WO1996005332A3 - Coated material and method of its production - Google Patents

Coated material and method of its production Download PDF

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Publication number
WO1996005332A3
WO1996005332A3 PCT/CZ1995/000017 CZ9500017W WO9605332A3 WO 1996005332 A3 WO1996005332 A3 WO 1996005332A3 CZ 9500017 W CZ9500017 W CZ 9500017W WO 9605332 A3 WO9605332 A3 WO 9605332A3
Authority
WO
WIPO (PCT)
Prior art keywords
coating
substrate
coated material
production
elements
Prior art date
Application number
PCT/CZ1995/000017
Other languages
French (fr)
Other versions
WO1996005332A2 (en
Inventor
Jindrich Musil
Jaroslav Vlcek
Marcel Benda
Original Assignee
Zapadoceska Univerzita V Plzni
Jindrich Musil
Jaroslav Vlcek
Marcel Benda
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CZ941919A external-priority patent/CZ191994A3/en
Priority claimed from CZ941920A external-priority patent/CZ192094A3/en
Application filed by Zapadoceska Univerzita V Plzni, Jindrich Musil, Jaroslav Vlcek, Marcel Benda filed Critical Zapadoceska Univerzita V Plzni
Publication of WO1996005332A2 publication Critical patent/WO1996005332A2/en
Publication of WO1996005332A3 publication Critical patent/WO1996005332A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/60—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/586—Nitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/80—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Treatment Of Metals (AREA)

Abstract

The invention concerns a surface coated material. The interface between the substrate and the coating is not sharp. It is diffused; the coating contains the elements of the substrate and the substrate contains the elements of the coating. As examples are given laboratory-verified materials: the steel with a titanium coating and the aluminium-based material with a titanium coating. The invention also covers the method of production of materials with a surface coating consisting of two steps. In the first step, a coating is deposited on a substrate material and in the second step, the coated material is further surface treated.
PCT/CZ1995/000017 1994-08-09 1995-08-07 Coated material and method of its production WO1996005332A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CZPV1919-94 1994-08-09
CZPV1920-94 1994-08-09
CZ941919A CZ191994A3 (en) 1994-08-09 1994-08-09 Surface treated aluminium material and process for producing thereof
CZ941920A CZ192094A3 (en) 1994-08-09 1994-08-09 Surface treated material and process for producing thereof

Publications (2)

Publication Number Publication Date
WO1996005332A2 WO1996005332A2 (en) 1996-02-22
WO1996005332A3 true WO1996005332A3 (en) 1996-04-04

Family

ID=25746896

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CZ1995/000017 WO1996005332A2 (en) 1994-08-09 1995-08-07 Coated material and method of its production

Country Status (1)

Country Link
WO (1) WO1996005332A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5858464A (en) * 1997-02-13 1999-01-12 Applied Materials, Inc. Methods and apparatus for minimizing excess aluminum accumulation in CVD chambers
CN115117230A (en) * 2021-03-18 2022-09-27 联华电子股份有限公司 Magnetic resistance type random access memory structure and manufacturing method thereof
CN113718191B (en) * 2021-07-28 2024-02-23 上海宝冶冶金工程有限公司 Preparation method of aluminum magnesium alloy surface reinforcing layer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB510404A (en) * 1938-05-03 1939-08-01 Bernhard Berghaus Improvements in and relating to light metal pistons and coatings therefor
JPS62260047A (en) * 1986-05-01 1987-11-12 Mitsubishi Heavy Ind Ltd Method for coating nitride film
JPH03260062A (en) * 1990-03-12 1991-11-20 Isuzu Ceramics Kenkyusho:Kk Production of ceramic-coated member
EP0608551A1 (en) * 1992-12-28 1994-08-03 Hitachi Metals Co. Ltd. Method of forming ohmic contact by sputtering a TiN layer for LSI circuit and LSI circuit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB510404A (en) * 1938-05-03 1939-08-01 Bernhard Berghaus Improvements in and relating to light metal pistons and coatings therefor
JPS62260047A (en) * 1986-05-01 1987-11-12 Mitsubishi Heavy Ind Ltd Method for coating nitride film
JPH03260062A (en) * 1990-03-12 1991-11-20 Isuzu Ceramics Kenkyusho:Kk Production of ceramic-coated member
EP0608551A1 (en) * 1992-12-28 1994-08-03 Hitachi Metals Co. Ltd. Method of forming ohmic contact by sputtering a TiN layer for LSI circuit and LSI circuit

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
MUSIL J ET AL: "Plasma nitriding of sputtered Ti films", 12TH INTERNATIONAL VACUUM CONGRESS, THE HAGUE, NETHERLANDS, 12-16 OCT. 1992, vol. A163, no. 2, ISSN 0921-5093, MATERIALS SCIENCE & ENGINEERING A (STRUCTURAL MATERIALS: PROPERTIES, MICROSTRUCTURE AND PROCESSING), 15 MAY 1993, SWITZERLAND, pages 181 - 186 *
PATENT ABSTRACTS OF JAPAN vol. 012, no. 143 (C - 492) 30 April 1988 (1988-04-30) *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 063 (C - 0911) 18 February 1992 (1992-02-18) *

Also Published As

Publication number Publication date
WO1996005332A2 (en) 1996-02-22

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