WO1986005214A1 - Disque memoire a couche mince et procede - Google Patents

Disque memoire a couche mince et procede Download PDF

Info

Publication number
WO1986005214A1
WO1986005214A1 PCT/US1986/000414 US8600414W WO8605214A1 WO 1986005214 A1 WO1986005214 A1 WO 1986005214A1 US 8600414 W US8600414 W US 8600414W WO 8605214 A1 WO8605214 A1 WO 8605214A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
target
sputtering
deposition
baffle
Prior art date
Application number
PCT/US1986/000414
Other languages
English (en)
Inventor
Atef H. Eltoukhy
Rick C. Price
Original Assignee
Trimedia Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/706,737 external-priority patent/US4604179A/en
Priority claimed from US06/814,229 external-priority patent/US4816127A/en
Application filed by Trimedia Corporation filed Critical Trimedia Corporation
Priority to JP61501389A priority Critical patent/JPH0668147B2/ja
Publication of WO1986005214A1 publication Critical patent/WO1986005214A1/fr

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Procédé de fabrication d'un disque magnétique à couche mince (en commençant par les substrats 28 et 30 à la fig. 1) possédant une coercitivité et une rémanence magnétique élevées, une bonne rectangularité de boucles et de faibles fluctuations de l'amplitude crête-à-crête du signal d'enregistrement sur un trajet circulaire complet d'enregistrement. Les aspects novateurs du procédé contribuant aux caractéristiques performantes du disque consistent à: (a) déposer une couche magnétique de 300 à 1000 Ao contenant environ entre 70 et 88% de cobalt, 10 et 28% de nickel, et 2 et 12% de chrome sur une sous-couche de chrome de 1000 à 4000 Ao; (b) former la couche et la sous-couche dans des conditions de dépôt par pulvérisation empêchant la pulvérisation asymétrique sous un angle faible; et (c) protéger le substrat du disque pendant la pulvérisation d'une manière permettant d'obtenir un dépôt d'épaisseur sensiblement uniforme.
PCT/US1986/000414 1985-02-28 1986-02-26 Disque memoire a couche mince et procede WO1986005214A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61501389A JPH0668147B2 (ja) 1985-02-28 1986-02-26 薄膜記憶ディスクおよび方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US706,737 1985-02-28
US06/706,737 US4604179A (en) 1985-02-28 1985-02-28 Sputtering-system baffle
US06/814,229 US4816127A (en) 1984-11-15 1985-12-27 Method of producing thin-film storage disk
US814,229 1985-12-27

Publications (1)

Publication Number Publication Date
WO1986005214A1 true WO1986005214A1 (fr) 1986-09-12

Family

ID=27107747

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1986/000414 WO1986005214A1 (fr) 1985-02-28 1986-02-26 Disque memoire a couche mince et procede

Country Status (4)

Country Link
EP (1) EP0213191A4 (fr)
JP (1) JPH0668147B2 (fr)
CA (1) CA1261465A (fr)
WO (1) WO1986005214A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0222459A2 (fr) * 1985-11-15 1987-05-20 Komag, Inc. Système et méthode manipulateurs robotiques de disques
EP0298840A2 (fr) * 1987-07-09 1989-01-11 Fujitsu Limited Support d'enregistrement magnétique et sa méthode de fabrication

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1201957A (en) * 1966-12-23 1970-08-12 Commissariat Energie Atomique Thin film having a high coercivity
US3904503A (en) * 1974-05-31 1975-09-09 Western Electric Co Depositing material on a substrate using a shield
JPS57109127A (en) * 1980-12-05 1982-07-07 Matsushita Electric Ind Co Ltd Magnetic recording medium
US4381453A (en) * 1980-12-31 1983-04-26 International Business Machines Corporation System and method for deflecting and focusing a broad ion beam
US4392931A (en) * 1981-03-30 1983-07-12 Northern Telecom Limited Reactive deposition method and apparatus
US4416759A (en) * 1981-11-27 1983-11-22 Varian Associates, Inc. Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers
CA1163602A (fr) * 1981-07-27 1984-03-13 Joseph S. Logan Dispositif quadripolaire de pulverisation cathodique radiofrequence avec blindage anodique-cathodique et blindage de cible flottant
US4552820A (en) * 1984-04-25 1985-11-12 Lin Data Corporation Disc media

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1201957A (en) * 1966-12-23 1970-08-12 Commissariat Energie Atomique Thin film having a high coercivity
US3904503A (en) * 1974-05-31 1975-09-09 Western Electric Co Depositing material on a substrate using a shield
JPS57109127A (en) * 1980-12-05 1982-07-07 Matsushita Electric Ind Co Ltd Magnetic recording medium
US4381453A (en) * 1980-12-31 1983-04-26 International Business Machines Corporation System and method for deflecting and focusing a broad ion beam
US4392931A (en) * 1981-03-30 1983-07-12 Northern Telecom Limited Reactive deposition method and apparatus
CA1163602A (fr) * 1981-07-27 1984-03-13 Joseph S. Logan Dispositif quadripolaire de pulverisation cathodique radiofrequence avec blindage anodique-cathodique et blindage de cible flottant
US4416759A (en) * 1981-11-27 1983-11-22 Varian Associates, Inc. Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers
US4552820A (en) * 1984-04-25 1985-11-12 Lin Data Corporation Disc media

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
I.E.E.E. issued 1985, T. YAMADA et al, CoNiCr/Cr Sputtered Thin Film Disks, see page CH 2180 8/85/000-DB-2 *
IBM Techn. Disc. Bull, Vol. 21, No. 10, issued March 1979, K.Y. AHN et al., Hard Magnetic Films for Magnetic Recording, See page 4232 *
IEEE, issued 1984, EDWARD M. SIMPSON et al. Underlayer Induced Modulation in Double Layer Perpendicular Media, see page CH1918-2/84/0000-BP-28 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0222459A2 (fr) * 1985-11-15 1987-05-20 Komag, Inc. Système et méthode manipulateurs robotiques de disques
EP0222459A3 (fr) * 1985-11-15 1989-08-23 Komag, Inc. Système et méthode manipulateurs robotiques de disques
EP0298840A2 (fr) * 1987-07-09 1989-01-11 Fujitsu Limited Support d'enregistrement magnétique et sa méthode de fabrication
EP0298840A3 (en) * 1987-07-09 1989-10-11 Fujitsu Limited Magnetic recording medium and manufacturing method thereof
US5047297A (en) * 1987-07-09 1991-09-10 Fujitsu Limited Magnetic recording medium and manufacturing method thereof

Also Published As

Publication number Publication date
EP0213191A1 (fr) 1987-03-11
JPS62501978A (ja) 1987-08-06
CA1261465A (fr) 1989-09-26
JPH0668147B2 (ja) 1994-08-31
EP0213191A4 (fr) 1988-04-27

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