WO1987000298A1 - Methods of positioning an optical fibre - Google Patents

Methods of positioning an optical fibre Download PDF

Info

Publication number
WO1987000298A1
WO1987000298A1 PCT/GB1986/000397 GB8600397W WO8700298A1 WO 1987000298 A1 WO1987000298 A1 WO 1987000298A1 GB 8600397 W GB8600397 W GB 8600397W WO 8700298 A1 WO8700298 A1 WO 8700298A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical fibre
groove
substrate
access
optical
Prior art date
Application number
PCT/GB1986/000397
Other languages
French (fr)
Inventor
Peter John Duthie
Original Assignee
Plessey Overseas Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Overseas Limited filed Critical Plessey Overseas Limited
Publication of WO1987000298A1 publication Critical patent/WO1987000298A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
    • G02B6/3834—Means for centering or aligning the light guide within the ferrule
    • G02B6/3838—Means for centering or aligning the light guide within the ferrule using grooves for light guides
    • G02B6/3839—Means for centering or aligning the light guide within the ferrule using grooves for light guides for a plurality of light guides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
    • G02B6/3855—Details of mounting fibres in ferrules; Assembly methods; Manufacture characterised by the method of anchoring or fixing the fibre within the ferrule

Definitions

  • This invention relates to methods of positioning an optical fibre, and in particular, to positioning an optical fibre in a substrate so that the optical fibre can subsequently be aligned and connected to an integrated optical device.
  • a previously proposed method of aligning an optical fibre with an input or output optical wave guide of an integrated optical device includes a step of locating an - optical fibre in a groove in a substrate.
  • the optical fibre is held and manipulated into the groove by means of a precision mechanical chuck which references the optical fibre against the polished surfaces of a V groove.
  • This method of locating the optical fibre is disadvantageous in that very careful jigging of the mechanical chuck is -5 necessary to ensure that the optical fibre is properly positioned in the groove so that it is correctly aligned with the optical wave guide of the integrated optic device to which it is to be connected.
  • the mechanical chuck is bulky, intricate to 0 make and cannot position several optical fibres which together make up a fibre array.
  • a method of positioning an optical fibre in a groove in a surface of a crystallographic substrate comprising forming an access in the surface or another surface of the crystallographic substrate, which access communicates with a part of the groove between the optical fibre when introduced into the groove and the substrate so as to enable a vacuum to be applied between the optical fibre and the crystallographic substrate, introducing the optical fibre into the groove, and applying the vacuum between the optical fibre and the crystallographic substrate thereby causing the optical- fibre to become positioned in the groove.
  • the access is preferably formed in the surface of the crystallographic substrate which is opposite to the surface in which the groove is formed.
  • the groove is preferably of V shaped cross section.
  • the crystallographic substrate is preferably of silicon.
  • the optical fibre in the crystallographic substrate may subsequently be aligned and connected to an optical wave guide of an integrated optical device.
  • the optical fibre may subsequently be secured in position by means of adhesive, solder or by anodic bonding.
  • the groove and the access may be formed by etching using, for example, photo-lithographic techniques.
  • Figure 1 shows a plan view of a crystallographic substrate having two grooves formed therein
  • Figure 2 shows an access formed through the crystallographic substrate; and Figure 3 shows a view of the crystallographic substrate with two optical fibres positioned thereon.
  • Figure 1 shows a crystallographic substrate 1, "which may be of silicon, having a pair of V shaped grooves 3 formed in a surface 5 thereof.
  • the grooves 3 may be formed in the substrate 1 by a method known as preferential etching.
  • an aqueous alkaline solution can be used to cause silicon to etch more rapidly in a direction normal to 100 planes than in that normal to 111 planes.
  • etching a groove in a 100 silicon surface results in a V shaped groove having sides which are parallel to the 111 planes.
  • the grooves 3 may be formed in the surface 5 of the substrate 1 through an oxide or nitride mask (not shown) by means of photo-lithography. In the region of each of the grooves 3 where the sides of the groove meet, there is formed an access 7 which communicates with the underside of the substrate 1.
  • Figure 2 shows a view of the underside of the substrate 1 and illustrates the access 7 between the ' groove 3 and the underside of the substrate 1.
  • the access 7 may be formed by photo-lithographic techniques in which an oxide or nitride mask (not shown) is formed on the reverse side of the substrate. The access 7 is then etched until the access 7 reaches the grooves 3. The etch time and conditions of etching are chosen so that the • correct proportion of the groove 3 sides remain unetched.
  • An advantage of this technique is that a plurality of similar substrates each having a pair of grooves 3 and an access 7 can be fabricated simultaneously on a silicon wafer.
  • Final separation of each of the etched substrates can be achieved by defining a border on both sides of the silicon wafer on which the substrates are fabricated and allowing the etch to remove the silicon which separates adjoining substrates.
  • figure 3 there is shown a view of the substrate 1 having a pair of optical fibres 9 located thereon.
  • one optical fibre 9 may be introduced into each of the grooves 3.
  • the vacuum is then applied between the optical fibres 9 and the crystallographic substrate 1 via the access 7.
  • the vacuum causes the optical fibres 9 to become properly seated in their respective groove 3 and this results in a pressure drop in the vacuum line which can be detected. It is possible to detect when the optical fibres 9 are properly positioned in their respective grooves 3 by monitoring the pressure in the access 7.
  • Embodiments on the present invention are further advantageous in that because the optical fibres 9 are individually constrained by means of the vacuum, it is relatively easy to align the ends of the optical fibre to an integrated optic device to which the optical fibres 9 are to be connected.
  • the optical fibres 9 can be secured by means of adhesive, solder or by anodic bonding.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

A method of positioning an optical fibre (9) in a groove (3) formed in a surface (5) of a crystallographic substrate (1). An access (7) is formed in the surface (5) or another surface of the crystallographic substrate (1), which access (7) communicates with a part of the groove (3) between the optical fibre (9) when introduced into the groove (3) and the substrate (1) so as to enable a vacuum to be applied between the optical fibre (9) and the crystallographic substrate (1). The optical fibre (9) is introduced into the groove (3) and a vaccumn applied causing the optical fibre (9) to become positioned in the groove (3).

Description

METHODS OF POSITIONING AN OPTICAL FIBRE
This invention relates to methods of positioning an optical fibre, and in particular, to positioning an optical fibre in a substrate so that the optical fibre can subsequently be aligned and connected to an integrated optical device.
A previously proposed method of aligning an optical fibre with an input or output optical wave guide of an integrated optical device includes a step of locating an - optical fibre in a groove in a substrate. The optical fibre is held and manipulated into the groove by means of a precision mechanical chuck which references the optical fibre against the polished surfaces of a V groove. This method of locating the optical fibre is disadvantageous in that very careful jigging of the mechanical chuck is -5 necessary to ensure that the optical fibre is properly positioned in the groove so that it is correctly aligned with the optical wave guide of the integrated optic device to which it is to be connected.
Further, the mechanical chuck is bulky, intricate to 0 make and cannot position several optical fibres which together make up a fibre array.
It is an aim of the present invention to provide a method of positioning an optical fibre in a substrate to an improved degree of accuracy without the need for such ^ complicated mechanical chucks. According to the present invention there is provided a method of positioning an optical fibre in a groove in a surface of a crystallographic substrate, the method comprising forming an access in the surface or another surface of the crystallographic substrate, which access communicates with a part of the groove between the optical fibre when introduced into the groove and the substrate so as to enable a vacuum to be applied between the optical fibre and the crystallographic substrate, introducing the optical fibre into the groove, and applying the vacuum between the optical fibre and the crystallographic substrate thereby causing the optical- fibre to become positioned in the groove.
The access is preferably formed in the surface of the crystallographic substrate which is opposite to the surface in which the groove is formed.
The groove is preferably of V shaped cross section.
The crystallographic substrate is preferably of silicon.
The optical fibre in the crystallographic substrate may subsequently be aligned and connected to an optical wave guide of an integrated optical device.
The optical fibre may subsequently be secured in position by means of adhesive, solder or by anodic bonding. The groove and the access may be formed by etching using, for example, photo-lithographic techniques.
The invention will now be further described by way of example, with reference to the accompanying drawings, in which:
Figure 1 shows a plan view of a crystallographic substrate having two grooves formed therein;
Figure 2 shows an access formed through the crystallographic substrate; and Figure 3 shows a view of the crystallographic substrate with two optical fibres positioned thereon.
Figure 1 shows a crystallographic substrate 1, "which may be of silicon, having a pair of V shaped grooves 3 formed in a surface 5 thereof. The grooves 3 may be formed in the substrate 1 by a method known as preferential etching. In the case where the substrate 1 is formed from silicon, an aqueous alkaline solution can be used to cause silicon to etch more rapidly in a direction normal to 100 planes than in that normal to 111 planes. Thus, etching a groove in a 100 silicon surface results in a V shaped groove having sides which are parallel to the 111 planes. The grooves 3 may be formed in the surface 5 of the substrate 1 through an oxide or nitride mask (not shown) by means of photo-lithography. In the region of each of the grooves 3 where the sides of the groove meet, there is formed an access 7 which communicates with the underside of the substrate 1.
Figure 2 shows a view of the underside of the substrate 1 and illustrates the access 7 between the ' groove 3 and the underside of the substrate 1. The access 7 may be formed by photo-lithographic techniques in which an oxide or nitride mask (not shown) is formed on the reverse side of the substrate. The access 7 is then etched until the access 7 reaches the grooves 3. The etch time and conditions of etching are chosen so that the • correct proportion of the groove 3 sides remain unetched. An advantage of this technique is that a plurality of similar substrates each having a pair of grooves 3 and an access 7 can be fabricated simultaneously on a silicon wafer. Final separation of each of the etched substrates can be achieved by defining a border on both sides of the silicon wafer on which the substrates are fabricated and allowing the etch to remove the silicon which separates adjoining substrates. Referring now to figure 3, there is shown a view of the substrate 1 having a pair of optical fibres 9 located thereon. After the grooves 3 and the access 7 have been formed in the substrate 1, one optical fibre 9 may be introduced into each of the grooves 3. The vacuum is then applied between the optical fibres 9 and the crystallographic substrate 1 via the access 7. The vacuum causes the optical fibres 9 to become properly seated in their respective groove 3 and this results in a pressure drop in the vacuum line which can be detected. It is possible to detect when the optical fibres 9 are properly positioned in their respective grooves 3 by monitoring the pressure in the access 7.
Embodiments on the present invention are further advantageous in that because the optical fibres 9 are individually constrained by means of the vacuum, it is relatively easy to align the ends of the optical fibre to an integrated optic device to which the optical fibres 9 are to be connected.
Once the optical fibres 9 have been positioned within the respective grooves 3, the optical fibres 9 can be secured by means of adhesive, solder or by anodic bonding.

Claims

CLAIMS ;
1. A method of positioning an optical fibre in a groove in a surface of a crystallographic substrate, the method comprising forming an access in the surface or another surface of the crystallographic substrate, which access communicates with a part of the groove between the optical fibre when introduced into the groove and the substrate so as to enable a vacuum to be applied between the optical fibre and the crystallographic substrate, introducing the optical fibre into. the groove, and applying the vacuum between the optical fibre and the crystallographic substrate thereby causing the optical fibre to become positioned in the groove.
2. A method as claimed in claim 1 wherein the access is formed in the surface of the crystallographic substrate which is opposite to the surface in which the groove is formed.
3. A method as claimed in claim 1 or claim 2 wherein the groove is preferably of V shaped cross-section.
4. A method as claimed in any one of claims 1 to 3 wherein the crystallographic substrate comprises silicon.
5. A method as claimed in any one of claims 1 to 4 wherein the optical fibre when in the crystallographic substrate is aligned and connected to an optical wave guide of an integrated optical device.
6. A method as claimed in any one of claims 1 to 5 wherein the optical fibre is secured in position by means of adhesive, solder or by anodic bonding.
7. A method as claimed in any one fo claims 1 to 6 wherein the groove and the access are formed by etching using photo-lithograhpic techniques.
PCT/GB1986/000397 1985-07-10 1986-07-10 Methods of positioning an optical fibre WO1987000298A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8517447A GB2178184B (en) 1985-07-10 1985-07-10 Method of positioning a number of optical fibres in a number of grooves
GB8517447 1985-07-10

Publications (1)

Publication Number Publication Date
WO1987000298A1 true WO1987000298A1 (en) 1987-01-15

Family

ID=10582081

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1986/000397 WO1987000298A1 (en) 1985-07-10 1986-07-10 Methods of positioning an optical fibre

Country Status (3)

Country Link
EP (1) EP0229143A1 (en)
GB (1) GB2178184B (en)
WO (1) WO1987000298A1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0283779A1 (en) * 1987-03-03 1988-09-28 Chugai Seiyaku Kabushiki Kaisha Method of assaying high molecular hyaluronic acid
US5017885A (en) * 1984-05-10 1991-05-21 At&T Bell Laboratories Optical amplifier with reduced nonlinearity
EP0542444A1 (en) * 1991-11-04 1993-05-19 AT&T Corp. Method and apparatus for bonding a plurality of optical elements
EP0806686A1 (en) * 1996-05-10 1997-11-12 Commissariat A L'energie Atomique Method and device for positioning and fixing optical fibers
DE4428808C2 (en) * 1994-08-13 2003-07-17 Bosch Gmbh Robert Method for producing a component according to the anodic bonding method and component
WO2014190343A1 (en) * 2013-05-24 2014-11-27 University Of Houston Integrated thin-film optrode

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2225441B (en) * 1988-11-24 1992-10-28 Stc Plc Terminating optical fibres
EP1186920A1 (en) * 2000-09-08 2002-03-13 Corning Incorporated Tool and method for positioning optical fiber arrays

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4466696A (en) * 1982-03-29 1984-08-21 Honeywell Inc. Self-aligned coupling of optical fiber to semiconductor laser or LED

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA969744A (en) * 1972-09-08 1975-06-24 Louis P. Boivin Coupling of optical fibres
FR2445972A1 (en) * 1979-01-03 1980-08-01 Lyonnaise Transmiss Optiques DEVICE FOR WELDING MULTIPLE OPTICAL FIBERS END-TO-END THROUGH TABLECLOTHS AND WELDING METHOD USING THE SAME
DE3065130D1 (en) * 1979-05-01 1983-11-10 Post Office Apparatus of joining together optical fibres
US4436295A (en) * 1981-06-12 1984-03-13 Augat Inc. Vacuum chuck for holding filaments

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4466696A (en) * 1982-03-29 1984-08-21 Honeywell Inc. Self-aligned coupling of optical fiber to semiconductor laser or LED

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Applied Optics, Vol. 14, No. 4, April 1975 (New York, US) W. BENSON et al.: "Optical Fiber Vacuum Chuck", pages 816-817, see page 816, column 2, lines 44-46; page 817, column 2, lines 22-39; figures 1,4 *
PATENTS ABSTRACTS OF JAPAN, Vol. 2, No. 127 (E-78) (7609), 25 October 1978 & JP, A, 5393849 (Fujitsu K.K.) 17 August 1978 *
PATENTS ABSTRACTS OF JAPAN, Vol. 8, No. 133 (P-281) (1570), 20 June 1984 & JP, A, 5936214 (Fujitsu K.K.) 28 February 1984 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5017885A (en) * 1984-05-10 1991-05-21 At&T Bell Laboratories Optical amplifier with reduced nonlinearity
EP0283779A1 (en) * 1987-03-03 1988-09-28 Chugai Seiyaku Kabushiki Kaisha Method of assaying high molecular hyaluronic acid
EP0542444A1 (en) * 1991-11-04 1993-05-19 AT&T Corp. Method and apparatus for bonding a plurality of optical elements
DE4428808C2 (en) * 1994-08-13 2003-07-17 Bosch Gmbh Robert Method for producing a component according to the anodic bonding method and component
EP0806686A1 (en) * 1996-05-10 1997-11-12 Commissariat A L'energie Atomique Method and device for positioning and fixing optical fibers
FR2748574A1 (en) * 1996-05-10 1997-11-14 Commissariat Energie Atomique METHOD AND DEVICE FOR POSITIONING AND HOLDING OPTICAL FIBERS
US5937132A (en) * 1996-05-10 1999-08-10 Commissariat A L'energie Atomique Process and system for positioning and holding optical fibers
WO2014190343A1 (en) * 2013-05-24 2014-11-27 University Of Houston Integrated thin-film optrode
US9986914B2 (en) 2013-05-24 2018-06-05 University Of Houston System Method of fabricating a probe

Also Published As

Publication number Publication date
GB2178184B (en) 1989-07-19
EP0229143A1 (en) 1987-07-22
GB2178184A (en) 1987-02-04
GB8517447D0 (en) 1985-08-14

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