WO1984003412A1 - Track for floating transport of substrates - Google Patents
Track for floating transport of substrates Download PDFInfo
- Publication number
- WO1984003412A1 WO1984003412A1 PCT/NL1984/000004 NL8400004W WO8403412A1 WO 1984003412 A1 WO1984003412 A1 WO 1984003412A1 NL 8400004 W NL8400004 W NL 8400004W WO 8403412 A1 WO8403412 A1 WO 8403412A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- track
- substrates
- installation according
- transport
- main
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
Definitions
- cassettes for supply of substrates can be connected with such branched transport tracks, providing a supply of substrates to the main transport track. Furthermore, cassettes for storage of substrates can be connected with such branched transport tracks.
- Such a storage track or series thereof can be part of a micro cleanroom cabin, inwhich the transport of substrates takes place in between modules for processing, testing, measuring and sorting.
- Figure 1 shows a main transport track according to the invention with the connection thereon of a branched transport track.
- Figure 2 is a cross section over line 2-2 of the transport track according to Figure 1.
- Figure 3 shows an enlarged detail of the transition of the main transport track towards the second track as branched transport track.
- Figure 4 shows the combination of a main transport track together with two branched transport tracks.
- Figure 5 shows two main transport tracks, each provided with a branched transport track with an enlarged passage thereof for the substrates and the connection of such branched transport tracks with a common conveyor belt.
- Figure 6 is a sectional view over line 6-6 of the installation according to Figure 5.
- FIG 1 the main transport track 10 is shown.
- this track consists of a set of side bearers 12 and 14, in which series of transporters 16 are positioned, with on each side of the track 18 the transporter sections 20 and 22, see also Figure 2.
- the channels, located in these transporters 16 for urging the transport medium towards the passage, can be inclined and proviled in such a way, that the multiple medium streams, flowing in the direction of the transport, provide a displacement thrust on these substrates.
- the branched transport track 28 is connected with the main transport track 10.
- This track consists of the bearers 30 and 32, corresponding with the side bearer 14 and whereby this bearer 14 is provided with the exit port 34,
- This branched transport track 28 includes the transporters 36, which are similar to the transporters 16 in at least the section aside the transition area.
- the first transporter 36 is positioned adjacent to a series of transporters 16 of the main transport track 10. Furthermore, the passage 38 is in open connection with the passage 18, because the distance strips 40, located in bearers 14, correspond with the strips 42, located in the bearers 30 and 32.
- the upper and lower plates also cover the bearers 30 and 32 of the branched transport track 28 over at least some distance.
- transporter 46 is located in between two transporters 16', see also Figures 2 and 3,
- the segments 54 and 56 are located, with the channels 58 positioned therein, which channels are inclined positioned, providing medium flows in the direction of the branched transport track.
- These channels 58 are connected with an own supply 68 of medium though the common channels 60 and 62 and the supply channels 64 and 66.
- valves 70 and 72 By means of the valves 70 and 72 a closing of these channels 64 and 66 can be established.
- a transport track 76 is connected with the main transport track 10',
- This track has such a wide passage 78, that simultaneously by means of transporters 80, 82 and 84 these substrates 74 are displaceabla from this main transport track 10' towards this track 76, see also Figure 6, UJithi ⁇ the scope of the invention such a passage 78 can still be wider, whereby a. single floating transport of the substrates is possible towards a clean room compartment, which is filled with gaseous transport medium to enable a temporary storage of these substrates,
- a mechanical conveyor belt 86 is connscted with transport track 76, Thereby the transport track 10 can for instance extend into a high vacuum module, wherein processing under high vacuum can take place of the substrates, being supplied via the conveyor belt 86.
- the conveyor belt can be a metal tape, which in that case can function as electrode.
- This tape is discharged evenly from roll 90 and whereby a gathering of the tape can take place on roll 92.
- the transport track structure 94 is ocated, which is similar to the combination of transport tracks 10' and 76.
- any other type of mechanical transport system whether or not offering a "floating" transport of the substrates, is possible.
- the ultra narrow "floating" passage for the substrates enabling a very restricted contents of the cleanroom environment for these substrates, and such combined with a very limited consumption of transport medium, makes the "floating" transport system very suitable for storage of a great number of substrates in a storage system.
- a storage track can be designed in such a way, that the transport/storage tracks, positioned aside each other, extend in upward direction, whereby after a 360o turn such a track section can be located on top of another track section, connected therewith.
- a storage under cleanroom condition of for instance 1000 substrates can be provided.
- such tracks stapled as a package on top of each other, can be displaceable in vertical direction for a successive connection of these tracks with supply and discharge tracks, with a "floating" transport of these substrates.
- the whole cabin whether or not including the stepper motors, can be located in an environment, having an ultra cleanroom condition.
- other structures of such storage track for substrates are possible.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Intermediate Stations On Conveyors (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
Abstract
Installation for transport of substrates (74), at least consisting of a main transport track (10), including a series of transporters (16), which are succesively positioned in the direction of movement of said substrates (74) for a two-sided floating trasport of said substrates (74) through a track passage (18), located in between transporters sections (20) and (22) and whereby means are included for at least locally a change of the movement in linear direction of said substrates (74).
Description
Track for floating transport of substrates.
In the Dutch Patent Application no. 83 00 443 of the applicant transport tracks are described, whereby the substrates, moving in linear direction in a floating transport passage by means of double floating thereof, by means of adapted transporters can be displaced in sideward direction. Thereby it is possible, that more than one branched transport track, positioned aside each other, are connected with such a main transport track. Furthermore, such branched transport tracks can have such a wide passage for the substrates, that more than one substrate can be displaced therethrough aside each other, whereby the possible connection of such a track with a mechanic transport track, such as a conveyor belt, for further transport of the substrates.
Furthermore, cassettes for supply of substrates can be connected with such branched transport tracks, providing a supply of substrates to the main transport track. Furthermore, cassettes for storage of substrates can be connected with such branched transport tracks.
Furthermore, storage tracks with single or double floating displacement of the substrates can ba connected with such a branched track. Thereby the possible storage of a great number of substrates in more than one storage level.
In that case such a storage track or series thereof can be part of a micro cleanroom cabin, inwhich the transport of substrates takes place in between modules for processing, testing, measuring and sorting.
Thereby such an environment is preferably filled with an inert gas. Further particularities follow from the description of the following Figures:
Figure 1 shows a main transport track according to the invention with the connection thereon of a branched transport track.
Figure 2 is a cross section over line 2-2 of the transport track according to Figure 1.
Figure 3 shows an enlarged detail of the transition of the main transport track towards the second track as branched transport track.
Figure 4 shows the combination of a main transport track together with two branched transport tracks. Figure 5 shows two main transport tracks, each provided with a branched transport track with an enlarged passage thereof for the substrates and the connection of such branched transport tracks with a common
conveyor belt.
Figure 6 is a sectional view over line 6-6 of the installation according to Figure 5.
In Figure 1 the main transport track 10 is shown. Thereby this track consists of a set of side bearers 12 and 14, in which series of transporters 16 are positioned, with on each side of the track 18 the transporter sections 20 and 22, see also Figure 2.
The channels, located in these transporters 16 for urging the transport medium towards the passage, can be inclined and proviled in such a way, that the multiple medium streams, flowing in the direction of the transport, provide a displacement thrust on these substrates.
The branched transport track 28 is connected with the main transport track 10. This track consists of the bearers 30 and 32, corresponding with the side bearer 14 and whereby this bearer 14 is provided with the exit port 34,
This branched transport track 28 includes the transporters 36, which are similar to the transporters 16 in at least the section aside the transition area.
The first transporter 36 is positioned adjacent to a series of transporters 16 of the main transport track 10. Furthermore, the passage 38 is in open connection with the passage 18, because the distance strips 40, located in bearers 14, correspond with the strips 42, located in the bearers 30 and 32.
By means of a screwed connection 44 the upper sections of a number of transporters 16' are mounted against the upper plate 24, whereas the lower sections of these transporters by means of the screwed connection 46 are secured to the lower plate 26.
In that way the width of the passage 18 remains the same, also in the transporters 16'. The upper and lower plates also cover the bearers 30 and 32 of the branched transport track 28 over at least some distance.
Furthermore, the transporter 46 is located in between two transporters 16', see also Figures 2 and 3,
In this transporter with sections 50 and 52 the segments 54 and 56 are located, with the channels 58 positioned therein, which channels are inclined positioned, providing medium flows in the direction of the branched transport track. These channels 58 are connected with an own supply 68 of medium though the common channels 60 and 62 and the supply channels 64
and 66.
By means of the valves 70 and 72 a closing of these channels 64 and 66 can be established.
Thereby the change in direction of movement of the substrates 74 is as follows;
These substrates, whether or not resting against each other, move under floating condition through passage 18. On command, the valves 70 and 72 are opened with through channels 58 the supply of transport medium under a relatively high pressure towards the substrate 74', which as a result is urged towards passage 38, whereafter the transporters 36 take over the displacement thereof.
Thereupon through these valves 70 and 72 the supply of medium towards the transporters 48 is blocked, with consequently the uninterrupted moving of the following substrate in the main transport track 10. In Figure 4 the main transport track 10 is shown over a greater length and whereby still another branched transport track 28' is connected therewith. Thereby the transporters 48' have again the same function as that of the transporter 48 with on command the displacement in sideward direction of the substrates 74. Uithin the scope of the invention only this corner transport section 28' can be used, whereby on command every substrate is displaced in sideward direction. Such a structure is applicable in transport tracks to offer more than only a linear displacement of the substrates. Furthermore, any inclination of such sideward displacement is possible, In Figure 5 a transport track 76 is connected with the main transport track 10', This track has such a wide passage 78, that simultaneously by means of transporters 80, 82 and 84 these substrates 74 are displaceabla from this main transport track 10' towards this track 76, see also Figure 6, UJithiπ the scope of the invention such a passage 78 can still be wider, whereby a. single floating transport of the substrates is possible towards a clean room compartment, which is filled with gaseous transport medium to enable a temporary storage of these substrates,
A mechanical conveyor belt 86 is connscted with transport track 76, Thereby the transport track 10 can for instance extend into a high vacuum module, wherein processing under high vacuum can take place of the substrates, being supplied via the conveyor belt 86.
The conveyor belt can be a metal tape, which in that case can function as electrode. By means of transport structure 88 this tape is discharged
evenly from roll 90 and whereby a gathering of the tape can take place on roll 92.
Thereby the take-over of the substrates by the conveyor belt takes place as these substrates are released by the transport track 76. On the other side of the conveyor belt 86 the transport track structure 94 is ocated, which is similar to the combination of transport tracks 10' and 76. Within the scope of the invention in between these transport tracks any other type of mechanical transport system, whether or not offering a "floating" transport of the substrates, is possible.
The ultra narrow "floating" passage for the substrates, enabling a very restricted contents of the cleanroom environment for these substrates, and such combined with a very limited consumption of transport medium, makes the "floating" transport system very suitable for storage of a great number of substrates in a storage system.
Thereby a storage track can be designed in such a way, that the transport/storage tracks, positioned aside each other, extend in upward direction, whereby after a 360º turn such a track section can be located on top of another track section, connected therewith. In that way in a number of successive levels a storage under cleanroom condition of for instance 1000 substrates can be provided.
Furthermore, by means of stepper motors such tracks, stapled as a package on top of each other, can be displaceable in vertical direction for a successive connection of these tracks with supply and discharge tracks, with a "floating" transport of these substrates.
Thereby the whole cabin, whether or not including the stepper motors, can be located in an environment, having an ultra cleanroom condition. Within the scope of the invention other structures of such storage track for substrates are possible.
Claims
1. Installation for transport of substrates, at least consisting of a main transport track, including a series of transporters, which are successively positioned in the direction of movement of said substrates for an at least local double floating transport of said substrates in a passage thereof and whereby means are incorporated for an at least local change of the direction of movement of said substrates.
2. Installation according to Claim 1 , whereby said transporters consist of two sections with a passage for said substrates in between, structured in that way, that at least during said change in direction of substrate movement in between said transporter sections and said substrates, moving through, a "floating" gaseous cushion for said substrates is maintained.
3. Installation according to Claim 2, whereby in said transporters a number of channels are located, which at one end are connected with a common supply of gaseous transport medium and at the other end are connected with said passage.
4. Installation according to one of foregoing Claims, whereby in at least one of said transporter" sections the arrangement of said supply channels for the urging of gaseous medium towards said substrate is such, that said flows of medium result in a force on said substrate in sideward direction.
5. Installation according to Claim 4, whereby therein means are incorporated to direct said transport medium towards said substrate for a wanted period of time.
6. Installation according to Claim 4, whereby said sideward direction is approximately 90 .
7. Installation according to one of foregoing Claims, whereby said transporters are secured in a mounting block arrangement and a sidewall of said arrangement at the location of the transporters for lateral displacement of said substrates is provided with at least one exit port.
8. Installation according to Claim 7, whereby said block arrangement is executed such, that said transporter sections are enclosed positioned, therein.
9. Installation according to Claim 8, whereby in said exit port transporters for floating transport of said substrates with a mounting section thereof are secured to said block arrangement.
10. Installation according to one of foregoing Claims, wherein, as distance strips are located in said mounting block arrangement of said main track, creating said passage, in said block arrangement of said exit also distance strips are located and furthermore said strips have such a relation, that at least one strip section is positioned. in both block arrangements.
11. Installation according to one of foregoing Claims, whereby aside said main block arrangement with a main transport track for said substrates a branched transport track is located, extending in lateral direction.
12. Installation according to Claim 11, whereby the combination of said main track and said branched transport track is such, that thereby the entrance of the passage of said branched transport track corresponds with the exit passage of said main transport track.
13. Installation according to one of foregoing Claims, whereby said transporters of said branched track at least locally are structured approximately the same as said transporters of said main track.
14. Installation according to Claim 13, whereby said block arrangement of said main track extends that far in lateral direction, that at least a part αf said branched track is enclosed in said block arrangement.
15. Installation according to Claim 13, whereby the first transporter of said branched track is positioned in the exit port of said block arrangement of said main track.
16. Installation according to Claim 15, whereby said transporter with one wall section at least approximately adjoins the ends αf at least two transporters of said main track.
17. Installation according to one of foregoing Claims, whereby said branched transport track as second main transport track is positioned at the end of said first main transport track to provide a transport system with a non-linaar displacement of said substrates.
18. Installation according to one of foregoing Claims, whereby said branched transport track at least at the location of the connection thereof with said main transport track has a greater passage width as that αf said main transport track.
19. Installation according to Claim 18, whereby said width of said passage in said branched transport track is that sized, that at least two substrates can move aside each other through said track.
20. Installation according to Claim 19, whereby in the main transport track at least two transporters with means are located to establish the displacement in sideward direction of at least two substrates at the same moment.
21. Installation according to Claim 20, wherein it is executed such, that in at least a number of said transporters of said branched transport tracks a two-sided floating transport of said substrates can take place.
22. Installation according to one of foregoing Claims, wherein said structure and means to control the transport medium are such, that substrates can be fed through said branched transport track towards said main transport track for further displacement thereof.
23. Installation according to Claim 22, wherein such means are ineluded, that the speed of said substrates at the end of the displacement immediately before the change in direction of movement is larger than the regular speed of said substrates in said track.
24. Installation according to Claim 23, wherein in said main transport track means are included for such a buffering αf arriving substrates, that said substrates cannot make a mechanic contact with said main track.
25. Installation according to Claim 23, wherein further the structure is such, that the speed αf said substrates in said take-over section of said main transport track is larger than the speed of said substrates in said track behind said take-over section.
26. Method of said installation according to Claim 25, wherein during the transport of said substrates successively at least two substrates are fed aside each other from said branched transport track towards said takeover section of said main transport track and the speed of said substrates during said take-over is that large, that substrates adjoin substrates, already displacing from said take-over section αf said main transport track.
27. Method according to Claim 26, wherein said substrates in said take-over section slip in between substrates, displacing in said main transport track.
28. Installation according to one of foregoing Claims, wherein in said main transport track sensors for contrαling the speed of said substrates in combination with regulation means, included in the supply of transport medium, are located to enable such a displacement of said substrates, that in this track successive substrates can be displaced individually and on some distance removed from each other,
29. Installation according to one of foregoing Claims, wherein the structure of said branched transport track is such, that a cassette for collection of said substrates can be connected therewith, with a transport of successive substrates to their respective rest positions in said cassette.
30. Installation according to Claim 29, wherein for that purpose the end section of said branched track only consists of transporters, which are positioned at the lower side of said passage for said substrates.
31. Installation according to Claim 30, wherein the structure of said installation is such, that said cassette after receiving a substrate by means of a stepper motor is displaced in dαwnward direction to receive the following substrate.
32. Installation according to Claim 30, wherein the structure σf said installation is such, that by means of said branched transport track a supply αf said substrates from a sender cassette takas place and said cassette by means αf a stepper motor after the sending is displaced in upward direction over some distance to send the following substrate.
33. Installation according to one of foregoing Claims, wherein said branched transport track is connected with one storage track to store a great number of said substrates.
34. Installation according to Claim 33, wherein in series of storage tracks are positioned on top of each other, with a gradually inclined route of said storage track.
35. Installation according to Claim 33, wherein said track is sxecuted such, that the displacement therein of said substrates occurs by means of at least locally a single-sided floating transport.
36. Storage track for said substrates, as included in said installation according to Claim 33, wherein said track is connected with at least a supply source and a discharge source of said substrates.
37. Storage track for substrates according to Claim 36, wherein said track as common collector track for substrates through branched transport tracks is connected with at least two modules for processing, testing, measuring, sorting etcetera,
38, Storage track according to Claim 37, wherein the structure of said track is such, that said track as substrate cabin is part of the cleanroom environment of said installation at the location of at least said main transport track.
39, Installation according to one of foregoing Claims, wherein in said installation such means are included, that in said track by means of said transport medium at least locally a sub-micro"clean-room" is maintained,
40, Installation according to Claim 39, wherein it is structured in such a way, that said "clean-room" condition is maintained in the whole section in between two modules.
41, Installation according to Claim 40, wherein the structure of said installation is such, that said "clean-room" condition is also maintained in said substrate storage track, connected with said section.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8300648A NL8300648A (en) | 1983-02-21 | 1983-02-21 | FLOATING CARRIAGE FOR SUBSTRATES. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1984003412A1 true WO1984003412A1 (en) | 1984-08-30 |
Family
ID=19841450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/NL1984/000004 WO1984003412A1 (en) | 1983-02-21 | 1984-02-20 | Track for floating transport of substrates |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0135548A1 (en) |
| JP (1) | JPS60500907A (en) |
| NL (1) | NL8300648A (en) |
| WO (1) | WO1984003412A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110065795A (en) * | 2018-01-22 | 2019-07-30 | 亨内克系统有限责任公司 | Chip sorting device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3976330A (en) * | 1975-10-01 | 1976-08-24 | International Business Machines Corporation | Transport system for semiconductor wafer multiprocessing station system |
| FR2381697A1 (en) * | 1977-02-28 | 1978-09-22 | Ibm | COMMAND FOR SEMICONDUCTOR PELLET ORIENTATION DEVICE |
| US4211505A (en) * | 1975-10-01 | 1980-07-08 | International Business Machines Corporation | Fluidic transport intersection |
| US4278366A (en) * | 1977-03-18 | 1981-07-14 | Gca Corporation | Automatic wafer processing system and method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3918706A (en) * | 1974-06-24 | 1975-11-11 | Ibm | Pneumatic sheet transport and alignment mechanism |
-
1983
- 1983-02-21 NL NL8300648A patent/NL8300648A/en not_active Application Discontinuation
-
1984
- 1984-02-20 WO PCT/NL1984/000004 patent/WO1984003412A1/en unknown
- 1984-02-20 JP JP50094084A patent/JPS60500907A/en active Pending
- 1984-02-20 EP EP19840900893 patent/EP0135548A1/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3976330A (en) * | 1975-10-01 | 1976-08-24 | International Business Machines Corporation | Transport system for semiconductor wafer multiprocessing station system |
| US4211505A (en) * | 1975-10-01 | 1980-07-08 | International Business Machines Corporation | Fluidic transport intersection |
| FR2381697A1 (en) * | 1977-02-28 | 1978-09-22 | Ibm | COMMAND FOR SEMICONDUCTOR PELLET ORIENTATION DEVICE |
| US4278366A (en) * | 1977-03-18 | 1981-07-14 | Gca Corporation | Automatic wafer processing system and method |
Non-Patent Citations (2)
| Title |
|---|
| IBM Technical Disclosure Bulletin, Vol. 23, No. 7B, December 1980 (New York, US) K.H. RAACKE: "Air Track Power Pack Assembly", pages 3177-3179, see the Whole document * |
| Solid State Technology, Vol. 23, No. 4, April 1980 (Washington, US) J.A. PAIVANAS et al.: "A New Air Film Technique for Low Contact Handling of Silicon Wafers", pages 148-155, see pages 151, 152 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110065795A (en) * | 2018-01-22 | 2019-07-30 | 亨内克系统有限责任公司 | Chip sorting device |
| CN110065795B (en) * | 2018-01-22 | 2022-10-21 | 梅耶博格有限责任公司 | Wafer sorting equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60500907A (en) | 1985-06-20 |
| NL8300648A (en) | 1984-09-17 |
| EP0135548A1 (en) | 1985-04-03 |
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