WO1994015109A1 - Roller bearing - Google Patents
Roller bearing Download PDFInfo
- Publication number
- WO1994015109A1 WO1994015109A1 PCT/JP1993/001885 JP9301885W WO9415109A1 WO 1994015109 A1 WO1994015109 A1 WO 1994015109A1 JP 9301885 W JP9301885 W JP 9301885W WO 9415109 A1 WO9415109 A1 WO 9415109A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- rolling
- lubricating film
- metal
- ceramic material
- rolling element
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/38—Ball cages
- F16C33/44—Selection of substances
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M107/00—Lubricating compositions characterised by the base-material being a macromolecular compound
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M107/00—Lubricating compositions characterised by the base-material being a macromolecular compound
- C10M107/38—Lubricating compositions characterised by the base-material being a macromolecular compound containing halogen
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M107/00—Lubricating compositions characterised by the base-material being a macromolecular compound
- C10M107/40—Lubricating compositions characterised by the base-material being a macromolecular compound containing nitrogen
- C10M107/44—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/38—Ball cages
- F16C33/3887—Details of individual pockets, e.g. shape or ball retaining means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/38—Ball cages
- F16C33/44—Selection of substances
- F16C33/445—Coatings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/66—Special parts or details in view of lubrication
- F16C33/6603—Special parts or details in view of lubrication with grease as lubricant
- F16C33/6633—Grease properties or compositions, e.g. rheological properties
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- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/66—Special parts or details in view of lubrication
- F16C33/6696—Special parts or details in view of lubrication with solids as lubricant, e.g. dry coatings, powder
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- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2205/00—Organic macromolecular hydrocarbon compounds or fractions, whether or not modified by oxidation as ingredients in lubricant compositions
- C10M2205/003—Organic macromolecular hydrocarbon compounds or fractions, whether or not modified by oxidation as ingredients in lubricant compositions used as base material
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- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
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- C10M2213/02—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions obtained from monomers containing carbon, hydrogen and halogen only
- C10M2213/023—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions obtained from monomers containing carbon, hydrogen and halogen only used as base material
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- C10M2213/04—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions obtained from monomers containing carbon, hydrogen, halogen and oxygen
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- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2213/04—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions obtained from monomers containing carbon, hydrogen, halogen and oxygen
- C10M2213/043—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions obtained from monomers containing carbon, hydrogen, halogen and oxygen used as base material
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- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2213/06—Perfluoro polymers
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2213/06—Perfluoro polymers
- C10M2213/0606—Perfluoro polymers used as base material
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- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2213/06—Perfluoro polymers
- C10M2213/062—Polytetrafluoroethylene [PTFE]
- C10M2213/0623—Polytetrafluoroethylene [PTFE] used as base material
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/0403—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds used as base material
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/041—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds involving a condensation reaction
- C10M2217/0415—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds involving a condensation reaction used as base material
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
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- C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/042—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds between the nitrogen-containing monomer and an aldehyde or ketone
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- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
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- C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/042—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds between the nitrogen-containing monomer and an aldehyde or ketone
- C10M2217/0425—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds between the nitrogen-containing monomer and an aldehyde or ketone used as base material
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- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/043—Mannich bases
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- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/043—Mannich bases
- C10M2217/0435—Mannich bases used as base material
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- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/044—Polyamides
- C10M2217/0443—Polyamides used as base material
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- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
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- C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/045—Polyureas; Polyurethanes
- C10M2217/0453—Polyureas; Polyurethanes used as base material
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- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
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- C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/046—Polyamines, i.e. macromoleculars obtained by condensation of more than eleven amine monomers
- C10M2217/0465—Polyamines, i.e. macromoleculars obtained by condensation of more than eleven amine monomers used as base material
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- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/02—Bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
- F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
- F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
Definitions
- the present invention relates to a rolling bearing, and particularly to a rolling bearing which is advantageous for use in a special environment such as a vacuum environment, a high-temperature environment, or a corrosive environment in which ordinary grease or oil cannot be used.
- a special environment such as a vacuum environment, a high-temperature environment, or a corrosive environment in which ordinary grease or oil cannot be used.
- the above-mentioned special environment includes, for example, a transfer system provided inside a semiconductor manufacturing apparatus.
- a transfer system provided inside a semiconductor manufacturing apparatus.
- the Evaporation of the oil causes problems such as deterioration of the lubrication function and contamination of the use environment.
- soft metals such as gold, silver, lead, and copper
- solid lubricants such as carbon and molybdenum disulfide
- the dusting condition is lower than when grease is used, such as when the lubricating film peels off little by little when it comes into contact with the rolling elements. appear .
- the present applicant is considering a method in which a lubricating film containing a fluorine-based resin is formed on a raceway or a retainer so that dust generation can be reduced by an order of magnitude compared to the conventional case.
- the lubricating film is formed by dispersing a fluororesin such as polytetrafluoroethylene (PTFE) in an organic solvent and a resin binder such as polyamide which has a rapid curing property, and spraying it onto the object to be formed. After coating, it is fixed by firing, but at present, the firing temperature is simply set at 180 ° C ⁇ 10 in consideration of the transferability and fixability of the film. It is set relatively low.
- PTFE polytetrafluoroethylene
- an object of the present invention is to provide a structure that does not emit hydrocarbon-based gas in a high-temperature environment while suppressing dust generation due to peeling or chipping. Disclosure of the invention
- the rolling bearing of the present invention includes: a raceway made of a metal or a ceramic material; a rolling element rolled and arranged on the raceway made of a metal or a ceramic material family; A fluorine-based synthetic resin is provided in a resin binder having an imido bond or an amide imide bond provided so as to cover the rolling portion of the rolling element.
- U consisting of a lubricating film which has been subjected to the resin dispersion mixing and degassing of the hydrocarbon gas
- the rolling bearing of the present invention comprises: a raceway made of metal or ceramic material; a rolling body made of metal or ceramic material rolled on the raceway; A cage made of a metal or a synthetic resin material for holding the rolling element, and an imid provided to cover the rolling wheel and / or the rolling and sliding contact portions of the rolling element and / or the cage. It is composed of a lubricating film obtained by dispersing and mixing a fluorine-based synthetic resin in a resin binder having a bond or an amide-imide bond and performing a degassing treatment of a hydrocarbon gas.
- the rolling bearing of the present invention comprises a raceway made of metal or ceramic material, and a rolling rest made of metal or ceramic material rolled on the raceway.
- a cage made of a metal or a synthetic resin material for holding the rolling element, and an imid coupling or amidim provided to cover a sliding contact surface of the cage with the rolling element.
- a lubricating membrane obtained by dispersing and mixing a fluorine-based synthetic resin in a resin binder having a metal bond and performing a degassing treatment of a hydrocarbon gas.
- the race and / or the rolling element are formed of silicon nitride-based ceramics.
- the metal constituting the bearing ring and rolling rest especially in an environment where corrosion resistance is required, for example, martensitic stainless steel such as JIS standard SUS440C, for example, JIS standard SU
- Precipitation hardening type stainless steel such as S630 can be used after appropriate hardening and aging treatment.
- austenitic stainless steel such as JIS SUS304. Noh.
- Ni—Cr—Mo alloys such as Hastelloy C122, Hastelloy C1-276, and Hastelloy C-14, manufactured by Mitsubishi Materials Corporation, are used as nickel-based alloys. It is also possible.
- JIS standard SKH4 steel, A1SI standard M-50 material, or the like is preferably used.
- Bearing steel such as JIS standard SUJ-2 commonly used.
- carburizing steel such as SAE standard 512 material can be used if heat treatment conditions such as quenching and tempering temperatures and times are appropriately adjusted.
- heat treatment conditions such as quenching and tempering temperatures and times are appropriately adjusted.
- Ni_Cr-based alloy HAYNESSALLOY for example, HA214, HA230, etc., manufactured by HaynesIntEternatelon, Inc.
- the metal forming the retainer for example, JIS standard SUS304, brass, titanium material, or the like is suitably used.
- the synthetic resin material include fluororesins such as polytetrafluoroethylene (hereinafter abbreviated as PTFE), ethylenetetrafluoroethylene (ETFE), polyetheretherketone (PEEK), and polyphenylenesulfate. It is also possible to use engineering plastics such as sulfide (PPS), polyethersulfone (PES), and Nylon 46. Reinforcing fibers such as glass fiber are added to these resins.
- a corrugated type, a crown type, a hollow type, or the like is suitably used.
- the resin binder having an imido bond or an amidomid bond include polyimide, polyimide, and the like.
- the fluorine-based synthetic resin include the same PTFE and ETFE as the fluorine-based resin used for the cage.
- the lubricating oil of the present invention is characterized in that the resin binder having the above imido bond or amide imide bond is 10 to 50% by weight, and the fluorine-based synthetic resin is 1 to 20% by weight therein.
- the lubricating film is subjected to the degassing treatment of the hydrocarbon-based gas. It is not required to be released, which is particularly advantageous in the use environment in which hydrocarbon-based gas may be an obstacle.
- the baking in a high temperature range during the degassing process causes a resin binder having an imido bond or an amide bond to undergo a condensation reaction, thereby causing hardening and brittleness of the lubricating film surface due to oxidation and carbonization. And promotes transfer, as well as improving the lubricating performance with the increase in the adhesion of the oxidized component to the metal surface due to the polarity of the C 0 H group.
- the pocket of the cage can be improved. Coated on the inner surface
- the lubricating film is substantially free of hydrocarbon-based gas.
- the rolling bearing of the present invention is left in a high-temperature environment, no hydrocarbon-based gas is released from the lubricating film. Therefore, when high-precision processing is required, for example, in a semiconductor manufacturing process, the use of the rolling bearing of the present invention can contribute to an improvement in yield.
- FIG. 1 is a longitudinal sectional view of one embodiment of the rolling bearing of the present invention
- FIG. 2 is a schematic diagram of an experimental apparatus used for measuring the amount of generated dust of the bearing
- FIG. 5 is a graph showing the gas release status of Comparative Example 2
- FIG. 6 is a graph showing the gas release status of Comparative Example 1
- FIG. 7 is an Example and Comparative Example 2.
- Fig. 8 is a graph showing the state of dust generation and hardness
- Fig. 8 is a graph showing another heat pattern of the lubricating film baking process
- Fig. 9 is a graph showing the results of examining the properties of the lubricating film by infrared spectroscopy.
- FIG. 1 is a longitudinal sectional view of one embodiment of the rolling bearing of the present invention
- FIG. 2 is a schematic diagram of an experimental apparatus used for measuring the amount of generated dust of the bearing
- FIG. 10 is a diagram representing Table 1
- FIG. 11 is a diagram representing Table 2
- FIG. 12 is a rolling shaft of the present invention.
- FIG. 3 is a longitudinal sectional view of a rolling bearing according to another embodiment of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION
- FIG. 1 shows an embodiment of the rolling bearing of the present invention.
- a deep-clear type ball bearing is taken as an example.
- 1 is an inner ring
- 2 is an outer ring
- 3 is a ball '
- 4 is a cage of a waveform.
- a lubricating film 5 in which a fluorine-based synthetic resin is dispersed and mixed in a resin binder having an imido bond or an amide imido bond is coated on the inner surface of each of the cages 4.
- the lubricating belly 5 is subjected to a degassing treatment of hydrocarbon gas.
- the inner and outer rings 1 and 2 and the ball 3 are made of JIS standard SUS440C, and the retainer 4 is made of JIS standard SUS304.
- the lubricating membrane 5 is composed of PTF E, which is the main component of lubrication, and polyimide, which is a thermosetting organic resin binder.
- the component ratio of the fluid is, for example, 5 PTFE powder, 25% polyamide powder, and 70% N-methyl-2-pyrrolidone.
- the sprayed film is heated and fired at a temperature as high as 315 to 360C for a predetermined time (about 30 minutes to 120 minutes). Then, the retainer 4 is fixed to the inner surface of the pocket. If the temperature in this firing step is as high as described above, the polyamide gas of the resin binder among the resins constituting the coating film will convert the hydrocarbon-based gas by a condensation reaction. It is released and there is almost no hydrocarbon gas.
- the thickness of the lubricating film 5 is set to, for example, 5 to 20 ⁇ m. You may do it.
- the lubricating film 5 When the sintering temperature of the lubricating film 5 is set to the high temperature as described above, the lubricating film 5 is oxidized and carbonized and hardened with the condensation reaction. (180 ° C ⁇ 10 ° C) and the appearance color is different. This point has been confirmed by the pencil hardness measurement shown in FIG. 7 and the infrared spectroscopic measurement shown in FIG. First, as shown in the graph of FIG. 7, 180 ⁇ 10. For 90 minutes at C and at 350 ° C ⁇ 10 minutes for 30 minutes, 350.
- Figure 2 shows the equipment used for the experiment.
- 50 is a rolling bearing
- 51 is a rotating shaft
- 52 is a casing
- 53 is a magnetic fluid seal
- 54 is a particle counting device (particle counter)
- 55 is a particle counter.
- 56 is a bearing housing.
- Atmosphere Inside a clean bench of class 10 in the atmosphere, in the room Measurement conditions: Dust amount of 0.3 m or more in particle size
- the inner and outer rings and rolling elements are JIS S4S4400C, and the retainers are JIS S3S4.
- the lubricating film 5 was not formed on the inner surface of the pocket of the cage, and in Comparative Example 2, the greased lubricating film 5 composed of the above-described component was reduced on the inner surface of the pocket of the cage.
- the lubricating film 5 is fired and fixed at a high temperature ( ⁇ 10. C at 350). .
- Figures 4 to 6 show the experimental results of the relationship between the ambient temperature and the released gas components
- Figure 7 shows the relationship between the firing temperature and the number of generated particles, and the relationship between the firing temperature and the hardness of the lubricating film.
- the experimental results are shown respectively.
- 4 is a graph relating to the example
- FIG. 5 is a graph relating to Comparative Example 2 ′
- FIG. 6 is a graph corresponding to Comparative Example 1
- FIG. 7 is a graph corresponding to Example and Comparative Example 2.
- A. on the vertical axis of the graph is an abbreviation of arbitrary unit, and indicates intensity.
- the firing temperature was set at 300 eC ⁇ 10 ° C. and 350 ° C. If we assume C ⁇ 10, then 180. C ⁇ 10. Although little comparable to the extent that dust amount is slightly more when used as compared with the case of the ratio Comparative Examples 2 to as C, when the firing temperature and 3 8 0 e C ⁇ 1 0 tt C, during use The amount of dust generated is 300. C ⁇ 10. C, 350. It is extremely high compared to the case of C ⁇ 10 ° C. This means that if the firing temperature is too high, the lubricating film 5 will be oxidized and carbonized deep inside, and the entire film will become brittle, so that peeling and chipping will be constant in the depth direction.
- the axial load (20N) was applied to the rolling bearings 50, 50 (nominal number 608>).
- the rolling bearing 50 was continuously rotated until it reached the end of its service life, and the amount of dust generated was measured at intervals of 6 minutes using the particle counting device 54.
- the presence / absence of a dust generation abnormality was checked by determining whether the amount of dust was 100 000 particles / 0.1 c ⁇ , and this dust generation abnormality was confirmed 10 times in succession.
- the time required from the start to the point in time when the above was confirmed as the dust generation life is measured, and the results are shown in Table 1 shown in Fig. 10.
- the lubricating film 5 is used in any of the following cases. Also covers the pocket surface of the cage of the rolling bearing 50. (1) in Table 1 is for Comparative Example 2 described above, and (4) is for Not correspond to .
- the “results” were (1), (5), (4), (2), (6), and (3) in descending order of dust generation life.
- (4) and (5) can be said to be practically preferable because of the assumption that they will not be released, because both the rolling elements, inner and outer rings, and the cage pocket surface showed wear after the experiment.
- the lubricating film 5 almost disappears, and the lubrication state becomes non-lubricated, so that the sliding surface and the rolling surface of the bearing components are significantly worn, and this causes
- the surface side of the lubricating film 5 is hardened and not too brittle at the baking temperatures (2) and (3), so that the lubrication film 5 does not become too brittle.
- the baking temperature of the lubricating film 5 is set in the range of 315 eC to 360, it is possible to completely eliminate the emission of hydrocarbon gases in a high temperature environment. In particular, lubricity can be extended as much as possible.
- (7) and (8) have a dusting life of (9) or (11) or the aforementioned ( 4) and (5) are much longer, so the inner and outer rings and rolling elements of rolling bearings are suitable! : If silicon nitride (S i 3 ,) -based ceramics is used, it can be said that the dust generation life is significantly improved. In (7) and (8), the rolling elements, the outer ring, and the cage pocket surface were worn after the experiment.
- the present invention is not limited to only the above embodiment.
- the lubricant film is formed only on the surface of the cage that is in sliding contact with the ball, and then the hydrocarbon-based degassing process is performed.
- the degassing process may be performed on the entire surface of the cage.
- the entire retainer may be formed of a resin having the above configuration.
- the bearing type refers to a deep groove ball bearing, but the present invention can be applied to other types of rolling bearings.
- a sealing plate may be attached to the end of the bearing.
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Abstract
A roller bearing consisting of races (1, 2) consisting of a metal or ceramic material, rolling elements (3) provided rollably inside the races (1, 2) and consisting of a metal or ceramic material, and a lubricating film (5) provided so as to cover the rolling portions of the races (1, 2) and/or rolling elements (3) and obtained by disperse-mixing a synthetic fluoro-resin in a resin binder having imide bond or amide-imide bond, and removing hydrocarbon gas from the resultant mixture. Since a temperature for firing this lubricating film (5) is set to such a level that permits a hydrocarbon gas to be discharged completely from the lubricating film (5) during a firing treatment for the lubricating film (5), the discharge of a hydrocarbon gas from the lubricating film (5) in a high-temperature environment is prevented.
Description
明細書 発明の名称 Description Title of Invention
転がり軸受 技術分野 Rolling bearing technical field
本発明は、 転がり軸受に係 り 、 特に通常のグリースやオイ ル の使用ができない真空環境下、 高溫環境下あるいは腐食環境下 と いつた特殊環境で.用いるのに有利な転がり軸受に閲する。 背景技術 The present invention relates to a rolling bearing, and particularly to a rolling bearing which is advantageous for use in a special environment such as a vacuum environment, a high-temperature environment, or a corrosive environment in which ordinary grease or oil cannot be used. Background art
前述の特殊環境と して 、 例えば半導体製造装置内部に配設さ れる搬送系などが挙げられるが、 このよ う な特殊環境では、 がり軸受の潤滑剤と してグリースを用いている と 、 グリースの 油分が蒸発する こ と によ り 、 潤滑機能の劣化や使用環境の汚染 と いった不具合が発生する 。 The above-mentioned special environment includes, for example, a transfer system provided inside a semiconductor manufacturing apparatus. In such a special environment, if grease is used as a lubricant for a ball bearing, the Evaporation of the oil causes problems such as deterioration of the lubrication function and contamination of the use environment.
このよ うな場合、 従来では、 主と して、 軌道輪の軌道面や転 動体の表面に、 金、 銀、 鉛、 銅などの軟質金属、 カーボンや二 硫化モ リ ブデンなどの固体潤滑剤を膜状に被覆する こ とが行わ れている 。 Conventionally, in such cases, soft metals such as gold, silver, lead, and copper, and solid lubricants such as carbon and molybdenum disulfide are mainly applied to the raceway surface of the bearing ring and the surface of the rolling elements. Coating is performed in the form of a film.
と ころで、 前述の固体潤滑剤からなる潤滑膜では、 この潤滑 膜が転動体との接触によ り僅かずつ剥がれるなど、 発塵状況が グリース使用時に比べる と低レベルになる ものの、 やは り発生 する 。 In the lubricating film made of the solid lubricant described above, the dusting condition is lower than when grease is used, such as when the lubricating film peels off little by little when it comes into contact with the rolling elements. appear .
そこで、 本件出願人は、 ふつ素系樹脂を含む潤滑膜を軌道輪 や保持器に形成して、 従来よ り も発塵を桁,違いに減らせる よ う にしたものを考えている (特開平 4 一 4 6 2 1 9号公報参照)
。 この潤滑膜は、 有機溶剤中にポリテ ト ラ フルォロエチレン ( P T F E ) などのふつ素系樹脂と熟硬化性を有するポリアミ ド ィ ミ ドなどの樹脂バイ ンダーと を分散させたものを、 形成対象 にスプレーコーテ ィ ングした後、 焼成する こ とによ り定着させ るが、 現時点では、 焼成温度を、 単純に、 膜の.移着性や定着性 を考慮して 1 8 0 °C ± 1 0でにと比較的低めに設定している 。 と ころが、 このよ うなふつ素系樹脂からなる潤滑膜は、 焼成溫 度よ り も高温の環境下において炭化水素系のガスを多量に放出 する こ と を実験によ り知見した (図 5のグラフ参照) 。 この炭 化水素系ガスは、 特に、 半導体製造過程のよ う に高精度な加工 が要求される場合では妨害要素となる可能性を秘めている。 但 し、 図 5のグラフに示される よ う に、 前述の炭化水素系のガス の発生と と もに、 H 2、 H 2 0 、 C O ' N 2および、 C 0 2も発生 するが、 これらは例えば半導体製造過程のよ う に高精度な加工 が要求される場合でも、 それ程、 妨害要素とならないので問題 ない。 Therefore, the present applicant is considering a method in which a lubricating film containing a fluorine-based resin is formed on a raceway or a retainer so that dust generation can be reduced by an order of magnitude compared to the conventional case. (See Japanese Patent Application Laid-Open No. 4-46219) . The lubricating film is formed by dispersing a fluororesin such as polytetrafluoroethylene (PTFE) in an organic solvent and a resin binder such as polyamide which has a rapid curing property, and spraying it onto the object to be formed. After coating, it is fixed by firing, but at present, the firing temperature is simply set at 180 ° C ± 10 in consideration of the transferability and fixability of the film. It is set relatively low. However, experiments have shown that such a lubricating film made of a fluororesin releases a large amount of hydrocarbon gas in an environment at a temperature higher than the firing temperature (Fig. 5). See graph.) This hydrocarbon-based gas has the potential to become an obstructive factor particularly when high-precision processing is required, such as in the semiconductor manufacturing process. However, and in earthenware pots by shown in the graph of FIG. 5, the above-mentioned hydrocarbon gas generator and a monitor, H 2, H 2 0, CO 'N 2 and, C 0 2 is also generated Suruga, these For example, even if high-precision processing is required as in the semiconductor manufacturing process, there is no problem because it does not become a hindrance element.
本発明は、 このよ う な事情に鑑み、 剥離や欠落による発塵を 抑制しながら も 、 高温環境下で炭化水素系ガスの放出がない構 造とするこ と を課題と している 。 発明の開示 In view of such circumstances, an object of the present invention is to provide a structure that does not emit hydrocarbon-based gas in a high-temperature environment while suppressing dust generation due to peeling or chipping. Disclosure of the invention
[構成 ] [Constitution ]
本発明の転がり軸受は、 金属またはセラ ミ ッ クス材料からな る軌道輪と 、 前記軌道輪に転動配置される金属またはセラ ミ ツ クス材科からなる転動体と 、 前記軌動輪および/または前記転 動体の転動部位を被覆するよ う に設けられる 、 イ ミ ド結合また はアミ ドィ ミ ド結合を有する樹脂バイ ンダー中にふつ素系合成
樹脂を分散混合しかつ炭化水素ガスの脱ガス処理を施した潤滑 膜とからなる u The rolling bearing of the present invention includes: a raceway made of a metal or a ceramic material; a rolling element rolled and arranged on the raceway made of a metal or a ceramic material family; A fluorine-based synthetic resin is provided in a resin binder having an imido bond or an amide imide bond provided so as to cover the rolling portion of the rolling element. U consisting of a lubricating film which has been subjected to the resin dispersion mixing and degassing of the hydrocarbon gas
さ らに、 本発明の転がり軸受けは、 金属またはセ ラ ミ ッ ク ス 材料からなる軌道輪と 、 前記軌道輪に転動配置される金属また はセラ ミ ッ ク ス材料からなる転動体と 、 前記転.動体を保持する 金属または合成樹脂材料からなる保持器と 、 前記軌動輪および /または前記転動体および または保持器の転動 · 摺接部位を 被覆する よ う に設けられる 、 イ ミ ド結合またはアミ ドイ ミ ド結 合を有する樹脂バイ ンダー中にふつ素系合成樹脂を分散混合し かつ炭化水素ガスの脱ガス処理を施した潤滑膜とからなる 。 Further, the rolling bearing of the present invention comprises: a raceway made of metal or ceramic material; a rolling body made of metal or ceramic material rolled on the raceway; A cage made of a metal or a synthetic resin material for holding the rolling element, and an imid provided to cover the rolling wheel and / or the rolling and sliding contact portions of the rolling element and / or the cage. It is composed of a lubricating film obtained by dispersing and mixing a fluorine-based synthetic resin in a resin binder having a bond or an amide-imide bond and performing a degassing treatment of a hydrocarbon gas.
さ らに、 本発明の転がり軸受けは、 金属またはセラ ミ ッ クス 材料からなる軌道輪と 、 前記軌道輪に転動配置される金属また はセラ ミ ッ ク ス材料からなる転動休と .、 前記転動体を保持する 金属または合成樹脂材料からなる保持器と 、 前記保持器の前記 転動体との摺接面を被覆する よ う に設けられる 、 イ ミ ド結合ま たはア ミ ドィ ミ ド結合を有する樹脂バイ ンダー中にふつ素系合 成樹脂を分散混合しかつ炭化水素ガスの脱ガス処理を施した潤 滑膜とからなる 。 Further, the rolling bearing of the present invention comprises a raceway made of metal or ceramic material, and a rolling rest made of metal or ceramic material rolled on the raceway. A cage made of a metal or a synthetic resin material for holding the rolling element, and an imid coupling or amidim provided to cover a sliding contact surface of the cage with the rolling element. And a lubricating membrane obtained by dispersing and mixing a fluorine-based synthetic resin in a resin binder having a metal bond and performing a degassing treatment of a hydrocarbon gas.
さ らに、 本発明の転がり軸受けは、 上記それぞれの発明にお いて、 前記軌道輪および,/または転動体が、 窒化けい素系のセ ラ ミ ッ クスで形成される 。 Further, in the rolling bearing of the present invention, in each of the above-mentioned inventions, the race and / or the rolling element are formed of silicon nitride-based ceramics.
軌道輪および転動休を構成する金属と しては、 特に耐食性が 要求される環境においては、 例えば J I S規格 S U S 4 4 0 C などのマルテンサイ ト系ステンレス鋼、 例えば J I S規格 S U As the metal constituting the bearing ring and rolling rest, especially in an environment where corrosion resistance is required, for example, martensitic stainless steel such as JIS standard SUS440C, for example, JIS standard SU
S 6 3 0などの析出硬化型ステ yレス鋼に適当な硬化熟処理を 施して使用でき る 。 また、 軽荷重用途では、 例えば J I S規格 S U S 3 0 4 などのオーステナィ ト系ステンレス鋼の使用も可
能である 。 また、 ニッケル系合金と して 、 N i — C r— M o系 の合金、 例えば三菱マテリ アル社製、 商品名ハステロイ C一 2 2、 ハステロイ C一 2 7 6 、 ハステロィ C一 4などの使用も可 能である 。 また、 特に耐熱性が要求される環境では、 J I S規 格 S K H 4鋼や A 1 S I規格 M— 5 0材などが好適に使用され る 。 一般的に用いられる J I S規格 S U J— 2などの軸受鋼ゃPrecipitation hardening type stainless steel such as S630 can be used after appropriate hardening and aging treatment. For light load applications, it is also possible to use austenitic stainless steel such as JIS SUS304. Noh. Also, Ni—Cr—Mo alloys such as Hastelloy C122, Hastelloy C1-276, and Hastelloy C-14, manufactured by Mitsubishi Materials Corporation, are used as nickel-based alloys. It is also possible. In an environment where heat resistance is particularly required, JIS standard SKH4 steel, A1SI standard M-50 material, or the like is preferably used. Bearing steel such as JIS standard SUJ-2 commonly used.
、 S A E規格 5 1 2 0材などの浸炭用鋼なども、 焼入れ、 焼戻 しの温度、 時間などの熱処理条件を適宜調整すれば使用可能で ある 。 らに、 H a y n e s I n t e r n a t i o n a l , I n c . 製の N i _ C r系合金 H A Y N E S A L L O Y , 例 えば H A 2 1 4 , H A 2 3 0などの使用も可能である 。 Also, carburizing steel such as SAE standard 512 material can be used if heat treatment conditions such as quenching and tempering temperatures and times are appropriately adjusted. In addition, it is also possible to use a Ni_Cr-based alloy HAYNESSALLOY, for example, HA214, HA230, etc., manufactured by HaynesIntEternatelon, Inc.
セラ ミ ッ クス材料と しては、 焼結助剤と して、 イ ッ ト リア ( Y 203 ) およびアルミナ ( A 1 .0 α ) 、 その他、 適宜 : 窒化ァ ルミ ( A 1 Ν ) 、 酸化チタ ン ( T i 〇 2 ) を用いた窒化けい素Is a Sera mission-box material, as a sintering aid, Lee Tsu preparative rear (Y 2 03) and alumina (A 1 .0 α), other appropriate: nitride § Lumi (A 1 New), silicon nitride using titanium oxide emissions (T i 〇 2)
(. S i 3 N 4 ) を主体とする ものの他、 アルミナ ( A 1 20 a ) や 炭化けい素 ( S i C 〉 、 ジルコニァ ( Z r 02 ) 、 窒化アルミ(. S i 3 N 4) others mainly composed of alumina (A 1 2 0 a) and silicon carbide (S i C>, Jirukonia (Z r 0 2), aluminum nitride
( A 1 ) などを用いる こ とができ る。 (A1) can be used.
保持器を構成する金属と しては、 例えば J I S規格 S U S 3 04や黄銅、 チタ ン材などが好適に用いられる。 合成樹脂材料 と しては、 ポリテ トラフルォロエチレン (以下 P T F Eと略称 する ) 、 エチレンテ ト ラフルォロエチレ ン ( E T F E ) などの ふつ素系樹脂やポリエーテルエーテルケ ト ン ( P E E K ) 、 ポ リ フエ二レンサルフ ァ イ ド ( P P S 〉 、 ポリエーテルサルフ ォ ン ( P E S ) 、 ナイ ロン 4 6などのエンジニアリ ングプラスチ ッ クスなどの使用も可能である .。 これらの樹脂にはガラス繊維 などの強化繊維が添加されている 。 保持器の形式と しては、 波 型、 冠型、 もみ抜き型などが好適に用いられる 。
ィ ミ ド結合またはア ミ ドィ ミ ド結合を有する樹脂バイ ンダー と しては、 ポリ イ ミ ド 、 ポリ ア ミ ドイ ミ ドなどが挙げられる 。 ふつ素系合成樹脂と しては、 上記保持器に使用されるふつ素系 樹脂と 同 じ P T F Eや E T F Eなどが挙げられる 。 As the metal forming the retainer, for example, JIS standard SUS304, brass, titanium material, or the like is suitably used. Examples of the synthetic resin material include fluororesins such as polytetrafluoroethylene (hereinafter abbreviated as PTFE), ethylenetetrafluoroethylene (ETFE), polyetheretherketone (PEEK), and polyphenylenesulfate. It is also possible to use engineering plastics such as sulfide (PPS), polyethersulfone (PES), and Nylon 46. Reinforcing fibers such as glass fiber are added to these resins. As the type of the retainer, a corrugated type, a crown type, a hollow type, or the like is suitably used. Examples of the resin binder having an imido bond or an amidomid bond include polyimide, polyimide, and the like. Examples of the fluorine-based synthetic resin include the same PTFE and ETFE as the fluorine-based resin used for the cage.
本発明の潤滑胰は、 上記ィ ミ ド結合またはアミ ドィ ミ ド結合 を有する樹脂バイ ンダーを 1 0 〜 5 0重量%と して、 この中に ふつ素系合成樹脂 1 〜 2 0重量%を 、 例えば N—メチルー 2 - ピロ リ ドンなどの溶媒を用いて分散混合させた溶剤を被覆面に ボンデッ ドフ ィ ルム法などで塗布して形成される。 炭化水素力' スの脱ガス処理は、 3 1 5 。C〜 3 6 0 。Cの温度で 3 0分〜 1 2 0分の時間で焼成される こ とによ り行われる 。 The lubricating oil of the present invention is characterized in that the resin binder having the above imido bond or amide imide bond is 10 to 50% by weight, and the fluorine-based synthetic resin is 1 to 20% by weight therein. Is formed by applying a solvent obtained by dispersing and mixing a solvent such as N-methyl-2-pyrrolidone to a coated surface by a bond film method or the like. Degassing of hydrocarbon power is 315. C-360. This is performed by firing at a temperature of C for a period of 30 minutes to 120 minutes.
[作用 ] [Action]
上記の構成によ り 、 潤滑膜は炭化水素系ガスの脱ガス処理が 施されているから、 例えば本発明の転がり軸受の使用対象環境 の温度がかなり高温であって も 、 炭化水素系ガスが放出されず に済み、 特に炭化水素系ガスが妨害要素とな り う る使用対象環 境において有利となる 。 According to the above configuration, the lubricating film is subjected to the degassing treatment of the hydrocarbon-based gas. It is not required to be released, which is particularly advantageous in the use environment in which hydrocarbon-based gas may be an obstacle.
また、 上記脱ガス処理時の高溫域での焼成によ り 、 イ ミ ド結 合またはアミ ド結合を有する樹脂バイ ンダーが縮合反応を起こ し、 酸化、 炭化による潤滑膜表面での硬化および脆化を生じて 移着が促進される と と もに、 酸化成分一 C 0 0 H基の極性によ る金属表面への付着力向上に伴って潤滑性能の向上も奏し う る In addition, the baking in a high temperature range during the degassing process causes a resin binder having an imido bond or an amide bond to undergo a condensation reaction, thereby causing hardening and brittleness of the lubricating film surface due to oxidation and carbonization. And promotes transfer, as well as improving the lubricating performance with the increase in the adhesion of the oxidized component to the metal surface due to the polarity of the C 0 H group.
[効果 ] [Effect]
以上説明したよ う に、 本発明では、 潤滑膜を焼成定着させる と きの焼成温度を 、 被膜層から炭化水素系ガスが発生する温度 以上に設定する こ と によ り 、 保持器のポケッ ト内面に被覆した
潤滑膜が実質的に炭化水素系ガスを含まないよ う に している 。 しだがつて 、 本発明の転がり軸受を高温環境に放置して も 、 潤滑膜から炭化水素系ガスが全く放出されなく なる 。 そのため 、 例えば半導体製造過程のよ う に高精度な加工が要求される と ころに本発明の転がり軸受を用いる と 、 歩留ま り向上に貢献で き る。 As described above, in the present invention, by setting the firing temperature at the time of firing and fixing the lubricating film to a temperature equal to or higher than the temperature at which the hydrocarbon-based gas is generated from the coating layer, the pocket of the cage can be improved. Coated on the inner surface The lubricating film is substantially free of hydrocarbon-based gas. However, even if the rolling bearing of the present invention is left in a high-temperature environment, no hydrocarbon-based gas is released from the lubricating film. Therefore, when high-precision processing is required, for example, in a semiconductor manufacturing process, the use of the rolling bearing of the present invention can contribute to an improvement in yield.
また、 上記脱ガス処理時の高温域での焼成によ り 、 イ ミ ド結 合またはアミ ド結合を有する樹脂バイ ンダーが縮合反応を起こ し、 酸化、 炭化によ る潤滑膜表面での硬化および脆化を生じて 移着が促進される と と もに、 酸化成分一 C 0 0 H基の極性によ る金属表面への付着力向上に伴って潤滑性能の向上も奏し う る そ して 、 転がり軸受の内 · 外輪、 転動体のう ち少なく と も転 動体を窒化けい素系セラ ミ ッ クスと して、 少なく と も保持器の ポケッ ト面に前述の処理を施した潤滑膜を被覆すれば、 寿命に ついて も著し く 向上する よ う になる 。 図面の簡単な説明 In addition, baking in a high temperature range during the degassing process causes a resin binder having an imido bond or an amide bond to undergo a condensation reaction, and is cured on the surface of the lubricating film by oxidation and carbonization. In addition, embrittlement occurs and transfer is promoted, and at the same time, the lubricating performance is improved with the increase in adhesion to the metal surface due to the polarity of the oxidized component (COH) group. At least one of the inner and outer races and rolling elements of the rolling bearing is made of silicon nitride ceramics, and at least the lubricating film on the pocket surface of the cage is treated as described above. If coated, the life will be significantly improved. BRIEF DESCRIPTION OF THE FIGURES
図 1 は本発明の転がり軸受の一実施例の縦断面図、 図 2は同 軸受の発塵量測定に用いる実験装置の概略図、 図 3は発塵量の 測定結果を示すグラフ 、 図 4は本実施例のガス放出状況を示す グラフ 、 図 5は比較例 2のガス放出状況を示すグラフ、 図 6は 比較例 1 のガス放出状況を示すグラフ 、 図 7は実施例および比 較例 2の発塵状況と 、 硬度を示すグラフ、 図 8は潤滑膜の焼成 工程の他のヒー トパターンを示すグラフ、 図 9は潤滑膜の性状 を赤外分光分析によ り調べた結果を示すグラフ、 図 1 0は表 1 を表す図、 図 1 1 は表 2 を表す図、 図 1 2は本発明の転がり軸
受の他実施例の縦断面図、 図 ] 3は本発明の転がり軸受のさ ら に他実施例の縦断面図である 。 発明を実施するための最良の形態 FIG. 1 is a longitudinal sectional view of one embodiment of the rolling bearing of the present invention, FIG. 2 is a schematic diagram of an experimental apparatus used for measuring the amount of generated dust of the bearing, FIG. Is a graph showing the gas release status of this example, FIG. 5 is a graph showing the gas release status of Comparative Example 2, FIG. 6 is a graph showing the gas release status of Comparative Example 1, and FIG. 7 is an Example and Comparative Example 2. Fig. 8 is a graph showing the state of dust generation and hardness, Fig. 8 is a graph showing another heat pattern of the lubricating film baking process, and Fig. 9 is a graph showing the results of examining the properties of the lubricating film by infrared spectroscopy. , FIG. 10 is a diagram representing Table 1, FIG. 11 is a diagram representing Table 2, and FIG. 12 is a rolling shaft of the present invention. FIG. 3 is a longitudinal sectional view of a rolling bearing according to another embodiment of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION
以下、 本発明の詳細を図 1 ない し図 1 1 に示す実施例に基づ いて説明する 。 図 1 は本発明の転がり軸受の一実施例を示して いる 。 こ こでは深清型玉軸受を例に挙げてお り 、 図中、 1 は内 輪、 2は外輪、 3はボール'、 4 は波形の保持器である。 保持器 4の各ボケッ ト内面には、 ィ ミ ド結合またはアミ ドィ ミ ド結合 を有する樹脂バイ ンダー中にふつ素系合成樹脂を分散混合した 潤滑膜 5がコーテ ィ ングされている 。 この潤滑腹 5は、 炭化水 素ガスの脱ガス処理が施されている 。 Hereinafter, details of the present invention will be described based on the embodiment shown in FIG. 1 or FIG. FIG. 1 shows an embodiment of the rolling bearing of the present invention. Here, a deep-clear type ball bearing is taken as an example. In the figure, 1 is an inner ring, 2 is an outer ring, 3 is a ball ', and 4 is a cage of a waveform. A lubricating film 5 in which a fluorine-based synthetic resin is dispersed and mixed in a resin binder having an imido bond or an amide imido bond is coated on the inner surface of each of the cages 4. The lubricating belly 5 is subjected to a degassing treatment of hydrocarbon gas.
具体的に、 内 · 外輪 1 , 2およびボール 3は J I S規格 S U S 4 4 0 C 、 保持器 4は J I S規格 S U S 3 0 4からなる 。 澗 滑膜 5は、 潤滑主体となる P T F E と 、 熱硬化性を有する有機 系樹脂バイ ンダ一と してのボリ ア ミ ドィ ミ ド とからなる 。 More specifically, the inner and outer rings 1 and 2 and the ball 3 are made of JIS standard SUS440C, and the retainer 4 is made of JIS standard SUS304. The lubricating membrane 5 is composed of PTF E, which is the main component of lubrication, and polyimide, which is a thermosetting organic resin binder.
次に、 潤滑膜 5の形成方法の一例を説明する 。 Next, an example of a method for forming the lubricating film 5 will be described.
( a ) 対象となる保持器 4 をそれぞれ脱脂する と と もに、 保 持器 4のポケッ ト内面を除く部分にマスク (図示省略〉 を被覆 してから、 露出部分にサン ドブラス ト を施す。 この処理によ り 、 潤滑膜 5の付着力が高められる と と もに、 耐圧性が高められ る 。 (a) Degreasing the target cage 4 and covering a portion of the cage 4 except for the inner surface of the pocket with a mask (not shown), and then sandblasting the exposed portion. By this treatment, the adhesion of the lubricating film 5 is increased, and the pressure resistance is increased.
( b ) 保持器 4 においてマスクで被覆されていないポケ ッ ト 内面に、 P T F E粉末と ポリ ア ミ ドイ ミ ド粉末と を N —メチル 一 2 —ピロ リ ドンで溶かした流動体を.複数回繰り返してスプレ 一する 。 これはいわゆるボンデッ ドフ ィ ルム法と呼ばれる塗布 方法であ り 、 前記各粉末がスプレー面にほぼ均等に拡散した状
態になる 。 なお、 前述の流動 の成分比は、 例えば P T F E粉 末 5 、 ポリ ア ミ ドィ ミ ド粉末 2 5 % 、 N —メチル— 2 — ピロ リ ドン 7 0 %である。 (b) A fluid obtained by dissolving PTFE powder and polyamide imide powder in N-methyl-12-pyrrolidone on the inner surface of the pocket not covered with the mask in the cage 4. Spray. This is a coating method called a so-called bond film method, in which each of the powders is almost uniformly diffused on the spray surface. Be in the state. The component ratio of the fluid is, for example, 5 PTFE powder, 25% polyamide powder, and 70% N-methyl-2-pyrrolidone.
( c ) 保持器 4からマス ク を除去して後; 前記スプレー した 被膜を 3 1 5 〜 3 6 0 Cもの高 で所定時間 (約 3 0分〜 1 2 0分) 加熱焼成する こ と によ り保持器 4のポケ ッ ト内面に対 して定着させる 。 この焼成工程での温度を先に述べたよ う な高 温で行う と 、 前記被膜を構成する樹脂のう ち樹脂バイ ンダ一の ポリ アミ ドィ ミ ドが縮合反応によ り炭化水素系ガスを放出 し、 炭化水素系ガスがほとんどない状態になる 。 (c) After removing the mask from the retainer 4, the sprayed film is heated and fired at a temperature as high as 315 to 360C for a predetermined time (about 30 minutes to 120 minutes). Then, the retainer 4 is fixed to the inner surface of the pocket. If the temperature in this firing step is as high as described above, the polyamide gas of the resin binder among the resins constituting the coating film will convert the hydrocarbon-based gas by a condensation reaction. It is released and there is almost no hydrocarbon gas.
この後、 ( b ) 、 ( c 〉 を数回繰り返し、 最終的に潤滑膜 5 の膜厚を例えば 5 〜 2 0 〃 mとする 。 なお、 焼成工程のヒー ト パターンを図 8に示すよ う に して も よい。 Thereafter, (b) and (c) are repeated several times, and finally the thickness of the lubricating film 5 is set to, for example, 5 to 20 μm. You may do it.
このよ う に潤滑膜 5の焼成温度を前述したよ うな高温に設定 した場合、 前記縮合反応と と もに潤滑膜 5が酸化、 炭化して硬 化する こ とにな り 、 焼成温度を低温 ( 1 8 0 °C ± 1 0 °C ) に設 定した場合と外観上の色が相違する 。 この点は図 7 に示す鉛筆 硬度測定および図 9 に示す赤外分光分析測定によ り確認してい る 。 まず、 図 7のグラ フに示すよ う に、 1 8 0 ± 1 0 。Cで 9 0分間の場合と 、 3 0 0 °C ± 1 0 で 3 0分間の場合、 3 5 0 。C ± 1 0でで 3 0分間の場合、 3 8 0 eC ± 1 0でで 3 0分間の 場合の四つの例を挙げているが、 結果と しては潤滑膜 5の焼成 温度を高くする程、 硬度が増している。 一方、 図 9のグラフに 示すよ う に、 1 8 0で ± 1 ϋ で 9 0分間の場合、 2 5 0 。C ± 1 0 °Cで 3 0分間の場合、 3 0 0 ±. 1 0 °Cで 3 0分間の場合 、 3 5 0 C土 1 0 で 3 0分間の場合の四つの例を挙げている が、 結果と しては潤滑膜 5の焼成温度を高くする程、 波数 9 3
0 c m - 1 ( 一 C H 2 - C O O 15 ) の官能基が増加している 。 次に、 潤滑膜 5からの発塵、 放出ガスの状況および転がり軸 受での発麈寿命について実験によ り調べているので、 説明する When the sintering temperature of the lubricating film 5 is set to the high temperature as described above, the lubricating film 5 is oxidized and carbonized and hardened with the condensation reaction. (180 ° C ± 10 ° C) and the appearance color is different. This point has been confirmed by the pencil hardness measurement shown in FIG. 7 and the infrared spectroscopic measurement shown in FIG. First, as shown in the graph of FIG. 7, 180 ± 10. For 90 minutes at C and at 350 ° C ± 10 minutes for 30 minutes, 350. For C ± 1 0 in 3 0 minutes, 3 8 0 e C ± cited four examples of case 3 0 minutes at 1 0, but as a result raising the firing temperature of the lubricating film 5 The higher the hardness, the higher the hardness. On the other hand, as shown in the graph of FIG. 9, in the case of 180 minutes at ± 1ϋ for 90 minutes, 250. C + 10 ° C for 30 minutes, 300 ± 30 ° C for 30 minutes, 350 C for 10 minutes for 30 minutes However, as a result, the higher the firing temperature of the lubricating film 5, the higher the wave number 9 3 0 cm - 1 (one CH 2 - COO 15) a functional group has increased. Next, the dust generation from the lubricating film 5, the state of the released gas, and the life of dust generation in the rolling bearings are examined by experiments, and will be described.
( a ) 発塵 (a) Dust generation
図 2は実験に用いた装置を示している 。 図において 、 5 0は 転がり軸受、 5 1 は回転軸、 5 2はケ一シング、 5 3は磁性流 体シール、 5 4は発塵個数計測装置 (パ一テ ィ クルカウンター ) 、 5 5は計測結果記録機 ( レコーダ 〉 、 5 6は軸受ハウジン グである 。 Figure 2 shows the equipment used for the experiment. In the figure, 50 is a rolling bearing, 51 is a rotating shaft, 52 is a casing, 53 is a magnetic fluid seal, 54 is a particle counting device (particle counter), and 55 is a particle counter. The measurement result recorder (Recorder), 56 is a bearing housing.
使用軸受 : S E M L 6 O 1 2 ( 0 6 x ^ 1 2 x 3 〉 回転速度 : 2 0 0 r p m Bearing used: SEM L6O12 (06 x ^ 12 x 3) Rotation speed: 200 rpm
荷重 : ラ ジアル荷重 ( 2 N ) Load: Radial load (2N)
雰囲気 : 大気中ク ラス 1 0のク リーンベンチ内、 室溫 計測条件 : 粒子径 0 . 3 m以上の発麈量 Atmosphere: Inside a clean bench of class 10 in the atmosphere, in the room Measurement conditions: Dust amount of 0.3 m or more in particle size
実験時間 : 連続 2 0時間 Experiment time: Continuous 20 hours
使用軸受において 、 内 · 外輪および転動体は J I S規格 S U S 4 4 0 C 、 保持器は J I S規格 S U S 3 0 4 と している 。 比 較例 1 は保持器のポケ ッ 卜内面に潤滑膜 5 を形成していない無 処理のものと し、 比較例 2は保持器のポケッ ト内面に前述の成 分からなる澗滑膜 5 を低溫 ( 1 8 0で土 1 0 'C ) で焼成定着さ せたものと し、 実施例は潤滑膜 5 を高温 ( 3 5 0で ± 1 0。C ) で焼成定着させた ものと している 。 In the bearings used, the inner and outer rings and rolling elements are JIS S4S4400C, and the retainers are JIS S3S4. In Comparative Example 1, the lubricating film 5 was not formed on the inner surface of the pocket of the cage, and in Comparative Example 2, the greased lubricating film 5 composed of the above-described component was reduced on the inner surface of the pocket of the cage. In this embodiment, the lubricating film 5 is fired and fixed at a high temperature (± 10. C at 350). .
この実験での結果は、 図 3 に示すよ う になる 。 つま り 、 実施 例の場合、 発塵量が、 比較例 2 よ り僅かに多くなる傾向を示し たものの、 比較例 1 に比べる と桁違いに少なくなつている 。 こ れは潤滑膜 5 によ って発塵を抑制でき る こ と を意味している 。
( b ) 放出ガス The result of this experiment is shown in Figure 3. That is, in the case of the working example, the amount of generated particles showed a tendency to be slightly larger than that of the comparative example 2, but was significantly smaller than that of the comparative example 1. This means that dust generation can be suppressed by the lubricating film 5. (b) Released gas
図 4〜図 6 には、 環境温度と放出ガス成分との閬係の実験結 果を 、 また図 7 には、 焼成温度と発塵個数の開係および焼成温 度と潤滑膜の硬度の関係の実験結果をそれぞれ示している 。 図 4は実施例に関する グラ フで、 図 5は比較例 2 'に関するグラフ 、 図 6は比較例 1 に閬するグラフ 、 図 7は実施例および比較例 2に鬨するグラフである 。 なお、 グラ フの縦軸の A . し は、 ar b i t ra ry u n i tの略であ り 、 強度を示す。 Figures 4 to 6 show the experimental results of the relationship between the ambient temperature and the released gas components, and Figure 7 shows the relationship between the firing temperature and the number of generated particles, and the relationship between the firing temperature and the hardness of the lubricating film. The experimental results are shown respectively. 4 is a graph relating to the example, FIG. 5 is a graph relating to Comparative Example 2 ′, FIG. 6 is a graph corresponding to Comparative Example 1, and FIG. 7 is a graph corresponding to Example and Comparative Example 2. A. on the vertical axis of the graph is an abbreviation of arbitrary unit, and indicates intensity.
比較例 2の場合、 図 5 に示すよ う に、 環境温度が 3 0 0 'Cを 越える と 、 炭化水素系 (質量数 5 8 , 7 1 , 9 8 ) のガス放出 が顕著に発生するのに対して、 実施例の場合、 図 4 に示すよ う に、 環境温度が 4 0 0でを越えて も炭化水素系のガスが全く放 出されなくなる 。 これは、 潤滑膜 5の焼成温度を高温にしたこ と によ り この焼成時に潤滑膜 5から炭化水素系ガスが放出され つくすからと考え られ、 潤滑膜 5の焼成温度を高温とするこ と の優位性を証明している 。 In the case of Comparative Example 2, as shown in FIG. 5, when the ambient temperature exceeds 300 ° C., hydrocarbon-based (mass number 58, 71, 98) gas emission is remarkably generated. On the other hand, in the case of the embodiment, as shown in FIG. 4, even when the environmental temperature exceeds 400, no hydrocarbon gas is released. This is considered to be because the hydrocarbon-based gas is released from the lubricating film 5 during the firing because the firing temperature of the lubricating film 5 is increased, and the firing temperature of the lubricating film 5 is increased. Has proven its superiority.
また、 図 7から明らかなよ う に、 焼成温度を 3 0 0 eC ± 1 0 °C 、 3 5 0 。C ± 1 0 とする場合、 1 8 0 。C ± 1 0 。Cとする比 較例 2の場合に比べて使用時の発塵量が僅かに多くなる程度で ほとんど遜色ないけれども 、 焼成温度を 3 8 0 eC ± 1 0 ttCと し た場合、 使用時の発塵量が 3 0 0 。C ± 1 0 。C 、 3 5 0 。C ± 1 0 °Cの場合に比べて極端に多くなつている 。 これはつま り 、 焼成 温度をあま り高く し過ぎる と 、 潤滑膜 5の内部深く まで酸化、 炭化される こ と になつて膜全体が脆く なるために剥離や欠落が 深さ方向に一定しておき るから と考え られ、 一方の 3 0 0 。C土 1 0で、 3 5 0て土 1 0 °Cの場合だと 、 澗滑膜 5の表面側で酸 化、 炭化される こ と になる ものの内部での酸化、 炭化が少ない
ために膜の剥離、 欠落が表面側からおきてその進行が比較的遅 くなるから と考え られる 。 このこ とから、 焼成温度にも望ま し い範囲が存在する こ と を意味している 。 As is clear from FIG. 7, the firing temperature was set at 300 eC ± 10 ° C. and 350 ° C. If we assume C ± 10, then 180. C ± 10. Although little comparable to the extent that dust amount is slightly more when used as compared with the case of the ratio Comparative Examples 2 to as C, when the firing temperature and 3 8 0 e C ± 1 0 tt C, during use The amount of dust generated is 300. C ± 10. C, 350. It is extremely high compared to the case of C ± 10 ° C. This means that if the firing temperature is too high, the lubricating film 5 will be oxidized and carbonized deep inside, and the entire film will become brittle, so that peeling and chipping will be constant in the depth direction. It is thought that there is a case, and the other is 300. In the case of C soil 10 at 350 and soil at 10 ° C, oxidation and carbonization will occur on the surface side of the synovial membrane 5, but less oxidation and carbonization inside. Therefore, it is considered that the peeling or lack of the film occurs from the surface side and the progress is relatively slow. This means that there is a desirable range for the firing temperature.
さ らに、 潤滑膜 5 を被覆していない比較例 1 に関する図 6 に 比べ、 潤滑膜 5 を被覆している比較例 2および実施例に閧する 図 4および図 5のほ う が H 2、 H 2 0 、 C 〇 · N 2および、 C 0 2 の発生量が多くなつてお り 、 同様に、 図 4 と図 5 との差異から も明らかなよ う に、 澗滑膜 5の焼成温度を高く した場合のほ う が、 低く した場合よ り も H 2、 H 7〇 、 C O . N 2および、 C 〇 2 の発生量多く なつている 。 これらの成分は、 大気中で潤滑膜 5 の表面に付着したと しか考えられないので、 高温で焼成した潤 滑膜 5 では表面が多孔質になって表面積が増大したこ とで付着 量が増えて 、 前述した結果のよ う に発生量が増加したものと考 え られる 。 一 Furthermore, as compared with FIG. 6 relating to Comparative Example 1 in which the lubricating film 5 was not coated, Comparative Examples 2 and Examples in which the lubricating film 5 was coated show H 2 , The amounts of H 2 0, C〇N 2 and C 0 2 are increasing. Similarly, as is apparent from the difference between FIG. 4 and FIG. ho will in the case of high, but lower the case by Ri also H 2, H 7_Rei, CO. N 2 and have summer many occurrence of C 〇 2. These components can only be considered to have adhered to the surface of the lubricating film 5 in the atmosphere.Therefore, in the lubricating film 5 fired at high temperature, the surface became porous and the surface area increased, and the amount of adhesion increased. Therefore, it is considered that the amount of generation increased as described above. one
( c ) 発塵寿命 (c) Dust life
発塵寿命では、 図 2の実験装置において転がり軸受 5 0 、 5 0 (呼び番号 6 0 8 〉 に対してアキシャル荷重 ( 2 0 N 〉 を付 加する よ う に している点が前記実験の場合と異なっている 。 こ の実験では、 転がり軸受 5 0 を寿命になる まで連続回転させて 、 発塵個数計測装置 5 4 で 6分間隔で発塵量を測定している 。 この測定した発塵量が 1 0 0 0個/ 0 . 1 c ί であるか否かで 発塵異常の有無を確認する と と もに、 この発塵異常を 1 0回連 続して確認する と 、 実験開始時点から前記確認した時点までを 発塵寿命と してその間に要した時間を計測する 。 その結果を図 1 0に示す表 1 に示している 。 なお、 潤滑膜 5は、 下記いずれ の場合も転がり軸受 5 0の保持器のポケッ ト面に被覆している 。 表 1 での(1 )が前述の比較例 2に、 (4 )が実施例に対応してい
る 。 Regarding the dust generation life, in the experimental apparatus shown in Fig. 2, the axial load (20N) was applied to the rolling bearings 50, 50 (nominal number 608>). In this experiment, the rolling bearing 50 was continuously rotated until it reached the end of its service life, and the amount of dust generated was measured at intervals of 6 minutes using the particle counting device 54. The presence / absence of a dust generation abnormality was checked by determining whether the amount of dust was 100 000 particles / 0.1 cί, and this dust generation abnormality was confirmed 10 times in succession. The time required from the start to the point in time when the above was confirmed as the dust generation life is measured, and the results are shown in Table 1 shown in Fig. 10. The lubricating film 5 is used in any of the following cases. Also covers the pocket surface of the cage of the rolling bearing 50. (1) in Table 1 is for Comparative Example 2 described above, and (4) is for Not correspond to .
' 結果'と しては、 発塵寿命が長い順に(1)、 (5〉、 (4)、 (2)、 (6 )、 (3)となったが、 高溫雰囲気で炭化水素系ガスを放出 しない と いう前提があるので、 (4)と (5)が実用上好ま しいと言える 。 いずれも実験後には、 転動体、 内 · 外輪および保持器ポケッ ト 面に摩耗が見られたこ とから 、 発塵寿命時点では潤滑膜 5がほ とんど無く なって無潤滑状態となるために、 軸受構成要素のす ベり面および転がり面に著しい摩耗が発生する よ う にな り 、 こ の摩耗粉によ って発塵異常になる ものと考えられる 。 つま り 、 (2)、 (3)の焼成温度では、 潤滑膜 5の表面側が硬化してあま り 脆くなつていないために剥離、 欠落がおきにく くなつて潤滑性 が低下したものと考え られ、 一方の(4)、 (5)では、 潤滑膜 5の 表面側の酸化、 炭化がよ り進んで適度に脆くな り 、 表面側での 剥離、 欠落がおきやすく なって潤滑性が向上したものと考え ら れる 。 したがって、 炭化水素系ガスを放出しないという前提を ふまえて潤滑膜 5の潤滑性能を考える と 、 好ま しい焼成温度が 存在する こ とが判る 。 The “results” were (1), (5), (4), (2), (6), and (3) in descending order of dust generation life. (4) and (5) can be said to be practically preferable because of the assumption that they will not be released, because both the rolling elements, inner and outer rings, and the cage pocket surface showed wear after the experiment. However, at the point of dusting life, the lubricating film 5 almost disappears, and the lubrication state becomes non-lubricated, so that the sliding surface and the rolling surface of the bearing components are significantly worn, and this causes At the firing temperatures (2) and (3), the surface side of the lubricating film 5 is hardened and not too brittle at the baking temperatures (2) and (3), so that the lubrication film 5 does not become too brittle. It is probable that the loss was less likely to occur and the lubricity was reduced. On the other hand, in (4) and (5), oxidation of the surface side of It is considered that the carbonization became more advanced and the brittleness became moderately brittle, and the lubricating property was improved due to the easy separation and chipping on the surface side. Considering the lubrication performance of the film 5, it can be seen that a preferable firing temperature exists.
以上の実験結菜に基づき 、 潤滑膜 5の焼き付け溫度を 3 1 5 eC〜 3 6 0 の溫度範囲に設定すれば、 高温環境において炭化 水素系ガスの放出を全く無くせる よ う になる と と もに、 潤滑性 を可及的に延ばせる よ う になる 。 Based on the above experimental results, if the baking temperature of the lubricating film 5 is set in the range of 315 eC to 360, it is possible to completely eliminate the emission of hydrocarbon gases in a high temperature environment. In particular, lubricity can be extended as much as possible.
と ころで、 前述の好ま しい焼成温度に設定した潤滑膜 5 を用 いて、 転がり軸受 5 0の転動体のみ、 または転動体および内 - 外輪を窒化けい素 ( S i 3Ν , ) 系のセラ ミ ッ クスと した場合に ついて、 前述と 同様の発塵寿命を調べた。 その結果を図 1 1 に 示す表 2に示している 。 At this point, using the lubricating film 5 set at the above-mentioned preferred firing temperature, only the rolling elements of the rolling bearing 50, or the rolling elements and the inner and outer rings are made of silicon nitride (Si 3 ,) series ceramics. For the case of mixing, the same dust generation life was examined as described above. The results are shown in Table 2 shown in Fig. 11.
このよ う に、 (7〉、 (8)の発塵寿命は(9)ない し(11)や前述の(
4 )、 (5 )に比べてはるかに延びている こ とから 、 転がり軸受の ' 内 · 外輪、 転動体を適!:に窒化けい素 ( S i 3 Ν , ) 系のセラ ミ ッ クスとすれば、 発塵寿命が著しく 向上する と言える。 (7 )、 ( 8〉では実験後に転動体、 內 · 外輪および保持器ポケ ッ ト面に摩 耗が見られた。 Thus, (7) and (8) have a dusting life of (9) or (11) or the aforementioned ( 4) and (5) are much longer, so the inner and outer rings and rolling elements of rolling bearings are suitable! : If silicon nitride (S i 3 ,) -based ceramics is used, it can be said that the dust generation life is significantly improved. In (7) and (8), the rolling elements, the outer ring, and the cage pocket surface were worn after the experiment.
なお、 本発明は上記実施例のみに限定されない。 例えば、 実 施例では、 保持器のボールとの摺接面のみに潤滑膜を形成した のち炭化水素系の脱ガス処理を施しているが、 保持器全面にそ れらを形成して も よい。 また、 H I 2 に示すよ う に保持器 4以 外に軌道輪である内 · 外輪 1 、 2の軌道面、 図 1 3 に示すよ う にボール 3表面などに形成して も よ く 、 この場合には保持器な しの総玉型と して も用いる こ とができ る 。 さ らには保持器全体 を上記のよ うな構成の樹脂で形成して もよい。 軸受形式も深溝 型玉軸受を引用しているが、 その他の種類の転がり軸受に本発 明を適用でき る。 また、 軸受端部に密封板をつけて もよい。
Note that the present invention is not limited to only the above embodiment. For example, in the embodiment, the lubricant film is formed only on the surface of the cage that is in sliding contact with the ball, and then the hydrocarbon-based degassing process is performed. However, the degassing process may be performed on the entire surface of the cage. . In addition, as shown in HI 2, other than the cage 4, it may be formed on the raceway surfaces of the inner and outer rings 1 and 2, which are races, and on the surface of the ball 3 as shown in FIG. 13. In this case, it can be used as a full ball without cage. Further, the entire retainer may be formed of a resin having the above configuration. The bearing type refers to a deep groove ball bearing, but the present invention can be applied to other types of rolling bearings. A sealing plate may be attached to the end of the bearing.
Claims
1 . 金属またはセラ ミ ッ クス材料からなる軌道輪と 、 1. A bearing ring made of metal or ceramic material;
前記軌道輪に転動配置される金属またはセラ ミ ッ クス材料から なる転動体と 、 A rolling element made of a metal or a ceramic material, which is rolled and arranged on the bearing ring;
前記軌動輪および/または前記転動体の転動部位を被覆する よ う に設けられる 、 ィ ミ ド結合またはア ミ ドィ ミ ド結合を有する 樹脂バイ ンダー中にふつ素系合成樹脂を分散混合しかつ炭化水 素ガスの脱ガス処理を施した潤滑腹と 、 A fluorocarbon synthetic resin is dispersed and mixed in a resin binder having an imido bond or an amidomid bond, which is provided so as to cover the rolling part of the orbiting wheel and / or the rolling element. And a lubricating bellow that has been degassed of hydrocarbon gas,
からなる転がり軸受。 Rolling bearing consisting of.
2 . 金属またはセラ ミ ッ クス材料からなる軌道輪と 、 2. A ring made of metal or ceramic material;
前記軌道輪に転動配置される金属またはセラ ミ ッ クス材料から なる転動体と 、 A rolling element made of a metal or a ceramic material, which is rolled and arranged on the bearing ring;
前記転動体を保持する金属または合成樹脂材料からなる保持器 と 、 A cage made of metal or synthetic resin material for holding the rolling elements; and
前記軌動輪および/または前記転動体および Zまたは保持器の 転動 , 摺接部位を被覆するよ う に設けられる 、 イ ミ ド結合また はアミ ドィ ミ ド結合を有する樹脂バイ ンダー中にふつ素系合成 樹脂を分散混合しかつ炭化水素ガスの脱ガス処理を施した潤滑 膜と 、 A resin binder having an imido bond or an amide imide bond, which is provided so as to cover the rolling and sliding contact portions of the orbiting wheel and / or the rolling element and the Z or the cage, is provided. A lubricating film in which elementary synthetic resin is dispersed and mixed and a hydrocarbon gas is degassed;
からなる転がり軸受。 Rolling bearing consisting of.
3 . 金属またはセラ ミ ッ クス材料からなる軌道輪と 、 3. A raceway made of metal or ceramic material,
前記軌道輪に転動配置される金属またはセ ラ ミ ッ ク ス材料から なる転動体と 、 A rolling element made of metal or ceramic material, which is rolled and arranged on the bearing ring;
前記転動体を保持する金属または合成樹脂材料からなる保持器 と 、 A cage made of metal or synthetic resin material for holding the rolling elements; and
前記保持器の前記転動体との摺接面を被覆する よ う に設けられ る 、 イ ミ ド結合またはア ミ ドイ ミ ド結合を有する樹脂バ.ィ ンダ
一中に.ふつ素系合成樹脂を分散混合しかつ炭化水素ガスの脱ガ ス処理を施した潤滑膜と 、 からなる転がり軸受。 A resin binder having an imido-imido or amido-imido bond, which is provided so as to cover a sliding contact surface of the retainer with the rolling element. A rolling bearing comprising: a lubricating film obtained by dispersing and mixing a fluorine-based synthetic resin and degassing a hydrocarbon gas.
4 . 前記軌道輪およびノまたは転動体が、 窒化けい素系のセラ ミ ッ クスで形成される ものである 、 ク レイ ム 1 、 2 または 3の いずれかに記載の転がり軸受。 4. The rolling bearing according to any one of claims 1, 2 and 3, wherein the race and the rolling element or the rolling element are formed of silicon nitride-based ceramics.
5 . 前記軌道輪および/または転動体がステンレス鋼で形成さ れる ものである 、 ク レイ ム ] .. 2 または 3のいずれかに記載の 転がり軸受。 5. The rolling bearing according to any one of claims 2 and 3, wherein the bearing ring and / or the rolling element is formed of stainless steel.
6 . 前記樹脂バィ ンダ一がボリ イ ミ ドあるいはポリアミ ドイ ミ ドである 、 ク レイ ム 1 、 2 または 3のいずれかに記載の転がり 軸受。
6. The rolling bearing according to any one of claims 1, 2 and 3, wherein the resin binder is a polyimide or a polyimide.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4/348130 | 1992-12-28 | ||
JP34813092 | 1992-12-28 | ||
JP5313164A JP2946272B2 (en) | 1992-12-28 | 1993-12-14 | Rolling bearing |
JP5/313164 | 1993-12-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1994015109A1 true WO1994015109A1 (en) | 1994-07-07 |
Family
ID=26567468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1993/001885 WO1994015109A1 (en) | 1992-12-28 | 1993-12-27 | Roller bearing |
Country Status (2)
Country | Link |
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JP (1) | JP2946272B2 (en) |
WO (1) | WO1994015109A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1022478A1 (en) * | 1999-01-19 | 2000-07-26 | Schneeberger Holding AG | Linear motion guide with rolling members |
WO2018168967A1 (en) * | 2017-03-15 | 2018-09-20 | オイレス工業株式会社 | Multi-layered sliding member and method for producing same |
EP3392514A4 (en) * | 2015-12-18 | 2019-07-17 | NTN Corporation | Deep-groove ball bearing |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4058599B2 (en) * | 2001-11-30 | 2008-03-12 | 株式会社ジェイテクト | Rolling bearing incorporating polymer lubricant and manufacturing method thereof |
JP4536650B2 (en) * | 2005-12-27 | 2010-09-01 | Ntn株式会社 | Rolling bearing |
JP5102964B2 (en) * | 2006-03-10 | 2012-12-19 | Ntn株式会社 | Resin cage and bearing |
DE112008000271B4 (en) * | 2007-01-30 | 2021-06-17 | Ntn Corp. | Ball bearing cage |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0134976Y2 (en) * | 1984-10-18 | 1989-10-25 | ||
JPH01299316A (en) * | 1988-05-24 | 1989-12-04 | Natl Aerospace Lab | Cage for roller bearing |
JPH0320115A (en) * | 1989-06-14 | 1991-01-29 | Nagano Keiki Seisakusho Ltd | Ceramic bearing |
JPH0446219A (en) * | 1990-06-12 | 1992-02-17 | Koyo Seiko Co Ltd | Rolling bearing for vacuum and formation of coated layer |
JPH04102718A (en) * | 1990-07-16 | 1992-04-03 | Yaskawa Electric Corp | Rolling bearing |
JPH04321815A (en) * | 1991-04-19 | 1992-11-11 | Nippon Seiko Kk | Rolling bearing |
-
1993
- 1993-12-14 JP JP5313164A patent/JP2946272B2/en not_active Expired - Fee Related
- 1993-12-27 WO PCT/JP1993/001885 patent/WO1994015109A1/en active Search and Examination
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0134976Y2 (en) * | 1984-10-18 | 1989-10-25 | ||
JPH01299316A (en) * | 1988-05-24 | 1989-12-04 | Natl Aerospace Lab | Cage for roller bearing |
JPH0320115A (en) * | 1989-06-14 | 1991-01-29 | Nagano Keiki Seisakusho Ltd | Ceramic bearing |
JPH0446219A (en) * | 1990-06-12 | 1992-02-17 | Koyo Seiko Co Ltd | Rolling bearing for vacuum and formation of coated layer |
JPH04102718A (en) * | 1990-07-16 | 1992-04-03 | Yaskawa Electric Corp | Rolling bearing |
JPH04321815A (en) * | 1991-04-19 | 1992-11-11 | Nippon Seiko Kk | Rolling bearing |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1022478A1 (en) * | 1999-01-19 | 2000-07-26 | Schneeberger Holding AG | Linear motion guide with rolling members |
EP1022477A1 (en) * | 1999-01-19 | 2000-07-26 | Schneeberger Holding AG | Linear motion guide with rolling members |
US6352366B1 (en) | 1999-01-19 | 2002-03-05 | Schneeberger Holding Ag | Linear guide for roller bearings |
EP3392514A4 (en) * | 2015-12-18 | 2019-07-17 | NTN Corporation | Deep-groove ball bearing |
WO2018168967A1 (en) * | 2017-03-15 | 2018-09-20 | オイレス工業株式会社 | Multi-layered sliding member and method for producing same |
Also Published As
Publication number | Publication date |
---|---|
JPH06280881A (en) | 1994-10-07 |
JP2946272B2 (en) | 1999-09-06 |
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