WO1989007334A1

WO1989007334A1 - Ic with means for reducing esd damage

Info

Publication number: WO1989007334A1
Application number: PCT/US1989/000257
Authority: WO
Inventors: Jerome F. Lapham
Original assignee: Analog Devices, Inc.
Priority date: 1988-02-02
Filing date: 1989-01-23
Publication date: 1989-08-10
Also published as: EP0397780A4; EP0397780A1; JPH03502389A; CA1303753C

Abstract

An integrated-circuit (IC) chip having means to prevent or mitigate damage from electrostatic discharge (ESD) employing a thick dielectric coating (20, 26) of insulative oxide between the surface of chip substrate and the metallization film (22) used to make contact with regions of the substrate (10). At least a portion of this layer (26) is formed at temperatures below 700°C. The coating (20, 26) is sufficiently thick everywhere that its breakdown voltage is greater than the breakdown voltage of any junction (14) in the substrate (10). This assures that the breakdown caused by ESD will always occur in the junction (14), which is self healing, rather than in the dielectric coating (20, 26), where the damage could be permanent.

Description

IC WITH MEANS FOR REDUCING ESD DAMAGE

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to integrated circuits (ICs) comprising a substrate carrying a large number of circuit elements such as transistors and the like. More particularly, this invention relates to ICs having means to reduce damage from the effects of electrostatic dis¬ charge (ESD) .

2. Prior Art

It is well known that ICs are subject to serious damage or destruction as a result of Electrostatic Dis¬ charge (ESD) events. The electrostatic voltage associated with the discharge can be developed by any of many sources, such as lightning, or friction between insulating bodies such as synthetic fiber clothing. Damage occurs when the ESD voltage is accidentally coupled to one of the circuit terminals and thence to some portion of the metal inter¬ connect layer of the IC.

The metal interconnect is typically an Aluminum layer laid down over an oxide coating overlying the top surface of the semiconductor. The ESD voltage can cause a current to flow from the metal through the normally nonconducting oxide coating to the underlying semi¬ conductor. The current then leaves the IC through some other circuit terminal. The magnitude of the current is often sufficient to cause significant dam¬ age to the oxide, particularly by leaving it permanently conducting. The resulting shunt path often causes circuit failure.

Various attempts have been made to prevent damage from ESD events. For example, semiconductor elements which require thin oxides, such as MOS tran¬ sistors and MOS capacitors, are often protected by additional devices which bypass the ESD current and thereby protect the element in question. In general, a separate bypass device must be provided for each ele¬ ment requiring protection. However, in some particular cases the protection device may be shared by more than one element requiring protection. In any event, pro¬ viding protection devices to prevent damage from ESD events adds to the complexity of the IC, requires addi¬ tional IC area, and generally is a quite undesirable practice.

Many ICs are made with semiconductive elements which, unlike MOS transistors, do not require thin oxides, for example bipolar transistors. These ICs nevertheless may as a result of the particular process steps carried out have thin oxides in certain places, or may have had the usual thermal oxide completely or almost completely removed in selected places, and are thus susceptible to ESD induced damage. This inven¬ tion describes a process for use with such ICs which eliminates the need to provide specific protection devices in accordance with prior practice. SUMMARY OF THE INVENTION A critical characteristic in accordance with the invention is that the total thickness of the insula- tive coating between the substrate and the metal intercon¬ nect is made great enough to assure that the dielectric breakdown voltage through the insulation is greater than the breakdown voltage of any of the junctions formed in the substrate. Thus, when electrostatic discharge occurs of sufficient intensity to cause breakdown, the breakdown occurs at a junction, not through the insulative coating. Since junction damage is self-healing, the injury to the IC will not be permanent as it would be if the breakdown occurred in the insulative coating.

A second critical characteristic in accordance with the invention is that the thick insulative coating on the substrate is at least partly comprised of low- temperature (LT) dielectric material deposited after formation of the junctions. Deposition at relatively low temperatures assures that no detrimental changes occur in the already-formed junctions.

In one preferred embodiment of the invention, to be described hereinbelow in detail, an IC structure is provided wherein the insulative coating for the sub¬ strate comprises two adjacent layers just beneath the metal interconnect. The first layer of the coating is the usual thermally-grown Silicon dioxide, formed at a relatively high temperature during conventional process¬ ing of the integrated circuit. The second layer is a deposited layer of Silicon dioxide, developed at a rela¬ tively low temperature, sufficiently low to assure that already-formed junctions in the IC are not altered detri¬ mentally during deposition of the oxide. In other embodiments of the invention, the thermally-grown oxide laid down during conventional IC processing may be partially or wholly removed, at least in selected regions of the substrate, prior to deposition of a low-temperature insulative coating of thickness suf¬ ficient to minimize the possibility of ESD damage in accordance with the invention.

Still other objects, aspects and advantages of this invention will in part be pointed out in and in part apparent from, the following detailed description of one embodiment considered together with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS FIGURE 1 is a vertical section through an inte¬ grated circuit chip, not to scale and with certain aspects shown pictorially;

FIGURE 2 is a schematic diagram representing elements of the IC chip of Figure 1; and

FIGURE 3 is a graphical presentation to aid in explaining the operation of the invention.

DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT

Referring first to Figure 1, there is shown an integrated circuit (IC) comprising a substrate 10, commonly made of Silicon and shown in this example as being p-type. This substrate is supplied with n-type impurities by conven¬ tional techniques, such as chemical vapor deposition (CVD) or ion implantation. These impurities are driven-in (diffused) into the substrate so as to form an n-type region 12 estab¬ lishing a junction 14 with the p-type substrate material. A diode symbol 16 is shown at the junction to illustrate pic¬ torially the electrical characteristics of the junction. A typical IC will of course include a multiplic¬ ity of other junctions (not shown) , forming both diodes and transistors which together comprise the elements of the cir¬ cuit of the particular IC device. These other junctions are not shown herein in order to simplify the presentation.

During the formation of the various junctions throughout the substrate 10, a protective insulating di¬ electric layer such as Silicon dioxide, illustrated at 20, is thermally grown over the surface of the substrate, in known fashion. This layer is formed at a relatively high temperature, preferably above 700°C. In such growth, 0₂ (oxygen) , in pure gaseous form or as part of water vapor (H_0) , combines with Silicon atoms from the substrate to form Silicon dioxide (Siθ2) • Since portions of the ther¬ mally-grown oxide must be removed in various places, as part of the implant and/or diffusion processes involved in making the many IC junctions, the final thickness of this oxide layer 20 will vary considerably from place to place, as shown in Figure 1.

In accordance with known prior art, a layer of metallization such as illustrated at 22 normally is laid down next, over the thermally-grown oxide 20, in order to make electrical connections to selected regions of the sub¬ strate surface. Experience with devices formed in that fashion has shown an excessive degree of sensitivity to electrostatic discharge (ESD) voltages developed on the metallization layer 22. Such ESD voltage is diagrammatic- ally illustrated in Figure 1 by a symbolic voltage source 24 with one terminal poised to be connected to the metalli¬ zation layer 22, and its other terminal connected to ground. It has been found that the excessive sensitivity to ESD in the prior art IC constructions can be overcome or substantially mitigated by a new IC construction, and process of making such an IC, as will now be described. In this new construction, an additional layer 26 of oxide is laid down, in this case over the thermally-grown layer 20, just beneath the metallization layer 22. This addi¬ tional layer, however, unlike the initial layer 20, is formed at a relatively low temperature (below 700°C) . This distinction is important, because the addition of a low- temperature (LT) oxide assures that creation of the layer does not adversely affect the junctions which already have been formed in the substrate.

The additional layer 26 is made sufficiently thick so as to assure that the total thickness of the oxide coating (20, 26) is sufficient that the dielectric break¬ down voltage (V--_™..) of the dielectric material between the substrate and metallization layer 22 is greater than the junction breakdown voltage (^v _τBKr of the IC, in this case, the breakdown voltage of the junction 14. Figure 2 illustrates how the ESD source 24 is in effect connected to the paralleled combination of the minimum breakdown- voltage dielectric region (i.e., where the dielectric is thinnest, and shown as a capacitor 30) and the minimum breakdown-voltage junction (diode 16, illustratively). When the ESD reaches a level sufficient to cause break¬ down, that breakdown will in accordance with the invention occur in the junction (e.g. diode 16) , not in the dielectric (20, 26) of the capacitor 30. This can graphically be explained by reference to Figure 3 which is a current-voltage (I-V) plot where the solid-line curve 36 is for a dielectric layer such as repre¬ sented by the composite coating 20, 26, and the dotted line curve 38 is for a junction such as diode 16.

As shown by the solid-line curve 36, the current in the dielectric gradually increases (the magnitude being shown exaggeratedly in Figure 3) with increases in voltage until the dielectric breakdown voltage is reached. At that point, the current increases rapidly, and the voltage decreases to a very low level (reflecting the near short circuit represented by the dielectric material after break¬ down) .

By providing an additional oxide coating (i.e. by applying a deposited layer (26) of low-temperature oxide as discussed above) , the magnitude of the dielectric breakdown voltage V__,_VT_. is increased as compared to the breakdown voltage for the thermally-grown layer (20) by itself. The actual dielectric breakdown voltage is given (somewhat conservatively) by the following relationship:

^VDBKD ^{= (}*^{06 Vo}l^ts/^Angstroms) (thickness in Angstroms)

o

A thickness of 10,000 A thus will provide protection against an ESD event of about 600 volts. With rare exceptions, all IC junctions break down at voltages less than 600 volts. The final dielectric coating (20, 26) prefer¬ ably is made sufficiently thick that its breakdown voltage V _BKD is greater than the junction breakdown voltage V , shown as a vertical dotted line in the first quadrant of the Figure 3 graph. Thus, for positive ESD voltage excur¬ sions, breakdown will first occur at the junction (e.g. junction 14) , and this will prevent any subsequent break¬ down in the dielectric material. Since such a junction breakdown is self-healing (i.e. it returns to operative condition after a short period of time) , there will be no permanent damage to the IC as a result of the electrostatic discharge. For a negative ESD voltage excursion, the diode 16 will be forward-biased and will pass current at volt¬ ages much less than the dielectric breakdown voltage of the oxide, thus protecting the oxide in the same way.

The low-temperature oxide coating can be depos¬ ited prior to the metallization mask step in any of various ways. Typically, chemical vapor deposition (CVD) will be used. For example, silane gas (SiH.) can be caused to flow over the wafers together with oxygen, there¬ by to form Si0₂. Sputtering also can be employed. Still other sources and oxidants can be used, e.g. tetraethyl orthosilicate and nitrous oxide. In each case, the Silicon for the low temperature SiO„ coating is supplied externally, i.e. it is not derived from the substrate as it is with thermally-grown (high-temperature) oxide. The deposition of the additional layer is performed at a temperature less than 700°C so as to assure that the already-formed junc¬ tions in the IC are not adversely affected as a result of the additional processing. In the particular preferred embodiment described hereinabove, the substrate is provided with a multilayer oxide coating, wherein one layer is a high-temperature (HT) layer next to the substrate, and the other is a low-temper¬ ature (LT) layer 26 just beneath the metallization layer. It will be understood, however, that the concept of the invention is to deposit low-temperature dielectric insula¬ tion on the substrate in sufficient thickness to assure that the overall dielectric breakdown voltage is greater than the junction breakdown voltage. In some cases, the high-temperature oxide may be partially or fully removed, at least in some places, prior to deposit of the low-temper¬ ature (LT) insulative coating, in which event the LT coat¬ ing thickness must be made sufficient by itself to assure the necessary dielectric breakdown voltage.

Accordingly, although a specific preferred embod¬ iment of the invention has been described hereinabove in detail, it is to be understood that this is for the purpose of providing an illustrative example of the invention and is not to be construed as necessarily limitative, since it is apparent that those skilled in this art can make many modifications as required for specific applications without departing from the scope of the invention.

Claims

What is claimed is:

1. In an integrated circuit of the type comprising a semiconductive substrate with selected regions having impurities forming at least one junction, and wherein metal interconnect is laid down over the substrate to make connection to at least one of said regions, there also being dielectric insulation between said metal inter¬ connect and the surface of said substrate; that improvement for reducing damage to said integrated circuit due to electrostatic discharges wherein said dielectric insulation comprises at least one layer of low-temperature dielectric sufficiently thick that the dielectric breakdown voltage of said di¬ electric insulation is greater than the breakdown voltage of said junction.

2. The integrated circuit as claimed in Claim 1, wherein said dielectric insulation comprises two layers, one thermally-grown layer, and the other a low-temperature deposited layer.

3. The integrated circuit as claimed in Claim 1, wherein said substrate is formed of Silicon and said dielectric is Silicon dioxide.

4. The method of making an integrated circuit which is resistant to damage from electrostatic discharge, com¬ prising the steps of: providing a se iconductive substrate with impur¬ ities to form at least one junction; growing high-temperature dielectric over said susbtrate as part of the IC forming process; depositing a layer of low-temperature dielectric over said substrate of sufficient thickness that said sub¬ strate is formed with dielectric material having a dielec¬ tric breakdown voltage greater than the junction breakdown voltage; and forming a metal interconnect layer over said layer of low-temperature dielectric to make electrical connection to said junction as well as to other regions of said IC.

5. The method of Claim 4, wherein said dielectric material on said substrate includes two layers, one being said layer of high-temperature dielectric, and the other being said layer of low-temperature dielectric laid down over said layer of high-temperature dielectric, said two layers having a combined thickness sufficient to create a dielectric breakdown voltage greater than the breakdown voltage of said junction.

6. The method of Claim 5, wherein said first layer is thermally grown at a temperature greater than 700°C; and said second layer is deposited at a temperature less than 700°C.

7. The method of Claim 4, wherein said low-temper¬ ature dielectric is deposited by chemical vapor deposition.

8. The method of Claim 4, wherein said low-temper¬ ature dielectric is deposited by sputtering.