WO1992017755A1 - Dispositif de mesure de la temperature absolue de corps solides, liquides ou gazeux - Google Patents

Dispositif de mesure de la temperature absolue de corps solides, liquides ou gazeux Download PDF

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Publication number
WO1992017755A1
WO1992017755A1 PCT/DE1992/000258 DE9200258W WO9217755A1 WO 1992017755 A1 WO1992017755 A1 WO 1992017755A1 DE 9200258 W DE9200258 W DE 9200258W WO 9217755 A1 WO9217755 A1 WO 9217755A1
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Prior art keywords
particles
anspmch
substance
mass
speed
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PCT/DE1992/000258
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German (de)
English (en)
Inventor
Jochen Laakmann
Georg J. Schmitz
Klaus Hoffmann
Ulf Trociewitz
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Access E.V.
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Publication of WO1992017755A1 publication Critical patent/WO1992017755A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/443—Dynamic spectrometers
    • H01J49/446—Time-of-flight spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/40—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using ionisation of gases

Definitions

  • the invention relates to a device according to the preamble of patent claim 1.
  • thermometer there are several temperature measuring devices that take advantage of the physical properties of most substances to change their expansion with temperature. These devices include the gas pressure thermometer, the steam pressure thermometer, the liquid thermometer and the bimetal thermometer. Other temperature measuring devices are based on the physical effect that some substances generate electricity depending on the temperature, e.g. B. the thermocouples, or change their electrical resistance, for. B. the resistance thermometer. In another group of temperature measuring devices, the changes in physico-chemical states depending on the temperature play a role, e.g. B. with thermal chalks or liquid crystals.
  • thermodynamic temperature scale is characterized by the fact that it starts from the Camot cycle process of a heat machine, the efficiency of which is independent of the working medium, and is ultimately only a function of two temperatures.
  • a direct determination of the absolute temperature of any substance is difficult to achieve using the known scale.
  • equations (I) and (II) only show the relationship between two state variables p. V or v. Show T
  • equation (III) shows the relationship between the three state variables p, V and T. From equation (III) the temperature could be determined by solving for T if p and V were known. However, p and V are not known for most substances whose temperature is to be determined. A measurement of the pressure would also involve a great deal of effort with many substances and would hardly be feasible, in particular with solids.
  • This equation still contains the variable p, which is difficult to determine, particularly at very low pressures, so that determination of the absolute temperature T using equation IV is hardly practical.
  • a further possibility for determining the absolute temperature would be to calculate the mean kinetic energy of a particle ensemble taking into account the uniform distribution law, according to which each degree of freedom that enters the energy of a system then contributes 1/2 kT on average,
  • m is the mass of a particle of the particle ensemble and v m j t is the mean velocity.
  • m and v mjt must therefore be known. If the substance to be measured is also known, m is also known and the problem is reduced to the determination of v mj t. However, the average speed cannot be measured directly, since it is a statistical statement about the speeds of a large number of particles. Otherwise, the mass m is not known for many substances, in particular mixtures of substances.
  • the absolute temperature can be calculated from the formula
  • the determination of the most probable speed by measurement technology is relatively simple if the speed distribution is recorded as such by measurement technology, ie. H. if this distribution z. B. can be represented as a curve on an oscilloscope.
  • the absolute temperature can always be determined if either the maximum speed or the mean speed or the mean square speed and the mass are known. If the speed distribution function is known, these values can be taken from the curve.
  • the actual problem of determining the absolute temperature therefore consists in measuring both a type of speed (v- j - ⁇ , v mjt or v q ) or the speed distribution as well as the mass.
  • the measurement of the speed distribution is of particular importance because it is still necessary if the masses of the substance to be measured are already known and therefore no longer have to be measured. If the masses are not known, mass spectrometers can be used to determine them.
  • the most probable speed can be determined most easily and quickly from a measured speed distribution function. On the one hand, it is directly visible as the maximum of the distribution curve and, on the other hand, it can be determined mathematically by differentiation.
  • a rotating drum which has an attachment surface for silver atoms on its inside (Frederick Reif; Berkeley Physics Course, Volume 5, Statistical Physics, 2nd edition. 1981, p. 149).
  • silver is heated in a melting furnace until it is gaseous. It is then passed through collimator gaps through the opening of a rotating hollow cylinder onto said attachment surface. If the silver atoms are driven through the opening of the hollow cylinder, all that matters is their speed. what time it takes to reach the opposite side of the cylinder drum. They reach faster atoms earlier than slow ones.
  • a further device for determining the speed distribution has been proposed by Miller and Kusch (Gerd Wedler. Textbook of Physical Chemistry, 2nd ed., 1985, p. 680).
  • the speed analyzer consists of a solid cylinder, in the surface of which closely milled helical grooves with a constant pitch are milled. At a certain rotation frequency, only atoms or molecules whose speed is in a narrowly limited range can pass the groove and hit the detector. The speed distribution can thus be measured by varying the rotational frequency. In this device too, however, there is no mass determination and therefore no temperature determination from the Maxwell's velocity distribution. In addition, it is not possible to determine the temperature precisely in the case of mixtures containing several types of atom.
  • the quadrupole mass spectrometer is particularly suitable for the determination of masses.
  • a quadrupole mass spectrometer or mass filter ideally consists of four hyperbolic cylindrical surfaces, which in practice, however, are mostly replaced by circular cylindrical tubes or rods. There is a direct voltage and an alternating voltage superimposed on each of these two rods (Wutz et al., P. 436, cf. also US Pat. No. 3,147,445). If a particle with a certain charge and a certain mass enters this four-pole field, which - coming from an ion source - has been accelerated by the voltage, this field leads to a complicated oscillation about an axis parallel to the tubes or rods.
  • the amplitude of this oscillation and thus the distance of the particle path from this axis is either limited or it grows over all limits, so that the particles hit the rods acting as electrodes and separate from the ion bundle. Of the particles that run on stable orbits, all those pass through the "filter" when the amplitude is less than a certain value. There are thus stable ion trajectories in which the ions execute vibrations around the axis of symmetry of the four rods, the amplitude of which does not exceed a maximum value, and there are unstable ion trajectories in which the oscillation amplitude of the ions increases so that the ions on the Hit rods and be unloaded.
  • a mass spectrometer which has an ion chamber and a device for interrupted and successive acceleration or braking of ions (US Pat. No. 2,642,535). Since the acceleration of the ions depends on their masses, their masses can be determined in this way.
  • a gas to be analyzed with regard to its composition enters an evacuated room, where it is ionized. Siert and accelerated by means of an electric field through an electrode in the direction of a target. A fixed, kinetic energy is supplied to the gas particles via the acceleration voltage. Due to the different mass numbers of the gas to be analyzed, the various types of atoms receive different final velocities at this fixed energy, so that the masses are determined by determining velocities. A necessary prerequisite for this is that the speed or energy distribution existing due to the temperature is negligible. It is therefore not possible to determine the absolute temperature via the speed distribution.
  • the object of the invention is therefore to create a device with which it is possible to determine the absolute temperature of a substance with the aid of the detection of properties of the particles emanating from this substance.
  • the advantage achieved by the invention is, in particular, that the absolute temperature can be deduced from the mere consideration of masses and the speeds of particle ensembles.
  • the masses themselves are measured so that the temperature can also be determined for real, ie contaminated, samples. Since the temperature is determined from the speed distribution at a selected mass number, the temperature of a body of this mass number which is in a hotter environment can also be determined without contact. With the invention it is also possible to determine the temperature of solid bodies in a vacuum without contact if at least one of the elements from which this solid body has a sufficient vapor pressure, which is the case with most metals in wide temperature ranges.
  • the temperatures of real gases e.g. B.
  • H2, N2, 02 also determine contactlessly at pressures of ⁇ 10 "1 Pa, since the energy is distributed according to the equal distribution theorem with 1/2 k T each to each degree of freedom and thus the determination of the kinetic energy , ie the speed of a single spatial direction is sufficient for a temperature measurement.
  • the non-contact measurement largely avoids that the temperature to be measured is influenced by the measuring probe.
  • QMS quadrupole mass spectrometer
  • FIG. 1 shows a graph of the velocity distribution of atoms / molecules according to Maxwell
  • FIG. 5 shows a first arrangement for the measurement of the mass and the velocity of gaseous molecules, in which a quadrupole mass spectrograph is used together with an electrostatic deflection of charged particles;
  • FIG. 6 shows a schematic illustration of the course of particles in an arrangement according to FIG. 5, which are deflected by electric fields;
  • FIG. 7 shows a second arrangement for measuring the mass and the velocity of a gaseous substance, in which the flight time of molecules is determined and a quadrupole mass spectrograph is used;
  • the distribution of the molecular energies is independent of the molecular mass.
  • the abscissa of FIG. 2 shows the energy in electron volts, while the ordinate indicates the number of molecules with a certain energy.
  • E 1/2 mv 2
  • dE mvdv.
  • Equation VII above which fulfills curves 101, 102 in FIG. 1, describes the speed distribution of particles which have three degrees of freedom of translation.
  • the velocity distribution according to equation VH therefore indicates the probability that v has any direction in space and v + dv.
  • FIG. 3 again shows a curve representation which essentially corresponds to the curve representation according to FIG. 1.
  • Curve 110 shows the speed distribution of Oxygen molecules at 73 K
  • curve 111 represents the speed distribution of 10 "oxygen molecules at 273 K.
  • v ma ⁇ the most likely speed is with the maximum distribution, with v the mean speed and with n v ) _r_it ⁇ em itt ⁇ ere square velocity is characterized be ⁇ of a molecule.
  • the number of molecules within a specific speed range for. example, between 300 and 600 m / s, is represented by the area within the corresponding Aus ⁇ section of the respective curve. Total the total number of molecules corresponds to 10 ⁇ under curve 110 or 111. This area is the same at every temperature, since the curves refer to the same number of particles.
  • This arrangement 1 has a vacuum chamber 2, in which there is a container 3 with a gaseous, liquid or solid substance 4.
  • Such pressure ranges are, for example, during vacuum melting At these pressures, metal vapors form a monoatomic ideal gas.
  • the substance 4 has a certain temperature and therefore emits particles with a certain speed distribution, which is indicated by an arrow 5.
  • the absolute temperature of the substance 4 can also be determined if its temperature differs from the temperature of the environment, for example of the container 3.
  • the substance 4 can have a temperature of 1000 ° C. while the container 3 has a temperature of 1200 ° C.
  • the container 3 is made of a different material than the material 4, so that the mass can be used as a distinguishing criterion ann.
  • the basic principle of arrangement 1 is that a particle ensemble of substance 4 is ionized and then separated into its velocities and masses. A particle bundle or ensemble of the particles escaping from the substance 4 is masked out by the diaphragm 6 and then moves along the straight line 7 in the direction of the speed v.
  • an ionization device 33 is provided, which is represented by a glow emission wire 8 and two electrodes 9, 10.
  • This ionization device 33 can be one that is provided in commercially available quadmolar mass spectrometers. It is even possible to remove the ionization device present in the arrangement 1 in the quadrupole mass spectrometer and to arrange it behind the diaphragm 6.
  • the neutral particles from the container 3 are ionized by means of an impact by the electrons of the ionization device 33, whereby it should be noted that the velocity component of the ionized particles in the direction of the line 7 is not changed by incident electrons, because the velocity vector of these impacting electrons decreases ⁇ runs right to line 7.
  • the at least theoretically given probability that a horizontally moving electron is hit frontally by a particle coming out of the container 3, so that the speed of this particle changes in the direction of the line 7, is negligible.
  • the ionization source 33 preferably has a constant electron emission, so that the particle ensemble from the vessel 3 is ionized as evenly as possible over time.
  • the ionized particle beam now passes through an aperture 11, which suppresses the scattering that occurs and thus prevents unwanted vapor deposition of parts of the arrangement 1.
  • the ion beam emerging from the ionizing device 33 is deflected slightly out of the axis 7 by the impact or impact ionization and by the voltage applied to the electrodes 9, 10. This deflection is reversed by a downstream compensation capacitor on its plate 12, 58 there is a DC voltage, the amount of which is correlated with the voltage applied to the electrodes 9, 10. However, the polarities of the two voltages are opposite.
  • the ionized particle beam After the ionized particle beam has returned to the original direction of velocity, it passes through two deflection plates 13, 14 which, viewed in the plane of the drawing, cross each other opposite. In comparison to the plates 9, 10 and the plates 12, 58 of the capacitor, the deflection plates 13, 14 are offset by 90 degrees.
  • the voltage at the deflection plates 13, 14 is fed from a function generator 15. It increases z. B. linear or is a sawtooth voltage.
  • the number of particles reaching the quadmolar mass spectrometer 17 can be very small, so that it is advisable to provide a secondary electron multiplier 18 as a reinforcing element for the detection of these particles between the quadrupole mass spectrometer 17 and the oscillograph 19.
  • the mass spectrometer 17 In the case of a substance which is composed of different types of atoms, slow and heavy as well as fast and light particles hit the mass spectrometer 17 at the same time with a thermal energy distribution. To measure the speed of only one type of particle, e.g. B. only a heavy or only a light type of tissue, in the mass spectrometer 17 the corresponding particle type is filtered. The mass spectrometer 17 is thus used as a mass filter in order to record the time course of the intensity of this one type of particle at a predetermined voltage on the mass spectrometer.
  • the mass spectrometer 17 is thus used as a mass filter in order to record the time course of the intensity of this one type of particle at a predetermined voltage on the mass spectrometer.
  • the ions are through one at the entrance Extraction voltage present in the mass spectrometer 17 is sucked into the mass spectrometer 17, there - if it is a quadmolar mass spectrometer - pass through the rod system and generate the signal of a single mass number, which is preselected by the voltage on the spectrometer. This signal goes to the detection in the Se_a ⁇ nd-Lrelek multiplier 18.
  • Ions that pass through the quadrature mass spectrometer 17 are thus sucked into the spectrometer 17 through an extraction field at the entrance of the spectrometer 17 and detected there according to their mass.
  • the I / U curve represented by the oscillograph 19 indirectly shows the velocity distribution of the charged particles.
  • the I / U curve is differentiated according to U. This can be done with a lock-in amplifier 20.
  • the result of the differentiation is Maxwell's speed distribution, as represented by an oscilloscope or an oscillograph 21.
  • the speed distribution can be read directly from it.
  • the proportionality factors which connect the curve in the oscillograph 21 and the actual speed curve to one another are unimportant for the temperature determination, since the absolute temperature can already be determined solely on the basis of the position of the distribution maximum.
  • FIG. 6 shows the left side of the arrangement according to FIG. 5 again in principle and in perspective.
  • the particles 54 emerging from the container 3 pass through an opening 55 in the diaphragm 6 into the area of an ionization device 33, which here is caused by the Plates 9, 10 is symbolized.
  • the ionization device 33 ionizes the initially neutral particles, which usually consist of several atom types or isotopes of the same material, into positively charged ions. Because of the bombardment with electrons, some of the particles are deflected somewhat from their original path. These positively charged ions 56 then reach the aperture 11, where some of them reach the horizontal deflection 12, 58 through an opening 57 in this aperture 11. There they are deflected towards the negatively charged plate 58.
  • the heavy particles in the particle ensemble 59 are deflected less strongly than the light particles that are in the same ensemble.
  • the deflection of the particle ensemble 59 in the horizontal deflection 12, 58 is as great as the deflection of the particle ensemble in the ionization device 9, 10, so that the original deflection error is compensated for.
  • the particle ensemble 71 which is now in its old path again, is now deflected upward by the vertical deflection 13, 14, where the negative electrode 14 is located.
  • the partial beam 78 emerging from the vertical deflection 13, 14 passes through an opening 79 in the diaphragm and arrives at the quadmole mass spectrometer 17, which has at its entrance a negative grid electrode, not shown, which, as far as it is positively charged, has the particles of the particle ensemble 80 are drawn into the spectrometer 17.
  • Neutral and negative particles 81 fly over the spectrometer 17.
  • the beam 78 consisting of positively charged particles is directed once more and once less with the linearly changing voltage on the plates 13, 14. From a certain voltage, therefore, only the fast particles will pass through the opening 79, while the slow particles will hit the aperture 16.
  • the particle beam 80 can still consist of different atom types with different masses, not only the slow particles are deflected more strongly by the voltage on the plates 13, 14, but also the lighter ones.
  • the distribution of the particle velocities in the beam 80 is therefore a velocity distribution composed of several individual velocity distributions - corresponding to the different mass numbers - which has approximately the curve shape of two or more overlapping Maxwell's velocity distribution curves. This speed distribution can be represented indirectly by a J / U ratio, where U is the voltage on the plates 13. 14 and J is the current formed by the particles of beam 80.
  • arrangement 98 of FIG. 7 shows a further arrangement 98 with which it is possible. to determine the temperature of substances.
  • This arrangement 98 corresponds in many points to the arrangement 1 according to FIG. 5, which is why the corresponding devices have been provided with the same reference numbers.
  • arrangement 98 of FIG. 7 attempts to measure the flight time of charged particles between two defined points. These two points are formed by the electrodes 9, 10 of the ionizing device 33 on the one hand and the center of the quadripolar mass spectrometer 17 on the other hand.
  • gaseous substance 4 the temperature of which is to be measured, have left the container 3, they reach the ionizing device 33, which is provided with a control grid 24 and is pulsing.
  • a negative square-wave signal applied to the control grid now permits the ionization of the neutral particle beam for a very short period of time, based on the flight time of the particles from the ionization device 33 to the mass spectrometer 17.
  • the ion packets produced in this way consist of ions of different speeds which reach the mass spectrometer 17 at different times with different intensities.
  • the pulse determines the start and end of the ionization of the particles to be measured.
  • the ionizing electron pulse thus generates an ion packet that moves within a beam of neutral particles.
  • Ions which have different speeds at the location of the ionizing device 8, 9, 10, arrive at the mass spectrometer 17 at different times after passing through the distance L with a characteristic intensity distribution.
  • a time-of-flight spectrum m thus arises in this way, which can be traced back to a Maxwell distribution function given a known drift distance L.
  • the time of flight spectrum determined in this way can be displayed on an oscillograph 25, which in turn is connected to a computer 26.
  • the curve J - N (t) visible on the oscillograph 25 has in principle the same shape as the curve dJ / dN - N (v) on the oscillograph 21 in FIG. 5.
  • the relationship between the flight time and the current er ⁇ is given by the fact that the ion packet contains an electrical charge which "discharges" in time, because in succession first the fast ions, then the medium and slow ions form the current.
  • This can be clearly seen from the representation of the oscillograph 25, where the current is initially relatively small - when the fast ions arrive at the mass spectrometer 17 - and then increases when the large mass of the medium-speed ions arrives.
  • the current characteristic then flattens out again when the slow ions arrive, until it ends completely because the last ions of the ion packet have arrived.
  • the mass selection in arrangement 98 of FIG. 7 is the same as in arrangement 1 according to
  • the arrangement according to FIG. 8 shows an arrangement which essentially corresponds to the arrangement according to FIG. 5.
  • the arrangement according to FIG. 8 also has an additional magnetic field B which is perpendicular to the electric field E of the deflection plates 13, 14.
  • Such a combination of a variable electrostatic and magnetic field serves as Speed filter.
  • the ions passing through the fixed B field experience, depending on the size of their velocity a more or less strong distraction due to the Lorentz force.
  • a variation of the E-field in a certain area corresponds to a scanning of ion velocities in the velocity interval of interest. There is therefore a speed distribution function at the output of the mass spectrometer 17, the intensity of which depends on the size of the time interval in which the E field is traversed.
  • the signals are further processed by means of a secondary electron multiplier 18, an oscillograph 29 and a computer 22.
  • FIG. 9 shows a further arrangement which largely corresponds to the arrangement according to FIG. 7, for which reason blocks 25 and 26 have been omitted.
  • it is not designed for a measurement without famous. Rather, it has a tube 30 which is connected to the vacuum chamber 2 and is brought into contact with one end with the substance 40 to be measured. At one end of the tube there is a reference substance 31 which is in thermal contact with the sample 40 via the tube 30. Particles of the comparison substance 31 brought to the temperature of the sample 40 enter the vacuum chamber 2 through a small aperture 41 and the temperature of the comparison substance is determined.
  • the container with the substance to be measured in terms of temperature is located outside the vacuum chamber, only a small connecting path from the substance to the vacuum chamber having to be present.
  • FIG. 10 once again shows in detail the most important elements of FIGS. 5, 7 to 9. For the sake of clarity, however, the EB field combination according to FIG. 7 is not shown.
  • the sample 4 in the container 3 is shown on the right side of a cylindrical housing 35 in which various devices are located.
  • the housing 35 itself and all elements in it and the container 3 are under vacuum.
  • a turbopump is indicated at 60 on the left-hand side.
  • An ionization device 52 with a control grid 53 is fastened to a support frame 38, 39 with two holding devices 50, 51.
  • This deflector plate 61, 62 is followed by a diaphragm 42, which is also connected to the support frame 38, 39 via a holding element 63.
  • the baffle plates 61, 62 perform the same task as the compensation capacitor 12 according to the embodiments of FIGS. 5, 7 to 9. With 64, 65 ceramic plates are designated which isolate the baffle plates 61, 62 from the frame 38, 39.
  • a further deflection unit is shown to the left of the diaphragm 42, the deflection plates of which are rotated by 90 degrees with respect to the deflection plates 61, 62. Because of this rotation, only one of the two deflection plates can be seen in FIG. 10, namely the deflection plate 66.
  • These deflection plates which correspond to the plates 13, 14 in FIG. 5, are connected via ceramic elements 47, 48 and holding elements 67, 68 connected to the support frame 38, 39.
  • a downstream diaphragm 43 which is connected to the support frame 38, 39 via holding elements 69, 70, corresponds functionally to the diaphragm 16 in FIG. 5.
  • a device for generating an EB field combination can be provided, but here is not shown.
  • 49 denotes a mass spectrometer on which there is an extraction grid 71 with which ions are sucked into the mass spectrometer 49.
  • the flange 37, 73 to the turbopump 60 in front of which there is a plate 44, forms the end of the housing 35, which is connected to this flange 37, 73 via a shoulder 76 and a connecting element 74.
  • a corresponding connection exists on the right-hand side of the housing 35, where the flange 36 is connected to the housing 35 via a part 75 and an extension 77.
  • a support ring 40a is connected upstream of the part 75.
  • the absolute temperature is first determined via a first mass which is located in the substance to be measured. The same determination is then carried out using a second mass. If the two measurement results match, this is an indication that the measurement carried out is correct.

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Abstract

Un dispositif de mesure de la température absolue de corps solides, liquides ou gazeux comprend un système qui permet de déterminer la distribution des vitesses des particules gazeuses de ladite substance, alors que la masse des particules gazeuses est déterminée en même temps ou avec un décalage dans le temps. La masse et la distribution des vitesses étant connues, la température absolue est calculée au moyen de la courbe de Maxwell de distribution des vitesses.
PCT/DE1992/000258 1991-04-03 1992-03-28 Dispositif de mesure de la temperature absolue de corps solides, liquides ou gazeux WO1992017755A1 (fr)

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DE19914110714 DE4110714A1 (de) 1991-04-03 1991-04-03 Einrichtung zum messen der absoluten temperatur von festen, fluessigen oder gasfoermigen koerpern
DEP4110714.4 1991-04-03

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2642535A (en) * 1946-10-18 1953-06-16 Rca Corp Mass spectrometer
US3080754A (en) * 1961-07-10 1963-03-12 Charles Y Jolmson Direct method of measuring neutral gas temperatures
US4473748A (en) * 1981-03-18 1984-09-25 Tokyo Shibaura Denki Kabushiki Kaisha Neutral particle analyzer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2642535A (en) * 1946-10-18 1953-06-16 Rca Corp Mass spectrometer
US3080754A (en) * 1961-07-10 1963-03-12 Charles Y Jolmson Direct method of measuring neutral gas temperatures
US4473748A (en) * 1981-03-18 1984-09-25 Tokyo Shibaura Denki Kabushiki Kaisha Neutral particle analyzer

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