, sans aucune variation, dans l'appareil dans lequel on cherche à maintenir un niveau constant, par la circulation continue et permanente du liquide. D'autre part, selon une autre caractéristique essentielle du système selon l'invention, les moyens de stockage du liquide sont distincts, séparés du dispositif à débordement, et ce dispositif à débordement est alimenté en continu par des moyens d'alimentation continue en liquide, reliés aux moyens de stockage.Indeed, the principle of the overflow device which is part of the system according to the invention differs fundamentally from that of the device of burette type at constant level of the prior art. Such an overflow device, which operates continuously, and which is permanently filled up to the desired constant level, guarantees that this same constant level is ensured permanently, without any variation, in the apparatus in which it is sought to maintain a constant level, by the continuous and permanent circulation of the liquid. On the other hand, according to another essential characteristic of the system according to the invention, the liquid storage means are distinct, separate from the overflow device, and this overflow device is continuously supplied by means of continuous liquid supply. , connected to the storage means.
En outre, il n'y a aucune circulation de bulle d'air susceptible d'occasionner des perturbations dans l'appareil et le dispositif à débordement.In addition, there is no air bubble circulation likely to cause disturbances in the device and the overflow device.
De ce fait, les rôles respectifs, d'une part, d'alimentation continue en liquide et de stockage et, d'autre part, de maintien du niveau constant sont joués de manière distincte, d'une part, par les moyens d'alimentation et les moyens de stockage et, d'autre part, par le dispositif à débordement.Therefore, the respective roles, on the one hand, of continuous supply of liquid and storage and, on the other hand, of maintaining the constant level are played separately, on the one hand, by means of supply and storage means and, on the other hand, by the overflow device.
Dans l'art antérieur, ces deux fonctions étaient réunies dans un seul et même appareil, a savoir la burette à niveau constant et se perturbaient mutuellement. Au contraire, selon l'invention, il est possible de réaliser un fonctionnement effectivement continu du système et de l'appareil puisque le fa t, par exemple, de recharger, de remplir à nouveau les moyens de stockage n'entraîne aucune perturbation, ni sur ce dispositif à débordement si sur l'appareil à alimenter dont le fonctionnement ne doit pas être arrêté. Ce remplissage, ce rechargement pouvant entre outre être réalisés a tout instant.In the prior art, these two functions were combined in a single device, namely the burette at constant level and disturbed each other. On the contrary, according to the invention, it is possible to achieve effectively continuous operation of the system and of the apparatus since the fact, for example, of recharging, of refilling the storage means does not cause any disturbance, nor on this overflow device if on the device to be supplied whose operation must not be stopped. This filling, this recharging can also be carried out at any time.
Les moyens de stockage du liquide comprennent généralement un réservoir muni de préférence de moyens de mesure de la quantité de liquide . Ce réservoir étant séparé et jouant strictement un rôle de stockage, il est très facile, à tout moment, .et sans occasionner aucune perturbation, de mesurer en continu la quantité de liquide se trouvant dans ce réservoir, et par voie de conséquence la quantité de liquide consommée dans l'appareil.The liquid storage means generally comprise a reservoir preferably provided with means for measuring the quantity of liquid. This tank being separate and playing strictly a storage role, it is very easy, at any time, and without causing any disturbance, to continuously measure the amount of liquid in this tank, and consequently the amount of liquid consumed in the device.
Avantageusement, un seul réservoir peut alimenter plusieurs dispositifs à débordement, chacun de ces dispositifs étant relié à un appareil. Par exemple, un seul réservoir d'un volume judicieusement choisi, peut alimenter jusqu'à 14 appareils ou plus.Advantageously, a single tank can supply several overflow devices, each of these devices being connected to an appliance. For example, a single tank with a judiciously chosen volume can supply up to 14 or more devices.
En outre, dans le cas de l'utilisation de liquides nécessitant des précautions particulières de manipulation et de stockage, le réservoir peut être stocké dans un local adéquat, même loin des appareils à alimenter. Une telle disposition, découlant des caractéristiques du système selon l'invention, assure une sécurité optimale de fonctionnement.In addition, in the case of the use of liquids requiring special handling and storage precautions, the tank can be stored in a suitable room, even far from the devices to be supplied. Such an arrangement, arising from the characteristics of the system according to the invention, ensures optimum operating safety.
Si le liquide mis en oeuvre subit un échauffement dans l'appareil comme c'est le cas, par exemple, dans un pot générateur d'aérosol, la circulation permanente du liquide et son renouvellement régulier dans l'appareil garantissent une température constante du liquide aussi, bien dans l'appareil que dans l'ensemble du système, un tel état d'équilibre thermique étant bien évidemment atteint après une phase transitoire de quelques minutes. Il en découle que les propriétés du liquide, telles que la viscosité, la tension de surface..., demeurent sensiblement constantes, ce qui permet un fonctionnement régulier de l'appareil, et par exemple la production d'un aérosol de caractéristiques stables et constantes. Avantageusement, selon l'invention, le niveau constant de liquide dans l'appareil peut être ajusté à tout moment en faisant varier l'altitude relative du dispositif à débordement par rapport à 5 l'appareil alimenté. Un tel ajustement ne peut pas être réalisé instantanément avec les systèmes de l'art antérieur comportant une burette à niveau constant, et constitue un avantage supplémentaire du système selon 1 ' invention.If the liquid used undergoes heating in the device as is the case, for example, in an aerosol generator pot, the permanent circulation of the liquid and its regular renewal in the device guarantee a constant temperature of the liquid. also, both in the apparatus and in the system as a whole, such a state of thermal equilibrium being obviously reached after a transient phase of a few minutes. It follows that the properties of the liquid, such as viscosity, surface tension, etc., remain substantially constant, which allows regular operation of the device, and for example the production of an aerosol with stable characteristics and constants. Advantageously, according to the invention, the constant level of liquid in the device can be adjusted at any time by varying the relative altitude of the overflow device relative to the powered device. Such an adjustment cannot be carried out instantaneously with the systems of the prior art comprising a burette at constant level, and constitutes an additional advantage of the system according to the invention.
10 Selon un premier mode de réalisation du système selon l'invention, le dispositif à débordement comprend un vase à débordement, formé d'une enceinte comportant une cloison de séparation verticale, séparant ladite enceinte en une première et une seconde10 According to a first embodiment of the system according to the invention, the overflow device comprises an overflow vessel, formed of an enclosure comprising a vertical partition, separating said enclosure into a first and a second
15 parties définissant respectivement ledit récipient et ladite zone de récupération, la hauteur de ladite paroi définissant le niveau constant à maintenir.15 parts respectively defining said container and said recovery zone, the height of said wall defining the constant level to be maintained.
Selon un second mode de réalisation du système, selon l'invention, le dispositif à débordementAccording to a second embodiment of the system, according to the invention, the overflow device
20 comprend un tube coudé présentant une portion verticale ; puis une portion horizontale définissant le niveau constant à maintenir, ladite portion horizontale débouchant dans un tube vertical descendant, définissant ladite zone de récupération, et formant un20 comprises a bent tube having a vertical portion; then a horizontal portion defining the constant level to be maintained, said horizontal portion opening into a downward vertical tube, defining said recovery zone, and forming a
25 siphon.25 siphon.
Selon l'invention, l'appareil est de préférence un générateur d'aérosol ultrasonore.According to the invention, the device is preferably an ultrasonic aerosol generator.
L'invention a donc également trait au générateur d'aérosol ultrasonore alimenté par leThe invention therefore also relates to the ultrasonic aerosol generator powered by the
30 système décrit plus haut.30 system described above.
Un tel générateur d'aérosol ultrasonore est mis en oeuvre de préférence dans un dispositif ou installation pour la mise en oeuvre du procédé dit procédé Pyrosol® d'élaboration de couches minces de métal ou d'un composé métallique.Such an ultrasonic aerosol generator is preferably used in a device or installation for implementing the so-called process. Pyrosol ® process for the production of thin layers of metal or a metal compound.
L; invention a donc également pour objet une installation d'élaboration de couches minces de métal ou de composé métallique par dépôt sur un substrat chauffé d'un aérosol de solution de précurseur dudit métal ou du composé métallique entraîné par un gaz vecteur, ledit aérosol étant créé par le générateur d'aérosol ultrasonore caractérisé en ce que ledit générateur d'aérosol ultrasonore est le générateur d'aérosol ultrasonore décrit plus haut.L ; The invention therefore also relates to an installation for producing thin layers of metal or metal compound by depositing on a heated substrate an aerosol of solution of precursor of said metal or of metallic compound entrained by a carrier gas, said aerosol being created. by the ultrasonic aerosol generator characterized in that said ultrasonic aerosol generator is the ultrasonic aerosol generator described above.
Les avantages présentés par le système selon l'invention sont particulièrement sensibles dans le cas où l'appareil est un générateur d'aérosol ultrasonore, en effet du fait du niveau constant sans variation assuré dans le pot générateur, on obtient un débit d'aérosol parfaitement constant.The advantages presented by the system according to the invention are particularly significant in the case where the device is an ultrasonic aerosol generator, in fact because of the constant level without variation guaranteed in the generator pot, an aerosol flow is obtained perfectly constant.
Ainsi, lorsque le système, selon l'invention, est intègre dans l'installation Pyrosol® mentionnée plus haut, toutes les qualités et tous les avantages du système, selon l'invention, se répercutent en conséquence sur 1 ' installation et le procèdeThus, when the system according to the invention is integrated into the Pyrosol ® installation mentioned above, all the qualities and all the advantages of the system according to the invention have repercussions on the installation accordingly and proceeds therefrom.
Pyrosol .Pyrosol.
Par exemple, la qualité et l'homogénéité des couches minces produites est grandement améliorée à cause de la production d'aérosol beaucoup plus homogène qu'avec les systèmes par exemple à burette de l'art antérieur ; la productivité du procédé est améliorée grâce a la suppression des arrêts nécessaires pour le rechargement en liquide. Enfin, et entre autres, la consommation de liquide peut être contrôlée de manière beaucoup plus précise et beaucoup plus aisée que dans l'art antérieur, par exemple, en pesant en continu les moyens de stockage tels qu'un réservoir même pendant la production d'aérosol.For example, the quality and homogeneity of the thin layers produced is greatly improved due to the production of aerosol which is much more homogeneous than with systems, for example burette systems of the prior art; the productivity of the process is improved thanks to the elimination of the stops necessary for recharging with liquid. Finally, and among others, the consumption of liquid can be controlled much more precisely and much easier than in the prior art, for example, by continuously weighing the storage means such as a reservoir even during aerosol production.
D'autres caractéristiques et avantages de l'invention seront mieux compris à la lecture de la description suivante, donnée à titre d'exemple îllustratif et non limitatif, cette description étant faite en faisant référence aux dessins joints dans lesquels : - la figure 1, dé à décrite plus haut, est une vue en coupe verticale illustrant schématiquement un système d'alimentation en liquide de l'art antérieur, pour appareil dans lequel est maintenu un niveau constant de liquide, ledit appareil étant un pot générateur d'aérosol ;Other characteristics and advantages of the invention will be better understood on reading the following description, given by way of illustrative and nonlimiting example, this description being made with reference to the accompanying drawings in which: FIG. 1, dice to described above, is a vertical sectional view schematically illustrating a liquid supply system of the prior art, for apparatus in which a constant level of liquid is maintained, said apparatus being an aerosol generating pot;
- la figure 2 est une vue en coupe verticale illustrant schématiquement un système d'alimentation en liquide conforme à l'invention, pour appareil dans lequel est maintenu un niveau constant de liquide, ledit appareil étant un pot générateur d'aérosol, et le dispositif d'alimentation en liquide a niveau constant étant réalise selon un premier mode de réalisation de l'invention sous la forme d'un vase a débordement ; - la figure 3A est une vue en coupe verticale illustrant plus précisément un premier mode de réalisation du dispositif d'alimentation en liquide à niveau constant du système selon l'invention, réalise sous la forme d'un vase a débordement ; - la figure 3B est une vue schématique en coupe selon BB du dispositif de la figure 3A ;- Figure 2 is a vertical sectional view schematically illustrating a liquid supply system according to the invention, for apparatus in which a constant level of liquid is maintained, said apparatus being an aerosol generating pot, and the device constant level liquid supply being produced according to a first embodiment of the invention in the form of an overflow vessel; - Figure 3A is a vertical sectional view illustrating more precisely a first embodiment of the liquid supply device at constant level of the system according to the invention, produced in the form of an overflow vessel; - Figure 3B is a schematic sectional view along BB of the device of Figure 3A;
- la figure 4 est une vue en coupe verticale illustrant schématiquement un système d'alimentation en liquide conforme à l'invention pour appareil dans lequel est maintenu un niveau constant de liquide, ledit appareil étant un pot générateur d'aérosol, et le dispositif d'alimentation en liquide à niveau constant étant réalisé selon un second mode de réalisation de l'invention, sous la forme d'un tube coudé .- Figure 4 is a vertical sectional view schematically illustrating a system liquid supply device according to the invention for an apparatus in which a constant level of liquid is maintained, said apparatus being an aerosol generating pot, and the constant level liquid supply device being produced according to a second mode of embodiment of the invention, in the form of a bent tube.
Sur la figure 2 on a donc représenté très schématiquement un système d'alimentation réalisé conformément à l'invention et destiné à alimenter en liquide un appareil dans lequel est maintenu un niveau constant de liquide.FIG. 2 therefore very schematically shows a supply system produced in accordance with the invention and intended to supply liquid to an appliance in which a constant level of liquid is maintained.
Sur la figure 2, l'appareil est un pot générateur d'aérosol 1 d'un générateur d'aérosol ultrasonore, mais l'appareil alimenté selon l'invention peut être tout appareil dans lequel on souhaite maintenir un niveau constant de liquide.In FIG. 2, the device is an aerosol generator pot 1 of an ultrasonic aerosol generator, but the device supplied according to the invention can be any device in which it is desired to maintain a constant level of liquid.
De même, le liquide pourra être un liquide quelconque, dans le cas d'un générateur d'aérosol pour installation Pyrosol , le liquide est de préférence une solution de précurseur de métal ou de composé métallique .Similarly, the liquid could be any liquid, in the case of an aerosol generator for Pyrosol installation, the liquid is preferably a solution of metal precursor or metal compound.
Un tel pot générateur d'aérosol présente une constitution générale en elle-même connue et on pourra en trouver une description complète dans l'article de J. SPITZ et G. UNY déjà cité plus haut ou dans le document FR-A-2 110 622 également mentionné ci-dessus. Le pot générateur comporte un émetteur d'ultrasons 2 tel qu'une céramique piézoélectrique, placé à la partie inférieure d'une cuve ou pot généralement cylindrique 3, rempli (e) de liquide 4 qui est de préférence une solution d'alcool ou d' acétylacétone.Such an aerosol generator pot has a general constitution in itself known and a full description can be found in the article by J. SPITZ and G. UNY already cited above or in document FR-A-2 110 622 also mentioned above. The generator pot comprises an ultrasonic emitter 2 such as a piezoelectric ceramic, placed at the bottom of a generally cylindrical tank or pot 3, filled with liquid 4 which is preferably an alcohol or acetylacetone solution.
Cette enceinte peut comporter également un certain nombre de capteurs tels que des capteurs de température 5.This enclosure can also include a certain number of sensors such as temperature sensors 5.
Le faisceau d'ultrasons généré, dirigé vers l'interface air-liquide 6, située au niveau constant que l'on souhaite maintenir, va former un geyser 7 qui s'accompagne d'un brouillard ou aérosol. Cet aérosol présente une répartition de la taille des particules relativement étroite, cette homogénéité de la taille des particules autour par exemple de 6 μm, est particulièrement intéressante dans le cas où le générateur d'aérosol ultrasonore est mis en oeuvre dans le cadre d'un procédé d'élaboration de couches minces dit procédé Pyrosol'" décrit dans le document FR-A-2 110 622, incorporé à la présente à titre de référence.The ultrasound beam generated, directed towards the air-liquid interface 6, located at the constant level which it is desired to maintain, will form a geyser 7 which is accompanied by a mist or aerosol. This aerosol has a relatively narrow particle size distribution, this homogeneity of the particle size around for example 6 μm, is particularly advantageous in the case where the ultrasonic aerosol generator is used in the context of a process for producing thin layers known as the Pyrosol process " described in document FR-A-2 110 622, incorporated herein by reference.
L'aérosol formé est entraîné vers le conduit de sortie de 9 par un gaz vecteur tel qu'un gaz inerte ou de l'air, introduit par le tube 8, dans le pot générateur d'aérosol.The aerosol formed is entrained towards the outlet duct of 9 by a carrier gas such as an inert gas or air, introduced by the tube 8, into the aerosol generating pot.
Selon l'invention le niveau constant dans l'appareil est maintenu par .un dispositif à débordement relié audit appareil et y maintenant le même niveau constant en vertu du principe des vases communicants.According to the invention, the constant level in the device is maintained by an overflow device connected to said device and maintaining the same constant level therein by virtue of the principle of communicating vessels.
Sur la figure , le dispositif à débordement désigné généralement par la référence 10, est relié à la base de l'appareil par les canalisations ou conduites 11, 12, le conduit 11 se prolongeant par le conduit 13, muni par exemple d'une vanne 14 de vidange. Le dispositif à débordement, qui est, sur la figure 2, conformément à un premier mode de réalisation de l'invention, un dispositif de type "vase à débordement" est décrit plus en détail sur les figures 3A et 3B, et comprend un récipient débordant 15 et une zone de récupération 16.In the figure, the overflow device generally designated by the reference 10, is connected to the base of the apparatus by the pipes or conduits 11, 12, the conduit 11 extending by the conduit 13, provided for example with a valve 14 drain. The overflow device, which is, in Figure 2, in accordance with a first embodiment of the invention, a device of the "overflow vessel" type is described in more detail in Figures 3A and 3B, and comprises a container overflowing 15 and a recovery zone 16.
Le système selon l'invention comprend en outre des moyens de stockage du liquide, qui comportent, par exemple un réservoir 17 de capacité adéquate par exemple de 10 à 100 i dans le cas où l'appareil est un pot générateur d'aérosol, et des moyens de mesure de la quantité de liquide tel qu'une balance 18. D'autres moyens de mesure permettant la mesure à tout instant, et en continu de la quantité de liquide, tels qu'un débitmètre, peuvent être envisagés.The system according to the invention also comprises means for storing the liquid, which comprise, for example a reservoir 17 of adequate capacity, for example from 10 to 100 i in the case where the device is an aerosol-generating pot, and means for measuring the quantity of liquid such as a scale 18. Other measuring means allowing the measurement at any time, and continuously of the quantity of liquid, such as a flow meter, can be envisaged.
Selon l'invention, un réservoir pourra alimenter plusieurs dispositifs a débordement, chacun étant relié à un appareil tel qu'un pot générateur d'aérosol, le nombre des appareils alimentés par un seul réservoir pourra ainsi aller jusqu'à 14 ou plus.According to the invention, a reservoir can supply several overflow devices, each being connected to an apparatus such as an aerosol generator pot, the number of apparatus supplied by a single reservoir can thus go up to 14 or more.
Le système selon l'invention comprend également des moyens d'alimentation en continu du récipient 15, qui comprennent essentiellement des moyens de mise en circulation du liquide par exemple une pompe 19 telle qu'une pompe péristaltique ou autre, et des moyens de conduite 20, 21 comportant essentiellement par exemple, une conduite d'aspiration 20 du liquide contenu dans le réservoir 17, et une conduite de refoulement 21 depuis la pompe 19 vers le récipient 15.The system according to the invention also comprises means for continuously supplying the container 15, which essentially comprise means for circulating the liquid, for example a pump 19 such as a peristaltic pump or the like, and conduit means 20 , 21 essentially comprising, for example, a suction pipe 20 for the liquid contained in the reservoir 17, and a discharge pipe 21 from the pump 19 to the container 15.
Le système comprend généralement en outre, des moyens d'équilibrage de la pression qui comprennent par exemple un conduit ou tuyau 22 assurant l'équilibrage de la pression entre le dispositif à débordement et l'appareil et reliant ceux-ci.The system generally further includes pressure balancing means which include for example a conduit or pipe 22 ensuring the balancing of the pressure between the overflow device and the apparatus and connecting the latter.
Enfin, le système comprend généralement des moyens de siphon 23, reliant la zone de récupération 16 au réservoir de liquide 17, et empêchant le gaz, par exemple l'air, en surpression dans le pot générateur et le dispositif à débordement, de s'échapper vers le réservoir 17. Sur les figures 3A et 3B on a illustré très schématiquement un dispositif à débordement, du type "vase à débordement" suivant un premier mode de réalisation de l'invention.Finally, the system generally comprises siphon means 23, connecting the recovery zone 16 to the liquid reservoir 17, and preventing the gas, for example air, in overpressure in the generator pot and the overflow device, from s' escape towards the reservoir 17. In FIGS. 3A and 3B, an overflow device, of the "overflow vessel" type according to a first embodiment of the invention, is very schematically illustrated.
Selon les figures 3A et 3B le vase à débordement 10 comprend généralement une enceinte 24, séparée par une cloison de séparation verticale 25, en deux parties, à savoir : un récipient intérieur 15 assurant le niveau constant (niveau 6 de l'appareil 1), et une zone de récupération 16 du liquide débordant depuis le récipient 15.According to FIGS. 3A and 3B, the overflow vessel 10 generally comprises an enclosure 24, separated by a vertical partition wall 25, in two parts, namely: an inner container 15 ensuring the constant level (level 6 of the apparatus 1) , and a recovery zone 16 for the liquid overflowing from the container 15.
Un siphon 23, déjà mentionné plus haut, relié à la zone de récupération est raccordé au réservoir de liquide 17.A siphon 23, already mentioned above, connected to the recovery zone is connected to the liquid reservoir 17.
Un piquage 26 permet la vidange de la zone de récupération 16, et est relié à un conduit 27 muni d'une vanne 28 (voir figure 2), tandis qu'un piquage 29 est relié au conduit 11 déjà mentionné, assurant le niveau constant entre le dispositif à débordement et le pot générateur d'aérosol (conduit 12) et permettant la vidange du récipient 15 (conduit 13) .A nozzle 26 allows the emptying of the recovery zone 16, and is connected to a conduit 27 provided with a valve 28 (see FIG. 2), while a nozzle 29 is connected to the conduit 11 already mentioned, ensuring the constant level between the overflow device and the aerosol generator pot (conduit 12) and allowing the container 15 to be emptied (conduit 13).
L'enceinte 24 compte généralement une bride 30 qui permet l'ouverture du vase à débordement pour son nettoyage interne. Cette bride définit un couvercle 31 comportant un premier piquage 32 recevant le conduit de refoulement 21 de la pompe 19, ce qui permet d'assurer en continu et en permanence le remplissage du récipient 15, et un second piquage 33 connecté au tuyau ou conduit d'équilibrage de pression 22.The enclosure 24 generally has a flange 30 which allows the opening of the overflow vessel for its internal cleaning. This flange defines a cover 31 comprising a first nozzle 32 receiving the delivery conduit 21 of the pump 19, which makes it possible to ensure continuous and permanent filling of the container 15, and a second nozzle 33 connected to the pipe or conduit pressure balancing 22.
Enfin, le vase à débordement comprend généralement un dispositif de fixation tel qu'une queue de fixation 34, en assurant le positionnement. Avantageusement, ce dispositif de fixation est muni de moyens tels qu'une table elévatrice de laboratoire permettant de faire varier l'attitude relative du dispositif à débordement par rapport à l'appareil alimenté, tel que le pot générateur d'aérosol 1, et d'ajuster ainsi simplement à tout moment ce niveau constant du liquide dans l'appareil 1.Finally, the overflow vessel generally comprises a fixing device such as a fixing tail 34, ensuring positioning. Advantageously, this fixing device is provided with means such as a laboratory lifting table making it possible to vary the relative attitude of the overflow device with respect to the powered device, such as the aerosol generator pot 1, and d '' thus simply adjust at any time this constant level of liquid in the device 1.
Par exemple on pourra ajuster l'altitude du dispositif à débordement 10 de plus ou moins 10 mm par rapport à une position moyenne. Sur la figure 4 est illustrée très schématiquement un système d'alimentation en liquide conforme a l'invention dans lequel le dispositif a débordement est réalisé, selon un second mode de réalisation de l'invention, sous la forme d'un tube coudé.For example, the altitude of the overflow device 10 can be adjusted more or less 10 mm relative to an average position. In Figure 4 is illustrated very schematically a liquid supply system according to the invention in which the overflow device is produced, according to a second embodiment of the invention, in the form of a bent tube.
La plupart des références étaient déjà utilisées sur la figure 3. Dans ce mode de réalisation, le tube coudé 35 oue le rôle de récipient, et le rôle de zone de récupération est joué par le tube horizontal 36 et le tube vertical descendant 37.Most of the references were already used in FIG. 3. In this embodiment, the bent tube 35 plays the role of container, and the role of recovery zone is played by the horizontal tube 36 and the vertical descending tube 37.
Le fonctionnement du système selon l'invention va maintenant être illustre en se référant à la figure 2, à titre d'exemple. Au départ, le liquide tel que le liquide à pulvériser est contenu dans le réservoir 17. Il est aspiré par la pompe 19 qui fonctionne en continu. Le récipient 15 du vase à débordement (figure 3) se remplit, et en vertu du principe des vases communicants, le pot générateur d'aérosol 1 (figure 2) se remplit jusqu'au niveau correspondant à la limite supérieure du récipient interne 15 (figure 3) . Ensuite, ce récipient 15 déborde, le liquide se déverse alors dans la zone de récupération 16. Depuis la zone 16, le liquide retourne dans le réservoir 17. Grâce au fonctionnement continu, le liquide est en permanence renouvelé dans le pot générateur d'aérosol, le niveau constant de liquide peut être ajusté à tout moment en faisant varier l'altitude relative du vase à débordement 10 par rapport au pot générateur d'aérosol 1.The operation of the system according to the invention will now be illustrated with reference to FIG. 2, by way of example. At the start, the liquid such as the liquid to be sprayed is contained in the reservoir 17. It is sucked in by the pump 19 which operates continuously. The container 15 of the overflow vessel (FIG. 3) fills, and by virtue of the principle of communicating vessels, the aerosol generator pot 1 (FIG. 2) fills up to the level corresponding to the upper limit of the internal container 15 ( figure 3). Then, this container 15 overflows, the liquid then flows into the recovery zone 16. From the zone 16, the liquid returns to the reservoir 17. Thanks to the continuous operation, the liquid is constantly renewed in the aerosol generator pot. , the constant level of liquid can be adjusted at any time by varying the relative altitude of the overflow vessel 10 relative to the aerosol generator pot 1.
Bien entendu, l'invention n'est pas limitée à la description qui vient d'être décrite à titre d'exemple, mais en couvre toutes les variantes.Of course, the invention is not limited to the description which has just been described by way of example, but covers all its variants.
Ainsi, le dispositif à débordement peut notamment prendre toute forme, outre les deux modes de réalisation décrits plus haut. Thus, the overflow device can in particular take any form, in addition to the two embodiments described above.

Claims

REVENDICATIONS
1. Système d'alimentation en liquide pour appareil (1). dans lequel est maintenu un niveau constant de liquide, ledit système d'alimentation en liquide comprenant des moyens de stockage du liquide1. Liquid supply system for device (1). in which a constant level of liquid is maintained, said liquid supply system comprising means for storing the liquid
(17), et un dispositif d'alimentation en liquide à niveau constant (10) relié audit appareil et y maintenant le même niveau constant en vertu du principe des vases communicants, caractérisé en ce que ladite alimentation en liquide est réalisée en continu ; en ce que lesdits moyens de stockage du liquide (17) sont distincts dudit dispositif d'alimentation en liquide à niveau constant (10) ; en ce que ledit dispositif d'alimentation en liquide à niveau constant (10) est un dispositif à débordement comportant un récipient (15, 35) rempli en permanence jusqu'à sa limite supérieure correspondant au niveau constant à maintenir, et une zone de récupération (16) qui recueille en permanence le liquide qui déborde depuis ledit récipient, ledit récipient étant relie audit appareil, et étant alimenté en continu par des moyens d'alimentation continue en liquide (19, 20, 21), relies auxdits moyens de stockage(17), and a constant level liquid supply device (10) connected to said apparatus and maintaining the same constant level therein by virtue of the principle of communicating vessels, characterized in that said liquid supply is carried out continuously; in that said liquid storage means (17) are separate from said constant level liquid supply device (10); in that said constant level liquid supply device (10) is an overflow device comprising a container (15, 35) permanently filled to its upper limit corresponding to the constant level to be maintained, and a recovery zone (16) which continuously collects the liquid which overflows from said container, said container being connected to said device, and being continuously supplied by means of continuous supply of liquid (19, 20, 21), connected to said storage means
(17) ; moyennant quoi un niveau constant est assuré en permanence dans l'appareil par la circulation continue du liquide.(17); whereby a constant level is permanently ensured in the apparatus by the continuous circulation of the liquid.
2. Système selon la revendication 1, caractérisé en ce que lesdits moyens de stockage du liquide comprennent un réservoir (17) muni éventuellement de moyens de mesure (18) de la quantité de liquide.2. System according to claim 1, characterized in that said liquid storage means comprise a reservoir (17) possibly provided with means for measuring (18) of the quantity of liquid.
3. Système selon la revendication 2, caractérisé en ce qu'un réservoir alimente plusieurs dispositifs à débordement. 193. System according to claim 2, characterized in that a reservoir feeds several overflow devices. 19
4. Système selon la revendication 2, caractérisé en ce que lesdits moyens de mesure comprennent une balance (18).4. System according to claim 2, characterized in that said measuring means comprise a balance (18).
5. Système selon la revendication 1, caractérisé en ce que lesdits moyens d'alimentation continue en liquide dudit récipient comprennent des moyens de mise en circulation continue (19) du liquide depuis lesdits moyens de stockage jusqu' audit récipient, et des moyens de conduite (20, 21) . 5. System according to claim 1, characterized in that said means for continuously supplying liquid to said container comprises means for continuously circulating (19) the liquid from said storage means to said container, and means for conducting (20, 21).
6. Système selon la revendication 5, caractérisé en ce que lesdits moyens de mise en circulation comprennent une pompe (19).6. System according to claim 5, characterized in that said circulation means comprise a pump (19).
7. Système selon la revendication 1, caractérisé en ce que le dispositif à débordement est muni de moyens d'équilibrage de la pression (22) le reliant à l'appareil (1) dans lequel est maintenu un niveau constant de liquide.7. System according to claim 1, characterized in that the overflow device is provided with pressure balancing means (22) connecting it to the device (1) in which a constant level of liquid is maintained.
8. Système selon la revendication 1, caractérisé en ce que des moyens de siphon (23) relient la zone de récupération (16) du dispositif à débordement aux moyens de stockage du liquide (17).8. System according to claim 1, characterized in that siphon means (23) connect the recovery zone (16) of the overflow device to the liquid storage means (17).
9. Système selon la revendication 1, caractérise en ce que le niveau constant du liquide dans l'appareil peut être ajusté en faisant varier l'altitude relative du dispositif a débordement par rapport à l'appareil alimente.9. System according to claim 1, characterized in that the constant level of the liquid in the device can be adjusted by varying the relative altitude of the overflow device relative to the device supplied.
10. Système selon l'une quelconque des revendications 1 a 9, caractérisé en ce que ledit dispositif à débordement (10) comprend un vase à débordement formé d'une enceinte (24) comportant une cloison de séparation verticale (25) séparant ladite enceinte en une première et une seconde parties définissant respectivement lesdits récipients (15) et zone de récupération (16), la hauteur de ladite paroi définissant le niveau constant à maintenir.10. System according to any one of claims 1 to 9, characterized in that said overflow device (10) comprises an overflow vessel formed by an enclosure (24) comprising a vertical partition (25) separating said enclosure in first and second parts respectively defining said containers (15) and recovery zone (16), the height of said wall defining the constant level to be maintained.
11. Système selon l'une quelconque des revendications 1 à 9, caractérisé en ce que ledit dispositif à débordement comprend un tube coudé (35) présentant une portion verticale ; puis un tube horizontal (36) définissant le niveau à maintenir, ledit tube horizontal débouchant dans un tube vertical (37) descendant définissant ladite zone de récupération et formant siphon.11. System according to any one of claims 1 to 9, characterized in that said overflow device comprises a bent tube (35) having a vertical portion; then a horizontal tube (36) defining the level to be maintained, said horizontal tube opening into a downward vertical tube (37) defining said recovery zone and forming a siphon.
12. Système selon l'une quelconque des revendications 1 à 11, caractérisé en ce que ledit appareil est un pot générateur d'aérosol ultrasonore.12. System according to any one of claims 1 to 11, characterized in that said device is a pot generating ultrasonic aerosol.
13. Générateur d'aérosol ultrasonore, caractérisé en ce qu'il est alimenté en liquide par le système selon l'une quelconque des revendications 1 à 11.13. Ultrasonic aerosol generator, characterized in that it is supplied with liquid by the system according to any one of claims 1 to 11.
14. Installation d'élaboration de couches minces de métal ou de composé métallique par dépôt sur un substrat chauffé d'un aérosol de solution de précurseur dudit métal ou composé métallique entouré par un gaz inerte, ledit aérosol étant créé par un générateur d'aérosol ultrasonore, caractérisée en ce que ledit générateur d'aérosol ultrasonore est le générateur selon la revendication 13. 14. Installation for producing thin layers of metal or metallic compound by depositing on an heated substrate an aerosol of solution of precursor of said metal or metallic compound surrounded by an inert gas, said aerosol being created by an aerosol generator ultrasonic, characterized in that said ultrasonic aerosol generator is the generator according to claim 13.
PCT/FR1998/000140 1997-01-30 1998-01-27 System for supplying liquid to an apparatus in which a constant level is maintained WO1998033599A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9701011A FR2758744B1 (en) 1997-01-30 1997-01-30 LIQUID SUPPLY SYSTEM FOR APPARATUS IN WHICH A CONSTANT LEVEL IS MAINTAINED
FR97/01011 1997-01-30

Publications (1)

Publication Number Publication Date
WO1998033599A1 true WO1998033599A1 (en) 1998-08-06

Family

ID=9503128

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR1998/000140 WO1998033599A1 (en) 1997-01-30 1998-01-27 System for supplying liquid to an apparatus in which a constant level is maintained

Country Status (2)

Country Link
FR (1) FR2758744B1 (en)
WO (1) WO1998033599A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160004259A1 (en) * 2014-07-03 2016-01-07 Applied Materials, Inc. Apparatus and method for self-regulating fluid chemical delivery
CN105771341A (en) * 2016-04-26 2016-07-20 合肥通用机械研究院 Constant-water-level filtration and back flush integrated device and control method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3070905B1 (en) * 2017-09-11 2020-07-24 Valeo Systemes Thermiques NEBULIZATION SYSTEM FOR MOTOR VEHICLES AND PROCESS FOR COOLING A PASSENGER COMPARTMENT USING SUCH A SYSTEM
CN114506888B (en) * 2022-02-18 2023-01-24 河南城建学院 Unpowered sewage adjusting tank

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1103522B (en) * 1957-10-24 1961-03-30 Transform Roentgen Matern Veb Exhalation device for aerosols generated by means of ultrasound
FR2110622A5 (en) 1970-10-23 1972-06-02 Commissariat Energie Atomique
US3851662A (en) * 1973-07-18 1974-12-03 Eastman Kodak Co Photographic processing solution filling and circulating apparatus
US3918640A (en) * 1973-06-20 1975-11-11 Stern Freres Sa Mist generator
US4257989A (en) * 1979-02-22 1981-03-24 Tdk Electronics Co., Ltd. Humidifier

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1103522B (en) * 1957-10-24 1961-03-30 Transform Roentgen Matern Veb Exhalation device for aerosols generated by means of ultrasound
FR2110622A5 (en) 1970-10-23 1972-06-02 Commissariat Energie Atomique
US3918640A (en) * 1973-06-20 1975-11-11 Stern Freres Sa Mist generator
US3851662A (en) * 1973-07-18 1974-12-03 Eastman Kodak Co Photographic processing solution filling and circulating apparatus
US4257989A (en) * 1979-02-22 1981-03-24 Tdk Electronics Co., Ltd. Humidifier

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
SPITZ ET UNY, APPLIED OPTICS, July 1968 (1968-07-01), pages 1345 - 1349
THIN SOLID FILMS, vol. 197, 1991, pages 197

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160004259A1 (en) * 2014-07-03 2016-01-07 Applied Materials, Inc. Apparatus and method for self-regulating fluid chemical delivery
US9857027B2 (en) * 2014-07-03 2018-01-02 Applied Materials, Inc. Apparatus and method for self-regulating fluid chemical delivery
CN105771341A (en) * 2016-04-26 2016-07-20 合肥通用机械研究院 Constant-water-level filtration and back flush integrated device and control method

Also Published As

Publication number Publication date
FR2758744B1 (en) 1999-02-19
FR2758744A1 (en) 1998-07-31

Similar Documents

Publication Publication Date Title
EP2959034B1 (en) Chemical vapor deposition device
EP2959035B1 (en) Chemical vapour deposition device
EP0070760B1 (en) Process for treating a liquid mass without contacting the walls of an apparatus, and application of this process to the formation of microgravity materials
FR2941378A1 (en) APPARATUS FOR DECONTAMINATION BY FOGGING
FR2575825A1 (en) METHOD AND DEVICE FOR THE DETERMINATION OF PULVERULENT MATERIALS
FR2528082A1 (en) DETERGENT DISPENSER CONTAINER, PARTICULARLY FOR THE DETERGENT TANK OF AN AUTOMATIC WASHING MACHINE
FR2692597A1 (en) Introducing liq. phase reactants into reaction chamber - by passing liq. into vaporiser contg. microporous packing then transporting vapour to reactor using carrier gas
EP0980741A1 (en) Method and apparatus for abrasive slurry distribution in mechanical polishing of substrate
EP2367614A1 (en) Device and method for depositing a powder mixture for forming an object with composition gradients
WO1998033599A1 (en) System for supplying liquid to an apparatus in which a constant level is maintained
FR2735004A1 (en) DEVICE FOR DELIVERING LIQUID SOAP TO A FOAM GENERATOR
FR2944004A1 (en) DEVICE FOR DISPENSING LIQUID OR VISCOUS PRODUCTS AND METHOD FOR IMPLEMENTING SAID DEVICE
FR3065171A1 (en) DUAL LIQUID DISPENSING DEVICE USEFUL IN A FRACTIONING OR WASHING COLUMN ON A FLOATING SUPPORT
WO2020208244A1 (en) Device for filling containers
EP1967932B1 (en) Device for regulating the concentration of a component in a liquid
CH456986A (en) Method and device for determining the specific masses of solids
CH627839A5 (en) Liquid feeder.
FR2788509A1 (en) VOLUMETRIC FILLING DEVICE
EP0080607B1 (en) Agglomerating nozzle
EP0409897B1 (en) Constant level supply of a mercury evaporation cell for epitaxy
WO1997018439A1 (en) Hydrostatic height measurement system and method
JP2011194313A (en) Bubbling device and method
EP0565581B1 (en) Device for pressure supplying a photographic coating station
FR2510749A1 (en) Batch liq. metering and dispensing system - employs microprocessor to compute flow from liq. velocity in calibrated tube
FR2606189A1 (en) Method and device for dispensing a liquid product in the form of basic doses of constant volume

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: JP

Ref document number: 1998532583

Format of ref document f/p: F

122 Ep: pct application non-entry in european phase