WO1990010313A1 - Monture a isolation antivibratoire pour cristaux coupes au gt - Google Patents

Monture a isolation antivibratoire pour cristaux coupes au gt Download PDF

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Publication number
WO1990010313A1
WO1990010313A1 PCT/US1990/000604 US9000604W WO9010313A1 WO 1990010313 A1 WO1990010313 A1 WO 1990010313A1 US 9000604 W US9000604 W US 9000604W WO 9010313 A1 WO9010313 A1 WO 9010313A1
Authority
WO
WIPO (PCT)
Prior art keywords
quartz crystal
plate
mounting area
crystal
mounting
Prior art date
Application number
PCT/US1990/000604
Other languages
English (en)
Inventor
Robert G. Kinsman
J. Earl Foster
Michael J. Onystok
Original Assignee
Motorola, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola, Inc. filed Critical Motorola, Inc.
Priority to KR1019900702322A priority Critical patent/KR920700481A/ko
Publication of WO1990010313A1 publication Critical patent/WO1990010313A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Definitions

  • This invention relates to a mounting system for piezoelectric quartz crystals.
  • this invention relates to mounting piezoelectric quartz crystals that have non-vibrational nodes, such as GT-cut crystals.
  • a GT-cut crystal maintains a nearly constant natural frequency over a relatively wide ambient temperature variation.
  • the mode of vibration of the GT-cut crystal is longitudinal extension in the plane of the wafer.
  • the crystal plate vibrates with a vibration null or nodal points substantially in the geometric center of the plate.
  • Prior art mounting schemes attach wires to the center of the GT-cut crystal blank.
  • U.S. patent number 4,447,753 disclosed a method for mounting a miniature GT-cut quartz resonator.
  • the GT-cut quartz resonator is held between two vibration-isolation structures that suspend the vibrating plate.
  • the vibration-isolation structure, as well as the quartz resonator plate, is etched from a single piece of quartz and can be manufactured to resonate in the 1 to 2 megahertz range. There are some difficulties in manufacturing such devices however. A need exists for alternate ways to mount GT quartz crystal resonators economically without substantially affecting vibration.
  • a GT-cut piezoelectric quartz crystal resonator which has a piezoelectric quartz crystal plate with planar opposing sides and a substantially non-vibrating node in the geometric center of the plate.
  • the crystal in the preferred embodiment mounts upon a pedestal that attaches to the crystal plate at the node.
  • a vibration isolation region minimizes vibration damping attributable to the mounting pedestal.
  • This region comprises a slot cut through the crystal plate and substantially surrounding the non-vibrating node. Supporting sections of the crystal plate are left in place. The slot effectively decouples the mounting region of the crystal from the remaining area of the crystal plate.
  • the region of the crystal plate outside of the isolation region is free to vibrate at its natural frequency.
  • Figure 1 shows a top perspective view of the CT-cut resonator.
  • Figure 2 shows an elevation view of the GT-cut crystal resonator on a mounting pedestal.
  • FIG. 3 shows, in greater detail, the mounting area and vibration isolation regions.
  • FIG 1 there is shown a rectangularly shaped piezoelectric crystal plate (10).
  • the crystal plate (10) has two substantially planar and opposed faces (6) and (8) that resonate at at least one natural frequency when subjected ton external electric signal applied to the two electrodes (23) and (25) deposited on both sides (6) and (8).
  • a node (15) exists in the approximate geometric center of the crystal plate (10) where vibration is essentially zero. Immediately surrounding this node (15) is a mounting region (12), which surrounds the geometric center of the plate (10).
  • the non-vibrating node (15) of a GT-cut crystal plate (10) is essentially a single point. Regions of the crystal plate distant from the node become increasingly more active with vibration as the distance from the center nodal point increases.
  • a mounting pedestal anywhere about the nodal point will dampen crystal vibration. Damping of the vibration of the plate (10) caused by a mounting pedestal attached to region (12) is reduced by inclusion of a void region (14) and support regions (16).
  • a void region (14) and support regions (16) In this embodiment there are four, substantially partial annular regions cut completely through the plate (10), leaving four, radially disposed support portions (16) as shown.
  • the void regions (14) extend through the thickness of the plate (10) whereas the support regions (16) support the remainder of the plate (10).
  • FIG 3 there is shown in greater detail the construction and geometry of the mounting region (12), void regions (14) and support members (16) as used in the preferred embodiment.
  • the extension of the void regions completely through the plate (10) is more clearly seen in this figure.
  • the outer regions of the plate (10) are relatively free to vibrate at their natural frequency when an excitation signal is applied o the electrodes (23) and (25).
  • Alternate embodiments of the invention could include fewer or more support members (16). Still other embodiments of the invention might not use partial annuli surrounding the mounting region (12) but would include removing crystalline material about this region (12) in any shape, subject to the limitation that the void regions (14) substantially surround the mounting area (12) with sufficient support members intact to support the crystal (10).
  • Alternate mounting schemes for the crystal (10) would include support wires attached to both sides of the mounting area (12) and suspending the crystal (10) by means of these support wires. Those skilled in the art will recognize that other support schemes attached to the mounting areas (12) are possible.
  • the plate (10) is shown mounted on a center mounting pedestal (17).
  • the plate (10) has the electrodes (23) and (25) deposited across the entire planar surfaces (6) and (8) of the plate (10).
  • the mounting pedestal (17) is attached to a substrate (26), which might be a circuit board, ceramic substrate or other appropriate material to which the quartz wafer can be mounted.
  • An excitation signal is applied to the plate (10) form an external signal source, not shown, by means of a top electrode connection (18) which may be a single wire (19) attached to the top electrode (16) in the mounting region (12).
  • the bottom electrode (20) is electrically connected to the center mounting pedestal (17) which carries an excitation signal and is electrically conductive.
  • the excitation signal is carried to the pedestal (17) via conductor (20).
  • the center mounting pedestal (17) as used in the preferred embodiment is substantially columnar and has sufficient height to permit mounting of the quartz wafer plate (10) above the substrate •26) and clearing the maximum height of the conductor (20).
  • the mounting pedestal (17) could be metallic or could also be ceramic coated with a metallic conductor or some other material.
  • the described mounting of the crystal plate (10) is intended for a GT-cut quartz crystal plate.
  • This mounting could be adapted to other quartz crystal cuts subject to the limitation that the crystal have at least on non-vibrating node to which the mounting pedestal can be attached.
  • Alternate embodiments might include multiple mounting pedestals each attached to a different non-vibrating node providing a stable attachment point for the pedestal.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

L'amortissement vibratoire provoqué par une structure de montage fixée à un n÷ud vibratoire (15) est réduit par une région (12) d'isolation antivibratoire. La région (12) d'isolation antivibratoire est un évidement (14) découpé dans la lame de cristal (10) et entourant la zone à laquelle la structure de montage est fixée. Des éléments de support (16) non découpés établissent des ponts à travers l'évidement (14) et soutiennent la lame vibratoire (10). Les éléments de support (16) et l'évidement (14) isolent les surfaces vibratoires de la structure de montage.
PCT/US1990/000604 1989-02-27 1990-02-06 Monture a isolation antivibratoire pour cristaux coupes au gt WO1990010313A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019900702322A KR920700481A (ko) 1989-02-27 1990-02-06 수정 발진 공진기

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31567689A 1989-02-27 1989-02-27
US315,676 1989-02-27

Publications (1)

Publication Number Publication Date
WO1990010313A1 true WO1990010313A1 (fr) 1990-09-07

Family

ID=23225553

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1990/000604 WO1990010313A1 (fr) 1989-02-27 1990-02-06 Monture a isolation antivibratoire pour cristaux coupes au gt

Country Status (2)

Country Link
KR (1) KR920700481A (fr)
WO (1) WO1990010313A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2161767A3 (fr) * 2008-09-09 2010-04-28 Canon Kabushiki Kaisha Dispositif de commande d'ondes vibratoires

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4135108A (en) * 1976-01-16 1979-01-16 L'Etat Francais represente par le Delegue Ministeriel Quartz resonator with electrodes that do not adhere to the crystal
US4139793A (en) * 1976-09-14 1979-02-13 Ebauches S.A. Integral resonant support arms for piezoelectric microresonators
US4216402A (en) * 1974-05-14 1980-08-05 Societe Suisse pour l'Industrie Horlogere (SSIH) Management Services, S.A. Sealed piezoelectric resonator with integral mounting frame
US4626732A (en) * 1984-03-30 1986-12-02 Compagnie D'electronique Et De Piezo-Electricite C.E.P.E. Piezoelectric resonator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4216402A (en) * 1974-05-14 1980-08-05 Societe Suisse pour l'Industrie Horlogere (SSIH) Management Services, S.A. Sealed piezoelectric resonator with integral mounting frame
US4135108A (en) * 1976-01-16 1979-01-16 L'Etat Francais represente par le Delegue Ministeriel Quartz resonator with electrodes that do not adhere to the crystal
US4139793A (en) * 1976-09-14 1979-02-13 Ebauches S.A. Integral resonant support arms for piezoelectric microresonators
US4626732A (en) * 1984-03-30 1986-12-02 Compagnie D'electronique Et De Piezo-Electricite C.E.P.E. Piezoelectric resonator

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2161767A3 (fr) * 2008-09-09 2010-04-28 Canon Kabushiki Kaisha Dispositif de commande d'ondes vibratoires
US7969065B2 (en) 2008-09-09 2011-06-28 Canon Kabushiki Kaisha Vibration wave driving device
CN102412756A (zh) * 2008-09-09 2012-04-11 佳能株式会社 振动波驱动装置
KR101155965B1 (ko) 2008-09-09 2012-06-18 캐논 가부시끼가이샤 진동파 구동장치
KR101201261B1 (ko) 2008-09-09 2012-11-14 캐논 가부시끼가이샤 진동파 구동장치
US8339016B2 (en) 2008-09-09 2012-12-25 Canon Kabushiki Kaisha Vibration wave driving device
CN102412756B (zh) * 2008-09-09 2015-03-11 佳能株式会社 振动波驱动装置

Also Published As

Publication number Publication date
KR920700481A (ko) 1992-02-19

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