WO1997040213A1 - Procede et matrice d'electroformage et produit ainsi obtenu - Google Patents
Procede et matrice d'electroformage et produit ainsi obtenu Download PDFInfo
- Publication number
- WO1997040213A1 WO1997040213A1 PCT/NL1997/000203 NL9700203W WO9740213A1 WO 1997040213 A1 WO1997040213 A1 WO 1997040213A1 NL 9700203 W NL9700203 W NL 9700203W WO 9740213 A1 WO9740213 A1 WO 9740213A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pattern
- mandrel
- ancillary
- product
- dykes
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/10—Moulds; Masks; Masterforms
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/08—Perforated or foraminous objects, e.g. sieves
Definitions
- the invention relates to an electroforming method for producing metal products having a pattern of openings separated by dykes using an electroforming mandrel in an electroplating bath, wherein metal from the electroplating bath is deposited on electrically conducting regions of the mandrel, which regions comprise at least two regions electrically insulated from one another.
- a method is des ⁇ cribed therein for growing electroplating products in which a mandrel is used which is composed of a plastic substrate, a so-called stencil pattern layer made of plastic and an electrical contacting layer.
- the stencil pattern layer of the mandrel has (at least partly) a surface roughness of less than 100 nanometres in order to facilitate the de ⁇ tachment of grown products.
- the contacting layer comprises mutually electrically insulated parts which are each provided with a separate connecting wire. Furthermore, the contacting layer is preferably ap ⁇ plied in the base of the stencil pattern layer.
- a disadvantage of the above method is that, to obtain an elec- troformed product having different thicknesses, the switching times for the selective connection of the mutually electrically insulated parts to a current source have to be monitored accurately.
- Mandrels known in the art are, for example, used to make, in particular, flat precision products such as, for example, ink jets, coding discs and coding strips, screens for microfiltration and the like.
- a high dimensional accuracy can be achieved in the case of the ⁇ se products because, during the electroforming, metal, for example, nickel, can be deposited with the same thickness everywhere or virtu ⁇ ally everywhere over a relatively large surface area. Products having an accurate thickness can therefore be made by exactly controlling the factors c ⁇ mprising amperes per unit surface area and processing time.
- Another known mandrel used in electroforming comprises an elec- t ⁇ cally conducting substrate to which a pattern of resist islands, separated by electrically conducting dykes, is applied with the aid of photosensitive resist. Said resist islands correspond with the ope ⁇ nings to be formed in the product During electroforming using such a mandrel, the latter is placed in an electroplating bath and connected as cathode, as a result of which metal from the bath is deposited on the electrically conducting regions. During the deposition, not only upward growth in the height direction (i.e perpendicular to the man ⁇ drel) , but also lateral overgrowth over the resist islands takes pla- ce. If the electroforming is continued for too long, the product be ⁇ comes too thick and the openings may be overgrown, which is undesira ⁇ ble.
- a high density (number/unit surface area) of small openings in the pro- duct is desired or required, as a result of which the products can be made only with a limited thickness.
- a thickness of a few ⁇ m or even still less is possible.
- the disadvantage of such a small thickness is that, as a result, the products cannot be handled and, in addition, must not or cannot be mechanically loaded in an article or device assembled from such a product or during the assembly thereof.
- a multista ⁇ ge method is often used in practice in which a second much thicker growth is deposited on the first thin growth, the vulnerable regions, namely the openings being masked by photoresist.
- a second mandrel is placed on the first for the further growth.
- the final product acquires its strength, including rigidity, from the combined growth.
- this method is complex, expensive and com- plicated, inter alia because the second mandrel has to be positioned very accurately on the first one ⁇ alignment within a few ⁇ m is requi ⁇ red) .
- the object of the present invention is to provide an electro ⁇ forming method using a mandrel, which method is simpler than the known multistage electroforming methods, and with which method it is possi ⁇ ble to produce the required product strength in one process step wit ⁇ hout alignment having to be carried out and/or without switching times having to be monitored.
- the object of the invention is to provide a man ⁇ drel suitable for use in the method according to the invention.
- the method of the abovementioned type according to the inventi- on is characterized in that the regions comprise at least one main pattern for product dykes to be formed, which main pattern is electri ⁇ cally insulated from at least one ancillary pattern for a reinforce ⁇ ment to be formed, in which process first the ancillary pattern is connected to a current source in order to form a reinforcement thereon and, after an electrical connection has been effected between the an ⁇ cillary pattern and the main pattern by growing metal of the reinfor ⁇ cement, the reinforcement is thickened and product dykes are formed.
- a product having different thicknesses can be made continuously in one process step. In this case, no alignment of a second mandrel takes place. Furthermore, monitoring of the time for connecting the main pattern is unnecessary since, after starting the method, said connec ⁇ tion is made automatically.
- the product comprises a relatively thick reinforcement framework and a pattern of openings separated by relati ⁇ vely thin dykes.
- the thick reinforcement framework confers the desired strength on the product, so that it can easily be handled and can also be sub- jected to mechanical stress.
- the pattern of openings and dykes is of the required accuracy in terms of density and dimensions of the ope ⁇ nings. A preferred method is described in claim 2.
- the mandrel according to the invention is characterized in that the regions comprise at least one main pat ⁇ tern for the product dykes to be formed, which main pattern is elec- trically insulated from at least one ancillary pattern for a reinfor ⁇ cement to be formed and in that the connecting means are connected only to the ancillary pattern.
- the present mandrel is composed of an electrically insulating substrate in which or on which an electrically conducting coating is formed which has two or more different patterns which are not electri ⁇ cally connected to one another.
- the ancillary pat ⁇ tern forms the first conducting pattern which, when the mandrel is used in electroforming, will be connected to a current source, as has already been explained above.
- the main pattern does not have its own connection to a current source.
- the main pattern which is present in electrically insulated form, corresponds to the dykes to be formed in the product, which separate the openings.
- the ancillary pattern is at some distance from the main pattern.
- the effect of this structure of the mandrel according to the invention is that, during the electrofor- ming, metal will first deposit on the electrically conducting regions of the ancillary pattern and, after time has elapsed, the grown metal will effect an electrical connection between the ancillary pattern and the main pattern by lateral overgrowth and/or upward growth, after which the two patterns are allowed to grow further.
- the electrical connection between ancillary pattern and main pattern will be effected automatically so that the electroforming does not have to be interrup ⁇ ted in order to obtain the desired strength of the product.
- a product is thus obtained whose thickness of the reinforcement is greater than the thickness of the dykes which separate the openings in the product. Such a product can readily be handled as a consequence of the relati ⁇ vely thick reinforcement.
- mandrel disclosed in NL-C 6 -1001220 can also be used in the method according to the invention, only one connecting wire of the electrical contacting layer being connected to a current source.
- the mandrel may comprise a continuous substrate.
- at least part of the ancillary pattern is situated in recesses which are provided in the substrate surface. If such a mandrel is used, an electroformed product can be obtained whose formed reinforcement projects on either side out of the surface of the main pattern. As a result, the manipulability is increased further.
- mandrel accor ⁇ ding to the invention is a so-called through-flow mandrel, in which the substrate comprises through-flow openings which correspond to the openings of the metal product to be formed. If said mandrel is used, a forced flow of the bath liquid is maintained through the through- flow openings during at least part of the electroforming method. Examples of this electroforming procedure are described, for example, in EP-B1-0 038 104, EP-B1-0 049 022 and EP-B1-0492 731.
- the ancillary pattern can have any kind of shape provided it is not electrically connected to the main pattern.
- suitable shapes comprise tracks, rectangular, diamond-shaped and circular grids or parts of such grids, depending on the desired shape of the main pattern and the strength of the product.
- the width of the conductors forming the ancillary pattern will be chosen, inter alia, as a function ⁇ on of the required strength of the product to be made.
- each main pattern is surrounded on all sides by an ancillary pattern situated at a distance therefrom.
- the distance between a main pattern and an ancillary pattern will be chosen as a function of the desired strength, in particular the thickness and width of the reinforcement of the final product, and also of the required pattern of openings in the product.
- the main pattern can have the shape usual for the end product, such as a pattern of square, rectangular or circular insula ⁇ tor regions surrounded by electrically conducting material.
- the mandrel can be made with the aid of standard procedures, such as, for example, by photochemical means, in which an electrically conducting material layer is applied to the substrate and a photosen ⁇ sitive resist layer is then applied thereto, which photosensitive re ⁇ sist layer is exposed in accordance with the main pattern and ancilla- ry pattern and developed, after which the electrically conducting ma ⁇ terial is etched away in the regions not screened by photosensitive resist.
- Other suitable procedures such as vapour deposition of the electrically conducting patterns using a mask, can also be used.
- the invention also relates to products formed in one electro ⁇ forming step, having openings separated by dykes, whose thickness of the reinforcement is greater than the thickness of the webs.
- the fact that these products having different thicknesses are formed in one step gives these products a structure which differs from the known structures built up in a plurality of interrupted steps because no interface is present between the first and the second growth.
- the electroforming mandrel and method according to the inventi- on can be used to make all kinds of electroformed parts, for example screens, printing stencils for the printed circuit board industry, coding discs and coding strips, slit patterns in a rigid framework etc. Mlowing two or more product thicknesses to grow in one method step can be used not only to obtain a rigid product with reinforce- ment, but can also be used, as, for example, in the case of ink jets, to make two or more product components, for example, a chamber having outflow openings, in one step.
- Figure 1 shows a plan view of a part of an embodiment of an electroforming mandrel according to the invention
- Figure 2 diagrammatically shows the electroforming of a product using an electroforming mandrel according to Figure 1 at various points in time;
- Figure 3 shows a perspective view of a part of another embodi ⁇ ment of a mandrel according to the invention;
- Figure 4 diagrammatically shows the electroforming of a product using the mandrel according to Figure 3;
- Figure 5 is a section through an embodiment of a through-flow mandrel according to the invention.
- Figure 6 diagrammatically shows the electroforming of a product using the mandrel according to Figure 5.
- FIGS 7 - 9 are three plan views of further exemplary embodi ⁇ ments of a mandrel according to the invention. Attention is drawn to the fact that the drawings are not shown to scale.
- Figure 1 shows part of a plan view of an electroforrning mandrel which is built up and made according to the invention.
- An electrical ⁇ ly conducting coating 2 is first applied to the entire upper surface of an electrical insulator 1, from which coating a number of main pat ⁇ terns 3, comprising dykes 4, and an ancillary pattern 5 of tracks 6 are made in a photochemical manner. Said patterns are shown hatched.
- a photosensitive resist layer is applied to the coating 2, which photosensitive resist layer is exposed in accordance with the patterns and developed, in which process the resist layer obtained therefrom masks the patterns.
- the unmasked regions are then locally etched away so that the insula ⁇ tor 1 (blank regions) is exposed there and the patterns 3 and 5, which are electrically insulated from one another, are thus formed after the mandrel is removed.
- the main pattern 3 compri ⁇ ses a regular grid of dykes 4, such as is desired, for example, for screen products.
- the desired product thic ⁇ knesses and the size of the product openings 9 can be controlled very accurately by suitable choice of the distance between the tracks 6 and the dykes 4 and the mutual distance between the dykes 4 and by con ⁇ trolling the factors comprising amperes per unit surface area and pro ⁇ cess time.
- the desired thickness of the reinforcements 7 and the dykes 8 and the desired dimension of the openings 9 has been achieved and the electrical connection of the mandrel to the current source is interrupted and the electroforming is therefore stopped.
- the finished product 10 (time t4) is obtained after removal of the mandrel.
- the product 10 comprises relatively thick reinforcements 7 which are situated along the circumference and witnin which a screen pattern of openings 9 separated by product dykes 8 is present. Said reinforcements 7 confer the desired strength on the otherwise thin product 10.
- recesses 11 are present in the rein ⁇ forcements 7 and dykes 8 which correspond to the shape and dimensions of the ancillary pattern and main pattern 3, respectively. If a flat lower side of the product 10 is desired, this can be achieved in a simple manner by covering the exposed regions of the insulator 1 with an insulating material, for example photoresist, before starting the electroforming so that the lateral overgrowth of the tracks 6 of the ancillary pattern 5 will take place over said photoresist regions. The same effect can be achieved by applying in a suitable manner the patterns 3 and 5 in the upper surface of the insulator 1 so that the upper surfaces of the patterns are flush with the upper surface of the insulator.
- the product shown in Figure 2 has two different thicknesses at different positions.
- this number of different thicknesses can be extended as required by applying, adjacently to a main pattern, one or more subpattems insulated therefrom, so that during the elec ⁇ troforming, first the growth of the ancillary pattern takes place, then after electrical contact has been effected between the ancillary pattern and the main pattern, the growth of these two patterns takes place and, finally, after the main pattern has also been electrically connected to the subpattem, the growth of all three patterns takes place. Examples of electroforming mandrels according to the invention for a product having such a structure are discussed below by reference to Figures 7 - 9.
- the transverse tracks 6' can be omitted. If the final product is to have slot-shaped openings, the central transverse dykes 4' in the main pat- tern 3 can be omitted, in which case only one or two outermost trans ⁇ verse dykes 4" are present in the main pattern.
- FIG. 3 Another embodiment of a mandrel according to the invention is shown in Figure 3.
- This mandrel comprises a substrate 1 made of insu ⁇ lating material.
- a groove 12 on the base of which there is an electrical conductor 6 of an ancillary pattern 5.
- Said ancillary pattern 5 furthermore compri ⁇ ses a transverse conductor 6' which is situated on the substrate sur- face up to the point in the groove 12 where the conductors 6 and 6' cross one another.
- the mandrel comprises four main patterns 3, of which only one is shown in detail.
- Such a main pattern comprises a grid of dykes 4.
- the distance between the conductor 6 and a main pattern 3 is equal to the distance between the conductor 6' and a main pattern 3 (distance shown by a) .
- the dykes may even be desirable for the dykes to be situated at some distance therefrom so that a pro- duct having greater through-put and a thicker reinforcement framework can be obtained.
- a further advantage is that the upright parts can be made lower in that case so that their vulnerability decreases.
- Figure 5 shows a cross-section of an embodiment of a through- flow mandrel according to the invention.
- the substrate 1 is not solid but provided with through-flow openings 13 through which a forced flow (shown by arrows) of bath li ⁇ quid is maintained during the electroforming.
- a conductor 6 of a an ⁇ cillary pattern 5 is situated on the wide substrate parts 1' and on both sides thereof a dyke 4 of the main pattern 3 is situated. Fur- ther dykes 4 of the main pattern 3 are situated on the thinner sub ⁇ strate parts 1".
- Figures 7 - 9 show three examples of mandrels according to the invention in which, in addition to a main pattern 3 and ancillary pat ⁇ tern 5, at least one subpattern or transition pattern 14 is present which is positioned in between.
- the ancillary pattern 5 is connected to a current source so that metal growth takes place on said pattern 5.
- metal deposition will take place on both pat ⁇ terns.
- the metal grown on the transition pat ⁇ tern 14 will make electrical contact with the main pattern 3 so that, finally, all three patterns will grow.
- a product can therefore be ob ⁇ tained with a gradual transition from thick reinforcement framework to thin region with openings, which is advantageous for limiting the risk of rupture of the product during removal from the mandrel.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69701189T DE69701189T2 (de) | 1996-04-19 | 1997-04-18 | Elektroformungsverfahren, form für die elektroformung und elektroformiertes produkt |
EP97917482A EP0894157B1 (fr) | 1996-04-19 | 1997-04-18 | Procede et matrice d'electroformage et produit ainsi obtenu |
AU25782/97A AU2578297A (en) | 1996-04-19 | 1997-04-18 | Electroforming method, electroforming mandrel and electroformed product |
US09/174,957 US6036832A (en) | 1996-04-19 | 1998-10-19 | Electroforming method, electroforming mandrel and electroformed product |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1002908 | 1996-04-19 | ||
NL1002908A NL1002908C2 (nl) | 1996-04-19 | 1996-04-19 | Elektroformeringsmatrijs, werkwijze voor de vervaardiging daarvan, elektroformeringswerkwijze en geëlektroformeerd produkt. |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/174,957 Continuation US6036832A (en) | 1996-04-19 | 1998-10-19 | Electroforming method, electroforming mandrel and electroformed product |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997040213A1 true WO1997040213A1 (fr) | 1997-10-30 |
Family
ID=19762707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/NL1997/000203 WO1997040213A1 (fr) | 1996-04-19 | 1997-04-18 | Procede et matrice d'electroformage et produit ainsi obtenu |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0894157B1 (fr) |
AU (1) | AU2578297A (fr) |
DE (1) | DE69701189T2 (fr) |
NL (1) | NL1002908C2 (fr) |
WO (1) | WO1997040213A1 (fr) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1007318C2 (nl) * | 1997-10-20 | 1999-04-21 | Stork Veco Bv | Elektroformeringsmatrijs voor toepassing bij het elektroformeren van metaalfolies, werkwijze voor de vervaardiging van een dergelijke matrijs en toepassing daarvan. |
WO1999020813A1 (fr) * | 1997-10-20 | 1999-04-29 | Stork Veco B.V. | Procede de fabrication de cribles, squelettes associes et produits obtenus par leur moyen |
GB2355017A (en) * | 1999-09-23 | 2001-04-11 | Lorenzo Battisti | Porous element for the effusive cooling of machine elements produced by electroforming |
EP1179614A3 (fr) * | 2000-08-01 | 2003-01-02 | Hewlett-Packard Company | Mandrin pour l'électroformage de de plaques perforées |
WO2004043659A1 (fr) * | 2002-11-12 | 2004-05-27 | Stork Prints B.V. | Materiau de tamis, procede de fabrication dudit materiau et applications correspondantes |
CN100473508C (zh) * | 2002-11-12 | 2009-04-01 | 斯托克印刷公司 | 筛网材料及其制造方法和应用 |
WO2011046432A1 (fr) | 2009-10-12 | 2011-04-21 | Stork Prints B.V. | Sérigraphie |
US8936160B2 (en) | 2000-08-28 | 2015-01-20 | Aquamarijn Holding B.V. | Nozzle device and nozzle for atomisation and/or filtration and methods for using the same |
US20150352831A1 (en) * | 2012-02-08 | 2015-12-10 | Photo Stencil, Llc | Screen Printing Apparatus Including Support Bars, And Methods Of Using Same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0192842A2 (fr) * | 1985-01-31 | 1986-09-03 | Dr. Johannes Heidenhain GmbH | Feuille perforée autoportante obtenue par électroformage |
EP0272764A1 (fr) * | 1986-12-23 | 1988-06-29 | Stork Veco B.V. | Membrane à perforations procédé pour sa production et appareil de séparation comprenant une ou plusiers membranes similaires |
NL1001220C1 (en) * | 1995-09-17 | 1996-03-20 | Twente Microproducts | Mould for easy release of moulded, cast or galvanically grown articles |
-
1996
- 1996-04-19 NL NL1002908A patent/NL1002908C2/nl not_active IP Right Cessation
-
1997
- 1997-04-18 EP EP97917482A patent/EP0894157B1/fr not_active Expired - Lifetime
- 1997-04-18 WO PCT/NL1997/000203 patent/WO1997040213A1/fr active IP Right Grant
- 1997-04-18 DE DE69701189T patent/DE69701189T2/de not_active Expired - Fee Related
- 1997-04-18 AU AU25782/97A patent/AU2578297A/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0192842A2 (fr) * | 1985-01-31 | 1986-09-03 | Dr. Johannes Heidenhain GmbH | Feuille perforée autoportante obtenue par électroformage |
EP0272764A1 (fr) * | 1986-12-23 | 1988-06-29 | Stork Veco B.V. | Membrane à perforations procédé pour sa production et appareil de séparation comprenant une ou plusiers membranes similaires |
NL1001220C1 (en) * | 1995-09-17 | 1996-03-20 | Twente Microproducts | Mould for easy release of moulded, cast or galvanically grown articles |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999020813A1 (fr) * | 1997-10-20 | 1999-04-29 | Stork Veco B.V. | Procede de fabrication de cribles, squelettes associes et produits obtenus par leur moyen |
NL1007318C2 (nl) * | 1997-10-20 | 1999-04-21 | Stork Veco Bv | Elektroformeringsmatrijs voor toepassing bij het elektroformeren van metaalfolies, werkwijze voor de vervaardiging van een dergelijke matrijs en toepassing daarvan. |
GB2355017A (en) * | 1999-09-23 | 2001-04-11 | Lorenzo Battisti | Porous element for the effusive cooling of machine elements produced by electroforming |
GB2355017B (en) * | 1999-09-23 | 2001-09-12 | Lorenzo Battisti | Porous element |
EP1179614A3 (fr) * | 2000-08-01 | 2003-01-02 | Hewlett-Packard Company | Mandrin pour l'électroformage de de plaques perforées |
US6586112B1 (en) | 2000-08-01 | 2003-07-01 | Hewlett-Packard Company | Mandrel and orifice plates electroformed using the same |
US8936160B2 (en) | 2000-08-28 | 2015-01-20 | Aquamarijn Holding B.V. | Nozzle device and nozzle for atomisation and/or filtration and methods for using the same |
WO2004043659A1 (fr) * | 2002-11-12 | 2004-05-27 | Stork Prints B.V. | Materiau de tamis, procede de fabrication dudit materiau et applications correspondantes |
CN100473508C (zh) * | 2002-11-12 | 2009-04-01 | 斯托克印刷公司 | 筛网材料及其制造方法和应用 |
US7449248B2 (en) | 2002-11-12 | 2008-11-11 | Stork Prints B.V. | Screen material manufacturing method and applications thereof |
WO2011046432A1 (fr) | 2009-10-12 | 2011-04-21 | Stork Prints B.V. | Sérigraphie |
US20150352831A1 (en) * | 2012-02-08 | 2015-12-10 | Photo Stencil, Llc | Screen Printing Apparatus Including Support Bars, And Methods Of Using Same |
US9718267B2 (en) * | 2012-02-08 | 2017-08-01 | Photo Stencil, Llc | Screen printing apparatus including support bars, and methods of using same |
Also Published As
Publication number | Publication date |
---|---|
DE69701189T2 (de) | 2000-06-21 |
EP0894157B1 (fr) | 2000-01-19 |
DE69701189D1 (de) | 2000-02-24 |
NL1002908C2 (nl) | 1997-10-21 |
EP0894157A1 (fr) | 1999-02-03 |
AU2578297A (en) | 1997-11-12 |
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