WO1993005962A1

WO1993005962A1 - Device for forming thin film

Info

Publication number: WO1993005962A1
Application number: PCT/JP1992/001212
Authority: WO
Inventors: Yasuhiro Hashimura; Kenichi Masaki
Original assignee: Nissha Printing Co., Ltd.
Priority date: 1991-09-26
Filing date: 1992-09-24
Publication date: 1993-04-01

Abstract

A device for forming a thin film more uniform in thickness and improved in smoothness on the surface of a matter to be printed, which is provided with: an intaglio printing roller (3) having a large number of ink cells (3a); an intaglio printing roller driving device (31) for driving said intaglio printing roller; an ink supply device (5) for supplying ink to the surface of said intaglio printing roller; an inking roll (51) for forcibly feeding ink fed on the surface of said intaglio printing roll into ink cells; an inking roll driving device (55) for rotating said inking roll; a doctor roll (52) for scratching off a fixed quantity of ink forcibly fed into the ink cell by said inking roll; a doctor roll driving device (56) for rotating said doctor roll; control means (103, 101, 108, and 109) for controlling said inking roll driving device, doctor roll driving device, and intaglio printing roll driving device so that the relation, Vp < Vi < Vd, is established on the assumption that Vi, Vd, and Vp, indicate the circumferential velocities of said inking roll, doctor roll, and intaglio printing roll, respectively; a printing roll (4) having a projecting part (41) to be in contact with said intaglio printing roll and for transferring ink in the cell of said intaglio printing roll onto said projecting part; and a printing table (6) for fixing the matter to be printed (61) and transferring ink spread on said projecting part of printing roll to the surface of said printed matter while bring said matter to be printed into contact with said projecting part of printing roll.

Description

Detail

Title of invention

Thin film type ^ Equipment

Technical field

The present invention relates to a thin film forming apparatus capable of forming a thin film having a uniform thickness.

Background art

As a thin film forming apparatus for forming a polymer thin film pattern used for a liquid crystal alignment film and other components, for example, as shown in FIG. 8, an intaglio roll 150 having a large number of ink cells 150a on the entire circumference is used. And an ink supply unit 15 1 for filling the ink in the ink cell, a printing roll 15 2 having a convex portion 15 2 a into which the intaglio P-roll 15 O ink is transferred, and a printing roll 15 2 There is a thin-film forming apparatus comprising a printing table 154 for fixing the printing material 153 to which the ink is transferred (see Japanese Patent Publication No. Hei 3-1-1630). In such a thin film forming apparatus, the printing rolls 15 2 and the intaglio rolls 150 are driven by a driving motor 15 5 of the printing rolls 15 2 to form a pair of pinions 15 6 and 15 6. The intaglio roll 150 is configured to be driven synchronously via the intermediary, so that a uniform thin film is formed on the printing medium.

However, when the thin film forming apparatus was operated at a high speed, there was a problem that the doctor blade did not completely supply ink into the cells of the intaglio roll, and it was difficult to form a thin film having a uniform thickness.

Accordingly, an object of the present invention is to provide a thin film forming apparatus which can solve the above-mentioned drawbacks and can form a thin film having a more uniform thickness on the surface of a printing medium.

Disclosure of the invention In order to achieve the above object, according to the present invention, it is possible to control the rotation speed difference between the three mouths within a predetermined range by independently moving the inking roll, the doctor one mouth and the intaglio roll. The configuration is as follows.

That is, according to one aspect of the present invention, there is provided an ω plate roll having a large number of ink cells, an intaglio roll drive device for rotating the intaglio roll, and an ink for supplying ink to the surface of the intaglio roll. A supply device, an ink roll for pushing the ink supplied to the surface of the upper IE intaglio roll into the ink cell, a synch roll driving mechanism g for rotating the ink roll, and the above ink ring. The doctor roll that scrapes the ink pushed into the ink roll, the doctor roll drive device that rotates the doctor roll, and the peripheral speed of the inking roll VI, and the doctor port

- Le peripheral speed of the [nu · iota, when the circumferential speed of the upper K intaglio roll and v _{_P} ^, v _P <the ink such that V i rather V _d> Gro Ichiru Tando device and the doctor roll Control means for controlling the driving device and the intaglio printing device driving device; and a printing roll having a convex portion which comes into contact with the printing plate roller and transferring ink in a cell of the printing plate roll onto the convex portion. And a printing table for fixing the printing medium, contacting the printing medium with the projections of the printing roll, and transferring the ink on the projections of the printing roll to the surface of the printing medium. .Constitute.

According to the above configuration, the peripheral speed of the intaglio roll is set such that the peripheral speed of the intaglio roll is less than the peripheral speed of the inking roll. When the ink is supplied from the ink supply device E to the surface of the ink, the ink is pushed into the cells of the intaglio roll by the above-mentioned means by the above-mentioned means, and the ink can be removed by the doctor roll. Thereby, the ink can be reliably filled in the cells of the intaglio roll.

Simple sharps of the drawing These and other objects and features of the present invention will become apparent from the following description taken in conjunction with preferred embodiments of the accompanying drawings. FIG. 1 is a perspective view showing a first embodiment of the thin film forming apparatus of the present invention. FIG. 2 is a schematic side view showing a first embodiment of the thin film forming apparatus S. FIG. 3 is a conceptual diagram showing a driving mechanism of the thin film forming apparatus.

FIG. 4 is a block diagram showing a control mechanism of the thin film forming apparatus.

5 and 6 are a perspective view and a sectional view showing a second embodiment of the thin film forming device fi of the present invention.

Fig. 7 is the? It is sectional drawing which shows the modification of an Example. FIG. 8 is a perspective view showing a conventional example of a thin film forming equipment.

BEST MODE FOR CARRYING OUT THE INVENTION

Prior to the description of the invention, the same parts will be provided with the same reference symbols in the attached drawings.

Hereinafter, the first embodiment according to the present invention will be described in detail based on FIGS.

In the thin film forming apparatus according to the first embodiment shown in FIG. 1, 1 is a base, 2 is a support frame having a pair of support walls 2a and 2a facing each other, 3 is an intaglio roll, 4 is a printing roll, 5 is an ink supply device and 6 is a printing table.

A support frame 2 is formed in the center of a base 1 made of a rectangular base, and the support frame 2 (the intaglio roll 3 and the printing roll 4 are rotatably supported. The ink supply device 5 is provided with a printing table 6 movably arranged on the upper surface of the base.

The intaglio roll 3 is generally referred to as an nicks roll, and has a body fixed to a rotating shaft. The body has an eyebrow formed on the surface of a core made of iron. , 3a. Each ink cell 3a has a depth of, for example, 0 to several tens im. The body contacts the convex portion 41 of the arm of the print roll 4 with a constant pressure. An intaglio roll moving motor 31 is attached to one end of the rotation shaft of the intaglio roll 3 and an end protruding from the support 2a.

The ink supply device 5 includes an inking roll 51 and a doctor device 52. Doctor S52 consists of a doctor roll. The moving body 50 that moves in the axial direction of the ink roll 51 along the two guide renoles 53 provided on the support frame 2 has an ink nozzle 50a. Ink is supplied from the ink nozzle 50 a to the space between the ink roll 51 and the doctor roll 52 and on the peripheral surface of the intaglio roll 3. The ink has, for example, a viscosity of several tens to 30.000 cps, and is composed of a mixture of a synthetic resin or a resin precursor and a solvent. As shown in FIG. 3, the inking roll 51 and the doctor roll 52 can be rotated by driving motors 55 and 56, respectively. In addition, the doctor roll 52 can change the pressure at which the doctor roll 52 comes into contact with the intaglio roll 3 by driving two motors 57 and 57, and can adjust the axial position S by another motor 58. . When the peripheral speed v _P of the intaglio roll 3 is _{30≤v P 30000 Cm m / sec)} , the peripheral speed of the inking roll 51 [nu, is 27≤ v, ≤ 27 000 (mm / se c), the doctor roll 52 © The peripheral speed v _d is set to 24≤ν «≤2 4000 '(.m / sec), and v _P <Vi <v _d . Here, since the inking roll 51 is for supplying ink to the intaglio roll 3, the ink can be spread on the surface of the intaglio roll 3 by setting Vpv. In addition, the doctor roll 52 scrapes the ink on the surface of the intaglio roll 3 and measures the ink.

By doing so, the ink can be scraped off. The greater the difference in peripheral speed, the greater the ink Since the scraping effect becomes large, the two roles can be shared between the ink supply and the ink scraping by setting v _d .桔果be configured as expression you _e on K is because the reason for the numerical limitation obtain adequate printability in the peripheral speed of each mouth Ichiru is satisfied ', as shown in FIG. 2, the intaglio roll 3 When the ink rotates in the clockwise direction, the ink dropped onto the surface of the KI plate roll 3 from the inking nozzle 50a by the counterclockwise rotation of the inking roll 51 firstly receives the intaglio roll by the inking roll 51. The ink is applied to the surface of the intaglio roll 3 while being pressed into the cell 3a of No. 3. After that, the surplus ink on the surface of the intaglio D-roll 3 is measured and scraped by the doctor roll 52. In this way, a highly uniform ink film is formed on the surface of the intaglio roll 3.

The printing roll 4 has a metal body fixed to the rotating shaft, and the body has a rubber such as butyl rubber, a synthetic resin such as a nylon resin, or a photosensitive rubber or a photosensitive resin. The convex portion 41 is made of high quality, and the ink of the intaglio roll 3 is transferred to the convex portion 41. A first vinylon 81 is fixed to one end of the rotation shaft of the intaglio roll 3 and an end protruding from the support wall 2a. The other end of the rotation axis of the print roll 4 and the end protruding from the support wall 2a are connected to the drive motor for the rear of the print roll initial position housing 42 via the clutch 44 (see FIG. 3). Have been.

The printing table 6 is cut on the base 1. As shown in FIG. 1, on the upper surface of the base 1, as shown in FIG. 1, a pair of support walls 2 a, 2 a of the support frame 2, and a printing position B below the print port 4 and a support wall 2 a , 2a, from the lower side of the printing medium receiving side to the printing medium receiving side, and the lower side between the support walls 2a, 2a to the printing medium unloading side. *: Unloading position C Guide rails 62 are fixed on both sides between the two. The printing table 6 is located on the base 1 along the guide rails 6 2 and 62. First, move between placement position A, printing position SB, and unloading position SC. The printing table 6 has a plate-shaped printing medium 61 placed on its upper surface, determines the position of the printing medium 61, and holds it. On the lower end surface of the printing table 6, a lag .86 parallel to the rails 62, 62 is fixed. A fifth binion 85 is meshed with the rack 86, and the printing table 6 is configured to move forward and backward together with the rack 86 by the forward / reverse rotation of the fifth binion 85. The fifth binion 85 is fixed to a print table drive shaft 87 rotatably mounted between the support walls 2a, 2a, and is connected to one end of the print table drive shaft 87 by the support wall 2a. A fourth pinion 84 is fixed to the protruding end, and a main motor 7 is attached to the other end protruding from the support wall 2a. The main motor 7 drives the printing roll 4 and the printing table 6. The fourth pinion 84 is connected to the first pinion 81 via a third binion 83 and a second binion 82 rotatably supported by one of the support walls 2a. The rotation direction 5 is connected so as to rotate in the reverse direction with respect to the first binion 81. Therefore, the rotation of the print roll 4 and the disappearance of the slide of the print table 6 move synchronously in a unique relationship g. Then, the printing material 6 1 contacts the printing port 4 at the printing position B of the printing table 6, and transfers the ink of the convex portion 4 1 of the printing roll 4 onto the printing material surface 6 1. Print and form. Therefore, the rotation of the printing roll 4 and the sliding movement of the printing medium 61 are performed when the first vinyl 81 and the second * 3 * 4 vinyls 81, 82, 83, and 5 Mechanically performed by the combination of the binion 85 and the rack 86, so that synchronization is smooth.

As shown in FIG. 3, a toothed clutch 43 is provided between the printing roll 4 and the table 6 to completely stop synchronous operation during non-printing. Has been obtained. This is because the printing roll 4 is always rotated only in a certain direction, so that it is not necessary to perform the reversing operation, and the roll releasing operation for preventing the press-contact between the intaglio roll 3 and the convex portion 41 of the printing roll 4 is performed. This is to make it unnecessary. That is, when the drive motor 42 for initial position return is operated, the clutch 43 is cut off to cut off the power transfer of the boat power of the main motor 7, and then the clutch 44 is connected to thereby restore the initial position. The driving force of the stagnant drive motor 4.2 is transmitted to the print roll 4 so that the printing port 4 that has completed the printing operation is rotated to the initial position E in the same direction as the rotation during the printing operation. On the other hand, during the printing operation, the clutch 44 is disengaged so that the driving force of the power motor 42 for returning to the initial position is not transmitted, and only the driving force of the main motor 7 is transmitted to the printing roll 4. Keep it.

Here, the rotation speed control mechanism of the intaglio roll 3 and the printing roll 4 will be described. ..

Fig. 4 shows the control unit. The rotational speeds of the intaglio roll 3, the printing roll 4, the in-growth roll 51, and the doctor roll 52 are determined by the setting device: L04, 10.5. After being input to the control unit 103, a command voltage signal (control signal) is output from the main control unit L03. This signal is input to a sub-aperture 101 for an intaglio opening, a servo amplifier 102 for a printing roll, a servo amplifier 108 for an inking roll, and a sub-amber 110 for a doctor roll. These amplifiers 101, 102, 108, and 109 are OA version motor 31, main motor 7, inking roll drive motor 55, dogter roll drive motor 56. Are controlled independently of each other. Intaglio roll 3, printing roll 4, inking roll 51, Doc-roller-The rotation speed of roll 52 is determined by rotation detection by resolvers 106, 107, 112, 113. The detection result is a servo amplifier (servo amplifier) The signals are input to 101, 102, 108, and 109, and the rotation of the motors 31, 7, 55, and 56 is controlled. Therefore, the intaglio roll speed setting device 104 and the printing roll speed estimator L05 are used to set the rotational speed difference between the intaglio roll 3 and the printing roll 4 to a desired value of 0 to 1%. When the set value is input to the main control section 103, the intaglio gap IK motor 31 and the main motor 7 are rotated by the operation of the sam-bombers 101 and 102 so that the respective rotational speed differences become the desired values described above. Controlled. Here, the difference in the rotation speed between the intaglio roll 3 and the printing roll 4 was set to 0 to 1% because, when the rotation speed difference became larger than this, the convex portion 41 of the printing roll 4 was elastically deformed by the printing roll 3. This is because accurate pattern printing cannot be performed. Further, by the intaglio roll speed setter 104 and the fin King roll speed setter 110 and the doctor roll speed setter 111, when the peripheral speed v _P of the intaglio roll 3 is 30≤v _P ≤30000 of (mm / sec), in the peripheral speed V of the king roll 51, is 27≤V, and ≤27000 (mm / sec) peripheral speed of s doctor roll 52 v _d is 24≤ν ≤24000 Cm mZs ec), and, v _P rather v [<v _d J: Inject and set the values to the main control unit 103, and the servo amplifiers 101, 108.109 will operate to activate the intaglio roll drive motor 31, the inking roll drive motor 55 and the doctor roll The rotation of each of the driving motors 56 is controlled so that the rotation speed of the motor 56 satisfies the above expression.

Here, the detection of the rotation speed (peripheral speed) of each of the intaglio roll 3, the printing roll 4, the inking roll 51, and the dough roll 52 will be described. The peripheral speed of each roll can be obtained from the formula of (the peripheral speed of each roll) = (rotational speed) (2? Rr), where r is the radius of each roll. Or, if the pitch between the adjacent rolls of the above four rolls, for example, the pitch between the intaglio roll 3 and the printing port 4 is Ρ, (the peripheral speed of the printing roll) = (the number of rotations) 2 (Pr)] Can also be obtained by the following calculation formula. Here, how to determine the pitch P will be described. The intaglio roll 3 is made of metal, and its radius r is constant. The cylinder (body) of the printing roll 4 itself is made of metal, and its radius R is constant. The convex portion 41 of the printing roll 4 is made of a cell, and its thickness t changes. The thickness t can be measured with a sensor. Therefore, the relationship between these values and the pitch P between the intaglio roll 3 and the printing roll 4 can be obtained by the formula of Pr + t + R. The inking roll 51 and the doctor port 52 are both made of a soft material such as rubber. However, if the radius of these ports is assumed to be constant, the rotational speed is measured by an encoder, and By doing this, the peripheral speed can be obtained.

According to the above configuration, first, the ink is supplied from the ink supplying device 5 into the cells 3 a,..., 3 a of the intaglio roll 3, and then the ink is supplied to the intaglio roll 3 by the inking roll 51. Ink is pressed into cells 3a,..., 3a, and doctor meter 52 performs ink measurement: E scraping. After that, the print table 6 fixes the print body 61 in a predetermined position, and then moves the print body 61 from the state where the printing medium is placed A to the unloading position C side. At this time, the toothed clutch 43 is connected, and the printing roll 4 and the intaglio roll 3 are synchronously rotated by the above-described control mechanism by the main motor 7 and the drive motor 31 which are independent of each other, or a desired rotation speed difference. Rotate with it. On the other hand, the rotation of the printing roll 4 rotates the first pinion 81, and accordingly, the second pinion 82, the third pinion 83, the fourth pinion 84, and the fifth pinion 85 rotate respectively. The printing table 6 moves to the unloading position C via the printing position B together with the rack 86 in synchronization with the rotation of the printing roll 4. At this time, the ink on the CD plate roll 3 moves onto the projections 41 of the printing roll 4, and the ink is transferred to the printing substrate 61.

Conversely, the printing table 6 is moved from the position at the unloading position C to the placing position A. In this case, the transmission mechanism of the driving force from the main motor 7 is disconnected by the toothed clutch 43, and then the main motor 7 is rotated in the reverse direction. Moves from the unloading position C via the printing position B to the loading fi position SA. Further, the clutch 43 is disconnected, the clutch 44 is connected, and the printing port initial position S return bile motion monitor 42 is driven to return the printing roll 4 to the initial position.

Next, a comparison will be made between the thin film forming apparatus according to the first embodiment and the thin film forming apparatus shown in FIG. 8 as a conventional example.

Conditions of the device according to the first embodiment

Intaglio roll diameter 18 Omm

Rotation speed 350mm / sec

Inking roll diameter 80mm

Made of ethylene propylene rubber

Contact pressure (Indentation replacement)

-0.08 mm / sec

Rotation speed 340mm / sec

Doctor roll diameter 80mm, EPT (ethylene

Propylene turbo limer) Rotation speed 300 mm / sec

Printing roll diameter 250mm

Rotational speed.350, 3mm / sec

Conventional equipment conditions

Intaglio roll diameter 180mm

Rotation speed 400 mm / sec

No Synchro Nore Doctor blade plastic

Printing roll diameter 3 6 O mm

Rotation speed 400 mm / sec

However, in the conventional device, as shown in Fig. 5, the intaglio roll and the printing roll are driven synchronously by a pair of pinions.

Under such conditions, when a thin film was formed on a glass substrate, the thickness of the thin film was measured at arbitrary 10 locations. As a result, based on the average value X and the standard deviation of the measured film thickness, (h / x) X I 00 is defined as the degree of smoothness (). In the apparatus according to the conventional example, it was 7 to 10%, whereas in the apparatus according to the first embodiment, it was 5%, which indicates that the apparatus was excellent in smoothness. Accordingly, the tendon dressing according to the first embodiment can form a thin film having a more uniform thickness than the device according to the conventional example.

According to the first embodiment, the peripheral speed of the inking roll 5.1 is set to be larger than the peripheral speed of the intaglio roll 3, and the peripheral speed of the dog bite roller 52 is set to be larger than the peripheral speed of the inking roll .51. Was increased. That is, since the peripheral speed of the inking roll 51 is larger than the peripheral speed of the intaglio roll 3 (V pv,), the ink can be surely spread on the surface of the intaglio roll 3. Further, since the peripheral speed of the doctor roll 5 2 is greater than the peripheral speed of the intaglio roll 3 (v _P rather v _d), it is possible to scrape the ink. Further, since the peripheral speed of the doctor roll 52 was set to be higher than the peripheral speed of the plate roll 3 (ViVd), the greater the difference between the peripheral speeds, the greater the ink scraping effect. Roles can be divided between ink supply and ink removal. As a result, first, the ink is supplied into the cell of the intaglio roll by the ink roll, and the ink is spread on the surface of the intaglio roll. Then, the doctor roll scrapes off the excess ink. As a result, it is ensured that the ink is filled into the cells of the intaglio roll. Since a fixed amount is measured, a thin film with a uniform thickness can be formed.The intaglio roll 3 and the printing roll 4 are not driven synchronously by a gear mechanism such as a pinion, but are driven independently of each other. Since the motors are driven by the motors 31 and 7, the rotation speed difference between the two rolls can be set to an arbitrary value including 0 compared to the conventional vision mechanism, and the rotation speed difference can be set within 0 to 1%. It can be set to the desired value. Therefore, when the peripheral speeds of the intaglio roll 3 and the printing roll 4 are completely synchronized, that is, when the rotation speed difference is 0, when the ink of the intaglio roll transfers to the convex portion of the printing roll, the cell of the rotation plate becomes Since the ink is transferred according to the shape, the ink can be more reliably transferred to the convex portions, and a smooth thin film having a uniform thickness can be formed on the surface of the printing medium. In addition, if the peripheral speeds of both rolls are not synchronous with each other and the rotation speed difference has a slightly different peripheral speed in a range of more than 0 and 1% or less, the ink on the intaglio roll 4 will not be printed. When the ink on the intaglio roll rolls onto the convex portion 4 1 of the roll 4, the ink in the circumferential direction of the convex portion of the printing roll does not transfer to the cell shape of the plate but on the basis of the difference in the rotation speed of the rain roll. Acts on the ink, and the ink is flattened on the projections 41 and the flattened ink is transferred from the printing opening 4 to the printing material 61, so that the thickness is more uniform and smoother. A thin film can be formed on the surface of the printing medium 61. In other words, depending on the conventional vinyl, the play between the two vinyls was too large, so the rotation speed difference between the Gil roll 3 and the print roll 4 could be set to an arbitrary value within 0 to 1%. Although it was difficult, as in the first embodiment, each roll was driven independently, and both drives were driven at a desired rotational speed difference by a control mechanism. It can be controlled so that the speed difference is set to any value within 0 to 1%.

In addition, between the print roll 4 and the table 6, there is a synchronous operation during non-printing. Since the clutch 43 for completely shutting off the operation is provided, the print roll 4 always rotates only in a fixed direction, and there is no need to perform a reversing operation, so that the operation efficiency is increased. Therefore, it is not necessary to perform the roll cutting operation to prevent the press contact between the plate roll 3 and the convex portion 41 of the printing roll 4.

Further, since the intaglio roll 3 and the printing roll 4 are driven by independent motors 31 and 7, respectively, the press-contact fi between the intaglio roll 3 and the convex portion 41 of the printing roll 4 is adjusted by a pair of press-contact amount adjusting motors. Even if it is changed by 32 and 32 (see FIG. 3), it is possible to adjust the peripheral speed independently of each other, and it is also possible to obtain a pressure contact ink which is uniform over the entire length of the roll.

'Next, a second embodiment of the present invention will be described in detail with reference to FIGS.

The configuration of the second embodiment is substantially the same as the configuration of the first embodiment, and therefore, different points will be mainly described.

In addition, an inking roll 51 is arranged on the front side of the uppermost surface of the intaglio roll 3 with respect to the rotation direction from the uppermost position 125, and a doctor as an ink weighing device is disposed on the rotation direction side of the uppermost surface 125. Roll 52 is placed.

As shown in FIG. 6, the inking roll 51 is disposed closer to the rotation direction than the uppermost portion 125 of the surface of the intaglio roll 3, and is in pressure contact with the intaglio roll 3. Inking roll 5 1 is the ink meter :! The ink 1 2 1 may be filled into the cell 3 a by being pressed against the surface of the intaglio roll 3 with a contact pressure weaker than that of the doctor roll 52 functioning as the device S. In this case, there is an effect that there is no extreme wear of the surface of the ink roll 51. The inking port 51 and the intaglio roll 3 may rotate at the tangential speed in the same direction at the contact portion, or may rotate at the tangential speed in the opposite direction. The ink has a viscosity of, for example, about 10 to 30,000 c.p.s., and also uses a foaming ink consisting of a mixture of a synthetic resin or a resin precursor and a solvent. it can. The ink is supplied from the ink supply nozzle 50a and is rotated by the rotation of the inking roll 51.The ink is transferred to the new ink 1 2 1 supplied on the intaglio roll 3 and to the positive convex portion 4 1 of the printing opening 4. When the ink remaining on the IS plate roll 3 goes around once and the ink becomes high in density, it is mixed with the ink pool 1 27 and transferred to the elastic protrusions 4 1 of the printing roll 4. Has a desired degree of immersion.

As shown in Fig. 6, the new ink 1 2 1 can be supplied to the surface of the intaglio roll 3 by placing the tip of the ink supply nozzle 50a on the inking roll 51 and using the new ink 1 There is a method in which 2 is dropped, ink is held on the surface of the inking roll 51, and ink is supplied to the surface of the Dfl plate roll 3 by rotation by pressing against the surface of the intaglio roll 3. Also, as shown in Fig. 7, an ink pan 130 is provided to immerse the lower part of the intaglio roll 3 in the ink, and depending on the degree of evaporation of the ink consumption fi. The ink may be collected on the surface.

According to the above configuration, first, the new ink 121 is supplied onto the inking roll 51 by an appropriate means such as the ink supply nozzle 50a, and the ink is supplied to the IHI plate roll 3 and the ink roll 5. It is carried to the contact part with 1 and the ink pool 1 2 7 is formed. The ink reservoir 1 2 7 spreads down the surface of the plate 00 due to gravity. The surface of the intaglio roll holding the ink 1 28 comes into contact with the spread ink pool 1 27 one after another. Then, during the contact, the new ink 12 1 and the residual ink 1 28 are sufficiently mixed with each other to form an ink having a uniform distribution, and are filled into the cell 3 a by the inking roll 51. After that, the extra rolls from the cell 3a were scraped off by the Doc Roll 5 2 and counted. At the same time as fi is performed, the ink is further filled in the underfilled cell 3a, and the ink having a uniform density distribution is held in the cell 3a. In this way, the new ink 1 2 1 and the residual ink 1 2 7 come into contact with the large ink reservoir 1 2 7, so they mix well, and even with high-speed rotation, print with a uniform ink distribution. It is possible to In this way, a uniform coating film is formed on the surface of the intaglio roll 3 and transferred onto the projections 4 1 of the printing roll 4, and then transferred to the surface of the printing substrate 6 1. To form a thin film.

As an example 1, under the conditions of the apparatus according to the first embodiment, an ink roll 51 was disposed on the front side of the uppermost surface 1 25 of the intaglio nozzle 3 in the rotation direction, and the liquid crystal color filter was flat. A new ink composed of a chemical film forming agent is supplied onto the intaglio roll 3 from the tip of the ink supply nozzle .50a.

In Example 1, even if printing was performed with the tangential speed of the print roll 4 increased and the print speed set to high, the new ink and the residual inches on the intaglio roll surface were mixed well. After a certain amount of ink has been filled into cell 3a, the amount of liquid crystal flat filter film forming agent held in the intaglio roll cell is uniform, and the printed film after printing is uniform. The thickness is also uniform. Also, after printing, the film thickness distribution was measured after heat treatment of the color filter and the flattening film forming agent. The average film thickness was as high as 812 persons, and the variation of the film thickness distribution was 32 A. A thin film with a low and uniform thickness can be formed.

Comparative Example 1

With an apparatus of the same configuration as above, an ink roll is placed on the rotation direction side from the top of the intaglio roll surface, and printing is performed at a print roll tangential speed of 40 OnimZ seconds. Since the time is short, the inks do not mix poorly and have an uneven density distribution. After printing, the liquid crystal alignment film forming agent is heat-treated to form a polyimide film. Compared to the measurement result of Example 1 of the present invention, the average thickness is as low as 764, and the variation in the film thickness distribution is as high as 44 A, and the film is non-uniform. :

According to the second embodiment, the inking roll is arranged on the surface on the front side with respect to the rotational direction from the top of the intaglio roll, so that the ink in the ink pool is weighed by its own weight and the intaglio orifice surface is indented. Spread. Therefore, the contact time between the residual ink and the new ink can be made longer, so that a thin film that is well mixed and has a uniform concentration distribution can be formed.

While the present invention has been fully described in connection with a preferred embodiment thereof with reference to the accompanying drawings, various changes and modifications will be apparent to those skilled in the art. Such variations and modifications are to be understood as included within the scope of the present invention, provided that they do not depart from the scope of the invention as set forth in the appended claims.

Claims

The scope of the claims

1. an intaglio roll (3.) having a number of ink cells (3a);

An intaglio roll driving device (31) for rotating the intaglio roll,

An ink supply device (5) for supplying ink to the surface of the intaglio roll; an inking roll (51) for pushing the ink supplied to the surface of the intaglio roll into the ink cells;

An inking roll driving device (55) for rotating the inking roll,

A doctor roll (52) for measuring and scraping the ink pressed into the ink cell by the above-mentioned ink roll,

The doctor roll driving device (56) that rotates the doctor roll, the peripheral speed of the inking roll is V !, and the peripheral speed of the doctor to the roll is

V. And the peripheral speed of the above HQ roll is V. And when. Control means for controlling the inking port driving device, the doctor roll driving degree, and the intaglio port driving degree so as to be ₁ (103, 101, 108, 1h 9)

A printing roll (4) having a convex portion (41) in contact with the intaglio roll and transferring ink in the cells of the intaglio roll onto the convex portion;

A printing table (6) for fixing the printing medium (61), contacting the printing medium with the projection of the printing roll, and transferring the ink on the projection of the printing roll to the surface of the printing medium; ,

A thin film forming apparatus characterized by comprising:

2. Inking roll rotation speed detection means (112) for detecting the rotation speed of the above-mentioned inking roll and inputting the rotation speed signal to the control means;

The rotation speed of the doctor roll is detected and a rotation speed signal is sent to the control means. Doctor roll rotation speed detection means (113) for inputting 93/05962,

Intaglio roll rotation speed detection means (106) for detecting the rotation speed of the intaglio roll and inputting a rotation speed signal to the control means.

2. The thin-film forming apparatus according to claim 1, wherein the control means controls the driving device g based on the rotation speed signals.

3. The thin film according to claim 1, wherein the inking roll (51) is ES-positioned in front of the uppermost portion (125) of the intaglio roll in the rotational direction of the intaglio roll. Forming equipment.

4. The thin film according to claim 2, wherein the inking roll (51) is arranged on the front side of the uppermost portion C125) of the intaglio roll with respect to the rotation direction of the intaglio roll. Forming equipment.

5. The thin film forming apparatus according to claim 1, wherein an ink holding means (130) for immersing the lower part in the ink is provided below the intaglio roll.

6. The thin film forming apparatus according to claim 2, wherein an ink holding means (130) for immersing the lower part in the ink is provided below the intaglio roll.

7. A printing port driving device (7) that rotates the above printing roll independently of the upper S intaglio printing roll,

An intaglio roll that controls the intaglio roll driving device and the printing-portion driving device such that the rotational speed difference between the intaglio roll and the printing port is more than 0% and not more than 1%. · Print roll control means (103, 101.102);