JPS53106580A - Device for orienting moving articles - Google Patents
Device for orienting moving articlesInfo
- Publication number
- JPS53106580A JPS53106580A JP159578A JP159578A JPS53106580A JP S53106580 A JPS53106580 A JP S53106580A JP 159578 A JP159578 A JP 159578A JP 159578 A JP159578 A JP 159578A JP S53106580 A JPS53106580 A JP S53106580A
- Authority
- JP
- Japan
- Prior art keywords
- moving articles
- orienting
- orienting moving
- articles
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US77239377A | 1977-02-28 | 1977-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53106580A true JPS53106580A (en) | 1978-09-16 |
| JPS5538056B2 JPS5538056B2 (en) | 1980-10-02 |
Family
ID=25094910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP159578A Granted JPS53106580A (en) | 1977-02-28 | 1978-01-12 | Device for orienting moving articles |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS53106580A (en) |
| BR (1) | BR7801097A (en) |
| CA (1) | CA1097770A (en) |
| DE (1) | DE2801609A1 (en) |
| FR (1) | FR2381697A1 (en) |
| GB (1) | GB1594792A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60500907A (en) * | 1983-02-21 | 1985-06-20 | ボツク、エドワ−ド | Substrate conveyance device |
| WO1999066550A1 (en) * | 1998-06-19 | 1999-12-23 | Kabushiki Kaisha Watanabe Shoko | Substrate transfer device |
| WO2000003428A1 (en) * | 1998-07-08 | 2000-01-20 | Kabushiki Kaisha Watanabe Shoko | Substrate transfer device and operating method thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3514825B1 (en) * | 2018-01-22 | 2023-11-29 | Meyer Burger GmbH | Wafer sorting |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3865254A (en) * | 1973-05-21 | 1975-02-11 | Kasker Instr Inc | Prealignment system for an optical alignment and exposure instrument |
| US3890508A (en) * | 1973-12-28 | 1975-06-17 | Texas Instruments Inc | Workpiece alignment system |
| US4081201A (en) * | 1976-12-27 | 1978-03-28 | International Business Machines Corporation | Wafer air film transportation system |
-
1977
- 1977-11-16 CA CA291,007A patent/CA1097770A/en not_active Expired
-
1978
- 1978-01-12 JP JP159578A patent/JPS53106580A/en active Granted
- 1978-01-14 DE DE19782801609 patent/DE2801609A1/en not_active Withdrawn
- 1978-01-20 FR FR7802110A patent/FR2381697A1/en active Granted
- 1978-02-01 GB GB407278A patent/GB1594792A/en not_active Expired
- 1978-02-23 BR BR7801097A patent/BR7801097A/en unknown
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60500907A (en) * | 1983-02-21 | 1985-06-20 | ボツク、エドワ−ド | Substrate conveyance device |
| WO1999066550A1 (en) * | 1998-06-19 | 1999-12-23 | Kabushiki Kaisha Watanabe Shoko | Substrate transfer device |
| US6394733B1 (en) | 1998-06-19 | 2002-05-28 | Kabushiki Kaisha Watanabe Shoko | Substrate body transfer apparatus |
| WO2000003428A1 (en) * | 1998-07-08 | 2000-01-20 | Kabushiki Kaisha Watanabe Shoko | Substrate transfer device and operating method thereof |
| US6447217B1 (en) | 1998-07-08 | 2002-09-10 | Masayuki Toda | Substrate transfer device and operating method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| BR7801097A (en) | 1978-09-26 |
| DE2801609A1 (en) | 1978-08-31 |
| FR2381697B1 (en) | 1982-05-14 |
| CA1097770A (en) | 1981-03-17 |
| FR2381697A1 (en) | 1978-09-22 |
| JPS5538056B2 (en) | 1980-10-02 |
| GB1594792A (en) | 1981-08-05 |
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