WO1996011764A1 - Outil pour dispositifs a semi-conducteurs - Google Patents

Outil pour dispositifs a semi-conducteurs Download PDF

Info

Publication number
WO1996011764A1
WO1996011764A1 PCT/IB1995/001020 IB9501020W WO9611764A1 WO 1996011764 A1 WO1996011764 A1 WO 1996011764A1 IB 9501020 W IB9501020 W IB 9501020W WO 9611764 A1 WO9611764 A1 WO 9611764A1
Authority
WO
WIPO (PCT)
Prior art keywords
insert
holder
tool
clamp
clamps
Prior art date
Application number
PCT/IB1995/001020
Other languages
English (en)
Other versions
WO1996011764B1 (fr
Inventor
Richard H. J. Fierkens
Original Assignee
Fierkens Richard H J
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fierkens Richard H J filed Critical Fierkens Richard H J
Priority to KR1019960703229A priority Critical patent/KR970702118A/ko
Priority to JP8513078A priority patent/JPH09508590A/ja
Publication of WO1996011764A1 publication Critical patent/WO1996011764A1/fr
Publication of WO1996011764B1 publication Critical patent/WO1996011764B1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/0063—Connecting non-slidable parts of machine tools to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for

Definitions

  • the invention relates to a tool for shaping or severing objects.
  • Another object of the invention is to provide a tool which enables an insert to be mounted on a holder with little or no risk of damage to the tool.
  • An additional object of the invention is to provide a method which permits an insert to be positioned on a holder reasonably simply and with a relatively high degree of precision. makes it possible to reduce the chance of damage to a tool whe mounting an insert on a holder.
  • the tool comprises an insert for shaping or severing objects, and a holder for the insert.
  • Either the insert or the holder is provided with a pair of grooves having first longitudinal axes which define a first intersection.
  • the other of the insert and the holder is provided with a pair of ribs having second longitudinal axes which define a second intersection, and the grooves and ribs are complementary to one another.
  • the ribs can be inserted in respective ones of the grooves.
  • Appropriate design of the grooves and the ribs will allow the insert to be accurately positioned relative to the holder by seating the ribs in the grooves.
  • the tool of the inventio enables precise relative positioning of the insert and the holde to be achieved in a relatively simple manner.
  • no hammering is required to properly position the insert relative to the holder so that the risk of damage to the tool can be greatl reduced.
  • Another aspect of the invention resides in a method o mounting an insert for shaping or severing objects on a holder.
  • One of the insert and the holder has a pair of first portions wit intersecting first axes which define a first intersection, and th other of the insert and the holder has a pair of second portion
  • the method comprises recessing the first portions in respective ones of the second portions so that the intersections are substantially in register with one another.
  • the method may further comprise the step of resiliently clamping the insert to the holder.
  • FIG. 1 is a fragmentary perspective view of a tool in accordance with the invention, the tool having an insert and a holder for the insert, and the insert and holder being shown in disassembled condition.
  • FIG. 2a is a side view of a clamp according to the invention for locking an insert to a holder.
  • FIG. 2b is an end view of the clamp of FIG. 2a.
  • FIG. 3 is a front view of the tool of FIG. 1 in the assembled condition of the insert and the holder, the insert being locked to the holder by two of the clamps of FIGS. 2a and 2b.
  • FIG. 4 is an end view of the assembled tool of FIG. 3 with the clamps in their unlocked positions.
  • FIG. 5 is similar to FIG. 4 but shows the clamps in their locked positions.
  • the numeral 1 generally identifies a tool in accordance with the invention.
  • the tool 1 is here assume to be designed for use in the semiconductor industry to process semiconductor devices.
  • the tool 1 includes an insert 2 for shaping and/or severin objects.
  • shape is intended to encompass any operation which affects the shape and/or dimensions of an object. Examples of operations covered by the term “shaping” are machining, milling and press forming operations.
  • the tool 1 further includes a holder 3 for the insert 2.
  • the holder 3 is provided with a pair of grooves 3a and 3b havin respective longitudinal axes XI and Yl which intersect one anothe at a location 3c of the holder 3.
  • the grooves 3a and 3b are perpendicular to each other as are th groove axes XI and Yl.
  • the intersection 3c of the groove axes X and Yl lies on the center line 3d of the holder 3.
  • the insert 2 is provided with a rib 2a which is complementar to the groove 3a, and a rib 2b which is complementary to the groov 3b.
  • the ribs 2a and 2b have respective longitudinal axes X2 and Y2 which intersect one another at a location 2c of the insert 2.
  • the ribs 2a and 2b exten normal to each other as do the rib axes X2 and Y2.
  • Th intersection 2c of the rib axes X2 and Y2 is located on the cente line 2d of the insert 2.
  • the grooves 3a and 3b, as well as the ribs 2a and 2b, preferably have conical or frustoconical cross sections.
  • the ribs 2a and 2b are shown as being continuous from one en to the other. However, it is possible for the ribs 2a and 2b to b each of the ribs 2a and 2b could be made up of two sections which are located on opposite sides of the intersection 2c and are separated from one another.
  • the grooves 3a and 3b are likewise depicted as being continuous from end to end. Again, each of the grooves 3a and 3b could instead be divided into a plurality of separate sections, e.g., two sections which are disposed on opposite sides of the intersection 3c and are spaced from each other.
  • the rib 2a is inserted in the groove 3a while the rib 2b is inserted in the groove 3b.
  • This automatically causes the intersection 2c of the rib axes X2 and Y2 to come into register with the intersection 3c of the groove axes XI and Yl.
  • the center lines 2d and 3d of the insert 2 and holder 3 then coincide to define the center line of the tool 1.
  • the slots 4 are formed in the insert 2 on opposite sides of the latter.
  • the slots 4 have an approximately U-shaped cross section, and each of the slots 4 is bounded by a pair of generally parallel walls 4a corresponding to the legs of a U and an end wall 4b which bridges the walls 4a and corresponds to the bottom of the U.
  • the slots 4 are used to lock the insert 2 to the holder 3 by means of clamps such as the clamp 5 illustrated in Figures 2a and 2b.
  • the clamp 5 has a part-cylindrical body section 5a and a part- circular disc-like section 5b which are joined to one another by a neck section 5c.
  • the disc-like section 5b includes an elastically deformable or resilient tongue 5d which projects beyond the body clamp 5 diametrically opposite the tip 5f is flat.
  • a part-circular recess 5e extends circumferentially of th clamp 5 between the body section 5a and the tongue 5d.
  • the reces 5e allows the elastically deformable tongue 5d to flex so that i can exert a spring-like action.
  • a passage 6 extends longitudinally of the clamp 5 and is ope at either end thereof.
  • the passage 6 includes a narrower portio 6a and a wider portion 6b which meet to form an abutment surface 6 running circumferentially of the passage 6.
  • the passage 6 has a center line 6d which constitutes an axi of rotation for the clamp 5.
  • the rotational axis 6d i eccentrically disposed with respect to the tip 5f of the tongue 5 in that the rotational axis 6d is farther from the tip 5f than fro the flat side 5g of the clamp 5.
  • Figure 3 shows the insert 2 locked to the holder 3 by two o the clamps 5.
  • the rib 2a of the insert 2 is received in the groov 3a of the holder 3, the rib 2b (see Fig. 1) is received in th groove 3b (see Fig. 1) , and the tongues 5d of the clamps 5 ar received in the respective slots 4. Due to the elastic nature o the tongues 5d, the insert 2 is locked to the holder 3 by a sprin force.
  • the clamps 5 are mounted on the holder 3 via fasteners 7 whic are accommodated in the passages 6 of the clamps 5.
  • the fastener 7 are here assumed to be in the form of screws having heads 7 which seat on the abutment surfaces 6c of the passages 6.
  • Th holder 3 is provided with threaded openings 8 which register wit the passages 6, and the screws 7 project into the openings 8 wher openings 8.
  • a new insert 2 is pushed into the gap between the flat sides 5g of the clamps 5.
  • the new insert 2 is aligned with the holder 3 in such a manner that the rib 2a of the new insert 2 enters the groove 3a of the holder 3 while the rib 2b of the new insert 2 enters the groove 3b of the holder 3.
  • the clamps 5 are rotated as indicated by the arrows 9 to introduce the tongues 5d (see Fig. 3) of the clamps 5 into the slots 4 (see Fig. 3) of the insert 2.
  • the clamps 5 are preferably rotated through 180 degrees so that the tips 5f of the tongues 5d the clamps 5 to the locking positions in which the tongues 5d are received in the slots 4, the screws 7 are tightened thereby causing the tongues 5d to resiliently bias the new insert 2 against the holder 3.
  • the screws 7 are loosened and the clamps 5 are rotated from their locking positions back to their release positions, i.e., the clamps 5 are rotated to move the tongues 5d out of the slots 4.
  • the clamps 5 are rotated to move the tongues 5d out of the slots 4.
  • the tool 1 can constitute one of a pair of tools which cooperate to shape and/or sever objects.
  • the tool 1 may form part of a press having an upper head which includes the tool 1 and a lower head which includes a second tool.
  • the second tool can be constructed similarly to the tool 1.
  • the tool 1 of the invention is not only very versatile but also permits rapid replacement of an insert 2.
  • the ribs 2a and 2b, together with the grooves 3a and 3b, make it possible to always bring the center line of the insert 2 into coincidence with the center line of the holder 3.
  • the clamps 5 enable an insert 2 to be mounted on and removed from the holder 3 quite easily. Furthermore, the clamps 5 allow mounting and removal of the insert 2 to be accomplished without tool 1. If the holder 3 is installed in a production machine or system, the clamps 5 permit the insert 2 to be replaced without removing the holder 3.
  • the resilient tongues 5d of the clamps 5 provide the advantage that the same clamping force can always be obtained.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

Outil utilisable avec des dispositifs à semi-conducteurs. Cet outil possède une pièce rapportée permettant la mise en forme et/ou le découpage des dispositifs, ainsi qu'un support pour la pièce rapportée. Ce support est pourvu d'une paire de rainures croisées tandis que la pièce rapportée est pourvue d'une paire de nervures croisées. Les nervures s'emboîtent dans les rainures de manière à fixer la position de la pièce rapportée par rapport au support. Deux organes de serrage sont montés sur le support à l'aide de vis que l'on peut desserrer afin de permettre aux organes de serrage de tourner. La pièce rapportée est reçue entre les organes de serrage et possède deux fentes tournées vers les organes de serrage respectifs. Les organes de serrage sont munis de languettes que l'on peut introduire dans les fentes, ou retirer de celles-ci, en faisant tourner lesdits organes de serrage. Lorsque les languettes sont engagées dans les fentes et que les vis sont serrées, la pièce rapportée est solidaire du support.
PCT/IB1995/001020 1994-10-18 1995-10-13 Outil pour dispositifs a semi-conducteurs WO1996011764A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019960703229A KR970702118A (ko) 1994-10-18 1995-10-13 반도체장치용 공구
JP8513078A JPH09508590A (ja) 1994-10-18 1995-10-13 半導体デバイス用ツール

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32471494A 1994-10-18 1994-10-18
US08/324,714 1994-10-18

Publications (2)

Publication Number Publication Date
WO1996011764A1 true WO1996011764A1 (fr) 1996-04-25
WO1996011764B1 WO1996011764B1 (fr) 1996-06-27

Family

ID=23264768

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB1995/001020 WO1996011764A1 (fr) 1994-10-18 1995-10-13 Outil pour dispositifs a semi-conducteurs

Country Status (3)

Country Link
JP (1) JPH09508590A (fr)
KR (1) KR970702118A (fr)
WO (1) WO1996011764A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998039122A1 (fr) * 1997-03-05 1998-09-11 Sandvik Aktiebolag (Publ) Porte-outil destine a des plaquettes de coupe

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3629919A (en) * 1969-09-17 1971-12-28 David J Trevarrow Jr Tool and tool holder assembly
US4209047A (en) * 1978-06-28 1980-06-24 Weill Theodore C Debarker toe assembly
CH667833A5 (en) * 1985-04-09 1988-11-15 Astrol S A Machine tool pallet-changing mechanism - has pallet mounting bosses with self-centring action and securing clamps
CH681967A5 (fr) * 1990-08-21 1993-06-30 Planetron Ag

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3629919A (en) * 1969-09-17 1971-12-28 David J Trevarrow Jr Tool and tool holder assembly
US4209047A (en) * 1978-06-28 1980-06-24 Weill Theodore C Debarker toe assembly
CH667833A5 (en) * 1985-04-09 1988-11-15 Astrol S A Machine tool pallet-changing mechanism - has pallet mounting bosses with self-centring action and securing clamps
CH681967A5 (fr) * 1990-08-21 1993-06-30 Planetron Ag

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998039122A1 (fr) * 1997-03-05 1998-09-11 Sandvik Aktiebolag (Publ) Porte-outil destine a des plaquettes de coupe
CN1098739C (zh) * 1997-03-05 2003-01-15 桑德维克公司 用于切削刀片的刀夹

Also Published As

Publication number Publication date
JPH09508590A (ja) 1997-09-02
KR970702118A (ko) 1997-05-13

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