WO1981003580A1 - Chambre d'echantillons pour instrument de sondage electronique - Google Patents

Chambre d'echantillons pour instrument de sondage electronique Download PDF

Info

Publication number
WO1981003580A1
WO1981003580A1 PCT/SU1980/000103 SU8000103W WO8103580A1 WO 1981003580 A1 WO1981003580 A1 WO 1981003580A1 SU 8000103 W SU8000103 W SU 8000103W WO 8103580 A1 WO8103580 A1 WO 8103580A1
Authority
WO
WIPO (PCT)
Prior art keywords
shaft
electron
eleκτροnnο
οπτichesκοy
vdοl
Prior art date
Application number
PCT/SU1980/000103
Other languages
English (en)
French (fr)
Russian (ru)
Inventor
V Morozov
A Rudnev
K Makarov
A Panov
Original Assignee
Burevestnik
V Morozov
A Rudnev
K Makarov
A Panov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Burevestnik, V Morozov, A Rudnev, K Makarov, A Panov filed Critical Burevestnik
Priority to PCT/SU1980/000103 priority Critical patent/WO1981003580A1/ru
Priority to JP55501573A priority patent/JPS57500954A/ja
Priority to DE803050424T priority patent/DE3050424A1/de
Publication of WO1981003580A1 publication Critical patent/WO1981003580A1/ru

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Definitions

  • the drive shaft is attached to the shafts; at the other hand, the shafts are connected to the corresponding shafts and the first and second shafts
  • the invention has been provided with the task of creating such a small-sized camera for the consumer, in fact,
  • s ⁇ - de ⁇ z haschaya ge ⁇ me ⁇ ichny ⁇ us in ⁇ m ⁇ azmeschen ⁇ dvizh- 5 ny s ⁇ lzh ⁇ for us ⁇ an ⁇ v ⁇ zh thereon issleduem ⁇ g ⁇ ⁇ b ⁇ aztsa and ⁇ iv ⁇ dnye me ⁇ anizsh for ⁇ e ⁇ emescheniya s ⁇ li ⁇ a vd ⁇ l ⁇ e ⁇ vzashln ⁇ ⁇ e ⁇ endi ⁇ ulya ⁇ ny ⁇ ⁇ dina ⁇ ny ⁇ ⁇ sey, ⁇ dna ZHZ ⁇ y ⁇ It complies with the

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
PCT/SU1980/000103 1980-06-09 1980-06-09 Chambre d'echantillons pour instrument de sondage electronique WO1981003580A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/SU1980/000103 WO1981003580A1 (fr) 1980-06-09 1980-06-09 Chambre d'echantillons pour instrument de sondage electronique
JP55501573A JPS57500954A (enrdf_load_stackoverflow) 1980-06-09 1980-06-09
DE803050424T DE3050424A1 (de) 1980-06-09 1980-06-09 Sample chamber for electron-sounding instrument

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/SU1980/000103 WO1981003580A1 (fr) 1980-06-09 1980-06-09 Chambre d'echantillons pour instrument de sondage electronique
WOSU80/00103 1980-06-09

Publications (1)

Publication Number Publication Date
WO1981003580A1 true WO1981003580A1 (fr) 1981-12-10

Family

ID=21616626

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SU1980/000103 WO1981003580A1 (fr) 1980-06-09 1980-06-09 Chambre d'echantillons pour instrument de sondage electronique

Country Status (3)

Country Link
JP (1) JPS57500954A (enrdf_load_stackoverflow)
DE (1) DE3050424A1 (enrdf_load_stackoverflow)
WO (1) WO1981003580A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0595548A1 (en) * 1992-10-26 1994-05-04 Hitachi, Ltd. An apparatus for measuring electromagnetic field distribution using a focused electron beam

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU407449B2 (en) * 1966-11-07 1970-11-03 Commonwealth Scientific And Industrial Research Organization Apparatus for positioning specimens in electron microscopes or electron diffraction cameras
JPS4826416A (enrdf_load_stackoverflow) * 1971-08-11 1973-04-07
GB1320346A (en) * 1970-05-22 1973-06-13 Ass Elect Ind Specimen stages for electron microscopes
JPS493290A (enrdf_load_stackoverflow) * 1972-03-27 1974-01-12
SU568984A1 (ru) * 1976-02-20 1977-08-15 Предприятие П/Я А-7638 Гениометрический столик объектов

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU407449B2 (en) * 1966-11-07 1970-11-03 Commonwealth Scientific And Industrial Research Organization Apparatus for positioning specimens in electron microscopes or electron diffraction cameras
GB1320346A (en) * 1970-05-22 1973-06-13 Ass Elect Ind Specimen stages for electron microscopes
JPS4826416A (enrdf_load_stackoverflow) * 1971-08-11 1973-04-07
JPS493290A (enrdf_load_stackoverflow) * 1972-03-27 1974-01-12
SU568984A1 (ru) * 1976-02-20 1977-08-15 Предприятие П/Я А-7638 Гениометрический столик объектов

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0595548A1 (en) * 1992-10-26 1994-05-04 Hitachi, Ltd. An apparatus for measuring electromagnetic field distribution using a focused electron beam

Also Published As

Publication number Publication date
DE3050424A1 (de) 1982-07-29
JPS57500954A (enrdf_load_stackoverflow) 1982-05-27

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