FR2381697A1 - COMMAND FOR SEMICONDUCTOR PELLET ORIENTATION DEVICE - Google Patents

COMMAND FOR SEMICONDUCTOR PELLET ORIENTATION DEVICE

Info

Publication number
FR2381697A1
FR2381697A1 FR7802110A FR7802110A FR2381697A1 FR 2381697 A1 FR2381697 A1 FR 2381697A1 FR 7802110 A FR7802110 A FR 7802110A FR 7802110 A FR7802110 A FR 7802110A FR 2381697 A1 FR2381697 A1 FR 2381697A1
Authority
FR
France
Prior art keywords
pellet
location
orientation device
command
orientation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7802110A
Other languages
French (fr)
Other versions
FR2381697B1 (en
Inventor
Robert L Judge
Anthony D Wutka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2381697A1 publication Critical patent/FR2381697A1/en
Application granted granted Critical
Publication of FR2381697B1 publication Critical patent/FR2381697B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Abstract

Dispositif d'orientation de pastilles semi-conductrices. A un ou plusieurs emplacements le long d'une piste de déplacement de pastilles, les caractéristiques du film d'air sont changées par des commandes électroniques répondant à des détections optiques de la position et de l'orientation d'une pastille semi-conductrice pénétrant dans l'emplacement particulier sur le film pneumatique de façon à stopper tout d'abord la pastille à proximité de l'emplacement, puis à centrer la pastille dans l'emplacement et après que la pastille soit centrée à faire subir une rotation rapide à la pastille jusqu'à ce qu'elle prenne l'orientation désirée. Tout ceci sans que la pastille entre en contact avec un objet solide. Peut être utilisé dans tout type de transport pneumatique de pastilles semi-conductrices.Orientation device for semiconductor pellets. At one or more locations along a wafer travel track, the characteristics of the air film are changed by electronic controls responsive to optical detections of the position and orientation of a penetrating semiconductor wafer. in the particular location on the pneumatic film so as to first stop the pellet near the location, then center the pellet in the location and after the pellet is centered to rapidly rotate the pellet pellet until it takes the desired orientation. All this without the pellet coming into contact with a solid object. Can be used in any type of pneumatic transport of semiconductor pellets.

FR7802110A 1977-02-28 1978-01-20 COMMAND FOR SEMICONDUCTOR PELLET ORIENTATION DEVICE Granted FR2381697A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77239377A 1977-02-28 1977-02-28

Publications (2)

Publication Number Publication Date
FR2381697A1 true FR2381697A1 (en) 1978-09-22
FR2381697B1 FR2381697B1 (en) 1982-05-14

Family

ID=25094910

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7802110A Granted FR2381697A1 (en) 1977-02-28 1978-01-20 COMMAND FOR SEMICONDUCTOR PELLET ORIENTATION DEVICE

Country Status (6)

Country Link
JP (1) JPS53106580A (en)
BR (1) BR7801097A (en)
CA (1) CA1097770A (en)
DE (1) DE2801609A1 (en)
FR (1) FR2381697A1 (en)
GB (1) GB1594792A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984003412A1 (en) * 1983-02-21 1984-08-30 Edward Bok Track for floating transport of substrates

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4275769B2 (en) 1998-06-19 2009-06-10 株式会社渡辺商行 Substrate transfer device
JP4274601B2 (en) * 1998-07-08 2009-06-10 昌之 都田 Substrate transfer device and operation method thereof
EP3514825B1 (en) * 2018-01-22 2023-11-29 Meyer Burger GmbH Wafer sorting

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2230964A1 (en) * 1973-05-21 1974-12-20 Kasper Instruments
US3890508A (en) * 1973-12-28 1975-06-17 Texas Instruments Inc Workpiece alignment system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4081201A (en) * 1976-12-27 1978-03-28 International Business Machines Corporation Wafer air film transportation system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2230964A1 (en) * 1973-05-21 1974-12-20 Kasper Instruments
US3890508A (en) * 1973-12-28 1975-06-17 Texas Instruments Inc Workpiece alignment system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984003412A1 (en) * 1983-02-21 1984-08-30 Edward Bok Track for floating transport of substrates

Also Published As

Publication number Publication date
FR2381697B1 (en) 1982-05-14
DE2801609A1 (en) 1978-08-31
JPS53106580A (en) 1978-09-16
CA1097770A (en) 1981-03-17
BR7801097A (en) 1978-09-26
JPS5538056B2 (en) 1980-10-02
GB1594792A (en) 1981-08-05

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Legal Events

Date Code Title Description
ST Notification of lapse