WO1995016059A1

WO1995016059A1 - Continuous immersion treatment apparatus of horizontal transfer type

Info

Publication number: WO1995016059A1
Application number: PCT/JP1994/002061
Authority: WO
Inventors: Tatsuya Tomioka; Yasuo Sekiguchi
Original assignee: Taisho Kogyo Kabushiki Kaisha
Priority date: 1993-12-10
Filing date: 1994-12-09
Publication date: 1995-06-15

Abstract

An apparatus for immersing works in a liquid treatment tank such as a plating bath. Conventionally, a plating process of works has been carried out in such a manner that they transferred in the air from one tank to another after a given time of immersion in an arrangement including a plurality of tanks. Such an arrangement lacks efficiency because it requires both vertical and horizontal movements of works. In a continuous immersion apparatus (10) of horizontal transfer type of the present invention, reserve tanks (20, 22 and 24, 28) are disposed at the front and back of a liquid treatment tank (18) and a water washing neutralization recovery tank (26), respectively, and gates 30 to 36 are provided between these tanks so that the work can be transferred by only horizontal movement between the reserve tank and the outside, between the reserve tanks, and between the reserve tank and the liquid treatment tank (18) or the water washing neutralization recovery tank (26), by using a gate control apparatus and liquid quantity regulation means so as to improve liquid treatment efficiency.

Description

Description Horizontal immersion continuous immersion treatment equipment Technical field

The present invention provides a dipping process for dipping a work in a liquid processing tank, such as plating, anodizing, electrolytic polishing, electrolytic pickling, through-hole plating on a printed circuit board, cleaning with a substitute for freon, and jig peeling. Related to the device.

Background technology

Conventionally, for example, in processes such as plating and electrolytic pickling, a plurality of types of liquid processing tanks are arranged, and a work is suspended by a transport device (rack and barrel) called an elevator or a carrier. After being immersed in the treatment tank for a certain period of time, it is lifted upward, moved directly above the adjacent liquid treatment tank, lowered, and immersed in the liquid treatment tank. The treatment is performed by immersion. Such a method of transporting a work is conventionally referred to as aerial transfer.

In this transfer method, the lower the work, the longer the dipping time in the processing solution, and for example, in the case of plating, the plating film pressure becomes uneven in the vertical direction.

In addition, the above-described conventional apparatus has a large loss time due to the transfer to the air, and usually takes 5 seconds each for the process of lifting and lowering the work and the horizontal movement during the transfer to the air. Assuming 8 hours, the vertical and horizontal movement time in the air was 10 hours, and the work efficiency was extremely low.

Also, in order to compensate for the loss time due to the air transfer, many workpieces are mounted on one rack and moved, so that each liquid processing tank is inevitably large, and as a result, the equipment space < In addition, there is a problem that a large amount of processing solution is required.

Also, as described above, if the capacity of the liquid processing tank is large, it is difficult to separately provide a management tank for managing the processing liquid. Therefore, the processing liquid in the liquid processing tank is frequently inspected and the quality of the liquid is checked. There was a problem that the decline had to be prevented.

On the other hand, for example, as disclosed in Japanese Patent Application Laid-Open No. There is an apparatus that performs a plating process while continuously moving a work in a horizontal direction.

This device processes continuous rests such as strips (wires), and has the problem that it cannot process mechanical parts and other objects that have independent shapes.

Disclosure of the invention

The present invention has been made in view of the above-described conventional problems, and provides a horizontal traveling continuous immersion treatment apparatus capable of continuously performing liquid treatment by horizontally traveling even if it is a mechanical part or the like. The purpose is to do.

It is another object of the present invention to provide a horizontal traveling continuous immersion treatment apparatus capable of reducing the capacity of a liquid treatment tank.

The present invention relates to a transfer means for transferring a work horizontally in a certain range along a horizontal transfer line, a liquid treatment tank, front and rear reserve tanks disposed before and after the liquid treatment tank, and a liquid treatment tank and a reservoir. A liquid amount adjusting means for adjusting the amount of the processing liquid in one tank, and at least one set for each processing liquid arranged horizontally and continuously along the transport line. And a constant height below the upper edge of the boundary wall between each liquid processing tank and the reserve tank, the entrance boundary wall of the front reserve tank, and the exit boundary wall of the rear reserve tank A gate that is formed in a range, and that is arranged in an opening that allows the passage of a workpiece, that allows the workpiece to pass horizontally in an open state, and that blocks a flow of a processing solution in a closed state, and a workpiece to the gate. Open the gate when approaching and open the gate after passing through the work A gate drive control device that opens and closes the gate on the inlet side of the front reservoir and the gate on the outlet side of the rear reservoir in opposite phases to the inlet and outlet gates of the liquid treatment tank. Wherein the liquid amount adjusting means sets the same liquid treatment level between the liquid treatment tank and the reserve tank when entering and leaving the tank, and enters and exits between the reserve tank and the outside of the reserve tank. In this case, the above object is achieved by setting the liquid treatment level of the reserve tank to be equal to or lower than the lower end of the gate opening when the gate is open.

According to the present invention, the reserve tanks are provided before and after the liquid treatment tank, the entrance boundary wall of the front reserve tank, the exit boundary wall of the rear reserve tank, and the boundary wall of the liquid treatment tank and the reserve tank. The work before entering the liquid treatment tank is guided to the front reserve tank with the liquid level lowered and the gate on the entrance boundary wall is opened, and then the work on the entrance boundary wall is opened. Close the gate and fill it with the processing liquid to the same level as the liquid processing tank, then open the front reservoir tank and the gate on the boundary wall with the liquid processing tank, and remove the work in the front reservoir tank. The work that has been guided to the processing tank, and then closed the gate of the boundary wall, and the workpiece that has been subjected to the predetermined processing in the liquid processing tank is the boundary wall between the outlet side of the liquid processing tank and the rear reserve tank. After being transferred to the rear reserve tank filled with the treatment liquid in advance, the boundary gate between the liquid treatment tank and the rear reserve tank is closed, and the inside of the rear reserve tank is closed. The process of lowering the wall surface, opening the gate on the outlet boundary wall of the rear reservoir tank, and discharging the workpiece enables the liquid treatment to be performed sequentially and continuously while moving the workpiece horizontally. it can.

Therefore, there is no loss time in the conventional air transfer, and there is no need to perform batch processing of the work, so that the liquid processing tank and the reserve tank can be made smaller, thereby reducing the amount of processing liquid used.减 can be.

The gate is constituted by a shutter-plate force for opening and closing the opening by moving the gate in a direction perpendicular to the horizontal transfer line of the work, so that the opening can be quickly opened and closed. Further, a pair of shirt evening plates at the gate are provided so as to advance and retreat with respect to the passing line in a vertical plane perpendicular to the horizontal feed line of the work, and the opposite edges of the shirt evening plates come into contact with each other. In order to allow the work to pass through the closed state and the open state when separated, the distance between the opposing edges of the pair of shutter plates is adjusted according to the shape of the work to minimize the opening amount.ヮ It is possible to shorten the time required for the gate to pass through the gate.

In addition, the gate drive control device is configured to open and close the entrance gate and the exit gate of the liquid processing tank in a set of liquid processing tanks in a synchronized manner, so that the work is fixed to the transfer means. It can be suspended and processed continuously.

A power shaft arranged on a side surface of the liquid processing tank group along a horizontal feed line of the work; and a transmission device for transmitting a driving force from the power to the gate. As a result, the oil droplets and the like dropped from the power source do not fall into the liquid processing tank or the reserve tank, do not interfere with the conveying means, and Since the driving force can be transmitted from any location to the gate via the transmission device, the gate can be installed at any location.

Further, the gate is moved in a direction orthogonal to a horizontal transfer line of the work. A shutter plate for opening and closing the opening; and a guide for movably guiding the shutter plate in a vertical plane perpendicular to the work transfer line, wherein the transmission device reciprocates the rotational motion of the power shaft. As a power conversion device for transmitting the motion to the gate, the shape of the tip of the shutter plate is adapted to the shape of the workpiece, and the gap between the tip and the workpiece when the shutter plate is open is minimized to shorten the workpiece transit time. Can be.

Further, the gate includes a shutter plate that is swingably supported in a vertical plane orthogonal to a horizontal transport line of the vehicle, and that opens and closes an opening by swinging. As a power conversion device for transmitting the rotational motion of the shaft as the oscillating motion of the shutter plate, the rotational motion of the power shaft can be easily converted to the oscillating motion and transmitted to the shutter plate.

Further, the at least one set of liquid processing tank groups shares one power line, and the transmission device is provided for each gate, so that each gate can be easily opened and closed in synchronization. .

Furthermore, the liquid processing tank and the reserve tank in each of the liquid processing tank groups of each set are linearly arranged, and the adjacent sets are arranged such that the relative angle of the horizontal feed line can be freely adjusted. The layout in the factory can be arbitrarily set according to the surrounding equipment and space.

Further, at least one pair of a pair of the entrance gate of the front reserve tank and the entrance gate of the processing liquid tank, and a pair of the exit gate of the rear reserve tank and the exit gate of the processing liquid tank. A space that is arranged in the opening of the boundary wall and accommodates a work therein, and that is formed from the upper end at a certain depth from the space to one location on the outer periphery, and that the work enters and exits the space. A cylindrical member having an open top and a bottom which is provided with an allowable work passage notch and is rotatable around a center in a vertical direction, wherein an opening direction of the work passage notch is set to the transfer line. A cylindrical gate member capable of being converted by 180 degrees in two directions along the seal member, and a seal member for sealing between the outer periphery of the cylindrical gate member and the inner peripheral edge of the opening in a liquid-tight manner, Due to the space inside the cylindrical gate member Constitute the reserve tank.

According to the present invention, the cylindrical gate member forms a reserve tank in the space, The opening direction of the work passage notch is changed 180 degrees in the opposite direction to the transfer line while the work is stored, and at this time, a seal member is provided between the outer periphery of the cylindrical gate member and the opening between the partition wall. As a result, the work can be passed through the partition wall without contacting the cylindrical gate member. Since the amount of liquid leakage at this time is equal to the amount of liquid that has entered the space of the cylindrical gate member, it is possible to suppress liquid leakage.

Further, the bottom wall of the cylindrical gate member has a double structure, a large number of rectifying holes are formed in the upper bottom wall, and the lower bottom wall is provided with a change in the direction of the opening of the work passage cutout. Therefore, the position is changed, and thereby the liquid is allowed to flow into the cylindrical gate member, or a supply / drain port for discharging the flowed liquid is provided, and before the liquid flows from the opening of the work passage cutout, Changes in the suspended state of the work due to the liquid flowing into the cylindrical gate member from the supply / drain port and the rapid flow of the liquid through the opening of the work passage notch, distortion due to a sudden increase in pressure near the cylindrical gate member, etc. In addition, the liquid force flowing from the supply / drain port << the flow force through the rectifying pores of the upper bottom wall can prevent the liquid flowing into the cylindrical gate member from being disturbed.

In addition, the opening force of the workpiece passage notch <Before the liquid level is low, the liquid inside the cylindrical gate member is discharged from the supply / drain port to open the tank with the liquid level low from the opening of the work passage notch. It is possible to suppress the liquid from suddenly flowing into the inside of the container, thereby disturbing the suspended state of the work and preventing the liquid from scattering.

Further, the liquid tank bottom wall adjacent to the lower side of the lower bottom wall of the cylindrical gate member is provided with the supply / drainage port in the lower bottom wall of the cylindrical gate member, and the work passing notch force is adjacent to the tank. A liquid supply port communicating with the liquid level higher side at least for a part of time from when the liquid level is closed to the lower side to when the liquid level is higher, and A drain port that communicates with the drainage system at least part of the time from when the notch passage notch closes the liquid level to high L and closes to the side to low L and opens to the side at least in part. By providing a valve, the liquid supply and drainage to the inside of the cylindrical gate member can be performed in accordance with the opening direction of the work passage cutout of the cylindrical gate member without requiring a special valve or valve control. In addition, a driven gear is provided below the bottom wall of the cylindrical gate member and integrally therewith, and the liquid tank bottom wall below the cylindrical gate member is a circle for rotatably receiving the driven gear. And a driving gear that meshes with the driven gear in the circular recess to rotate the driven gear. The driven gear is provided with the supply / discharge at the lower bottom wall of the cylindrical gate member. By providing a second liquid supply / drain port connected to the liquid port, the cylindrical gate member can be pivotally supported by the circular recess and the liquid supply / drain can be synchronized.

Further, the sealing member is provided in parallel with the central axis of the cylindrical gate member, and at two positions on the left and right sides of the transfer line, on the front side and the rear side in the transfer direction of the cylindrical gate member, the cylindrical gate member. A seal roll disposed in contact with the cylindrical outer periphery so as to be relatively displaceable about the central line, and attached to an inner peripheral side of the opening; And four seal plates that come into contact with each other so as to be relatively displaceable from the opposite side of the member, so that rotation of the cylindrical gate member with little friction can be allowed while maintaining a good state of the see-through.

Also, the seal roll comprises a pipe, and a support shaft rotatably supporting the pipe, and a support shaft loosely fitted with a radial allowance to the inner diameter of the pipe, The pipe forming the seal roll is displaced following the displacement of the cylindrical gate member which is displaced in the radial direction by the hydraulic pressure, and the seal can be maintained satisfactorily.

Also, when the liquid level of the seal port is high, the liquid comes into contact with the outside of the seal port on the tank side, and the leading edge extends near a vertical tangent between the seal roll and the outer periphery of the cylindrical gate member. By providing a soft second seal piece, the sealed state can be maintained more reliably without hindering the rotation of the cylindrical gate member.

In addition, when the work passage cutout of the cylindrical gate member communicates with the peripheral wall of the cylindrical gate member on the side where the liquid surface is higher, the work passage cutout is adjacent to the work passage cutout in front of the cylindrical gate member rotation direction. A drain communication hole communicating between the inside and outside of the cylinder is formed at a position between the seal roll to be sealed and the next adjacent seal roll, and the liquid collected between the seal rolls outside the cylindrical gate member is discharged into the cylindrical gate member. Balloons can be prevented.

Further, a chain is circumferentially fixed to the outer periphery of the cylinder at one of the vicinity of the lower end and the upper end of the cylindrical gate member, and the chain and the chain are provided on the liquid tank side including the boundary wall. Turn the cylindrical gate member around the ib line through a chain. A sprocket wheel for tilling drive is provided. For example, compared to a case where the driven 時 protrudes downward from the lower end of the cylindrical gate member, the seal is easier, the frictional resistance at the time of driving is reduced, and the sprocket is driven. The chain distributes the driving force from the wheel in the circumferential direction of the cylindrical gate member, preventing the concentration of stress.

Furthermore, a pair of a pair of work pieces arranged so as to surround the outer side of the opening along the movement trajectory that converts the opening direction of the work passage cutout of the cylindrical gate member into two directions from both sides of the transfer line. A guide member having a guide wall, and a guide bottom wall that is in contact with the bottom surface of the cylindrical gate member and supports the movable member in a fixed range, is provided. By surrounding the cylindrical gate member with a guide member with a gap that allows the workpiece to pass through, it is possible to prevent the cylindrical gate member from tilting due to hydraulic pressure, and to use a strong hydraulic pressure to prevent the cylindrical gate member from tilting. When the member is about to flow, it comes into contact with the pair of guide walls, thereby preventing the member from flowing out and also preventing liquid leakage.

In addition, the seal member is provided on the guide wall, and includes a seal piece slidably provided on the outer periphery of the cylindrical gate member, so that even if the cylindrical gate member is inclined or displaced, the seal piece is formed. Can reliably seal between the guide wall and the guide member to prevent liquid leakage.

Further, the cylindrical gate member includes a flange at a bottom portion, the pair of guide members includes an arc-shaped inner peripheral surface arranged with a slight gap with respect to the outer periphery of the flange, and the seal includes: The member includes a seal piece provided on the guide member and slidably provided on the cylindrical outer peripheral surface of the cylindrical gate member and the upper surface of the flange. It is possible to seal the outer periphery and the bottom of the bracket member.

In addition, at the position of the center line of the bottom wall of the cylindrical gate member, there is provided a driven member projecting downward below the bottom wall of the liquid tank, and around the center line through the driven member. The cylindrical gate member can be easily driven by arranging the driving device below the liquid tank so as to be rotated.

In addition, a driven gear is provided on the lower side of the bottom wall of the cylindrical gate member and integrally therewith, and the driven gear is rotatably provided on the bottom wall of the liquid tank below the cylindrical gate member. Circle to accommodate A concave recess, and a driven gear for rotating the driven gear with the driven gear in the recess, and rotatably supporting the cylindrical gate member via the driven gear without causing liquid leakage. In addition, the cylindrical gate member can be driven to rotate stably without generating distortion or twist.

Further, the liquid tank bottom wall has a double structure of a movable bottom wall having the circular recess and a fixed bottom wall connected to the bottom wall of the liquid processing tank, and the cylindrical gate member, the sealing member, The driven gear and the movable bottom wall are integrally assembled by a frame member, and the fixed bottom wall is detachably attached to a position where the driven gear meshes with the driving gear. Replacement and maintenance can be facilitated.

Further, a reinforcing lid having a work passage groove formed in a radial direction of a cylinder with a width equal to the work passage notch from the work passage notch to a position beyond the central axis at an upper end opening of the cylindrical gate member. The rigidity of the cylindrical gate member can be increased by mounting the.

Further, the cylindrical gate member comprises: an oval-shaped bottom wall; and a flexible peripheral wall member disposed on the β so as to be slidable on an oval orbit in the circumferential direction. In addition, the flexible peripheral wall member is configured to be shorter than the entire length of the elliptical track by about the work passing width, and by increasing the major axis of the ellipse, it is possible to process a workpiece that is long in the transport line direction. it can.

Further, a work passage corresponding to at least the passage locus range of the work is formed, and an insertion member which is detachable from above is provided in the space of the cylindrical gate member. It is filled with the insertion member without obstructing the passage of the liquid, and the amount of liquid leakage accompanying opening and closing of the cylindrical gate member can be reduced by the volume of the insertion member.

Further, a partition wall having a height lower than the bottom of the opening is erected on the bottom wall of the reserve tank and outside the cylindrical gate member. By providing a collecting hole, the leakage liquid generated when the cylindrical gate member is opened and closed can be collected without leaking to another liquid tank.

Further, the height of the partition wall and the leaked liquid discharge capability of the leak recovery hole are set so that the liquid leaking from the liquid treatment tank is discharged without exceeding the partition wall when the partition is fully opened. In the unlikely event that the gate member is broken and a large amount of liquid in the liquid treatment tank flows out of the opening, it can be collected without leaking to another liquid tank.

According to the present invention, a reserve tank is provided before and after the liquid treatment tank, and the entrance boundary wall of the front reserve tank, the exit boundary wall of the rear reserve tank, and the liquid treatment tank and the reserve are provided. The boundary wall of the tank is made openable and closable by a gate, and the work before entering the liquid treatment tank is introduced into the front reserve tank after the liquid level is lowered and the gate on the entrance boundary wall is open. Close the gate on the side boundary wall, apply the processing liquid to the same level as the liquid processing tank, and then open the front reservoir tank and the gate on the boundary wall with the liquid processing tank to open the work in the front reservoir. The work is guided to the liquid treatment tank, and then the gate on the boundary wall is closed. The work which has been subjected to the predetermined treatment in the liquid treatment tank is located at the boundary between the outlet side of the liquid treatment tank and the rear reserve tank. The gates, etc. on the wall are transferred into the rear reserve tank filled with the treatment liquid in advance, and then the liquid treatment tank and the rear reservoir are filled. By closing the boundary gate of the reserve tank, lowering the wall surface in the rear reserve tank, opening the gate on the outlet boundary wall of the rear reserve tank, and discharging the work. The liquid processing can be performed sequentially and continuously while moving the workpiece horizontally.

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a perspective view showing a horizontal traveling continuous plating device according to the embodiment of the present invention. FIG. 2 is a schematic front view showing the apparatus of the embodiment.

FIG. 3 is a schematic side view of the same device.

FIG. 4 is an enlarged perspective view showing a gate opening / closing mechanism in the apparatus of the embodiment. FIG. 5 is a schematic cross-sectional view including a partial block diagram showing a relationship between control of the liquid level of each tank and control of opening and closing of the gate in the apparatus of the embodiment.

FIG. 6 is a schematic cross-sectional view showing a relationship between control of the liquid level of each tank and control of opening and closing the gate in the apparatus of the embodiment.

FIG. 7 is a schematic cross-sectional view showing the relationship between control of the liquid level of each tank and control of opening and closing the gate in the apparatus of the embodiment.

Fig. 8 shows the control of the liquid level of each tank and the opening and closing control of the gate in the apparatus of the embodiment. It is a schematic sectional drawing which shows the relationship.

FIG. 9 is a schematic plan view showing a second embodiment of the present invention.

FIG. 10 is a schematic plan view showing a modified example of the reserve tank in the apparatus of the embodiment. FIG. 11 is a perspective view showing a processing liquid tank line using the gate of the third embodiment in the present invention.

FIG. 12 is an exploded perspective view showing the liquid level maintaining gate of the embodiment in an enlarged manner. FIG. 13 is a schematic plan view showing the relationship between the liquid level maintaining gate and the work of the example.

FIG. 14 is a perspective view showing a liquid level maintaining gate according to a fourth embodiment of the present invention. FIG. 15 is a perspective view showing a liquid level maintaining gate according to a fifth embodiment of the present invention. FIG. 16 is a perspective view showing a liquid level maintaining gate according to a sixth embodiment of the present invention. FIG. 17 is an exploded perspective view showing the gate member of the embodiment.

FIG. 18 is a perspective view showing a part of the liquid tank of the embodiment.

FIG. 19 is a plan view showing another embodiment of the seal member of the embodiment.

FIG. 20 is a sectional view showing a seventh embodiment of the present invention.

FIG. 21 is a plan view showing the same example.

FIG. 22 is a cross-sectional view of the embodiment of FIG. 21 as viewed from the right.

FIG. 23 is a plan view showing a movable bottom wall portion of the gate member when the gate member is not assembled.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

In this embodiment, the present invention is applied to a horizontal traveling continuous plating device 10 for gold plating shown in FIG.

The horizontal traveling continuous plating apparatus 10 is provided with a transport means 12 for transporting a workpiece along a horizontal transport line 12A, and a continuous arrangement below the horizontal transport line 12A. And a tank 16 for neutralization and recovery of water.

The plating tank group 14 is composed of a plating tank 18, front and rear reserve tanks 20, 22 arranged before and after the plating tank 18, and the water washing neutralization and recovery. Vessel group 16 is being flushed with the front recovery reservoir 24 adjacent to the rear reservoir 22 It comprises a sum recovery tank 26 and a rear recovery reserve tank 28 arranged on the rear side.

A boundary wall 20 A on the entrance side of the front reservoir tank 20, a boundary wall 18 A between the front reservoir tank 20 and the plating tank 18, and a rear reservoir tank 2 Boundary wall 18 B with 2 and boundary wall 2 2 A between this rear reservoir 22 and front recovery reservoir 24 and front recovery reservoir 24 The boundary wall 26 A between the neutralization and recovery tank 26 and the boundary wall 26 B between the washing neutralization and recovery tank 26 and the rear recovery reserve tank 28, and the rear recovery reserve tank Gates 30 to 36 forces are arranged on the outgoing boundary wall 28 A of 28, respectively, and these boundary walls 18 A, 18 B, 22 A, 26 A, 26 B And 28 A are opened and closed.

The gates 30 to 36 are, as shown in an enlarged view in FIG. 4, in a vertical plane orthogonal to the horizontal transfer line 12 A of the work, in synchronization with the work passing line in a horizontal direction. Equipped with a pair of shut-off plates 38 that move forward and backward, the boundary wall closes when the opposing edges 38 A of the shut-off plates come into contact with each other, and when separated, the work force < Is formed in an open state. The opposite edge 38 A is made of a flexible rubber seal material.

As shown in FIG. 4, the pair of shirt evening plates 38 opens and closes a U-shaped opening 40 formed on the boundary wall from the left and right. It is guided by a horizontal guide 42 traversed below 40, and can be moved in and out of the horizontal direction along one side of the boundary wall.

As shown in FIG. 4, a moving shutter arranged on the upper end of the shutter plate 38 so as to straddle the upper end of the boundary wall and sandwich the upper end of the shutter plate 38 with the boundary wall. 4 4 《Mounted so that the upper end of the shutter plate 38 can be moved along the upper end of the boundary wall.

The shutter plate 38 is opened and closed by a gate drive control device 46. The gate drive control device 46 includes a cylindrical cam 48 slidably attached to a pin 44 A discharged from the upper surface of the moving shroud 44 at the upper end of the shutter plate 38, and a cylindrical cam 48. A worm wheel 50 that is tied together, a worm gear 52 that drives the worm wheel 50, and a worm gear And a driving device 56 including a motor 56 A for driving the rotation {it] 2 A mounted on one of the two motors.

In addition, the cam groove 48 A of the cylindrical cam 48 moves the moving shaft 44 to the gate closed position within a range of 180 degrees, and reciprocates the moving shaft 44 within the remaining 180 degrees. The gates 30, 33, and 36 are synchronously formed, and the gates 31, 32, 34, and 35 are gates 30, 33, 36, and 1, respectively. Cylindrical cams 48 are set so as to be opened and closed in synchronization with a shift of 80 degrees. The driving device 56 is set so as to intermittently drive the rotating shaft 52 A, and to rotate the cylindrical cam 48 half a turn in one driving time.

Further, the cylindrical cam 48 is supported by a supporting force bar 54 above the boundary wall in a state where the lower end is covered by a cover 49 # which is opened like a free-directional slit.

The supporting force bars 54 are fixed to both side walls 17 of the plating tank group 14 and the washing neutralization and recovery tank group 16. The worm wheel 50 is mounted on the outer side of the support cover 54 and also on the outer side of the side wall 17 and with the worm gear 152 arranged in parallel with the horizontal transfer line 12A.

The supporting force bar 54 shields the space between the worm wheel 50 projecting upward from the side wall 17 and the space above the plating tank group 14 and the washing neutralization and recovery tank group 16.

As shown in FIGS. 1 to 3, the transfer means 12 includes a motor 56A, a sprocket wheel 58, and a chain 60 wound around the motor 56A, and is provided between the left and right chains 60. The work W is suspended and supported under the suspended suspension plate 64, and the upper part of the plating tank group 14 and the washing neutralization recovery tank group 16 is horizontally arranged along the guide frame 62, In FIG. 2, they are transported from left to right.

Reference numeral 66 in FIG. 2 denotes a dispensing device that removes the workpiece W from the washing neutralization and recovery tank group 16 to a lower knife 67.

As shown in FIG. 5, the plating tank 18, the front and rear reserve tanks 20 and 22, the front recovery reserve tank 24, the rinsing neutralization recovery tank 26, and the rear recovery reserve tank Underneath 28 are control tanks 68, 70, 72, 74, 76 and 7 corresponding to the respective volumes. 8 forces <located.

The front reserve tank 20 and the control tank 70, the rear reserve tank 22 and the control tank 72, the front recovery reserve tank 24 and the control tank 74, the rear collection reservoir tank As shown in Fig. 5, valves 70 A, 72 A, 74 A and 78 A are placed on the bottom wall of each reserve tank, as shown in Fig. 5. It can communicate with the upper end of the corresponding management tank.

The lower ends of the control tanks 68 to 78 are connected to the suction side of a pump 82 via a filter 80, and the discharge ports 84 of the pumps 82 are provided with corresponding plating tanks and reserves. It is located above the tank and the water neutralization and recovery tank so that the processing solution sucked from the control tank can be circulated to the corresponding tank above.

Reference numerals 86 A to 86 F in FIG. 5 denote liquid level sensors for detecting the liquid level in each upper tank, 88 denotes a signal from the liquid level sensor 86 A to 86 F, and gates 30 to 3. Control devices for controlling the opening / closing of the vanolebs 70 A, 72 A, 74 A, and 78 A and the driving of the pump 82 based on the gate opening / closing signal from 6 are shown, respectively. The gate opening / closing signal is derived from the rotation of the cylindrical cam 48.

Reference numeral 37 in FIG. 4 is attached to the side wall 17 at the entrance side of each of the gates 30 to 36. When the work W approaches these gates 30 to 36, this is detected and a signal is output. The sensor which outputs to the gate control device 57 for the drive device 56 of the said gate is shown. The gate control device 57 turns on the driving device 56 so as to open the gate only during the time when the work W passes through the gate in response to the work W approach signal from the sensor 37. I have.

Here, the length of the reserve tank in the horizontal transfer line 12A direction is set to an extent that the minimum transfer unit of the work W by the transfer means 12 can be accommodated. Therefore, in the case where the work W is a linear material as shown in FIG. 2, for example, three pieces are set as one unit, and the length is set to accommodate these three pieces.

Next, the operation of the horizontal traveling continuous plating device 10 according to the above embodiment will be described. First, the plating 8 and the water washing neutralization recovery t 26 are maintained at the liquid level required for plating and recovery processing, respectively.

When the work W approaches the gate 30 by the transfer means 12, the front reserve tank 2 In the case of 0, the valve 7OA is opened in advance, and the plating liquid is set to be lower than the lower end position of the opening 40 of the boundary wall 31 as shown in FIG.

In this state, when the approach of the workpiece W is detected by the sensor 37, the gate 3◦ is opened (in FIGS. 5 to 8, the broken line indicates the gate is open, and the solid line indicates the gate closed state). Move the work W into the front reserve tank 20 and stop it.

When the workpiece W passes, the gate 30 which has been opened as shown in FIG. 6 <closes, and then the plating solution in the control tank 72 is pumped by the pump 82, and the plating liquid in the control tank 72 is moved to the upper front reservoir tank 2. Inject to 0 to the same liquid level as the plating tank 18.

When the liquid level sensor 86 A detects a rise in the liquid level, the work W is advanced, and when it approaches the gate 31, it opens as shown in FIG. As shown in FIG. 8, the gate 31 opened is closed, and the workpiece W is intermittently advanced in the plating tank 18 to perform the plating process. The peak W after the plating process is completed is moved into the rear reserve tank 22 having the same liquid level as the plating tank 18 by opening the gate 32 as shown in FIG. After passing through the work W, the gate 32 is closed, the plating solution in the rear reserve tank 22 is discharged into the lower management tank 72, and the liquid level is lowered, and the liquid level is also lowered. Is moved into the front collection reservoir 24.

In the same manner as in the plating tank group 14, the work W is also provided in the water-recovery neutralization recovery tank group 16, the front recovery reservoir 24, the water-wash neutralization recovery tank 26, and the rear recovery reservoir. The tank 28 proceeds in the same process as above, and is finally carried out from the gate 36 of the rear recovery reservoir tank 28 to the outside.

In the above process, the liquid levels of the four reserve tanks are raised and lowered in synchronization with each other, and the inlet gate 30 of the front reserve tank 20 and the outlet gate of the rear reserve tank 22 are provided. 3 3, The outlet gate 36 of the rear recovery reservoir tank 28 is opened and closed synchronously, and it is deviated by 180 degrees in the rotation direction of the cylindrical cam 48 from these, so that the plating tank 18 Gates 31 and 32 on the inlet and outlet sides of the tank and gates 34 and 35 on the inlet and outlet sides of the washing neutralization and recovery tank 26 are synchronously opened and closed.

In this embodiment, since the control tanks are arranged below the respective liquid processing tank groups in correspondence with the liquid processing ffi and the reserve tank, the management of the processing liquid is easy, and the control of the processing liquid in the factory is easy. apparatus The volume can be reduced.

In the above embodiment, the force in which the plating tank group 14 and the water-washing neutralization recovery tank group 16 are arranged along the linear horizontal transfer line 12A is not limited to this. Instead, for example, as shown in FIG. 9, a plurality of liquid processing tank groups 101 to 1◦3 may be arranged in a U shape or a crank shape. In this case, the arrangement of the reserve tank and the liquid processing tank in each processing liquid tank group is linear.

Further, in the above embodiment, the width of each reserve tank is the same as the width of the plating tank 18 and the washing neutralization and recovery tank 26.For example, as shown in the embodiment of FIG. The width of the reserve tanks 104 and 105 may be the minimum necessary for the workpiece W to pass through. The liquid processing tank 106 has a normal width.

In this case, a block 107 made of, for example, a corrosion-resistant resin may be provided inside the side wall 17 with a passage having a passage width of the work W left inside. Reference numeral 108 in FIG. 10 denotes a gate.

As described above, when the volumes of the reserve tanks 104 and 105 are reduced, it is possible to quickly discharge and inject the processing liquid, and to reduce the amount of the processing liquid to be used. In the above embodiment, the power of the gate of the reserve tank and the gate of the plating tank and the gate of the water-washing neutralization and recovery tank are respectively opened and closed in synchronization.The present invention is not limited to this. It is not always necessary to open and close in synchronization with the relationship between the processing time and distance of plating and the dimensions of the workpiece W. However, in this case, it is necessary to adjust the opening and closing phase of the gate.

Furthermore, the above-described embodiment is for a gold plating platform, and is provided with only the plating tank 18 and the flushing water recovery tank 26, but the present invention is not limited to this. Applicable to other immersion processing equipment for immersing a workpiece in a liquid processing tank for other plating, alumite treatment, electrolytic polishing, electrolytic pickling, printed circuit board through-hole plating, chlorofluorocarbon alternative cleaning, jig peeling, etc. Can be done.

Hereinafter, a third embodiment of the present invention will be described with reference to FIGS.

As shown in FIG. 11, the liquid level maintaining gate 10 according to the third embodiment of the present invention] is, for example, a second liquid tank 1 12 which is a plating tank in a plating line (described later) and an outlet side. It is provided on the boundary wall 1 16 between the second liquid tanks 1 1 4 which is the reservoir tank, and this boundary wall 1 1 6 The opening and closing of the opening 1 18 of the container 1 allows the work 1 2 2 to pass along the transfer line 1 2 0 passing horizontally through the opening 1 1 8 when opened, and the first liquid tank when closed. The liquid is prevented from flowing out of the liquid 124 to the second liquid tank 114.

Here, the liquid level of the liquid 1 24 in the first liquid tank is made slightly lower than the upper end of the boundary wall 1 16, and the liquid level in the second liquid tank 1 14 is the first liquid. The liquid level of the liquid 124 in the tank 112 is significantly less than or equal to zero.

The liquid level maintaining gate 110 is a bottomed cylindrical member having a central axis vertically arranged at the center of the opening 118 and a flange 126 at the bottom, and It is arranged with a small gap between the cylindrical gate member 128 that is rotatable in front of the line and the outer periphery of the flange 126, and is arranged concentrically with the cylindrical outer peripheral surface of the cylindrical gate member 128. A pair of guide walls 1 provided with a circular arc-shaped inner peripheral surface 130 A and arranged so as to surround the cylindrical gate member 128 on the transfer line 120 with a gap from both sides. 30 and a guide member 13 4 having a guide bottom wall 13 2 that comes into contact with the bottom surface of the cylindrical gate member 128 to rotatably support the same, and a guide member 1 34 And a sealing member 1336 for liquid-tight sealing between the cylindrical gate member 128 and the cylindrical gate member 128. That.

The configuration of the cylindrical gate member 128, the guide member 134, and the seal member 136 is as shown in FIG.

The boundary wall 1 16 has a double structure, and the guide wall 1 30 is integrally supported in a slit 1 16 A between the boundary walls 1 16 of the double structure. The support wall 130B is dropped from above and is fixed to the boundary wall 116 by bolts 130C. Here, the opening 1 18 is formed from the upper end of the boundary wall 1 16 so as to reach the common bottom wall 1 13 of the first liquid tank 1 12 and the second liquid tank 1 14 .

The cylindrical gate member 128 has a work passage notch 138 extending from the upper end to the lower end flange 126 at one location in the circumferential direction. The width of the work passing notch 1 38 is set to be slightly larger than the width of the work 122 traveling along the transfer line 120. Also, the pair of guide walls 130 The gap 130D between both ends of the transfer line 120 in the direction is also set to be substantially equal to the work passage notch 1338.

The support wall 130B is integrally connected to the guide wall 130 on the side opposite to the arc-shaped inner peripheral surface 13◦A in the normal direction of the arc.

The cylindrical gate member 128 has a driven shaft 128 A penetrating the guide bottom wall 132 at the center position of the bottom wall, and is provided at the tip (lower end) of the driven shaft 128 A. The attached bevel gear 140 is engaged with the bevel gear 144 attached to the drive shaft 142 so as to be rotationally driven by the drive shaft 144.

The sealing member 1336 is vertically attached along the end of the pair of guide walls 130 on the first liquid tank 112 side, and the tip is the cylindrical gate member 128. And a flexible seal piece such as rubber which comes into contact with the cylindrical outer peripheral surface and the upper surface 126A of the flange 126.

As shown in FIG. 12, on the bottom wall 113 of the second liquid tank 114, an outlet (gap 13) on the second liquid tank 114 side of the liquid level maintaining gate 110 is provided. There is a low-profile partition wall 1 4 6 adjacent to the 0D) side. In addition, a leaked liquid collecting hole 1 488 is formed in the bottom wall 1 13 of the second liquid tank 114 at a position between the partition wall 146 and the boundary wall 111. .

The leaked liquid collecting hole 1 48 communicates with a reserve tank 150 arranged below the first liquid tank 112 and passes through the opening 118 to form the first liquid tank 1 1 2 The liquid leaked from the tank can be returned to the reserve tank 150.

For example, as shown in FIG. 21, the liquid level maintaining gate 110 is disposed on a boundary wall between the tanks in a continuous processing liquid tank line 152 and passes below each liquid tank. The one drive shaft 142 is driven to rotate via a bevel gear in the same manner as shown in FIG. In FIG. 12, reference numeral 54 denotes a motor, and reference numeral 156 denotes an electromagnetic clutch for turning on and off engagement between the level gear 144 and the drive shaft 144 in the rotational direction. Reference numeral 158 indicates a control device for controlling on / off of the electromagnetic latch 156 according to a program.

The work 122 is a transfer device disposed above the treatment liquid tank line 52. It is suspended and supported by a rack 160 via a plating jig 162. The plating jig 162 is supported by being hooked on a bracket 160B integrated with the rack 16OA.

The transfer device 160 is configured to rotate in a horizontal plane outside both ends of the processing liquid tank line 152, and is composed of, for example, a chain 164A and a sprocket wheel 164B. Here, the transport device 160 transports the plurality of workpieces 122 attached to the plating jig 162 from the upper right direction to the lower left direction in FIG. 11 along the transport line 120. The height is set below the liquid level of the liquid 124 in the first liquid tank 112.

For example, in the case of the plating process, the plurality of liquid tanks along the transfer line 120 are, from the upper right of FIG. 11, a washing tank 166, a first buffer tank 168, a plating layer (first liquid tank 112), a second buffer layer (first The two-liquid tank 114) and the recovery tank 170 are arranged in this order. The pretreatment system upstream of the washing tank 166 and the posttreatment system downstream of the collection tank 170 are not shown.

The liquid level maintaining gate is located at the entrance wall 166A of the washing tank 166, the boundary wall 167 between the washing tank 166 and the first buffer tank 168, the boundary wall 169 between the first buffer 168 and the first liquid tank 112, and the first liquid. Reference numerals 201 to 201 denote the boundary wall 116 between the tank 112 and the second liquid tank 114 as the second buffer layer, the boundary wall 115 between the second liquid tank 114 and the collection tank 170, and the boundary wall 171 on the exit side of the collection tank 170, respectively. They are arranged as indicated by 203, 110, 204, 205.

Next, a process of treating the workpiece 122 suspended by the transport device 160 via the plating jig 162 through each liquid tank will be described.

The table and the transfer device 160 transfer the work 122 at a constant speed along the transfer line 120. On the other hand, each liquid level maintaining gate is a cylindrical gate member when the work 122 approaches. When the work 122 is allowed to enter the inner space 129 from the work passage notch 138 and the work 122 is going to leave the airspace 129, the work passage notch 138 is used. The rotation is controlled so as to be directed to the traveling direction of 122.

For example, as shown in Fig. 13 (Α), when the work 122 The cylindrical gate member 28 has its work passage notch 1 38 rotated to the right in the figure, and the work 122 that has been traveling on the transport line 120 has its work passage notch 1 38 It goes into the space 1 2 9 inside the lock member 1 2 8.

While the work 1 2 2 is traveling on the transfer line 120 in the space 1 2 9 inside the cylindrical gate member 1 2 8, the cylindrical gate member 1 2 8 rotates around its central axis. Then, as shown in FIG. 13 (B), the work passage notch 1 38 is positioned rightward. Therefore, the work 122 comes out of the cylindrical gate member 128 through the work passage cutout 138. After the work 122 is extracted, the cylindrical gate member 128 is further rotated, and the next work 122 is received again as shown in FIG. 13 (A).

In the above process, the seal member 13 6 attached to the guide wall 13 0 is always provided with the cylindrical outer peripheral surface of the cylindrical gate member 1 2 8 and the upper surface 1 2 6 A of the lower end flange 1 2 6 And is in pressure contact with the cylindrical gate member 128 by the liquid pressure from the liquid tank on the higher liquid surface side, so that liquid leakage can be suppressed well.

However, the liquid that has entered the cylindrical gate member 128 is rotated by the rotation of the cylindrical gate member 128 into the liquid tank on the lower side of the liquid level, and rotates every time the cylindrical gate member 128 rotates. It will be discharged (leaked).

This leaked liquid is blocked by the partition wall 146 and does not leak to other parts. Also, the liquid is quickly returned to the reserve tank 150 from the leaked liquid recovery hole 148. In FIG. 11, reference numeral 172 denotes a jet hole for the piercing liquid which is arranged on the bottom surface of the first liquid tank 1 12, and 1 74 denotes an orifice provided on a side wall of the first liquid tank 1 12. A single hole, 176 indicates a return pipe for returning the plating solution overflowing from the overflow hole 174 to the reserve tank 150.

The plating solution returned from the return pipe 176 and the leaked liquid recovery hole 148 to the reserve tank 150 is pumped from the jet hole 172 again by the pump (not shown). Squirted into. Reference numeral 1178 in FIG. 11 denotes an exhaust hood for preventing the emission of odor of the chemical solution from the first liquid tank 112, which is a fitting liquid tank.

As described above, the workpieces 122 transported by the transport device 160 via the plating jigs 16 2 include the washing tanks 166, the first buffer layer 168, and the first liquid tank 1 1 2, 2nd liquid The bath 114 and the recovery tank 170 are moved in and out through the liquid level maintaining gates 201 to 203, 110, 204 and 205, and the plating process is completed.

In this embodiment, each liquid level maintaining gate is connected to the drive shaft 142, which is arranged vertically below the liquid tank along the transfer line 12 °, via a bevel gear 144, 145. The bevel gear 144 force is turned on and off with respect to the drive shaft 142 by an electromagnetic clutch 156 that is turned on and off by a control device 1 58. The position of the work passing notch 138 is converted.

Next, a liquid level maintaining gate 180 according to a fourth embodiment of the present invention shown in FIG. 14 will be described.

The liquid level maintaining gate 180 is provided with an insertion member 182 in which a work passage 182A corresponding to a range of a locus of passage of the work 122 including the plating jig 162 is formed.

The insertion member 182 is removably inserted from above into the space 129 inside the cylindrical gate member 128 (but not in contact with the cylindrical gate member 128). Except for filling the space 129. In this embodiment, the leakage amount of the cylindrical gate member 128 when the workpiece 122 enters and exits can be reduced by the volume of the input member 182.

It is preferable to prepare a plurality of types of the work passages 182A of the insertion member 182 having different passage cross-sectional areas depending on the sizes of the work 122 and the fixing jig 162 passing therethrough.

Next, a fifth embodiment of the present invention shown in FIG. 15 will be described.

In the fifth embodiment, a cylindrical gate member 186 is formed by an elliptical bottom wall 186A, and a bellows-like member is disposed on the bottom wall 186A so as to be slidable along an elliptical orbit in the circumferential direction. And a flexible peripheral wall member 186B comprising: a work passage width shorter than a total length of the elliptical track by a work passage width; 188. In this embodiment, a long work can be passed in the direction of the transfer line 120.

Next, a sixth embodiment of the present invention shown in FIGS. 16 to 18 will be described. The liquid level maintaining gate 190 according to the sixth embodiment is a single rectangular parallelepiped assembly including a cylindrical gate member 192 having a bottomed cylindrical shape. The bottom wall of this cylindrical gate member 192 has a double structure, and a large number of flow regulating holes 1994A are formed in the upper bottom wall 1994, and the work passes through the lower bottom wall 1996. The position of the notch 1998 is changed in accordance with the change of the opening direction, so that the liquid in the first liquid tank 1 12 flows into the cylindrical gate member 192 or the liquid that flows in is discharged. Supply / drainage port for water supply.

An annular spacer 195 is disposed between the upper bottom wall 14 and the lower bottom wall 196, and between the upper bottom wall 194 and the lower ij bottom wall 1996. It forms a space into which liquid flows. In addition, a wear-resistant resin sheet 197 such as PVDF is attached to the lower side of the lower bottom wall 196.

The cylindrical gate member 192 is rotatable around its central axis, and is rotatably sealed by seal members 210 at four locations in the circumferential direction.

Each of the four seal members 210 is parallel to the rotation center line of the cylindrical gate member 192 with respect to the cylindrical outer periphery of the cylindrical gate member 192, and has a total height range of the cylindrical outer periphery. And the seal rolls 2 1 2 arranged in contact with each other so as to be displaceable in the circumferential direction, and attached to the inner peripheral side of the opening 1 18, and the leading edge 2 1 4 8 <the seal roll 2 1 2 And four seal plates 2 14 that are relatively displaceable from the opposite side of the cylindrical gate member 19 2 over the entire height range of the seal roll 2 12. .

The seal roll is made of, for example, a pipe 212A made of a wear-resistant resin such as PVDF, and a pair of upper and lower supporting pongs loosely fitted with a radial allowance near the upper end and the lower end of the pipe 212A. 2 1 2B.

A chain 2 16 is fixed in the circumferential direction on the outer periphery of the cylindrical shape near the upper end of the cylindrical gate member 19 2, and on the boundary wall 1 16 side, it engages with the chain 2 16. A sprocket wheel 218 is provided for rotating the cylindrical gate member 192 about the width rf] line via the chain 2.

The lower side of the chain 2 16 of the cylindrical gate member 19 2 A pair of arcuate guide members 220 facing each other are placed at both sides of the transfer line 120 so as to sandwich the cylindrical outer periphery of the cylindrical gate member 192 with a slight gap. Have been. The sprocket wheel 2 18 is rotatably supported by the arcuate guide member 220.

An assembly bottom wall 222 supporting the lower bottom wall 196 below the cylindrical gate member 192 is provided with a liquid supply port 224 and a drain port 226. I have. The liquid supply port 224 and the liquid discharge port 226 overlap the liquid tank lined liquid port 225 and the liquid tank discharge port 227 formed on the lower liquid tank bottom wall 223, respectively. It is located.

The liquid supply port 224 is a part of the time from when the work passage notch 198 of the cylindrical gate member 192 is closed to the second liquid tank side to when it is opened to the first liquid tank side. In addition, the lined drain port 200 vertically overlaps with the lined drain port 200, whereby the liquid in the first liquid tank is supplied to the supply ports 222, 224, the supply / drain port 200, and the baser 19. The air flows into the cylindrical gate member 1992 from the rectifying pore 1994A of the upper bottom wall 1994 through the inner space of 5. At this time, since the liquid rest slowly flows through the rectifying pores 194A and flows into the cylindrical gate member 192, a turbulent flow of the liquid rest occurs in the cylindrical gate member 192. Is suppressed. Reference numeral 2 28 in FIG. 18 denotes a communication pipe for connecting the liquid supply port 2 25 to the communication hole 22 on the bottom of the first liquid tank, and reference numeral 230 denotes a liquid from the drain port 2 27. The discharge pipes for discharging to the outside are shown respectively.

Reference numeral 232 in the figure denotes a vertical engaging projection formed by projecting the tip of the seal plate 2 14 opposite to the seal roll 2 12. The mooring projections 2 32 are inserted from above into vertical mooring grooves 2 3 4 formed inside the liquid tank side wall 2 33 to maintain the liquid level of this embodiment. The gate 190 is detachable as one assembly.

In this embodiment, the supply / drainage liquid formed on the lower bottom wall 1 96 of the cylindrical gate member 190 before the work passage notch 1 98 opens to the first liquid tank 112 side. Mouth 200 force \ Liquid supply port 2 24, 2 25 When the liquid in the first liquid tank 1 12 overlaps with the liquid supply port 2 24, 2 25, the communication pipe 2 28, the liquid supply boat 2 25, 2 24, The liquid is introduced into the cylindrical gate member 192 through the supply / drainage port 200 and the rectifying pore 194A. Therefore, the liquid is injected into the cylindrical gate member 192 before the liquid in the first liquid tank 112 flows suddenly due to the work passing notch 198 force, and the liquid is rapidly injected. Generation of turbulent flow due to liquid inflow, rapid pressure increase in cylindrical gate member 192, and work 1 2 2 trying to enter cylindrical gate member 192 from notch 1998 It does not fall by the current.

Before the cylindrical gate member 192 is further rotated and its work passage notch 1998 force <, opening to the second liquid tank 114 side, the supply / drain port 200 is set to the drain port 22 The liquid in the cylindrical gate member 192 is discharged from the discharge pipe 230 in communication with 6, 27. At this time, the cylindrical gate member 192 seals with the seal member 210 so that the liquid in the first liquid tank 112 does not enter.

When the work passage notch 1 3 8 opens to the second liquid tank 1 14 side, most of the liquid in the cylindrical gate member 19 2 has been discharged. Does not suddenly flow out and scatter.

A small amount of leaked liquid or liquid dripped from the work is collected from the leaked liquid collecting port 148.

In the above process, the cylindrical gate member 19 2 is displaced from its center axis by the hydraulic pressure. The pipe 21 A constituting the seal roll 21 is loosely fitted to the support 21 B. Therefore, the seal can be maintained by following the displacement of the cylindrical gate member 192 in the radial direction by hydraulic pressure.

In addition, since the pipe 2 12 A is made of wear-resistant resin, when the cylindrical gate member 19 2 rotates, it does not rotate even if it comes into contact with or slides on the gate member 19 2 Without the need to maintain the seal.

In the above embodiment, as shown in FIG. 19, the outer edge of the seal roll 112 on the side of the first liquid tank 112, and the leading edge 236A is cylindrical with the seal roll 211. By providing the second seal piece 236 that reaches near the contact line with the circumferential surface of the gate member 192, the seal can be further improved, and the cylindrical gate member 192 can be further improved. Even if there is a gap between the second seal piece 236 and the seal roll 211, the seal can be maintained. This second seal piece 236 may be, for example, a vinyl chloride sheet or half-divided vinyl chloride. It may be constituted by a chip. Further, in the above embodiment, as shown by the two-dot chain line in FIG. 16, the lower end of the work passage notch 1 98 is provided at the outer peripheral position of the upper bottom wall 19 4 of the cylindrical gate member 19 2. By providing the rising portion 238 so as to cover a certain height range, it is possible to reduce the amount of liquid leakage when the work passage notch 198 is opened to the second liquid tank 114 side. .

Note that the cylindrical gate members 1 28 and 1 92 of the above embodiment have a cylindrical shape with a bottom, and the cylindrical gate member 18 6 is a force constituted by a flexible peripheral wall member 18 B. However, the present invention is not limited to this, and if necessary, accepts the work 122 conveyed on the conveyance line 120 while maintaining a sealed state with the opening 118 side, and inserts the work inside. It is sufficient that the direction of the notch 1 98 can be changed 180 degrees on the transfer line 120 while the work 122 is present.

Therefore, for example, the shape may be an elliptical cylindrical shape.

Further, when the cylindrical gate member is a cylindrical body provided with a work passage notch, the rotation may be either unidirectional or reciprocating. However, in the case of the embodiment shown in FIGS. 16 to 18, since the chain 2 16 is not connected at the work passing notch 1 98, the sprocket wheel must be used when rotating in one direction. It is necessary to provide at two or more places. The chain may be attached to the outer periphery of the lower end of the cylindrical gate member 186. At this stage, the chain is L continuously in the circumferential direction, so that only one sprocket wheel may be used. Further, there is an advantage that no torsional force is generated in the cylindrical gate member 186.

Next, a seventh embodiment of the present invention will be described with reference to FIGS.

In the seventh embodiment, a cylindrical gate member 240 similar to the cylindrical gate member 92 in the sixth embodiment shown in FIG. 16 is provided. A driven gear 2 42, which is coaxially and integrally mounted at the lower end of 0, is driven by a driving gear (described later), and a reinforcing lid having a cylindrical gate member 240 with an opening at the upper end provided with a work passage groove 24 A. This embodiment differs from the embodiment shown in FIG. 16 in that the second embodiment is provided with a second through-hole 24, and a drainage communication hole 246 is provided in the peripheral wall of the cylindrical gate member 240.

Other configurations are the same as or similar to the embodiment of FIG. 16, and the same parts are denoted by the same reference numerals as in FIG. 16 and description thereof will be omitted.

As shown in FIG. 20, the driven gear 242 is located below the cylindrical gate member 240. It is fixed to the side bottom wall 248 by bolt nuts 252A and 252B so as to be sandwiched from below with the movable bottom wall 25 °.

Here, the driven gear 242 is integrally fastened and fixed to the lower bottom wall 248 of the cylindrical gate member 240, and is rotatably mounted on the movable bottom wall 250 around the bolt 252A together with the cylindrical gate member 240. L, ru.

Reference numeral 254 in FIG. 2 indicates an upper bottom wall in which a number of rectifying holes 254 A are formed.In the center of the upper bottom wall 254, work is performed so that the nut 252B can be tightened or loosened. A hole 254B is formed.

The driven gear 242 and the lower bottom wall 248 are formed so as to be substantially aligned in the thickness direction, as shown by broken lines in FIG.

As shown in FIG. 21, the positions of these supply / drainage ports 242 A and 248 A around the center rf] of the cylindrical gate member 240 are shifted by 180 degrees from the work passage cutout 256. Are located.

As shown in FIG. 21, the reinforcing lid 244 has a force having a width equal to that of the work passage notch 256 and has a substantially U-shape formed from the work passage notch 256 to a position beyond the rotation center line. The cylindrical gate member 240 is provided with a work passage groove 244A and is attached to the inner periphery of the upper end of the cylindrical gate member 240 so as to increase its rigidity. As shown in FIGS. 20 and 21, the drainage communication hole 246 is formed in the peripheral wall of the cylindrical gate member 240 near the upper bottom wall 254, and the rotational position of the cylindrical gate member 240 in the rotation direction. L is disposed at a position shifted by about 60 degrees in the rotation direction forward with respect to the work passage notch 256.

The movable bottom wall 250 is integrally provided with four seal plates 114 at the front and rear ends in the work transfer line direction and a wall-shaped frame 117 connecting the seal plates 114 in the transfer line direction. Inside, four seal rolls 112 are attached by supporting means 112Β, and a cylindrical gate member 240 is set between them. A lid 258 is attached from above, and a support 112Β on the back surface of the lid 258 is attached to the seal roll. The gate member assembling rest 260 can be configured by fitting and fixing to the upper end of 112. On the bottom surface of the movable bottom wall 250, a circular recess 262 for rotatably storing the driven gear 242 is formed.

At the center of the circular recess 26 2, a through hole 26 2 A through which the bolt 25 2 A penetrates is formed, and a phase of 18 ° is interposed with the through hole 26 2 A interposed therebetween. The liquid supply port 26 2 B and the liquid discharge port 26 2 C have the same fan shape as the above-mentioned liquid supply and discharge ports 24 2 A and 248 A, and may overlap with these. Is placed so that it can be

From the circular recess 26 2, a drive gear entry groove 26 4 extending continuously in one direction in the work transfer line direction is continuously formed until it reaches one end of the movable bottom wall 250. Has been established.

When the gate member assembly 260 is set at a predetermined position on the fixed bottom wall 266 which is the liquid tank bottom wall, the fixed bottom wall 2 The driving gear 2668 disposed at 66 is inserted so as to be able to communicate with the driven gear 2442.

Reference numeral 270 in FIG. 21 indicates a positioning wall for positioning in the work transfer line direction when the gate member assembly 260 is mounted.

The drive gear 268 is engaged with a pinion 272 as shown in FIG. 21 and FIG. 22, and the pinion 272 is a sprocket mounted in the middle of the rotation cold 272A. The driven gear 242 is driven to rotate by a chain 276 wound around a rocket wheel 274, and the driven gear 242 is rotated via a driving gear 268.

The chain 2776 is wound around and driven by an external sprocket wheel (not shown) through a through hole 2778A of the liquid tank wall 2778.

Here, the driving gear 2 68 and the pinion 2 7 2 are arranged so that the processing liquid level is zero with respect to the liquid level in the liquid tank on the opposite side with the cylindrical gate member 240 interposed therebetween. ,, And are the lower sides of the lower end of the work passage notch 256. Therefore, the through hole 2778A of the liquid tank wall 2778 needs to be provided at a position higher than the lower end of the work passage cutout 256 to prevent liquid leakage.

The entry and exit of the work and the processing liquid into and from the cylindrical gate member 240 in this embodiment are the same as in the embodiment of FIG. 16 described above. Will be described below.

In FIG. 21, when the liquid level on the left side is high and the liquid level on the right side is zero or lower than the lower end of the work passage cutout 256, the rotation of the cylindrical gate member 240 The processing liquid may accumulate between the outer periphery of the cylindrical gate member 240 and the front and rear shields 112 and the wall-like frame 117, which may be blown out to a lower liquid level. The drain communication holes 246 are used to discharge the processing liquid accumulated between the front and rear seal rolls 11 and 12 as described above. In the state shown in FIG. 21, a pair of lower seal rolls in FIG. The processing liquid accumulated between 1 12 and the outer periphery of the cylindrical gate member 240 is discharged into the cylindrical gate member 240, and further rotated clockwise in FIG.

The processing liquid collected here at a position between the pair of (upper) seal rolls 111 is discharged into the cylindrical gate member 240.

As described above, the drainage communication hole 246 is arranged with a phase difference of about 60 degrees ahead of the workpiece passage notch 256 in the rotation direction. Does not enter or exit the cylindrical gate member 240.

Industrial applicability

The present invention provides a method for purifying a workpiece in a liquid processing tank, such as plating, alumite treatment, electrolytic polishing, electrolytic pickling, through-hole plating on a printed substrate, freon substitute cleaning, and jig peeling. This is an immersion treatment device that can move the work horizontally continuously without moving it up and down with respect to the liquid treatment tank, so that the treatment can be performed efficiently with little loss time.

Claims

The scope of the claims

(1) A transport means for transporting a work horizontally along a horizontal transport line within a certain range, a liquid treatment tank, front and rear reserve tanks disposed before and after the liquid treatment tank, and a liquid treatment tank And a liquid amount adjusting means for adjusting the amount of the processing liquid in the reserve tank, and at least one set for each processing liquid horizontally and continuously arranged along the transport line. And a fixed height range from the upper end of the boundary wall between each liquid processing tank and the reserve tank, the entrance boundary wall of the front reservoir, and the exit boundary wall of the rear reservoir. A gate that is formed at each of the openings that allow the passage of the work, and that allows the work to pass horizontally in the open state and prevents the outflow of the processing liquid in the closed state; and a gate when the work approaches the gate. And close the gate after passing the work Gate drive that opens and closes the gate on the inlet side of the reserve tank and the gate on the outlet side of the rear reserve tank in opposite phases to the gate on the inlet side and the gate on the outlet side of the liquid treatment tank And a control device, wherein the liquid amount adjusting means sets the same liquid processing level between the liquid processing tank and the reserve tank when the work enters and leaves between the liquid processing tank and the reserve tank. A horizontal traveling continuous shoreline treatment apparatus characterized in that the liquid treatment level of the reserve tank when entering and exiting the gate is not more than the lower end of the gate opening when the gate is open.

(2) The horizontal traveling continuous immersion treatment apparatus according to claim 1, wherein the gate includes a shutter plate that opens and closes an opening by moving in a direction orthogonal to a horizontal transfer line of the work.

(3) In claim 2, a pair of shutter plates at the gate are provided to advance and retreat with respect to the passage line in a vertical plane orthogonal to the transport line of the park, and the opposite edges of the shutter plates are provided. A horizontal running continuous immersion treatment apparatus characterized in that it comes into a closed state when it comes in contact with it, and it becomes an open state when it comes apart.

(4) In claim 1, the gate drive control device synchronously opens and closes an inlet gate and an outlet gate of a liquid processing tank in a set of liquid processing tanks. Horizontal traveling continuous beach treatment equipment.

(5) In claim 1, the gate drive control device comprises: a power ^ disposed on a side surface of the liquid processing tank group along the work transfer line; A horizontal traveling continuous immersion comprising:

(6) In claim 5, the gate includes a shutter plate that opens and closes an opening by moving in a direction orthogonal to a horizontal transfer line of the work, and the shutter plate is orthogonal to the transfer line of the work. Wherein the transmission device is a power conversion device for transmitting the rotational motion of the power shaft to the gate by reciprocating the rotational motion. Traveling continuous immersion processing equipment

(7) In Claim 5, the gate includes a shutter plate that is swingably supported in a vertical plane orthogonal to a horizontal transfer line of the work and that opens and closes an opening by swinging, and the transmission device is A horizontal running continuous immersion process, wherein the power conversion device transmits the rotational motion of the power shaft as the oscillating motion of the shirt-plate.

(8) The horizontal plane according to claim 5, wherein each gate of at least one set of the liquid treatment tank groups shares the same driving force, and the transmission device is provided for each gate. Running continuous immersion treatment equipment.

(9) In claim 1, the liquid treatment tank and the reserve tank in each of the liquid treatment tank groups of each set are arranged linearly, and the relative angle of the transport line of the adjacent set is freely adjustable. A horizontal running continuous immersion treatment apparatus characterized by being performed.

(10) In Claim 1, a pair of an inlet gate of the front reservoir and an inlet gate of the processing liquid tank, and an outlet gate of the rear reservoir and an outlet of the processing liquid tank. At least one pair of the pair with the gate is arranged in the opening of the boundary wall, and has a space for accommodating the work therein, and is formed at a certain depth from the upper end and from the space to one outer periphery. A bottom-opened cylindrical member provided with a work-passing notch that allows the work to enter and exit the space, and that is rotatable about a vertical center. A cylindrical gate member capable of changing the opening direction of the notch by 180 degrees in two directions along the transfer line; and a liquid-tight space between the outer periphery of the cylindrical gate member and the inner periphery of the opening. And a sealing member for sealing. Horizontal running communicating said space is characterized in that it constitutes the reservoir one blanking tank

(11) In Claim 10, the bottom wall of the cylindrical gate member has a double structure, A large number of flow regulating pores are formed in the upper bottom wall, and the position is changed in the lower bottom wall in accordance with the change in the direction of the opening of the work passage notch, whereby the adjoining cylindrical gate member 2 is formed. A horizontal traveling continuous immersion treatment apparatus characterized in that a water supply / drain port is provided for inflow of a fluid in a tank having a higher liquid level in one of the two tanks or for discharging the inflowing liquid.

(12) In Claim 11, the liquid supply / discharge port in the lower bottom wall of the cylindrical gate member is provided on a liquid tank bottom wall adjacent to a lower side of a lower bottom wall of the cylindrical gate member. The peak passage notch communicates with the liquid surface on the high side during at least part of the time from when the liquid surface of the adjacent tank closes on the low side to when the liquid surface force opens on the high side. The liquid supply port and the liquid supply / drain port are connected at least partially during the time from when the workpiece passage notch closes to the liquid level << high side to when the liquid level opens to the low side. A horizontal traveling continuous immersion treatment apparatus, comprising:

(13) The cylindrical gate member according to claim 11, wherein the cylindrical gate member is provided with a driven gear integrally below the bottom wall thereof, and a liquid tank bottom wall below the cylindrical gate member includes: A circular recess that rotatably accommodates the driven gear, and a drive gear that meshes with the driven gear in the recess to rotate the driven gear are arranged, and the driven gear is located below the cylindrical gate member. A horizontal traveling continuous immersion treatment apparatus comprising a second supply / drain port connected to the supply / drain port on the side bottom wall.

(14) In the tenth aspect, the seal member is provided at two places parallel to the central axis of the cylindrical gate member, on the left and right sides of the transfer line, and on the front side in the transfer direction of the cylindrical gate member, and after. A seal roll disposed at two positions on the outer periphery of the cylindrical gate member so as to be relatively displaceable about the center line, and attached to the inner peripheral side of the opening, and the leading edge is A horizontal traveling continuous immersion treatment apparatus, comprising: four seal plates that are in contact with the outer periphery of the seal roll so as to be relatively displaceable from the opposite side from the cylindrical gate member.

(15) The seal roll according to (14), wherein the seal roll supports the pipe and the pipe so as to be rotatable, and is loosely fitted with a radial allowance to the inner diameter of the pipe. And a horizontal traveling continuous immersion treatment apparatus characterized by comprising: (16) The sealing roll according to (14), wherein the sealing roll is in contact with the outer side of the sealing roll on the tank side where the liquid level is high, and a leading edge is a vertical tangent between the sealing roll and the outer periphery of the cylindrical gate member. A horizontal traveling continuous immersion treatment apparatus, comprising a soft second seal piece extending in the vicinity.

(17) In the above item (14), the work passage notch of the peripheral wall of the cylindrical gate member, when the notch passage notch of the gate member communicates with a higher liquid surface side, A horizontal traveling continuous immersion treatment apparatus, characterized in that a drain communication hole communicating between the inside and outside of the cylinder is formed at a position between a seal roll adjacent to the front in the gate member rotation direction and a seal hole adjacent to the next.

(18) In the tenth aspect, a chain is circumferentially fixed to a cylindrical outer periphery near one of a lower end and an upper end of the cylindrical gate member, and a liquid tank side including the boundary wall includes: A horizontal traveling continuous immersion treatment apparatus, which is provided with a sprocket wheel force that engages with the chain and drives the cylindrical gate member to rotate around the line through the chain.

(1) In Claim 10, the outside of the cylindrical gate member is surrounded by a gap from both sides of a transfer line along a movement trajectory that converts the opening direction of the work passage cutout of the cylindrical gate member into two directions. A guide wall having a pair of guide walls arranged in the above manner, and a guide bottom wall in contact with the bottom surface of the cylindrical gate member and supporting the movable body within a certain range; The horizontal traveling continuous immersion treatment apparatus is characterized in that both ends in the conveying line direction are opposed to each other with a gap allowing passage of the work.

(20) The horizontal running continuous immersion device according to claim 19, wherein the seal member includes a seal piece provided on the guide wall and slidably provided on an outer periphery of the cylindrical gate member. Hama processing equipment.

(21) The cylindrical gate member according to claim 19, wherein the cylindrical gate member has a flange at a bottom portion, and the pair of guide members have an arc-shaped inner peripheral surface arranged with a small gap with respect to the outer periphery of the flange. The seal member is provided on the guide member, and includes a seal piece slidably provided on the cylindrical outer peripheral surface of the cylindrical gate member and the upper surface of the flange. Horizontal running continuous immersion treatment equipment.

(22) The cylindrical gate member according to claim 10, wherein: A horizontal traveling continuous immersion treatment apparatus, comprising a driven member projecting below the bottom wall of the liquid tank at a position of the line, and being rotated around the center line through the driven member.

(23) The cylindrical gate member according to claim 10, wherein the cylindrical gate member includes a driven gear coaxially and integrally with a lower side of a bottom wall thereof, and a liquid tank bottom wall below the cylindrical gate member includes: A horizontal traveling continuous immersion treatment apparatus, comprising: a circular recess that rotatably accommodates a driven gear; and a drive gear that meshes with the driven gear in the recess to rotate the driven gear.

(24) In Claim 23, the liquid tank bottom wall has a double structure of a movable bottom wall having the circular recess, and a fixed bottom wall continuous to the bottom wall of the liquid processing tank. The cylindrical gate member, the seal member, the driven gear, and the movable bottom wall are an integral assembly formed by a frame member, and the fixed bottom wall has a position where the driven gear is mounted on the drive gear. A horizontal traveling continuous immersion treatment device characterized in that it can be freely attached to and detached from.

(25) In Claim 10, at the upper end opening of the cylindrical gate member, from the work passage notch to a position beyond the center axis, the work passage notch is equal to L, and the diameter of the cylinder in width. A horizontal running continuous immersion treatment apparatus characterized by mounting a reinforcing lid having a work passage groove formed in a direction.

(26) In Claim 10, wherein the gate member has an oval bottom wall, and a flexible peripheral wall member disposed on the bottom wall so as to be slidable in a circumferential direction on an oval orbit. The horizontal traveling continuous immersion treatment apparatus, characterized in that the flexible peripheral wall member is shorter than the entire length of the elliptical orbit by about the work passage width.

(27) The work passage according to claim 10, wherein at least a work passage corresponding to a range of a passage locus of the work is formed, and the work passage has a size that substantially fills the space in the gate member. A horizontal traveling continuous immersion treatment device characterized by providing a detachable insertion member.

(28) In Claim 1, a bottom wall of the reserve tank is provided with a tsuji cut wall having a height lower than a bottom of the opening, outside the gate member, and A horizontal traveling continuous immersion processing apparatus, wherein a leaked liquid recovery hole is provided between the partition walls.

(29) In Claim 28, the height of the partition wall and the leaked liquid discharge capability of the leak recovery hole are such that when the partition wall is fully opened, the liquid leaking from the liquid treatment tank passes through the partition wall. A horizontal traveling continuous immersion treatment apparatus characterized in that the immersion treatment is performed without discharge.