WO1993025928A1 - Systeme a platine de grandes dimensions pour microscopes a sonde de balayage et d'autres instruments - Google Patents

Systeme a platine de grandes dimensions pour microscopes a sonde de balayage et d'autres instruments Download PDF

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Publication number
WO1993025928A1
WO1993025928A1 PCT/US1993/005393 US9305393W WO9325928A1 WO 1993025928 A1 WO1993025928 A1 WO 1993025928A1 US 9305393 W US9305393 W US 9305393W WO 9325928 A1 WO9325928 A1 WO 9325928A1
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WIPO (PCT)
Prior art keywords
sample
probe
microscope
translation stage
scanning probe
Prior art date
Application number
PCT/US1993/005393
Other languages
English (en)
Inventor
Sang-Il Park
Ian R. Smith
Ronald H. Arima
Michael D. Kirk
Original Assignee
Park Scientific Instruments Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Park Scientific Instruments Corporation filed Critical Park Scientific Instruments Corporation
Priority to AU44079/93A priority Critical patent/AU4407993A/en
Publication of WO1993025928A1 publication Critical patent/WO1993025928A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor

Definitions

  • the present invention pertains to systems and methods for microscopically examining the surface of objects. More specifically, it pertains to the examination of large objects such as intact semiconductor wafers and lithographic photo-masks, using scanning probe microscopes such as scanning tunneling microscopes and atomic force microscopes.
  • SPM scanning probe microscope
  • Scanning probe microscopes include devices such as scanning force microscopes (SFMs) , scanning tunneling microscopes (STMs) , scanning acoustic microscopes, scanning capacitance microscopes, magnetic force microscopes, scanning thermal microscopes, scanning optical microscopes, and scanning ion-conductive microscopes.
  • Probe means the element of an SPM which rides on or over the surface of the sample and acts as the sensing point for surface interactions and may include the cantilever and tip, a chip from which the cantilever projects, and a plate on which the chip is mounted.
  • the probe includes a flexible cantilever and a microscopic tip which projects from an end of the cantilever.
  • the probe in an STM the probe includes a sharp metallic tip which is capable of sustaining a tunneling current with the surface of the sample. This current can be measured and maintained by means of sensitive actuators and amplifying electronics.
  • the probe in a combined SFM/STM the probe includes a cantilever and tip which are conductive, and the cantilever deflection and the tunneling current are measured simultaneously.
  • Cantilever means the portion of the probe of an SFM which deflects slightly in response to forces acting on the tip, allowing a deflection sensor to generate an error signal as the probe scans the surface of the sample.
  • Tip in an SFM means the microscopic projection from one end of the cantilever which rides on or slightly above the surface of the sample.
  • tip refers to the metallic tip.
  • SFM scanning Force Microscope
  • Atomic Force Microscope means an SPM which senses the topography of a surface by detecting the deflection of a cantilever as the sample is scanned.
  • An SFM may operate in a contacting mode, in which the tip of the probe is in contact with the sample surface, or a non-contacting mode, in which the tip is maintained at a spacing of about 50 A or greater above the sample surface.
  • the cantilever deflects in response to electrostatic, magnetic, van der Waals or other forces between the tip and surface. In these cases, the deflection of the cantilever from which the tip projects is measured.
  • STM scanning Tunneling Microscope
  • SPM scanning Tunneling Microscope
  • STMs are normally operated in a constant current mode, wherein changes in the tunneling current are detected as an error signal.
  • a feedback loop uses this signal to send a correction signal to a transducer element to adjust the spacing between the probe and sample and thereby maintain a constant tunneling current.
  • An STM may also be operated in a constant height mode, wherein the probe is maintained at a constant height so that the probe-sample gap is not controlled, and variations in the tunneling current are detected.
  • Kinematic mounting means a technique of removably mounting a rigid object relative to another rigid object so as to yield a very accurate, reproducible positioning of the objects with respect to each other.
  • the position of the first object is defined by six points of contact on the second. These six points must not over or under constrain the position of the first object.
  • three balls on the first object contact a conical depression, a slot (or groove) and a flat contact zone, respectively, on the second object.
  • the three balls fit snugly within three slots formed at 120° angles to one another on the second object.
  • kinematic mounting According to the principles of kinematic mounting, which are well known in the mechanical arts, six points of contact between the two objects are required to establish a kinematic mounting arrangement.
  • the first ball makes contact at three points on the conical surface (because of inherent surface imperfections, a continuous contact around the cone will not occur) , two points in the slot, and one point on the flat surface, giving it a total of six contact points.
  • each ball contacts points on either side of the slot into which it fits.
  • scanning probe microscopes including the scanning tunneling microscope and atomic force microscope
  • Such microscopes can, in certain circumstances, resolve individual atoms on a surface and can map topographic variations on the sample with 0.1 nm vertical sensitivity or better.
  • These microscopes have found widespread application in academic and industrial research laboratories. The majority of systems constructed have been used for the examination of samples smaller than 25 mm in any one dimension. Samples of this size may conveniently be prepared and handled, and are commonly used in other types of optical and electron microscopes. In the semiconductor industry, for example, it is routine practice to fracture a wafer in order to microscopically examine a small fragment of it. The process is destructive and so the material examined is wasted.
  • the mechanical linkage path between the microscope and the sample is comprised of two separate bearing assemblies in the two translation stages assembled in series; vibrational or thermal instabilities or non- planarities or non-linearities of motion are additive for the two stages and produce a composite positioning error which can substantially degrade the performance or positioning accuracy of the microscope. It is the stability of this mechanical support path which determines the mechanical stability of the microscope and its ability to resolve fine structures as well as to image the same point on the object even when the instrument is subject to external physical sources of interference such as vibrations, temperature fluctuations, and the like.
  • a key goal is to minimize the number of bearing stages between the sample and the microscope and to maximize the mechanical stability and strength of the complete support path whilst providing a means of precisely and accurately positioning the sample relative to the microscope.
  • Video optical microscopes can scan images much faster than typical probe microscopes of the present generation, and so overall throughput is increased by this combination of techniques. Furthermore the video image may be digitized so that the site selection process can be fully automatic using pattern recognition and other image analysis techniques.
  • Application Serial No. 07/850,669 describes a probe microscope system in which biaxial translation is accomplished using a kinematic stage mount in which two adjustable kinematic translation elements combine to select the position of the probe microscope with respect to the sample. This provides a very efficient and compact translation mechanism for small samples.
  • U.S. Patent No. 4,999,494 to Elings describes a scanning tunneling microscope system in which the microscope head is supported by feet which bear on the surface of the sample or on another surface which supports the sample.
  • the probe microscope is attached to motorized stage means which position the microscope head in a plane roughly parallel to the sample surface.
  • the head is unconstrained in the vertical direction and can thus accommodate variations in the flatness of the support surface whilst remaining in contact with the surface.
  • a limitation of this approach is that the translation speed of the stage and the ability of the stage to make the smallest incremental motions is limited by friction and stiction effects between the support feet and the translation surface, which effects are always present since the support feet are permanently in contact and supporting the weight of the probe microscope.
  • a further limitation of the approach is that there may be wear to either the feet or to the sample or support surface as the sample is translated, since the surfaces are rubbing. For semiconductor applications, this is particularly undesirable since the particles thus generated can cause defects to appear on the circuits being inspected.
  • the Koshiba arrangement is specifically designed to provide an elastic coupling between the movable stage and the base and to allow tilting of the movable stage. This is entirely unsuitable for an SPM.
  • Optical detection as disclosed by Elings requires precise alignment of the canti ⁇ lever with the illuminating laser beam; furthermore, the optical arrangement is bulky and reduces scanning fidelity. Finally the optical interferometer arrangement requires that the cantilever be deformed in order to satisfy an optical interference condition for correct operation, and this means that the force exerted by the tip on the sample may not be precisely selected in order to optimize imaging conditions.
  • U.S. Application Serial No. 638,163 describes the use of a piezo-resistive cantilever assembly which detects height fluctuations on the sample surface and converts them into electrical signals, which arrangement is used in a preferred embodiment according to this invention.
  • the advantage of this scheme is the inherent simplicity and low mass of the detection system.
  • a specific object of the invention is to provide a trans ⁇ lation stage coupled to a microscope and sample which links the two in a stable kinematic configuration whilst imaging is in progress, but which permits lateral translation of the microscope relative to the sample using a very low friction air bearing whilst the parts are in relative motion.
  • very high mechanical stability and immunity to external vibrations is achieved whilst the translation means is static, but whilst it is moving the reduced friction of the air bearing permits high speed motion, thereby reducing the effects of backlash and stiction which can limit positioning accuracy and precision with conventional stage systems.
  • a bright- field oblique optical view receives a much greater amount of reflected light from the imaged object than a dark- field view, which receives mainly scattered light from the imaged object in the oblique optical view.
  • a single translation stage moves laterally on air bearings over a smoothly polished, highly planar base.
  • the translation stage is free to move in any horizontal direction.
  • the air bearings are de-energized and a source of vacuum may be connected to the air bearings, thereby holding the translation stage tightly against the base. Since the air bearings are formed of rigid materials, the translation stage is held firmly in place so that highly delicate operations, such as the scanning of a sample with a scanning probe microscope, can be performed.
  • pressurized air is supplied to the air bearings.
  • the translation stage may then be moved easily and precisely to a new position, which may be far removed from the original position, without countering the effects of stiction and friction.
  • the scanner e.g., a piezoelectric tube
  • the scanner is mounted in the head of a scanning probe microscope. Accordingly, the scanner is forced to move only the fixed, limited mass of the probe and detection system, rather than the variable mass of the sample. This arrangement is particularly suitable for examining large samples.
  • Figure IA illustrates a block diagram of the computer control unit of an embodiment according to this invention.
  • Figures IB and 1C illustrate side and top views, res ⁇ pectively, of a microscope head unit in accordance with this invention.
  • Figure 2 illustrates a top view of the lateral translation units of the microscope.
  • Figure 3 illustrates a horizontal cross-sectional view of the translation stage and guide.
  • Figure 4A illustrates a perspective view of the translation stage and components thereof and a schematic view of the pressurized air and vacuum supply units.
  • Figure 4B illustrates a vertical cross-sectional view through the center of an air bearing.
  • Figure 5 illustrates the construction of the adjustment hinge mechanisms for the roller bearing assemblies.
  • Figure 6A illustrates a vertical cross-sectional view of the translation stage and guide taken through section A-A shown in Figure 1C.
  • Figure 6B illustrates a vertical cross-sectional view of the translation stage and guide taken through section B-B shown in Figure 1C.
  • Figure 7A illustrates a side view of the microscope head, showing the TV system, taken from direction C shown in Figure IB.
  • Figure 7B illustrates a top view of the TV system, taken from direction D shown in Figure IB.
  • Figure 8A illustrates a cross-sectional exploded view of the scanner.
  • Figure 8B illustrates the mounting of the fixture containing photodiodes on the piezoelectrical tube.
  • Figure 8C illustrates the kinematic mounting of the scanner on the bracket.
  • Figure 8D illustrates a bottom view of the probe.
  • Figure 8E illustrates a perspective view of the probe and probe mount.
  • Figure 9 illustrates a view of the shutter motor mechanism.
  • Figures 10A, 10B, and IOC illustrate side views of second, third and fourth embodiments of a translation stage according to the invention.
  • Figures IA and IB illustrate the overall system schematically.
  • a computer control unit 110 and a video display screen 111 are used to control the operation of a microscope head unit 100 and to record and analyze data and images therefrom.
  • Computer control unit 110 includes interfacing circuitry for generating scanning and positioning signals to a probe microscope head 106, for controlling stage translation units 108 and 109, for controlling a sample stage 105 and a TV system 113, and for recording data from these various units. Images and data are displayed on video display screen 111, and a graphical user interface permits selection and control of the overall microscope operation. Details of the software control structure are specifically disclosed in U.S.
  • Microscope head unit 100 includes an external enclosure 103 which is designed to reflect or absorb external sources of vibrational or acoustic energy, as well as to maintain a uniform temperature within the enclosure. Typically, it may be fabricated from steel or polymer materials, and sound deadening materials may be laminated to its surfaces in order to optimize microscope performance.
  • Figure 1C shows a top view of microscope head unit 100 in which external enclosure 103 has been omitted for clarity.
  • a sample 104 is introduced to the microscope head through an entry door 112 (Fig. IB) , either automatically by a robot or manually by an operator. Sample 104 is positioned on sample stage 105 and is captured thereon by holding means incorporated in stage 105, which holding means may be based upon mechanical fixtures, or by electrostatic magnetic or vacuum chucking, or by other means according to the type of sample and other considerations.
  • Sample stage 105 rests in static configuration on a surface 115 of a reference block 102 which has been ground to a precise contour.
  • surface 115 is ground flat to high precision, such that translation of sample stage 105 over surface 115 provides minimal motion of sample 104 with respect to probe microscope head 106 and TV system 113 in a direction perpendicular to surface 115.
  • reference block 102 may be fabricated from granite, which has excellent mechanical strength and thermal inertia, whilst it provides high damping of any vibrational energy coupled into it.
  • Reference block 102 may be 100mm in thickness or more.
  • Reference block 102 is mounted on servo-vibration isolating units 101 which are mounted on a floor standing support table, 114. Combined servo-vibration isolation units 101 and floor-standing support table 114 are available for example from the Technical Manufacturing Company, Peabody, MA.
  • Sample stage 105 may be translated in two axes by motor translation units 108 and 109 which operate under command from computer control unit 110. During trans- lation, sample stage 105 may be partially or fully supported by an integral air-bearing mechanism such that there is negligible friction between sample stage 105 and surface 115.
  • Probe microscope head 106 and TV system 113 are rigidly mounted to a support structure 107, which is itself mounted rigidly on reference block 102.
  • Support structure 107 is designed to minimize the motion of the microscope head 106 and the TV system 113 with respect to reference support block 102. Typically, it may be constructed of materials which combine high strength with a low coefficient of thermal expansion as well as good acoustic damping characteristics. Materials such as granite or steel are suitable for this appli ⁇ cation. Support structure 107 is mounted to reference block 102 at three points around the perimeter of block 102 in order to ensure that the structure is optimally stable and has a high mechanical resonant frequency.
  • support structure 107 may be built from a steel I-beam girder of cross-sectional dimensions 100mm x 100mm with a web thickness of 2 cm and may be coupled to reference block 102 along its length by an additional structure welded to it, as illustrated in Figures IB and 1C.
  • Design of support structure 107 follows conventional mechanical design principles.
  • Figure 2 illustrates top view of reference block 102 and sample translation systems 108 and 109.
  • Probe microscope 106, TV system 113, sample 104, sample stage 105 and support structure 107, which overlay this structure, have been omitted from Figure 2 for clarity.
  • Lateral motion of a sample stage guide 219 is guided by two linear track bearings, numbered 211 and 218, which are mounted orthogonal to one another.
  • Bearings 211 and 218 are selected for offering good linearity of motion coupled with a high resistance to mechanical and thermal fluctuations. Bearings 211 and 218 also provide high resistance to forces which could cause rotation, pitch and yaw or other deviations relative to the desired motion axis. Such bearings utilize a recirculating ball mechanism. Bearing 218 is rigidly mounted to reference block 102. A slider 212 is attached to two recirculating ball heads 231 and 232 which are freely movable along the length of bearing 218 with low friction. Two heads are used for this purpose since they provide enhanced stiffness against rotation of slider 212 about an axis perpendicular to surface 115.
  • the position of slider 212 along bearing 218 is controlled by a leadscrew 215 acting on a lead nut 214, which is in turn rigidly attached to slider 212.
  • Leadscrew 215 passes through a clearance hole bored in slider 212.
  • Rotation of leadscrew 215 is accomplished by a motor 216 driving through a coupler 213 and a thrust bearing 223, under instruction from computer control unit 110.
  • Motor 216 is rigidly attached to a support member 217, which is in turn rigidly attached to reference block 102.
  • Bearing 211 is rigidly attached to slider 212 at one end, whilst the other end of bearing 211 is cantilevered above reference surface 115.
  • Means for stiffening bearing 211 in the vertical axis may be provided in order to increase the resonance frequency of the bearing to vertical oscillations and so minimize vibrational sensitivity.
  • bearing 211 may be coupled to reference block 102 in a manner which constrains motion of bearing 211 in a direction perpendicular to reference surface 115 yet leaves bearing 211 free to move in a direction parallel to the surface of reference block 102. Such may be accomplished by the addition of an extra roller or track bearing assembly placed at the free end of bearing 211, running parallel to and equivalent to bearing 218, or by equivalent means.
  • Sample stage guide 219 is attached to two or more of recirculating ball sliders 233 and 234, which are freely slidable along the length of bearing 211. As with slider 212, sample stage guide 219 is positioned along the length of bearing 211 by a leadscrew 210 and a lead nut 220, which is rigidly attached to sample stage guide 219. A clearance hole for leadscrew 210 is bored through sample stage guide 219. Leadscrew 210 is driven by a motor 209 acting through a coupler 221 and a thrust bearing 222. Motor 209 is rigidly mounted to slider 212 and receives drive signals from computer control unit 110.
  • Motors 216 and 209 may be chosen for desirable torque and speed characteristics and may be DC or stepping motors. Stepping motors are preferred since they provide an economical means of precisely positioning the sample stage 105 without the use of additional position sensors which would be required if DC motors were used. Motor drive circuitry and software must be properly designed such that the motors can perform at high frequency, in order to give the high translation speeds made possible by the low friction air-bearings employed in this design, yet provide a sufficiently small minimum step size for precise translational motion of the sample. In particular the drive amplifier impedances and the acceleration and deceleration software routines must be carefully optimized, as will be evident to those skilled in the art. Also viscous damping systems may be coupled to the motor spindle such that transient performance is improved. Micro-stepping drives may provide a reduced minimum step size whilst permitting higher speed translation.
  • motors 209 and 216 translate at two inches per second maximum speed, with a minimum step size of 6 microns.
  • Limit switches 205, 206, 207 and 208 serve to signal to computer control unit 110 when slider 212 or stage guide 219 has reached the limits of its travel in either direction and may be of mechanical or optical types.
  • Leadscrews 215 and 210 may be of ground steel with lead chosen to provide suitable speed of motion and step size of motion.
  • Lead nuts 214 and 220 are of the anti-backlash type and may use either spring preloading or be of the recirculating ball type for increased accuracy of motion. The position of sample stage guide 219 may thus be accurately controlled in two orthogonal directions by computer control unit 110.
  • Sample stage 105 is placed over sample stage guide 219 and is mechanically coupled to it such that the horizontal position of sample stage guide 219 kinematically defines the position of sample stage 105 on reference surface 115, whilst permitting free motion of sample stage 105 in a direction perpendicular to reference surface 115.
  • Figure 2 illustrates five roller bearing assemblies 224, 225, 226, 227 and 228 whose centre ele ⁇ ments are rigidly mounted, with outside elements freely rotatable, at five points around the edges of sample stage guide 219, with their rotational axes oriented horizontally.
  • Bearings 224-228 are of a ball race roller type with planar or radiused outer bearing surfaces.
  • Bearings 226 and 228 are rigidly coupled to sample stage guide 219 via adjustment hinge mechanisms 229 and 230 respectively. These mechanisms permit fine translational adjustment of the centre of rotation of the roller bearings in a direction parallel to surface 115 and orthogonal to the rotational axes of the respective roller bearings.
  • FIG. 5 illustrates the design of adjustment hinge mechanisms 229 and 230, which are identical.
  • Hinge block 500 is machined to be rigidly attached to sample stage guide 219 along rear surface 503.
  • Roller bearing 226 or 228 is mounted onto hinge block 500 as shown and is free to rotate.
  • Hinge block 501 is machined to a thin flexible hinge point along its length, point 501, such that the separation of bearing 226 from rear surface 503 can be adjusted by set screw 502 which is threaded into hinged portion 504 of hinged block 500.
  • Other mechanisms for translation adjustment of roller bearings 226 and 228 with different force/displacement characteristics will be clear to those skilled in the art and may be substituted for adjustment hinge mechanisms 229 and 230 where more 5 constant preloading forces are desired.
  • Figure 3 is a cross-sectional view of sample stage 105 and stage guide 219 through a section parallel to surface 115 at the height of the axles of roller bearings 224-228 and shows the manner in which sample stage guide
  • bearings 224, 225, 226, 227 and 228 engage corresponding bearing surfaces 300, 301, 302, 303 and 304 respectively. These bearing surfaces should ideally be cylindrical, such that a cross section parallel to surface 115 is circular and so that there is a
  • Bearing surfaces 300-304 are embedded into an interior surface of sample stage 105 such that sample stage 105 can
  • Bearings 224, 225 and 226 serve to constrain the motion of sample stage 105 in a horizontal direction orthogonal to bearing 211 as well as preventing rotation of sample stage 105 about an axis perpendicular to surface 115.
  • Bearing 226 may be
  • bearing 25 adjusted in order to minimize play in this direction and establish appropriate loading on bearings 224, 225 and 226.
  • Bearings 227 and 228 constrain the motion of sample stage in a direction parallel to bearing 211, and the location of bearing 228 may be adjusted by hinge mechanism
  • sample stage 105 with respect to sample stage guide 219 is kinematically defined in a plane parallel to reference surface 115.
  • sample stage 105 is illustrated in Figure 4, which is a perspective view of the general configuration of three air bearings 401, 402 and 403, which rest on surface 115 when the air supply is switched off, but which raise the stage a few microns above the surface when compressed air is supplied to the three jets through fittings 404, 405 and 406 respectively; pipes 5 bored into stage 105 conduct compressed air to the three air bearings.
  • the air supply to fittings 404, 405 and 406 is separately adjusted by air pressure regulators 407, 408 and 409, respectively, so that the stage floats evenly above surface 115, even if the mass loading of sample 104
  • FIGS 6A and 6B show cross-sectional views through sample stage 105 and stage guide 219, illustrating the relationship of the various components which interact with sample stage 105, stage guide 219 and reference block 102.
  • Air supply ducting which is bored into sample stage 105 in order to connect supply pipes is not shown for clarity. It is seen that the stage 105 is free to move in the vertical direction guided by bearings 227 and 228 as well as the bearings 224, 225 and 226.
  • Air bearings 401, 402 and 403 are machined separately to fit into sample stage 105 and are inset to their respective locations using a press.
  • sample stage 105 is ground and polished precisely parallel to the contact plane of air bearings 401, 402 and 403, such that when the stage is translated on surface 115 the height of the top surface of stage 105 is invariant. This is advantageous since the surface height of a parallel- sided sample 104 thus remains constant even as it is translated, and a probe can be maintained in close proximity to the surface of sample 104 so the time spent recontacting the surface can be shortened.
  • a typical air bearing is illustrated in Figure 4B as a cross section through air bearing 402 in a plane orthogonal to surface 115.
  • An air bearing aperture 451 provides a reactive force to sample stage 105 in a direction away from surface 115 roughly equal to the surface area of the aperture multiplied by the air pressure supplied to it via a bored pipe 452 and pipe fitting 405.
  • Different sized apertures for the air bearings can be employed to provide different degrees of floatation force according to the mass of sample 104 and sample stage 105.
  • sample stage 105 is built from a dense material, such as stainless steel, it is advantageous to machine a large air bearing area in order to exert the necessary lifting force at modest air 5 supply pressure; when the combined mass of sample 104 and stage 105 is small then a smaller air emission surface area may be acceptable.
  • a diameter of 1 cm for aperture 451 may be suitable for a sample stage 105 made from stainless steel, whereas a diameter of only 5mm may be
  • Air bearings 10 suitable where the sample stage is constructed from aluminum; in both cases the stage floats with air inlet pressures of approximately 20 - 30 pounds per square inch.
  • the design of air bearings follows conventional principles which are known to those skilled in the art. Air bearings
  • 401, 402 and 403 may be machined from stainless steel or other materials, and may have a single or multiple orifices in order to distribute the load. Furthermore, air bearings 401, 402 and 403 may have a pointed or spherical lower surfaces which contact surface 115 when
  • the air bearings are de-energized, such that there are only three points of contact between sample stage 105 and surface 115, one at each air bearing. In this way, the mechanical stability of sample stage 105 with respect to tilt is assured since the three contact provide optimum
  • sample stage 105 is uniquely positioned with very high stability.
  • Figure 4A also shows surface details of sample stage 105.
  • Sample stage 105 includes a milled surface pattern
  • Vacuum valve 414 controls the vacuum supply and may be either manually controlled or may receive computer control signals from controller 110.
  • Figure 7A shows the disposition of probe microscope head 106 on support structure 107 with respect to sample 104.
  • the microscope head 106 includes a probe 701 and means for scanning the probe over the sample surface, comprising a scanner assembly 703.
  • Probe 701 is kinematically, removably mounted on a probe mount 702, which in turn secured to scanner assembly 703.
  • Microscope head 106 also includes two optical microscopes, described below, for providing an on-axis view of the sample surface and an oblique view of the probe and the sample.
  • TV system 113 is also described below.
  • a portion of microscope head 106 is raised or lowered relative to both support structure 107 and sample translation stage 105 by means of a motor-driven, vertical translation stage 705.
  • Vertical translation stage 705 comprises a plate 761 mounted on a vertical slide rail 760.
  • Slide rail 760 is rigidly fixed to a vertical plate 762 which in turn is rigidly fixed to support structure 107.
  • Stage 705 thus can be raised or lowered relative to support structure 107.
  • a bracket 704 is rigidly fixed to vertical stage 705.
  • Scanner assembly 703 is kinematically, removably mounted onto this bracket.
  • an objective lens 709, a lens 710, and mirrors 711 and 712 are attached to bracket 704.
  • the motion of vertical translation stage 705 is controlled by a stepping motor 706 and a micrometer 707, under control of computer control unit 110.
  • the drive shaft of stepping motor 706 is axially connected via a flexible coupler to a pushing screw 706a which is threaded through a fixed nut 706b mounted on plate 762.
  • Stepping motor 706 slides on a slide rail 706c also mounted on plate 762 as pushing screw 706a advances or retreats through fixed nut 706b.
  • Stage 705 is biased against the tip of the pushing screw by a pair of springs 766 as well as by a fixture 767 rigidly fixed to stage 705.
  • Springs 766 are connected between stage 705 and plate 762.
  • Fixture 767 rigidly connects the body of stepping motor 706 to stage 705.
  • Fixture 767 also makes contact with the tip of pushing screw 706a, as shown in Figure 7A.
  • Springs 766 in combination with fixture 767 provide means to maintain contact between the tip of the pushing screw and stage 705 at all times.
  • springs 766 provide means to reduce significantly backlash between pushing screw 706a and fixed nut 706b.
  • stage 705 is lowered or raised, respectively, relative to both support structure 107 and sample stage 105.
  • Micrometer 707 has a resolution of 80 turns per inch of travel.
  • Limit switches 718 and 719 are attached to plate 762 and signal to control unit 110 when stage 705 is at the limits of its travel.
  • Stage 705 thus provides for motion of probe 701 along an axis perpendicular to sample 104.
  • Stage 705 also provides for adjustment of the focus of objective lens 709, by lowering or raising the focal plane of lens 709 with respect to an imaged object.
  • the components shown in Figure 7A also form a video microscope system which selectively permits viewing of sample 104 at high magnification from a perpendicular direction above the sample using lens 709, or viewing of probe 701 and sample 104 at lower magnification at an oblique angle through lens 710.
  • This dual facility is very valuable in controlling the probe microscope since both the integrity of probe 701 and the location to be examined on sample 104 can conveniently be selected.
  • TV system 113 includes a color video camera 750, and a motorized zoom lens 751 as well as two mirrors 752 and 753 for directing light from an optical beam splitter 715 along a beam path 754.
  • Motorized zoom lens 751 may be a 60 mm - 300mm focal length motorized zoom lens, or other zoom lens combined with a motor, such as has been disclosed in Application Serial No. 07/850,677.
  • Video camera 750, zoom lens 751 and mirrors 752 and 753 are mounted on flat plates which are attached to support structure 107.
  • high magnification microscope objective lens 709 is attached to bracket 704, and provides a view of the surface of sample 104 from a roughly perpendicular direction.
  • An image of sample 104 is reflected by a beam splitter 715 towards TV system 113 such that an image of the sample may be viewed on monitor 111.
  • Low magnification lens 710 and mirrors 711 and 712 are attached to bracket 704 and thus can be raised or lowered via vertical translation stage 705.
  • Lens 710 is focused obliquely onto probe 701 and may be a 50mm focal length bi-convex lens. Thus the surface of sample 104 comes into focus when probe 701 is in the proximity of sample 104.
  • a mirror 713 and optical beam splitter 715 are mounted on a vertical plate 770 attached to support structure 107.
  • Mirrors 713, 712 and 711 serve to direct light from beam splitter 715 to lens 710 along a beam path 720 and to direct the image back along the same path, through beam splitter 715 and thus to TV system 113, causing an image to be seen on monitor 111 (Fig. 1) .
  • monitor 111 Fig. 1
  • the lens 710 operate at infinite conjugate i.e., the lens 710 forms an image of the probe at infinity, by placing the imaged object one focal length in front of the lens, and also by ensuring that beam path 720 between mirrors 712 (mounted on bracket 704) and 713 (rigidly fixed to support structure 107) is parallel to the direction of motion of stage 705.
  • beam path 720 between mirrors 712 (mounted on bracket 704) and 713 (rigidly fixed to support structure 107) is parallel to the direction of motion of stage 705.
  • Other equivalent means for ensuring that the probe remains in focus will be obvious to those skilled in the art, including the provision of a second focusing mechanism to accomplish this task.
  • Illumination for the two viewing systems is provided from a single illuminating light bulb 717 via a condenser lens 716 and beam splitter 715.
  • Beam splitter 715 splits the illuminating light into two beams of roughly equal intensity.
  • the first beam illuminates sample 104 through lens 709, in an arrangement commonly known in microscopy as Kohler illumination, which provides uniform spatial illumination.
  • An on-axis image of sample 104 is formed by lens 709 and directed towards TV system 113 by reflection from plate glass beam splitter 715.
  • the second beam of illuminating light is reflected by beam splitter 715 towards mirror 713, and serves to illuminate the oblique view through lens 710 via mirrors 713, 712 and 711.
  • a shutter 722 is mounted on the spindle of a motor 721 such that it may be rotated.
  • FIG. 7A illustrates the shutter 722 in position to block the on-axis view (through lens 709) such that the oblique view is visualized; if shutter 722 is rotated to position 714 (dashed lines) then the oblique view (through lens 710) is obscured and the on-axis view is visualized. Intermediate positions for shutter 714, or other arrangements, would permit simultaneous viewing of parts of both images.
  • Bulb 717, lens 716 and motor 721 are mounted on vertical plate 770 which is attached to support structure 107.
  • Shutter 722 is a bracket which is preferably coated to be optically absorbent, either by painting or anodizing it black, or by the use of black velvet material, as is commonly known in the art. Shutter 722 may also be angled with respect to the light beam in order to reflect energy away from beam splitter 715. Motor 721 may be any type of stepping motor for positioning objects rotationally, or the like.
  • a mirror 723 is attached to probe mount 702.
  • Mirror 723 is positioned and angled such that it reflects the lost illumination reflected by the sample and probe back along a reverse path so that the sample and probe are now illuminated in bright field conditions and the oblique view optical image is substantially improved.
  • Mirror 723 may be planar or may be curved for improved efficiency or to accommodate a wider range of probe and sample surface gradients.
  • the angle, position, shape and size of mirror 723 are dictated by the angle of the oblique view, and by the slope of the sample surface and by other factors, as will be clear to those skilled in the art.
  • the direction of light from bulb 717 incident on the probe can be altered, using lenses and mirrors, so that the probe is illuminated from the opposite side of scanner assembly 703.
  • the direction of illumination is angled in such a way that specularly reflected light from the probe and sample follows the reciprocal path 720.
  • scanner assembly 703 may at least partially block this path of direct illumination. Means for overcoming this obstruction, for instance by directing light through an opening in the side of scanner assembly 703 and past the probe mount 702, may be somewhat cumbersome.
  • Another alternative embodiment uses a light source positioned substantially beneath scanner assembly 703 so that sample and probe are illuminated from close range, for instance by an LED (light-emitting diode) or a fiber optic light source.
  • a light source positioned substantially beneath scanner assembly 703 so that sample and probe are illuminated from close range, for instance by an LED (light-emitting diode) or a fiber optic light source.
  • This probe microscope system concerns minimizing the risk of collisions when inspecting objects with undulating topography.
  • some raised portion of the sample 104 may contact either probe 701 or objective lens 709 with the attendant risk of damage to those elements.
  • lens 709 may be struck by some raised portion of sample 104 distant from the probe location whilst the stage is in motion.
  • probe 701 may be struck by some raised portion of sample 104 when stage 105 is in motion.
  • probe 701 In order to minimize the risk of such collisions, it is advantageous to position probe 701 so that it is approximately at the mid-point of the working distance of objective lens 709, which is to say that when lens 709 is focused on a flat sample, probe 701 is separated from the sample 104 by half the distance that lens 709 is separated from the sample.
  • a sample with a protrusion of height equal to the working distance divided by 2 can only just strike probe 701 when the stage is in motion.
  • the same size of sample protrusion (working distance divided by 2) can just strike lens 709.
  • the height separation between probe 701 and the focal plane of lens 709 may be reduced such that minimal time is spent in adjusting stage 705 when changing imaging mode from probe to optical viewing, and 5 vice-versa.
  • the stage may then be translated to place some portion of the sample beneath lens 709.
  • Motor 706 is commanded to position stage 705 such that lens 709 is focused onto the surface of the sample. At this time, probe 701 is clear of the sample surface since it is
  • Sample 104 can be translated laterally over surface 115 to select the field of view.
  • the stage 105 can be commanded to translate a pre-programmed lateral displacement which causes the probe
  • Probe 701 can be above the selected region of sample 105. Air supply to air bearings 401-403 of stage 105 can then be disconnected by valve 410 and vacuum pump 411 can be connected to an bearings 401-403 so that stage 105 is drawn firmly to surface 115 of block 102. Probe 701 can
  • probe 701 may be continuously examined using oblique viewing lens 710 since the image through this lens remains in focus on probe 701 as probe 701 approaches the sample.
  • an in-focus view of the sample 104 may also be visualized through lens 710.
  • probe imaging the probe may be withdrawn, air bearings 401-403 re-energized, and the sample moved to some new location for imaging.
  • Figure 8C illustrates the mounting arrangement for scanner 703 on bracket 704.
  • Bracket 704 has three ball bearings 882, 883, 884 mounted on it.
  • Scanner 703 has corresponding contact regions 885, 886 and 887 which engage the three ball bearings and kinematically locate scanner 703 on bracket 704.
  • Contact region 885 is flat and engages ball bearing 882.
  • Contact region 886 is conical and engages ball bearing 883 whilst contact region 887 is in the form of a slot and engages ball bearing 884.
  • a clamp 888 serves to force the scanner 703 tightly onto the ball bearing mounts.
  • An electrical connector 813 is mounted on the rear of scanner 703 and mates with a corresponding electrical connector 880 which is mounted loosely on bracket 704, such that whilst connectors 813 and 880 make reliable electrical contact they do not affect the positioning of scanner 703 on bracket 704, which is solely dictated by the kinematic mounting arrangement formed by the ball bearings and contact points described above.
  • FIG 8A shows the internal structure of scanner 703, which is identical to that of Application Serial No. 07/850,669, with some notable exceptions.
  • Scanner 703 consists of a body 815 in which is mounted a piezoelectric tube scanner 870. Mounting points 885, 886 and 887 are machined in body 815 at the fixed end of tube scanner 870.
  • the scanner was used to translate the sample in the microscope, which was mounted on the free end of the tube scanner, whilst the probe and optical deflection detection system was static relative to the scanner body. For a large sample system it is advantageous to scan the probe rather than the sample since the mass of the probe is generally smaller and is relatively constant.
  • probe 701 is a piezo ⁇ electric probe with batch-fabricated integral tip and is used to sense the surface topography of sample 104.
  • Probe 701 is kinematically mounted onto probe mount 702, which makes electrical contact with probe 701.
  • Probe mount 702 is attached to the free end of tube scanner 870 which incorporates a fixture 830, similar to the similarly numbered fixture in Application Serial No. 07/850,669.
  • Position sensing photodiodes 808, 814 and 816 are identical to the similarly numbered photodiodes described in Application Serial No.
  • FIG. 8B illustrates the mounting of fixture 830, which, for example, may be glued to the free end of tube 870 leaving exposed regions to which probe mount 702 may also be attached.
  • Figure 8D illustrates probe 701.
  • a piezo-cantilever chip 891 includes a piezo-resistive cantilever 893 and is glued to an alumina plate 892 using glue and standard IC mounting techniques or other alignment methods.
  • Plate 892 includes three rectangular slots 849, 850 and 851 which are precisely laser machined in alumina plate 892 and are oriented at an angle of 120 degrees with respect to each other. Slots 849, 850 and 851 form kinematic mounting points which align probe 701 precisely in probe mount 702 with a precision of less than 1 micron, using principles outlined in Application Serial No. 07/850,669.
  • Piezo-resistive cantilever 893 and substrate chip 891 are microfabricated monolithically from a silicon wafer, using processes described in Application Serial No. 638,163.
  • the piezo-resistive cantilever 893 includes two flexure arms 841 and 854 which are attached to cantilever end part 855, all of which are highly doped, using standard semiconductor fabrication methods, to make them electrically conductive.
  • Also fabricated on the end part 855 is a high aspect-ratio tip 840 which is used to probe the surface of the sample 104. As tip 840 is scanned over the surface of sample 104 interatomic forces cause the tip to rise and fall with height variations of the surface of sample 104.
  • the deflection of cantilever 104 is a direct measure of the surface height of sample 104 in the region of the tip.
  • the electrical resistance of flexure arms 841 and 854 is modified as the cantilever is deflected because of the piezo-resistive effect.
  • an electrical current may be passed from a metallic contact pad 848 on plate 892 through wire 846 onto a contact pad 844, along a conductive track 852, through flexure arm 854, across end part 855, along flexure arm 841, along a conductive track 853, through a contact pad 843, and finally through a wire 845 to contact pad 847, and the resistance to current flow is proportional to the cantilever deflection.
  • This change in resistance may be converted into a voltage variation using a bridge amplifier circuit, as is well known in the art.
  • Conductive tracks 852 and 853 may be fabricated by depositing and patterning a metal film using standard semiconductor techniques.
  • contact pads 848 and 847 may be silk screened onto alumina substrate 892.
  • other types of probes used in scanning probe microscopes such as STM probes or conducting cantilevers or tips, may be substituted for piezo-resistive cantilever 893.
  • Figure 8E illustrates probe 701 and probe mount 702, including mirror 723.
  • Probe mount 702 includes three ball bearings 895, 896 and 899 which are attached to its surface. Ball bearings 895, 896 and 899 are arranged in the same pattern as slots 850, 851 and 849, and serve to kinematically locate probe 701 in probe mount 702, such that tip 840 can be reliably positioned relative to scanner body 815 within an error of 20 microns.
  • Springs 897 serve to force probe 701 against the three ball mounts and also make electrical contact to contact pads 848 and 847.
  • a flexible circuit board 898 connects springs 897 independently to the bridge amplifier circuit in order to complete the cantilever connection. Amplification and processing of the signal from probe 701 are carried out by methods well known in the art and may advantageously be performed with the apparatus described in Application Serial No. 07/850,669.
  • probe 701 is attached to a horizontal translation stage 1000 for coarse translation of the probe over a static sample 104.
  • stage 1000 may ride on air bearings 1001 over the surface of the sample or over a surface 1002 which supports the sample.
  • FIG. 10B Another alternative embodiment is illustrated in Figure 10B.
  • sample 104 is mounted on the underside of a horizontal translation stage 1003 and faces a static probe 701.
  • This configuration has an advantage over the configuration shown in Figure 10A in that the mechanical path of the translation stage is smaller.
  • air bearings 1001 for the configuration shown in Figure 10A must be spaced further apart than those of the configuration shown in Figure 10B to provide for the full range of translation over the sample.
  • the mechanical path of the configuration shown in Figure 10B is therefore much smaller, providing increased positioning stability of probe 701 relative to the sample 104.
  • FIG. IOC A further alternative embodiment is illustrated in Figure IOC.
  • probe 701 is mounted on a horizontal translation stage 1004 and faces a static sample 104 which is mounted above it.
  • This embodiment has the same advantage as that shown in Figure 10B, that is, it has a smaller mechanical path than the embodiment shown in Figure 10A.
  • the description of the above embodiments is intended to be illustrative and not limiting. Many alternative embodiments in accordance with the broad principles of this invention will be apparent to those skilled in the art.

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  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

L'invention décrit une platine de translation horizontale de grandes dimensions (105) conçue pour un microscope à sonde de balayage ou un autre instrument. La platine de translation (105) comporte des coussinets à air (401, 402, 403) lui permettant de flotter au-dessus d'une surface plane. La platine de translation (105) est montée cinématiquement sur un guide de platine d'échantillon (219), de telle manière que sa position horizontale est définie par le guide de platine d'échantillon (219) tout en ayant la possibilité de se déplacer dans un sens perpendiculaire à la surface plane. Pour positionner un échantillon, on agit sur les coussinets à air (401, 402, 403) et le guide de platine d'échantillon (219) déplace la platine de translation (105) vers la position souhaitée. On applique ensuite une force d'attraction, de préférence, une aspiration dans les coussinets à air (401, 402, 403), afin de maintenir la platine de translation (105) fermement contre la surface de support, tandis qu'on analyse l'échantillon (104). Ce dispositif est particulièrement approprié pour un microscope à sonde de balayage servant à analyser un échantillon de grande dimension.
PCT/US1993/005393 1992-06-12 1993-06-10 Systeme a platine de grandes dimensions pour microscopes a sonde de balayage et d'autres instruments WO1993025928A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU44079/93A AU4407993A (en) 1992-06-12 1993-06-10 Large stage system for scanning probe microscopes and other instruments

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US89765792A 1992-06-12 1992-06-12
US897,657 1992-06-12

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998038501A1 (fr) * 1997-02-28 1998-09-03 Thermomicroscopes Corporation Microscope a sonde de balayage permettant d'obtenir des vues descendantes et ascendantes
ES2125165A1 (es) * 1996-04-30 1999-02-16 Baro Vidal Arturo Microscopio de fuerzas de bajo ruido, con amplio campo de visibilidad.
EP0935137A1 (fr) * 1998-01-27 1999-08-11 Hitachi Construction Machinery Co., Ltd. Microscope à sonde de balayage
EP3257621A1 (fr) * 2016-06-13 2017-12-20 Eitel, Rudolf Dispositif de positionnement variable et guide d'un objet ou d'un porte-objet a usiner et/ou a mesurer
CN113252945A (zh) * 2021-05-18 2021-08-13 中国科学院苏州纳米技术与纳米仿生研究所 用于扫描隧道显微镜中移动样品的装置和方法

Citations (2)

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Publication number Priority date Publication date Assignee Title
US4556317A (en) * 1984-02-22 1985-12-03 Kla Instruments Corporation X-Y Stage for a patterned wafer automatic inspection system
US4999494A (en) * 1989-09-11 1991-03-12 Digital Instruments, Inc. System for scanning large sample areas with a scanning probe microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4556317A (en) * 1984-02-22 1985-12-03 Kla Instruments Corporation X-Y Stage for a patterned wafer automatic inspection system
US4999494A (en) * 1989-09-11 1991-03-12 Digital Instruments, Inc. System for scanning large sample areas with a scanning probe microscope

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2125165A1 (es) * 1996-04-30 1999-02-16 Baro Vidal Arturo Microscopio de fuerzas de bajo ruido, con amplio campo de visibilidad.
WO1998038501A1 (fr) * 1997-02-28 1998-09-03 Thermomicroscopes Corporation Microscope a sonde de balayage permettant d'obtenir des vues descendantes et ascendantes
US5854487A (en) * 1997-02-28 1998-12-29 Park Scientific Instruments Scanning probe microscope providing unobstructed top down and bottom up views
EP0935137A1 (fr) * 1998-01-27 1999-08-11 Hitachi Construction Machinery Co., Ltd. Microscope à sonde de balayage
US6278113B1 (en) 1998-01-27 2001-08-21 Hitachi Construction Machinery Co, Ltd. Scanning probe microscope
EP3257621A1 (fr) * 2016-06-13 2017-12-20 Eitel, Rudolf Dispositif de positionnement variable et guide d'un objet ou d'un porte-objet a usiner et/ou a mesurer
CN113252945A (zh) * 2021-05-18 2021-08-13 中国科学院苏州纳米技术与纳米仿生研究所 用于扫描隧道显微镜中移动样品的装置和方法
CN113252945B (zh) * 2021-05-18 2022-08-23 中国科学院苏州纳米技术与纳米仿生研究所 用于扫描隧道显微镜中移动样品的装置和方法

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