USD980177S1 - Ceiling heater for substrate processing apparatus - Google Patents

Ceiling heater for substrate processing apparatus Download PDF

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Publication number
USD980177S1
USD980177S1 US29/773,972 US202129773972F USD980177S US D980177 S1 USD980177 S1 US D980177S1 US 202129773972 F US202129773972 F US 202129773972F US D980177 S USD980177 S US D980177S
Authority
US
United States
Prior art keywords
processing apparatus
substrate processing
ceiling heater
ceiling
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/773,972
Inventor
Shinobu Sugiura
Tetsuya Kosugi
Yuya YOSHIMURA
Takuto Shoji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: YOSHIMURA, Yuya, SUGIURA, SHINOBU, KOSUGI, TETSUYA, SHOJI, TAKUTO
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Description

FIG. 1 is a front, top and right side perspective view of a ceiling heater for substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a rear elevational view.

Claims (1)

    CLAIM
  1. The ornamental design for a ceiling heater for substrate processing apparatus, as shown and described.
US29/773,972 2020-09-24 2021-03-12 Ceiling heater for substrate processing apparatus Active USD980177S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020020256F JP1684468S (en) 2020-09-24 2020-09-24 Ceiling heater for substrate processing equipment
JP2020-020256D 2020-09-24

Publications (1)

Publication Number Publication Date
USD980177S1 true USD980177S1 (en) 2023-03-07

Family

ID=75802242

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/773,972 Active USD980177S1 (en) 2020-09-24 2021-03-12 Ceiling heater for substrate processing apparatus

Country Status (3)

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US (1) USD980177S1 (en)
JP (1) JP1684468S (en)
TW (1) TWD217779S (en)

Cited By (6)

* Cited by examiner, † Cited by third party
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USD1002596S1 (en) * 2021-12-14 2023-10-24 Advanide Holdings Pte. Ltd. RFID inlay
USD1003281S1 (en) * 2021-12-14 2023-10-31 Advanide Holdings Pte. Ltd. RFID inlay
USD1015316S1 (en) * 2021-12-10 2024-02-20 Advanide Holdings Pte. Ltd. RFID inlay
USD1019618S1 (en) * 2021-06-21 2024-03-26 Ace Technologies Corporation Antenna
USD1020711S1 (en) * 2021-06-21 2024-04-02 Ace Technologies Corporation Antenna
USD1113882S1 (en) 2024-07-03 2026-02-17 Advanide Holdings Pte. Ltd. RFID antenna for a biometric card

Citations (19)

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US3627338A (en) * 1969-10-09 1971-12-14 Sheldon Thompson Vacuum chuck
USD312126S (en) * 1988-02-10 1990-11-13 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
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USD859331S1 (en) * 2017-03-31 2019-09-10 Ebara Corporation Vacuum contact pad
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD921431S1 (en) * 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
USD943539S1 (en) * 2020-03-19 2022-02-15 Applied Materials, Inc. Confinement plate for a substrate processing chamber
USD946638S1 (en) * 2017-12-11 2022-03-22 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD947802S1 (en) * 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film
USD954567S1 (en) * 2019-06-25 2022-06-14 Ebara Corporation Measurement jig
USD959393S1 (en) * 2020-09-24 2022-08-02 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus

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USD312126S (en) * 1988-02-10 1990-11-13 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
USD323385S (en) * 1990-02-10 1992-01-21 Ceramaspeed Limited Radiant stove heater
USD517743S1 (en) * 2003-12-09 2006-03-21 Le Creuset Of America, Inc. Hotpad
USD541486S1 (en) * 2005-07-22 2007-04-24 Le Creuset Of America, Inc. Hotpad
USD616389S1 (en) * 2008-10-20 2010-05-25 Ebara Corporation Vacuum contact pad
USD650344S1 (en) * 2008-10-20 2011-12-13 Ebara Corporation Vacuum contact pad
USD625558S1 (en) * 2010-02-05 2010-10-19 Chef'n Corporation Trivet
USD826185S1 (en) * 2016-10-14 2018-08-21 Hitachi Kokusai Electric Inc. Ceiling heater for substrate processing apparatus
JP1581406S (en) 2016-10-14 2017-07-18
USD859331S1 (en) * 2017-03-31 2019-09-10 Ebara Corporation Vacuum contact pad
USD946638S1 (en) * 2017-12-11 2022-03-22 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD921431S1 (en) * 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
USD954567S1 (en) * 2019-06-25 2022-06-14 Ebara Corporation Measurement jig
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD943539S1 (en) * 2020-03-19 2022-02-15 Applied Materials, Inc. Confinement plate for a substrate processing chamber
USD947802S1 (en) * 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film
USD959393S1 (en) * 2020-09-24 2022-08-02 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1019618S1 (en) * 2021-06-21 2024-03-26 Ace Technologies Corporation Antenna
USD1020711S1 (en) * 2021-06-21 2024-04-02 Ace Technologies Corporation Antenna
USD1015316S1 (en) * 2021-12-10 2024-02-20 Advanide Holdings Pte. Ltd. RFID inlay
USD1002596S1 (en) * 2021-12-14 2023-10-24 Advanide Holdings Pte. Ltd. RFID inlay
USD1003281S1 (en) * 2021-12-14 2023-10-31 Advanide Holdings Pte. Ltd. RFID inlay
USD1031701S1 (en) 2021-12-14 2024-06-18 Advanide Holdings Pte. Ltd. RFID inlay
USD1113882S1 (en) 2024-07-03 2026-02-17 Advanide Holdings Pte. Ltd. RFID antenna for a biometric card

Also Published As

Publication number Publication date
TWD217779S (en) 2022-03-21
JP1684468S (en) 2021-05-10

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