WO1986002519A1 - Method of continuously producing a substrate having an electrically conductive circuit - Google Patents

Method of continuously producing a substrate having an electrically conductive circuit Download PDF

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Publication number
WO1986002519A1
WO1986002519A1 PCT/JP1985/000576 JP8500576W WO8602519A1 WO 1986002519 A1 WO1986002519 A1 WO 1986002519A1 JP 8500576 W JP8500576 W JP 8500576W WO 8602519 A1 WO8602519 A1 WO 8602519A1
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WO
WIPO (PCT)
Prior art keywords
ink
substrate
conductive circuit
printing
conductive
Prior art date
Application number
PCT/JP1985/000576
Other languages
French (fr)
Japanese (ja)
Inventor
Kozo Matsumura
Eiji Nakagawa
Original Assignee
Nissha Printing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissha Printing Co., Ltd. filed Critical Nissha Printing Co., Ltd.
Publication of WO1986002519A1 publication Critical patent/WO1986002519A1/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/067Etchants
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions

Definitions

  • the present invention also relates to a method M for producing a gamma having a zero-electricity circuit. 3 ⁇ 4 ⁇ 3 ⁇ 4, also having a conductive circuit as a counterpart of the present invention.
  • the following method has been known as a method for producing such a conductive circuit *.
  • metal skins such as gold, brass, stripes, moths, 3 ⁇ 4 / kel, palladium, etc.
  • gold skins such as indium oxide, indium oxide, antimony oxide, etc. are deposited by vacuum evaporation, spay.
  • a mask is formed on the surface of the conductive circuit by a photoresist or screen printing method, and then an unnecessary gold or leather oxide or a metal oxide skin by a dry etching method. after removal of the minute, more before 12 masking eyebrows have ⁇ O connexion desired electrical «resistance circuit in removing * ⁇ a method for manufacturing there 3 ⁇ 4 beta
  • An object of the present invention is to solve all the characteristics of the conventional various methods, and particularly to provide a conductive circuit that is widely used throughout the Fe method. To offer.
  • the inventor of the present invention has solved many of the problems of the prior art, and over the years, has studied and experimented with various laboratory conditions, processing conditions, and work bottles.
  • I've been paying my attention to the palms finally a new way to watch The present invention has been fulfilled.
  • the present inventors provide an ink containing a solid corrosive which generates an acidic gas or a mist-like acidic gas upon maturation at 500 in the presence of a coexisting material family.
  • Print a predetermined pattern on the conductive flag dry it, and then heat it to 50 to 300 to perform an etching reaction to complete the corrosive action, and then wash and remove the printed pattern ⁇
  • the neutral gas generated by heating at 50 to 300 in the presence of the coexisting material according to the present invention is a relatively simple gas (dry gas) that does not substantially contain moisture.
  • a compound of a gas with an organic compound gas (a mixed gas).
  • it is a unique ratio of different droplets of organic acid anhydrides! It is a poor gas diffusion (ie, a wet gas).
  • Acidic sulfuric acid, acidic hydrofluoric acid, acidic acid, amino acid-containing compounds, boron fluoride male salts, and amino acid-containing compound borates such as acidic sulfuric acid, acidic hydrofluoric acid, and acidic acid.
  • There are a single compound or two or more compounds such as hydrofluoric acid, amino-containing compounds, and fluorinated acid.
  • the amount of the contained ink is usually 5 to 30% of the ink.
  • inks according to the present invention can be used alone as the upper solid W foodstuff, but in practice, those containing a binder are used as a coexisting material for the above-mentioned widespread eclipse.
  • coexisting materials include compounds containing an active water cord such as dextrin, polyvinyl alcohol, hydroxyzide, polyacrylamide, and polyacrylic acid as water-soluble materials.
  • Solvent-soluble compounds include compounds such as polystyrene.
  • the content of the coexisting material is not limited, it is usually 20 to 50 volumes of the ink.
  • the ink according to the present invention contains a reaction accelerator in addition to the SS binder. & ⁇
  • a predetermined pattern is printed on a conductive layer provided on a substrate using the above-mentioned ink, and dried.
  • a screen printing method, gravure printing method, flexo printing method, offset printing method there is a relief printing method such as ⁇
  • A as above s printing method, a stable W Shoku ⁇ used because to Hiroshishoku the formed conductive " ⁇ based ⁇ is Te hand smell 5 0 e C Not ⁇ Solid omelets, particularly preferably at a low concentration of 50 to 50 to 40
  • each a plastic film is a good composter, for example, polystyrene film, nylon. Film, polysulfon film. Polyestersulfon film and the like are preferable for printing.
  • Examples of the conductive layer according to the present invention include gold skin such as gold, silver, parent, plow, gel, palladium, etc., and oxide, indium oxide, antimony oxide, zinc oxide, cadmium oxide, or silver oxide.
  • Transfer metal oxides such as tin oxide and antimony oxide can be used for indium monoxide starvation. However, in consideration of etching processability and economical efficiency, netting, nickel and indium oxide. Most preferred are systems.
  • the thickness of these conductors is 100 000, and the resistance 1 is 1 ⁇ / port to 10 * Q / C3 depending on the use of the electric circuit, but it is particularly preferable that I 0 ⁇ to 200 000 ⁇ / is good.
  • the front IB base plate is heated to 50 to 300 to perform an etching reaction, thereby completing the phagocytosis.
  • the heating in the present invention is devised so as to arrest the purpose of the new term at 50 to 300, preferably 70 to 150, and the hot air circulation method is used as the method.
  • the hot air circulation method is used as the method.
  • a corrosion treatment of about £ 30 to 1 minute at 8 Ot: t12 Q is set as a practically preferable one.
  • the pattern is printed on the surface of the conductive farm without being wound up or springing off.
  • the phenomenon of chemical erosion on the substrate during the process, and the phagocytosis is the result of an epeptic reaction, the Shinjiro portion is obviously corroded, and the change on the 3S shape and the appearance that are very different from those before treatment ⁇ ⁇
  • the printed design portion is washed and removed.
  • methods such as Java-washing with water or a polar solvent, washing in a bath tub, ultrasonic washing, and microphone sigma washing are employed.
  • the present inventors have carried out a number of experiments on the method of manufacturing a base having an isotropic circuit according to the present invention described above, and have confirmed the excellence of the present invention.
  • representative examples are shown below as examples.
  • the method of the present invention should not be construed as being limited to only the executions set forth below, but may be carried out arbitrarily in the practice of starvation;
  • Indium oxide Oxide: 0: Indium and tin oxide having the composition of 0: 10 are also adhered to the refuge film of the city refuge by the sputtering method.
  • Sputtering was performed under a vacuum of 10 "* torr with the introduction of argon gas, and the adhesion flag thickness was about 10 OA.
  • sodium sulphate sodium hydroxide 5% was added to 20% by weight of polyacrylamide.
  • Kaburasu is also attached to the polyester sulfone film of city sleep by the vapor deposition method so that it has a thickness of 1000 people.
  • Guru 3-those 20 weight, Polyvinyl alcohol 20 weight, sodium hydrogen oxyoxide, alkylbenzenesulfonic acid 8 weight, aluminum silicate and potassium bentonite The inks composed of 6 Doduro were adjusted. -a- Using this ink, 50 pieces of bran with a width of 1.27 fflia and a space of 1, 27, ie, a pitch of 2, 54, 50, are added to the thin film with tendon.
  • the ink was composed of 20 onm, a mixture of 20 onm, maleic anhydride and iodine amount $, and was printed using a roll-to-roll gravure printing machine.
  • the polyester film rolled up and wound is then used in an arch-type far-infrared heater tunnel with apricot for 90 minutes at 90 ° C. * After the ink has been completely removed, the ink is completely removed and the desired indium oxide oxide is removed. Was obtained.
  • the present invention has the following configuration, and thus has the following consequences. That is, since the food is formed on the base and is used to corrode the conductive material, the food has a sol-shaped form in Chora.
  • the method of manufacturing a substrate having an iso-IE circuit according to the present invention is extremely useful in terms of pharmacy and has a high utility value.
  • the substrate having an isoelectric circuit obtained according to the present invention includes a ttII display body, an electorifice chromic display body, an electrophotographic

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Printing Methods (AREA)
  • Inks, Pencil-Leads, Or Crayons (AREA)

Abstract

A method of continuously producing a substrate having an electrically conductive circuit, wherein a predetermined pattern is printed on an electrically conductive film provided on the substrate using ink which contains a solid corroding agent that generates acidic gas when heated from 50oC to 300oC, the etching reaction is carried out by heating from 50oC to 300oC to complete the corrosion reaction, and then portions applied with said ink which contains the solid corroding agent are removed. As a printing method of the type of continous winding is adaptable for the present method, it is suitable for continous mass production of the substrate.

Description

明 細 脔  明
発明の名称  Title of invention
導電性回路^有する基我の速絨製遣法  A method of manufacturing a quick-moving skeleton with a conductive circuit
m  m
本発明は、 零電性回路を有する g¾を ¾練的に製遣する方法 Mする ものであも。 本発明の対^とする導電性回路も有す ¾基¾ほ、 表示 体. エレク トロタ σミ ク表示体, At子箄真 3S»体, 鼋気泳励 β錄休, 透明スイッチ *' ネクター, フレキシブルサーキッ ト, 椎電防止体, 面 状発熟体, 太»«池, 導電体等の材料として、 電 寫子工業分野もは じめ各産 ¾分野において広く利用されている。  The present invention also relates to a method M for producing a gamma having a zero-electricity circuit. ¾ 基 ¾, also having a conductive circuit as a counterpart of the present invention. Display body. タ 表示 表示 表示 体 体 , , , , , At At At At 表示 表示 At It is widely used in various industrial fields, including the field of the photographic element industry, as a material for flexible circuits, anti-vertebral bodies, sheet ripening bodies, large ponds, and conductors.
来技術  Coming technology
従来、 かかる導電性回路 *有する の製造法としてほ、 次の.ような 方法が知られている。 即ち、 金, 堪, 縞, 蛾, ¾/ケル, パラジウム等 の金属皮鷹、 ¾¾いほ蒙化鉍, 酸化インジウム, 羧化アンチモン等の金厲 蒙化物皮廣を、 真空蒸着法, スパ yタリング法もしくは印刷法によりガ ラズ基板, ブラスチック基坂等の *«上全面に形成しお後、 圻定の必要 な導 «性回路齦分に、 プオトレジスト法やスクリーン印刷法によりマス キング晨を形成し、 次いで ¾式¾いは乾式のェッチング法により不要な 金羼皮勰郎分、 或いは金属酸化物皮驟耶分を除去した後、 更 前 12マス キング眉も除去することによつて所望の導 «性回路^有する *扳も製造 する方法があ ¾ β Conventionally, the following method has been known as a method for producing such a conductive circuit *. In other words, metal skins such as gold, brass, stripes, moths, ¾ / kel, palladium, etc., gold skins such as indium oxide, indium oxide, antimony oxide, etc. are deposited by vacuum evaporation, spay. * To be formed on the entire surface of glass substrate, plastic base plate, etc. by tarring method or printing method A mask is formed on the surface of the conductive circuit by a photoresist or screen printing method, and then an unnecessary gold or leather oxide or a metal oxide skin by a dry etching method. after removal of the minute, more before 12 masking eyebrows have ^ O connexion desired electrical «resistance circuit in removing *扳a method for manufacturing there ¾ beta
しかし、 した方法は、 マスキング眉の形成ェ種, エッチングェ韁, マスキング雇の除去工程等多くの工程が必要であり、 作集性が極めて « いものであつお。  However, such a method requires many steps such as masking eyebrow formation, etching, masking employment removal, and the like, and is extremely highly collective.
舫紀した方法の間お点を解抉する方法として、 日本 Sの待開昭 5 6— 1 3 7 8 9号公银ゃ特闥昭 5 8 1 1 3 3 7 6号公輟等に開示ざれた方 法が提案されている。 ::の方法は何れも、 基板上 Iftけられお導¾胰上 に、 Λ食によ て除去すぺき新定の筘¾に前 35導電縻の廣食剤を含有す るインキ 印刷し、 莳纪導 ¾厲の不要な 15分を 食した後、 SITiSW食剤 を含有するインキ郏分を除去することによって新望の導 ¾性回路を有す る《扳を製遣する方法である。  As a method of digging the dots during the beautic method, it is disclosed in Japan S, Machikai Sho 56- 1 3 7 89, Ko-Tokusho 581 1 1 3 3 7 6 Kogo, etc. A broken method has been proposed. All of the methods of :: are printed on the substrate, ift are removed by erosion, and the ink containing the conductive agent of the 35 conductive chine is printed on the new surface. After eating the unnecessary 15 minutes of the lead, it removes the ink component containing the SITiSW food, thereby producing a new color that has a new conductive circuit.
この方法によると、 マスキング層の形成ェ棲, マスキング屑の狳去ェ 程が不必要 なるという生廬上、 作藥工程が弒少するという点で大きな 効果を有するものであった。 しかしながら、 この方法は、 作業工程が弒 少する点では良好な効果を有するものであるものの、 连總生盧には棒め て不遍当なものであつお。 何故なら、 前記した方法は何れも、 使甩する 腐食剤が常搌で液状のものであるおめ、 «食剤を含有するインキを印刷 した後、 そのままの状態、 即ち、 導 «JR上に印刷したインキも他と接蝕 させるごとのない状 »で、 次ェ種であるェ チングェ S, 不¾物の狳去 工程に移らねばならず、 従って基扳を速練的に巻き取りながら印刷を行 なうということができないからである β According to this method, formation of a masking layer and removal of masking debris are performed. This process has a great effect in that there is no need for a process, and there is a small number of drug-making processes. However, although this method has a good effect in that the number of working steps is small, it is unreasonably improper for Sosei Roh. This is because, in any of the above-mentioned methods, the caustic agent to be used is usually in a liquid state. After printing the ink containing the food, the caustic agent is used as it is, that is, on the JR. The printed ink must be transferred to the next type, Etchinge S, the process of removing foreign substances without causing any contact with other parts. Therefore, printing is performed while rapidly winding up the substrate. the it is not possible that the line now β
発明の開示  Disclosure of the invention
本発明の目的とすると ろは、 従来の種々の方法が有する閬屬点を全 て解决するとともに、 特に ¾«fe生廒 遍した導 ¾性回路 有す.も基 の 通栊製造法を ¾供する とにある。  An object of the present invention is to solve all the characteristics of the conventional various methods, and particularly to provide a conductive circuit that is widely used throughout the Fe method. To offer.
本発明者らほ、 前杞従来技術が有する讅問 «点も解消すぺく、 永年に わおり各種の厣科閟係の条件, 処理条件及ぴ作橥手瓶等の研究 ·実驗も 童ね、 ^意努力を僳注してきた棕果、 遂に新しい刮目すぺき方法として 本発明を充成するにまったのである。 即ち、 本発明者らは、 共存材科の 存在下において 5 0 0での加熟 より酸性ガスもしくは霧状の 酸性ガスを発生する固体腐食剤を含有するインキを用いて基疾上に設け られぉ導電旗上に所定の図柄を印刷した後乾燥しその後 50で〜 300でに 加熱してエ チング反応を行なわすことにより腐食作^を完了させ次い で印刷図柄 Φ分を洗^除去することも柃傲とする導電性回路も有する基 梃の連棟製逭法を発明したのである。 The inventor of the present invention has solved many of the problems of the prior art, and over the years, has studied and experimented with various laboratory conditions, processing conditions, and work bottles. Yeah, I've been paying my attention to the palms, finally a new way to watch The present invention has been fulfilled. That is, the present inventors provide an ink containing a solid corrosive which generates an acidic gas or a mist-like acidic gas upon maturation at 500 in the presence of a coexisting material family.印刷 Print a predetermined pattern on the conductive flag, dry it, and then heat it to 50 to 300 to perform an etching reaction to complete the corrosive action, and then wash and remove the printed pattern Φ In other words, they invented a method of manufacturing a multi-facility building that also has a conductive circuit that is arrogant.
発明の実施:するおめの最良の開示  Practice of the Invention: Best Disclosure
以下、 本発明も実施例について詳紬に酴明する。  Hereinafter, embodiments of the present invention will be described in detail.
本発明に係る共存材料の存在下 おいて 5 0で〜 3 0 0での加熱によ り発生する ¾性ガスとは、 実質的に水分を含まない比铰的雜粋なガス (ドライガス) もしくは::れと有機化合物ガスとの ¾合物 (ミ タスド ガス;) であり、 更に霧状の »性ガスとほ、 上記鲛性ガスの他に水、 酸、 弗化水索、 有機蒙もしくは有機酸無水物の徽钿なる液滴が箨じつた比! ¾ 的拡散性に乏しい、 つまり 的な気铼混合物 (ウエットガス) である。 このようなガスを堯生する囝体腐食剤としては、 酸性硫酸堪, 酸性弗 化水索酸堪, 黢性 酸堪. アミノ基含有化合物敏酸堪, 弗化ホウ素雄塩, ァミノ基含有化合物ホウ弗化水索酸塲, ァミノ碁含有化合物ケィ弗化水 索酸壎等の単独もしくは二種以上の翁合物がある。 その含宵量ほ限定さ れるものではないが、 通常インキの 5〜3 0童 S%である。 The neutral gas generated by heating at 50 to 300 in the presence of the coexisting material according to the present invention is a relatively simple gas (dry gas) that does not substantially contain moisture. Or: A compound of a gas with an organic compound gas (a mixed gas). In addition to the mist-like gas and the above-mentioned natural gas, water, acid, fluorinated water, organic Or, it is a unique ratio of different droplets of organic acid anhydrides! It is a poor gas diffusion (ie, a wet gas). Acidic sulfuric acid, acidic hydrofluoric acid, acidic acid, amino acid-containing compounds, boron fluoride male salts, and amino acid-containing compound borates such as acidic sulfuric acid, acidic hydrofluoric acid, and acidic acid. There are a single compound or two or more compounds such as hydrofluoric acid, amino-containing compounds, and fluorinated acid. Although not limited, the amount of the contained ink is usually 5 to 30% of the ink.
本発明に係るインキは、 上 固体 W食剤単独でも使用可 ftなものもあ るが、 実際的には上記面体廣食射の共存材料としてパインダーも含む ί> のが用いられる。 共存衬料としては、 水溶性のものとして、 ヂキストリ ン, ポリビ ルアルコール, ヒ ドロキジせル σ ス, ポリアクリルアミ ド, ボリアクリル酸等のごとき活性水索を含有する化合物があり、 また 有穰溶剤可溶性のものとして、 ポリスチレン. ポリ齚黢ビニル, ポリ埴 化ビュル, アタリレート櫞 メタタリレート樹 W, 可癟性フ: cノール 榭 SS , 可溶性尿衆 可溶性メラミ ン樹 S等のごとき化合物がある。 この共存材料の含有量は限定されるものではないが、 通常インキの 2 0 〜5 0童量 である。  Some of the inks according to the present invention can be used alone as the upper solid W foodstuff, but in practice, those containing a binder are used as a coexisting material for the above-mentioned widespread eclipse. Examples of the coexisting materials include compounds containing an active water cord such as dextrin, polyvinyl alcohol, hydroxyzide, polyacrylamide, and polyacrylic acid as water-soluble materials. Solvent-soluble compounds include compounds such as polystyrene. Although the content of the coexisting material is not limited, it is usually 20 to 50 volumes of the ink.
まお、 本発明に係るインキほ、 前 SSパインダ一の他に反応促進剤を含 &ー In addition, the ink according to the present invention contains a reaction accelerator in addition to the SS binder. & ー
むものであってもよい。 この反応促 ¾6剤とは、 面体腐食痢と共存材料の 潘合系にガス発生の反 ίδを促進するおめに加えられも触媒的あるいは助 蝕媒的性 ifeも宵する第三物貧で、 例えば、 無水マレイン酸, 無水コハク 敷,アジビン酸, セパチン酸, ァゼライン摩, 安息香联, 槟鏐渙安息眷 酸, ナフタリンカルボン酸, 無水トリメリ ト酸, 無水ィタ ン ¾ , 無 水フタール載, イソフタール酸, テレフタール肇, 獰水ノルボルネンジ カルボン » , フミ ン K, タンユン肇等のごとき、 瓛点が 5 0 以上であ る有櫬酸もしくは有機 ¾無水物をさす。 その添加量は限定きれるもので はないが、 a常固体廣食剤の 1 0重量%以下にすることが好ましい。 May be used. These six agents are third-order poverty, which is added to the banhe system, which is a coexisting material, in addition to promoting the δ of gas generation, but also has catalytic or anticorrosive properties ife. For example, maleic anhydride, succinic anhydride, adibic acid, sepatinic acid, azelaine, benzoic acid, naphthalene carboxylic acid, naphthalene carboxylic acid, trimellitic anhydride, titanium anhydride, anhydrous phthalate, It refers to organic acids or organic anhydrides with a melting point of 50 or more, such as isophthalic acid, terephthalic acid, terrible water norbornene dicarboxylic acid », humin K, and tanyun hazy. Although the amount of addition is not limited, a is preferably 10% by weight or less of the ordinary solid food preparation.
本発明においては、 先ず前 したインキも用いて基扳上に設けられお 導電胰上に所定の ®柄奁印刷し乾燥する。  In the present invention, first, a predetermined pattern is printed on a conductive layer provided on a substrate using the above-mentioned ink, and dried.
本発明に係る印刷方法としては、 スクリーン印刷法, グラビア印刷法, · フレキソ印刷法, オフセッ ト印刷法, 凸版印刷法等がある β As the printing method according to the present invention, a screen printing method, gravure printing method, flexo printing method, offset printing method, there is a relief printing method such as β
本発明においてまた重要な;:とは、 上 s印刷法として、 基拔上に形成 した導《腆を廣食する め 使用する W食剌が 5 0 eC未瀚の潘度におい て安定な固体であるおめ、 5 0で未铕の缀度特に好ましくほ 5 ~ 4 0で ート Also important in the present invention;: A, as above s printing method, a stable W Shoku剌used because to Hiroshishoku the formed conductive "腆based拔上is Te hand smell 5 0 e C Not瀚Solid omelets, particularly preferably at a low concentration of 50 to 50 to 40 To
において一旦乾燦した後、 希望すれば巻き取ることが可能であり、 この ため連椟卷き取り式のスクリ一ン印馴法あるいほ速綞卷き取り式のダラ ビア印刷法を璩用できるという長所がある。 It is possible to wind it up once it has been dried and then roll it up if desired. For this reason, a continuous winding screen printing method or a high speed winding daravia printing method is used. There is an advantage that you can do it.
本発明に係る «としては、 従来、 この種の基板に用いられているも のなら何でも使用可能であるが、 本発明においては特に各 aブラスチッ クスプイルムが好逋であり、 例えばポリエスデルプイルム, ナイロンフィ ルム, ポリサルプオンフィルム. ポリエステルサルプオンフィルム等が 印刷上好ましい。  As the material according to the present invention, any material that has been conventionally used for this type of substrate can be used. In the present invention, in particular, each a plastic film is a good composter, for example, polystyrene film, nylon. Film, polysulfon film. Polyestersulfon film and the like are preferable for printing.
本発明に係る導電腹としては、 金, 銀, 親, 鋤, 二 ¾ゲル, パラジゥ ム等の金 皮胰があり、 また酸化蟓, 酸化インジウム, 酸化アンチモン, 酸化亜^ , 酸化カドミウム、 或いは ¾化インジウム一酸化饑. 酸化錫一 酸化ァンチモン等の ¾移金属酸化物系皮胰がぁるが、 ェ チング加工性, . 择済性等も考慮すると、 網. 二 ケル, 酸化インジウム. 酸化親系のも のが最も好ましい。 これら導 «nの厚さは 1 0 0 0 0人、 抵抗值 は電気回路の用途によって 1 Ω /口〜 1 0 * Q /C3であるが、 特に好ま しくは I 0 ΩΖΕ〜2 0 0 0 Ω/がよい。 次いで、 前 IB基坂を 5 0〜3 0 0でに加熱してエ チング ¾応を行な わすことにより 1«食作用を完了させる。 Examples of the conductive layer according to the present invention include gold skin such as gold, silver, parent, plow, gel, palladium, etc., and oxide, indium oxide, antimony oxide, zinc oxide, cadmium oxide, or silver oxide. Transfer metal oxides such as tin oxide and antimony oxide can be used for indium monoxide starvation. However, in consideration of etching processability and economical efficiency, netting, nickel and indium oxide. Most preferred are systems. The thickness of these conductors is 100 000, and the resistance 1 is 1 Ω / port to 10 * Q / C3 depending on the use of the electric circuit, but it is particularly preferable that I 0 ΩΖΕ to 200 000 Ω / is good. Next, the front IB base plate is heated to 50 to 300 to perform an etching reaction, thereby completing the phagocytosis.
本発明にいう加熱とは 5 0 〜 3 0 0 、待に好ましくほ 70で~150で において新期の目的が逮せられるように材料が工夫されており、 その方 法としては、 熱風捃環炉, 逮赤ヒーター トンネル萨等も使用する方法が ある。 加熱条件の一例を示すと、 8 O t:〜 1 2 Qでで 3 0秒〜 1分と云 う程 ££の腐食処理が実»上好ましいものとして設定される。  The heating in the present invention is devised so as to arrest the purpose of the new term at 50 to 300, preferably 70 to 150, and the hot air circulation method is used as the method. There is a method to use furnaces, red heaters, tunnels, etc. As an example of the heating conditions, a corrosion treatment of about £ 30 to 1 minute at 8 Ot: t12 Q is set as a practically preferable one.
本発明にいうェ チンダ反 とほ図柄を印刷し乾煥した後一旦巻き取 るか或いは春き取ることなく導電農の図抦部分が前記した画体 «食剃と 接触して遭当な温度、 つまり 5 0で〜 3 0 0て、 特に好ましくは 7ひで ~ 1 5 0てにおいて酸性塩, 酸性酸化物, 可港性化合钧, 剝糠性物 « , 粉末伏物貧等に乾式伏攄において基椟上で化学変化する現象を い、 ま た廣食作用とはェプチング反応の铙果、 新荽郎分が明らかに腐食されて 処理前とほ異なつお形 3S上の変化とか外観上の変化ももおらす作用も云 うのであ δ β After printing and drying the pattern in accordance with the present invention, the pattern is printed on the surface of the conductive farm without being wound up or springing off. In other words, at 50 to 300, and particularly preferably at 7 to 150, the acid salt, the acidic oxide, the harborable compound, the bran substance, the dry powder, etc. In addition, the phenomenon of chemical erosion on the substrate during the process, and the phagocytosis is the result of an epeptic reaction, the Shinjiro portion is obviously corroded, and the change on the 3S shape and the appearance that are very different from those before treatment Δ β
次いで、 前記印刷図柄部分を洗浄除去する。 本発明に係る洗浄除去方法としては、 水或いは極性溶剤によるジャワ -洗浄, 浴槽中での洗浄. 超音波洗浄, マイク σ浚洗浄等の方法が採用 されている。 Next, the printed design portion is washed and removed. As the washing and removing method according to the present invention, methods such as Java-washing with water or a polar solvent, washing in a bath tub, ultrasonic washing, and microphone sigma washing are employed.
本発明者らは上 3Βした本発明 係る等 ¾性回路 有する基拔.の製遣法 に関して多数の実驗を行ない、 本発明の慶秀性を確鎵しおものであるが、 更に本発明の技術的内容を ¾明するため、 以下代表的な を実施例とし て示す。 本発明.の方法は、 単に以下に示された実施判のみに限定して解 釈されるぺきでほなく、 任意にその実施饑様を遭宜に実施し得る;:とほ 当然である。  The present inventors have carried out a number of experiments on the method of manufacturing a base having an isotropic circuit according to the present invention described above, and have confirmed the excellence of the present invention. In order to clarify the technical contents, representative examples are shown below as examples. The method of the present invention should not be construed as being limited to only the executions set forth below, but may be carried out arbitrarily in the practice of starvation;
実施例 1  Example 1
市皈のポリエスチル ¾鲩卷き ¾りプイルムに、 酸化インジウム: 酸化 0 : 1 0 の組成のインジウム,錫酸化物もスバ' タリング法に より付着させお。 スパ タリングは真空度 1 0 " *torr にてアルゴンガ ス導入のもとに行ない、 付着旗厚は約 1 0 O Aであった。 次に、 ポリア クリルアミ ド 20重量茚に対し硫 K水衆ナトリウム 5童 S郎, ケィ蒙アル ミニゥム 25童量邾奁 合し、 水で希釈して全 Sを 1 0 0重量郯とし、 ¾ 練シルクスクリ一ン印刷法に遍するインキ 作ゥぉ β ::のインキを い て上 ISフィルムに線犠 S . O ffla , 艨颶 1 0鱷、 即ち 1 5 . 0 M ピ チの 長さ 1 0 O Mの細糠 ¾ ι 0本、 «fe卷き取り式のスクリーン印刷機によ り印刷、 春き取りを佇ない、 その後、 印刷したフィルムを熱風痏骊轳で 8 0でで 3 0秒間加熱処理も行なつお。 インキの乾集と同時にエツチン グ反 ifcが行なわれ、 Λ食作用は宪了しお。 Indium oxide: Oxide: 0: Indium and tin oxide having the composition of 0: 10 are also adhered to the refuge film of the city refuge by the sputtering method. Sputtering was performed under a vacuum of 10 "* torr with the introduction of argon gas, and the adhesion flag thickness was about 10 OA. Next, sodium sulphate sodium hydroxide 5% was added to 20% by weight of polyacrylamide. Doro Suro, K-Meng Al Minimium, 25 diluents, diluted with water to make total S 100 wt. Ink ubiquitous to kneaded silk screen printing method β :: Ink is applied to the top of the IS film. S. Offfla, Giganto 10 鱷, ie, 15.0 M 10 OM fine rice bran ι 0 0, printed by «fe-winding screen printing machine, no spring harvesting, and then printing the printed film with hot air 8 Also heat treatment for 2 seconds. At the same time as ink drying, anti-ifc etching is performed, and erosion is over.
次いで前艇フィルムを水 ¾し、 インキ Φ分を完全 除去しお後乾 jftし お。 各細糠においてほ両耥閼の表面抵抗が 5 0 /口であり、 まお各 粞糠間は完全に »轅されていた。 . ·  Next, immerse the film in the foreboat, completely remove the ink Φ, and then jft dry. In each fine rice bran, the surface resistance of the Japanese rice bran was 50 / mouth, and between the rice bran was completely »en. ·
案旎剁 2  Plan 2
市眠のポリエステルサルフォンフィルムに鏑も蒸着法によって、 厚み 1 0 0 0人となるように付着きせ、 鎊»腹付フィルムも作つお。 次に、 グル 3—ス 2 0重量郎, ポリビュルアルコール 2 0童量郁, »酸水素ナ トリウム 童郎, アルキルベンゼンスルホン酸 8童潼茚, ケィ酸アル ミ ウム 1 2意 S郁およびベントナイ ト 6童量郎からなるインキを調整 した。 -a- こ インキを用いて、 上記鲷薄腱付フィルムに睬幅 1 . 2 7 fflia , 锒間 1 , 2 7 、 即ち 2 , 5 4 ピッチの さ 5 0鷗の钿糠を 5 0本杏、 遑 糠骞き取り式のスクリーン印刷棣によって印刷、 巻き取り *行ない、 ¾ の後アーチ式の ¾赤ヒータートンネル垆を使用して i 2 0 ¾、 2 0秒 W 加熱処理を行なって、 飼 エ チング反 JSも艇こさせて脚食作用を完了 させ、 统いて前記フィルムを水洗し、 インキを完全に除去しお後乾煤し たと::ろ、 所定の鋼の細 »パターンが得られた。 旗厚 2 0 O Aのインジウム一 «¾化物薄廣付ポリエステルフィルム メ夕クリル掛脂 1 0 0童量 Φ. テトラフルォ σホウ畿アルミ ウム 3 0 S量部. ケィ搋アルミ ウム 2 0重量郎, エチルアルコール一水翁合溶 剤 2 0 on m, 無水マレイン酸 ι童量 $からなるインキ 連總卷き取 り式のグラビア印刷機を用いて印刷した。 铣いて巻き取ったポリエステ ルフィルムをアーチ式の遠赤ヒータートンネル垆杏使用して 9 0 で 1 分 K加熟処理 *行なった後、 インキも宪全に除去しおところ所望のイン ジゥムー蜴酸化物からなる導電性回路が得られた。 本発明は、 上.のような構成からなるものであるから次のような劫果 するものであ $。 即ち、 基拔上 形成されお導 ¾康を腐食するため 使用する «食剤は、 常羅で囿体形状を sするものであるから、 この廣 食剤を含有してなるインキを用いて所定の図抦も印刷した後、 ¾¾的に 卷き取ることが.できるものであり、 従って印刷法として连銃卷き取り式 の印刷法も遽用することが可椎なものであるから、 的な大量生廳に ■ 極めて大きな効果を有するものである。 この繪梟、 製造工程の合理化が でき、 工 チングェ街の短縮化ができ、 更に廣食剂含有のインキの印刷 時 おいて印刷不良等の潁因により製品が不良となることが予測される 場合には、 この で前記インキを洙浄除去し、 高価な基扳を再使用す ることができるものであるから、 良品率の向上, コストダウン等の劫果 も有するものである。 Kaburasu is also attached to the polyester sulfone film of city sleep by the vapor deposition method so that it has a thickness of 1000 people. Next, Guru 3-those 20 weight, Polyvinyl alcohol 20 weight, sodium hydrogen oxyoxide, alkylbenzenesulfonic acid 8 weight, aluminum silicate and potassium bentonite The inks composed of 6 Doduro were adjusted. -a- Using this ink, 50 pieces of bran with a width of 1.27 fflia and a space of 1, 27, ie, a pitch of 2, 54, 50, are added to the thin film with tendon. , Printing by screen printing, printing and winding * by 遑, の 後 の 後 使用 の 後 の 後 の 後 の 後 2 の 後 2 ア ー チ 2 2 2 2 2 2 2 2 Etching anti-JS also made the boat complete the leg phagocytosis action, and then washed the film with water, completely removed the ink, and then sooted dry. Was. Flag thickness 20 Indium in OA Polyester thin film with polyester thinner Membrane acryl oil 1 0 0 Child weight Φ. Tetrafluo σ Hokiki aluminum 30 S Sept. The ink was composed of 20 onm, a mixture of 20 onm, maleic anhydride and iodine amount $, and was printed using a roll-to-roll gravure printing machine. The polyester film rolled up and wound is then used in an arch-type far-infrared heater tunnel with apricot for 90 minutes at 90 ° C. * After the ink has been completely removed, the ink is completely removed and the desired indium oxide oxide is removed. Was obtained. The present invention has the following configuration, and thus has the following consequences. That is, since the food is formed on the base and is used to corrode the conductive material, the food has a sol-shaped form in Chora. It is possible to wind up the paper after printing the figure (1), and it is possible to use the gun-winding printing method as a printing method. It has an extremely large effect. If this owl can streamline the manufacturing process, shorten the length of the industrial area, and if the product is expected to be defective due to printing problems such as poor printing when printing ink containing wide food In this method, since the ink can be removed by using this method, and an expensive substrate can be reused, there are also problems such as an increase in non-defective products and a reduction in cost.
なお、 本発明に係る導電性回略を有する基板の速糠製造法は、 必ずし も遍銃巻き取り式の印刷法を適用する必要はなく、 また連铳卷き取り式 の印刷法を通用した場合でも必ずしも卷き取る必要はなく、 印刷乾 *後 直ちに所定の大きさ 断載して後の工程に攥えたり、 あるいは印刷後乾 — 1ト In the method for producing a substrate having a conductive circuit according to the present invention, it is not always necessary to apply a pilferage winding type printing method, and a continuous winding type printing method can be used. It is not always necessary to wind it up even if it is printed. — 1
燦すると同時に後ェ sである加熟ェ sに移ってもよいものであることほ ≤うまでもない。 It goes without saying that it may be possible to move to the later stage, which is the same as the mature stage.
¾業上の利用可能性  上 の Business availability
従って本発明に係る等 IE性回路を有する基板の连總製逸法は、 産藥上 極めて有用な、 利用価像の高いものである a  Therefore, the method of manufacturing a substrate having an iso-IE circuit according to the present invention is extremely useful in terms of pharmacy and has a high utility value.
本発明 よって得られお等電性回路を有する基扳は、 tt¾表示体, ェ レクト口クロミ ク表示体, 電子写真 |E錄体, S気泳動紀绿体, 3明ス イ チ, コネクター, フレキシプルサ一キジ ト. 撙電防止体, 面伏発熟 体, 太 池, 零 ¾体等の ^科として、 電気,電子工業分野をはじめ各. 虔業分野において広く利用することができるものである。  The substrate having an isoelectric circuit obtained according to the present invention includes a ttII display body, an electorifice chromic display body, an electrophotographic | E 錄 body, an S-electrophoresis body, a 3M switch, a connector, Flexipur sagitte. It can be widely used in the fields of electricity and electronics, including the anti-electrostatic body, surface-ripening body, Oike pond, and zero-body. .

Claims

II求の範囲 II
1 . 共存材料の存在下において 5 0 〜 3 0 0での加熟により酸性ガ スもしくは霧吠の酸性ガス杏発生する固体廣食剤 *含有するィンキを用 いて基扳上に投げられた導 S膜上に所定の図柄も印刷した後乾 ¾しその 後 5 0 °C〜3 0 0でに加熟してェ チング^おも行なわすことにより Λ 食作用 *完.了させ次いで印刷図柄節分を洗淨除去する とを待翁とする 導電性回路を有する基板の遑銑製造法。  1. In the presence of coexisting materials, a solid broad-spectrum that generates acidic gas or fizzy apricots by ripening at 50 to 300 in the presence of coexisting materials * A guide thrown onto a substrate using the contained ink After printing a predetermined pattern on the S film, drying it, then ripening it at 50 ° C to 300 and etching it to perform the phagocytosis. A method of manufacturing substrates with conductive circuits.
2。 導耄鵜が導 性の金羼皮旗であること奁特徵とする蹐求の範 S第 2. The fact that the celebrity cormorant is a conductive gold skin flag.
1項記載の導電铨回路を有する基板の連銃製遣法。 2. A method for producing a board having a conductive circuit according to claim 1.
3 . 零電澳が遷移金羼酸化物系皮膜である;:とを特徼とする婧求の範 囲第 1項羝載の導 3性回路を有する基铤の逮統製造法。  3. A method for arresting a substrate having a conductive circuit as described in item 1.
4 . ィンキが园休 T食剤の共存材料としてバインダ-を含むことも犄 豢とする躋求の範囲第 1項紀載の導 铨回路奁有する塞梃の遑線製遣法。  4. Ink may also contain binder as a co-existing material for T-foods.
5 , インキが固体廣食剤の ¾存材料 してバインダー δぴ^応挺進剂 を含むことを待徼とする請求の範画笫 4項 IS載の導電性回路も有する基 坂の瀵統製造法。  5. Claims that the ink should contain a binder δ ぴ ^ 応 as a preservative material of solid food additives. Law.
PCT/JP1985/000576 1984-10-17 1985-10-16 Method of continuously producing a substrate having an electrically conductive circuit WO1986002519A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP21918984A JPS6196794A (en) 1984-10-17 1984-10-17 Continuous manufacture of substrate having conductive circuit
JP59/219189 1984-10-17

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US5770895A (en) * 1995-06-08 1998-06-23 Tokyo Electron Limited Operation control device and method for a plurality of electric power consuming systems
US7651830B2 (en) 2007-06-01 2010-01-26 3M Innovative Properties Company Patterned photoacid etching and articles therefrom

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5280289A (en) * 1975-12-26 1977-07-05 Takuma Kiriyama Surfactants
JPS591680A (en) * 1982-06-25 1984-01-07 Daicel Chem Ind Ltd Etching solution for thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5280289A (en) * 1975-12-26 1977-07-05 Takuma Kiriyama Surfactants
JPS591680A (en) * 1982-06-25 1984-01-07 Daicel Chem Ind Ltd Etching solution for thin film

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