WO1992008101A1 - Dispositif pour la mesure de dimensions lineaires sur une surface structuree d'un objet a mesurer - Google Patents

Dispositif pour la mesure de dimensions lineaires sur une surface structuree d'un objet a mesurer Download PDF

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Publication number
WO1992008101A1
WO1992008101A1 PCT/EP1991/002087 EP9102087W WO9208101A1 WO 1992008101 A1 WO1992008101 A1 WO 1992008101A1 EP 9102087 W EP9102087 W EP 9102087W WO 9208101 A1 WO9208101 A1 WO 9208101A1
Authority
WO
WIPO (PCT)
Prior art keywords
measuring
sensors
measurement
sensor
probe tip
Prior art date
Application number
PCT/EP1991/002087
Other languages
German (de)
English (en)
Inventor
Karlheinz Bartzke
Rolf Thiemer
Lothar Voigt
Ludwig Fritzsch
Joachim Heim
Original Assignee
Jenoptik Carl Zeiss Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Carl Zeiss Jena Gmbh filed Critical Jenoptik Carl Zeiss Jena Gmbh
Publication of WO1992008101A1 publication Critical patent/WO1992008101A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures

Definitions

  • the invention relates to an arrangement for measuring linear dimensions on the structured surface of a measuring object, consisting of a measuring head and a measuring object carrier, the measuring head relative to the
  • the invention is particularly useful in two-coordinate measuring devices, in measuring devices for ultra-precision machining technology, in probe cutters, in measuring devices for measuring microelectronic semiconductor structures, in roughness measuring devices, in profile measuring devices and for generating microstructures on r - m. Surfaces applicable.
  • optical arrangements For the measurement of linear dimensions of semiconductor structures, optical arrangements are known which achieve a linear resolution of approximately 0.7 ⁇ m with the aid of optical imaging systems and optoelectronic receivers.
  • measuring arrangements result in measuring errors due to electron-optical imaging errors (Reimer, L .; Pfefferkorn, G .: “Scanning Electron Microscopy", Springer-Verlag Berlin, 1977).
  • STM scanning tunnel microscopy
  • AFM atomic force microscopy
  • a nanometer-fine tip made of tungsten, gold, diamond or the like is used. guided at a distance of a few nanometers over the surface of the test specimen, so that a tunnel current of a few nanoamperes is formed between the tip and the surface either at a voltage of a few millivolts (STM) or interatomic forces become effective (AFM), which are kept constant by a distance controller become.
  • STM scanning tunnel microscopy
  • AFM atomic force microscopy
  • test specimen surface at the STM must be electrically conductive due to the tunnel current.
  • the arrangements are so sensitive that only areas of a few micrometers in size can be scanned and the scanning speeds are very slow. During these scans, the measurement processes on the test specimen produce traces (Proceedings of SPIE, Vol. 897, 1988, pp. 8-15; EP 0 338 083 AI; "Physical Review Letter” 56 (1986) 9, pp. 930-933 ).
  • AFM atomic force microscopy
  • An electrical measuring circuit determines the shift in the resonance frequency of the piezoelectric oscillator, which is caused by touching the test specimen surface with the stylus.
  • a control circuit connected to the measuring circuit and an actuating unit carrying the piezo oscillator are used to determine the profile.
  • a disadvantage of this arrangement is that the cube-shaped geometry of the piezo oscillator shown in the measuring arrangement does not allow harmonic oscillation and that the stylus, which is massive in comparison to the piezo oscillator, dampens the natural resonance of the piezo oscillator.
  • the measuring method used is the resonance frequency difference Measurement sluggish in time and relatively insensitive and therefore less suitable as a highly dynamic and at the same time highly sensitive measuring principle (EP 0 290 647).
  • probe cutters are known which, with a diamond tip as a probe tip, achieve a lateral resolution of 6 nm depending on the probe tip geometry and measuring force.
  • a disadvantage of these conventional stylus cutters is that due to dynamic effects, for example jumping of the stylus, only low measuring speeds are possible, which require long measuring times. The constant contact between the diamond tip and the surface of the test specimen
  • a piezo crystal is integrated in a lever that scans the surface with a tip, the measuring forces of which it is loaded are used for signal acquisition.
  • a touch detector in which the contact to the surface is determined by a piezoelectric rod resonator, on the front side of which a probe tip, preferably made of diamond, is attached.
  • the rod resonator is excited by a generator or oscillator in self-resonance via lateral electrodes.
  • An electronic measuring circuit evaluates the frequency occurring when the probe tip touches the measuring surface. or amplitude changes of the resonator as a contact signal, which can be used in conjunction with an actuator for profile determination.
  • the disadvantage of this arrangement is that the rod resonator produces high measuring forces and has low resonance frequencies, so that the measuring surface can be damaged and only low measuring speeds can be achieved (WO 89/00672 AI).
  • Another known scanning probe device works according to an impulse scanning method, in which a stylus is raised and lowered in a pulsed manner from the surface of the measurement object. The device works quasi statically.
  • Raising the stylus serves to reduce frictional and tangential forces in the bearing points of the measuring mechanism.
  • the pulse speed is low and that the measuring forces are too high (Lehmann, R .: “Guide to Length Measurement Technology", VEB Verlag,technik Berlin, 1960, p. 277).
  • the invention has for its object to further develop a generic measuring arrangement so that it can be used to increase the measuring speed with great accuracy and only small measuring forces.
  • the measuring head is arranged to be movable relative to the surface of the measuring object and a plurality of sensors is arranged in it, each having a probe tip scanning the surface of the measuring object , wherein each sensor contains a transducer for obtaining tactile signals and an actuating and measuring device is provided for positioning the respective probe tip in the direction perpendicular to the surface.
  • the measuring arrangement according to the invention makes it possible to mechanically scan the surface of the measuring object simultaneously with a plurality of probe tips.
  • the large number of sensors used makes it possible to carry out structural measurements at several locations on the surface at the same time, as a result of which the measurement time per test object is reduced in inverse proportion to the number of sensors. Furthermore, the required range of movement of the adjusting elements for the measuring head or the measuring object and the required measuring range of the position measuring systems assigned to the control elements to the size of a measuring range of a sensor.
  • Macroscopic and microscopic bumps on the surface of the test object to be examined are determined by the adjusting devices of the individual
  • Compensated sensors that are provided with a sufficient travel for this vertical shift.
  • the probe tips experience horizontal displacements of only a few nanometers with respect to one another, which are either compensated for or detected by measurement and corrected in a measurement signal evaluation circuit.
  • microactuators are used as actuating elements in the actuating devices, the dimensions of which are very small, e.g. less than 1 mm.
  • the sensors are arranged in a matrix or in a line.
  • Each sensor measures in a measuring field.
  • the measuring fields have to be connected to one another by measurement technology by determining the position of all probe tips in a coordinate system.
  • Test specimens are made, in the first case the measurement accuracy is greater due to the lower edge roughness of the calibration structures and in the second case the connection measurements are a by-product of the measurement results.
  • the orthogonality of the coordinates of the measuring device can be determined quite easily with a sensor matrix. This can be done by two ⁇ nearly crossing structural edges are measured twice, the test specimen being rotated by approximately 90 degrees before the second measurement.
  • a high degree of accuracy in the determination of the orthogonality error is achieved by including many structure edges which intersect at almost perpendicular angles in the measurement result from the sensor matrix. The angle between the two structural edges is not included in the final result.
  • the sensors contain plate-shaped or rod-shaped * resonators with or without shock absorbers, which are each arranged between the probe tip and the actuating device and which have a measuring signal ejection circuit with a control circuit for the actuating device in Connect.
  • Fig. 1 is a basic side view of a measuring arrangement according to the invention.
  • Fig. 2 shows the view in the direction Z from Fig. 1 (view of the sensor plate).
  • FIG. 1 The basic illustration of a measuring arrangement according to the invention from FIG. 1 shows a sensor plate 2 fastened to a measuring head 1, on which vertically movable touch sensors 3 with probe tips 4 are arranged in a matrix, as seen from the view in the direction of arrow Z, which is shown in FIG. 2 is recognizable.
  • the probe tips 4 touch the surface 5 to be measured of a measurement object 6, which is fastened on a coordinate table 7 that is horizontally movable relative to the probe tips 4.
  • the probe tips 4 of the probe sensors 3 are mechanically calibrated to the same height.
  • a measurement transducer 8 for obtaining tactile signals is assigned to each tactile sensor 3. As
  • a transducer 8 can be used, in particular if the T ⁇ stsensoren 3 contain plate or rod-shaped resonators 9.
  • the transducers 8 are connected to a measurement signal evaluation circuit, to which a control circuit for evaluating the individual control devices for the touch sensors 3 is connected.
  • the carrier for the touch sensors 3 consists of a suitable material with a thermal expansion coefficient that has a value equal to or almost equal to zero in order to largely exclude measuring fields due to temperature changes.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Dans un dispositif pour la mesure de dimensions linéaires sur une surface structurée d'un objet à mesurer (6) constitué d'une tête de mesure (1) et d'un porte-objet (7), la tête de mesure (1) est disposée de manière mobile relativement à la surface de l'objet à mesurer (6). La tête de mesure (1) abrite une pluralité de palpeurs (3) dont chacun présente une pointe de contact (4) palpant la surface de l'objet à mesurer (6). Dans chaque palpeur (3) est prévu un transducteur de valeur de mesure (8) servant à l'obtention de signaux de palpage, ainsi qu'un dispositif de réglage et de mesure pour le positionnement de la pointe de contact correspondante (4) dans un sens perpendiculaire à la surface (5) de l'objet à mesurer (6).
PCT/EP1991/002087 1990-11-05 1991-11-05 Dispositif pour la mesure de dimensions lineaires sur une surface structuree d'un objet a mesurer WO1992008101A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19904035075 DE4035075A1 (de) 1990-11-05 1990-11-05 Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
DEP4035075.4 1990-11-05

Publications (1)

Publication Number Publication Date
WO1992008101A1 true WO1992008101A1 (fr) 1992-05-14

Family

ID=6417636

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1991/002087 WO1992008101A1 (fr) 1990-11-05 1991-11-05 Dispositif pour la mesure de dimensions lineaires sur une surface structuree d'un objet a mesurer

Country Status (2)

Country Link
DE (1) DE4035075A1 (fr)
WO (1) WO1992008101A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1510780A2 (fr) * 2003-08-26 2005-03-02 Metso Paper Inc. Appareil et procédé pour la mesure de la planéité de la surface de la caisse de tête d'une machine à papier

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4216458C2 (de) * 1992-05-19 1994-09-15 Wolfgang Brunner Verfahren zur Erfassung der Oberflächenform von Körpern
DE4243807C2 (de) * 1992-12-23 2001-07-05 Truetzschler Gmbh & Co Kg Vorrichtung zur Prüfung der Ebenheit und der Lage eines Deckelstabes für eine Karde
DE19710111A1 (de) * 1997-03-12 1998-09-24 Boehm Feinmechanik Und Elektro Meßfühlerarmatur
AT412915B (de) * 2001-08-31 2005-08-25 Friedrich Dipl Ing Dr Franek Sensor zur bestimmung von oberflächenparametern eines messobjekts
DE10230009B4 (de) * 2002-07-04 2007-03-08 Carl Mahr Holding Gmbh Tastgerät
DE10260915A1 (de) * 2002-12-20 2004-07-15 Prüf- und Forschungsinstitut Pirmasens e.V. Meßsystem zur Vermessung auch komplexer dreidimensionaler Geometrien mittels einer Vielzahl in Messtiefenrichtung beweglicher Messtaster

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1077441B (de) * 1959-04-03 1960-03-10 Sennheiser Electronic Taststift fuer Feintaster oder Oberflaechenpruefgeraet
EP0290647A1 (fr) * 1987-05-12 1988-11-17 International Business Machines Corporation Microscope de forces atomiques à quartz oscillant
EP0361932A2 (fr) * 1988-09-30 1990-04-04 Canon Kabushiki Kaisha Méthode et dispositif de détection à balayage par courant à effet tunnel
EP0368579A2 (fr) * 1988-11-09 1990-05-16 Canon Kabushiki Kaisha Sonde, méthode de commande et système de balayage pour détecter un courant tunnel utilisant cette sonde
EP0397416A1 (fr) * 1989-05-08 1990-11-14 AMERSHAM INTERNATIONAL plc Appareil et méthode de visualisation
WO1990015986A1 (fr) * 1989-06-20 1990-12-27 The Board Of Trustees Of The Leland Stanford Junior University Unite a microscope microfabriquee

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3472063A (en) * 1967-04-17 1969-10-14 Branson Instr Resonant sensing device
JPS51149052A (en) * 1975-04-23 1976-12-21 Rank Organisation Ltd Method of and apparatus for measuring surface
DD213497A1 (de) * 1983-01-18 1984-09-12 Tech Hochschule Messverfahren und einrichtung zur formpruefung, vorzugsweise fuer geradheits- und ebenheitsabweichung
DE3708105A1 (de) * 1987-03-13 1988-09-22 Bosch Gmbh Robert Messtaster

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1077441B (de) * 1959-04-03 1960-03-10 Sennheiser Electronic Taststift fuer Feintaster oder Oberflaechenpruefgeraet
EP0290647A1 (fr) * 1987-05-12 1988-11-17 International Business Machines Corporation Microscope de forces atomiques à quartz oscillant
EP0361932A2 (fr) * 1988-09-30 1990-04-04 Canon Kabushiki Kaisha Méthode et dispositif de détection à balayage par courant à effet tunnel
EP0368579A2 (fr) * 1988-11-09 1990-05-16 Canon Kabushiki Kaisha Sonde, méthode de commande et système de balayage pour détecter un courant tunnel utilisant cette sonde
EP0397416A1 (fr) * 1989-05-08 1990-11-14 AMERSHAM INTERNATIONAL plc Appareil et méthode de visualisation
WO1990015986A1 (fr) * 1989-06-20 1990-12-27 The Board Of Trustees Of The Leland Stanford Junior University Unite a microscope microfabriquee

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1510780A2 (fr) * 2003-08-26 2005-03-02 Metso Paper Inc. Appareil et procédé pour la mesure de la planéité de la surface de la caisse de tête d'une machine à papier
EP1510780A3 (fr) * 2003-08-26 2011-08-10 Metso Paper Inc. Appareil et procédé pour la mesure de la planéité de la surface de la caisse de tête d'une machine à papier

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Publication number Publication date
DE4035075A1 (de) 1992-05-07

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