WO1990005907A3 - Inspection apparatus - Google Patents

Inspection apparatus Download PDF

Info

Publication number
WO1990005907A3
WO1990005907A3 PCT/GB1989/001372 GB8901372W WO9005907A3 WO 1990005907 A3 WO1990005907 A3 WO 1990005907A3 GB 8901372 W GB8901372 W GB 8901372W WO 9005907 A3 WO9005907 A3 WO 9005907A3
Authority
WO
WIPO (PCT)
Prior art keywords
point
focusing means
optical axis
object point
inspection apparatus
Prior art date
Application number
PCT/GB1989/001372
Other languages
French (fr)
Other versions
WO1990005907A2 (en
Inventor
Robert Noel West
Original Assignee
Sira Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sira Ltd filed Critical Sira Ltd
Publication of WO1990005907A2 publication Critical patent/WO1990005907A2/en
Publication of WO1990005907A3 publication Critical patent/WO1990005907A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/30—Systems for automatic generation of focusing signals using parallactic triangle with a base line
    • G02B7/305—Systems for automatic generation of focusing signals using parallactic triangle with a base line using a scanner

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

An optical apparatus including focusing means (41), an optical axis, an object point (31) and an image point on said optical axis, said object point being movable along the optical axis with respect to the focusing means, means being provided to change the effective optical distance between either the object point and the focusing means or between the image point and the focusing means to maintain the object point at a fixed point even if the image point moves.
PCT/GB1989/001372 1988-11-23 1989-11-17 Inspection apparatus WO1990005907A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8827297.6 1988-11-23
GB888827297A GB8827297D0 (en) 1988-11-23 1988-11-23 Inspection apparatus

Publications (2)

Publication Number Publication Date
WO1990005907A2 WO1990005907A2 (en) 1990-05-31
WO1990005907A3 true WO1990005907A3 (en) 1990-07-12

Family

ID=10647279

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1989/001372 WO1990005907A2 (en) 1988-11-23 1989-11-17 Inspection apparatus

Country Status (3)

Country Link
CA (1) CA2003734A1 (en)
GB (1) GB8827297D0 (en)
WO (1) WO1990005907A2 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2053017A1 (en) * 1970-10-29 1972-05-04 Grundig Emv Method for contactless distance measurement
US3876875A (en) * 1972-05-11 1975-04-08 Philips Corp Optical system for forming an image of an object in a given plane
US3892494A (en) * 1972-07-26 1975-07-01 Sira Institute Detection of optical micro-defects with focused retroreflected scanning beam
US3910695A (en) * 1973-02-28 1975-10-07 Hitachi Ltd Automatic focus adjusting device for use in information retrieving apparatus
JPS59148025A (en) * 1983-02-14 1984-08-24 Victor Co Of Japan Ltd Focus adjusting method
EP0182471A2 (en) * 1984-09-24 1986-05-28 Sira Limited Inspection apparatus with a scanning beam of radiation

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2053017A1 (en) * 1970-10-29 1972-05-04 Grundig Emv Method for contactless distance measurement
US3876875A (en) * 1972-05-11 1975-04-08 Philips Corp Optical system for forming an image of an object in a given plane
US3892494A (en) * 1972-07-26 1975-07-01 Sira Institute Detection of optical micro-defects with focused retroreflected scanning beam
US3910695A (en) * 1973-02-28 1975-10-07 Hitachi Ltd Automatic focus adjusting device for use in information retrieving apparatus
JPS59148025A (en) * 1983-02-14 1984-08-24 Victor Co Of Japan Ltd Focus adjusting method
EP0182471A2 (en) * 1984-09-24 1986-05-28 Sira Limited Inspection apparatus with a scanning beam of radiation

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
IBM Technical Disclosure Bulletin, Vol. 15, No. 2, July 1972, (New York, US) A. FROSCH et al.: "Optical Surface Microtopography Measurement and/or Automatic Focussing", pages 504-505 *
PATENT ABSTRACTS OF JAPAN, Volume 7, No. 164 (P-211) (1309), 19 July 1983; & JP-A-5872127 (Canon K.K.) 30 April 1983 *
PATENT ABSTRACTS OF JAPAN, Volume 8, No. 282 (P-323) (1719), 22 December 1984; & JP-A-59148025 (Nippon Victor K.K.) 24 August 1984 *

Also Published As

Publication number Publication date
CA2003734A1 (en) 1990-05-23
WO1990005907A2 (en) 1990-05-31
GB8827297D0 (en) 1988-12-29

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