USD917825S1 - Wafer support ring - Google Patents

Wafer support ring Download PDF

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Publication number
USD917825S1
USD917825S1 US29/698,332 US201929698332F USD917825S US D917825 S1 USD917825 S1 US D917825S1 US 201929698332 F US201929698332 F US 201929698332F US D917825 S USD917825 S US D917825S
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United States
Prior art keywords
support ring
wafer support
view
wafer
ornamental design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/698,332
Inventor
Eric Alan Kirkland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Priority to US29/698,332 priority Critical patent/USD917825S1/en
Assigned to ENTEGRIS, INC. reassignment ENTEGRIS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KIRKLAND, ERIC ALAN
Application granted granted Critical
Publication of USD917825S1 publication Critical patent/USD917825S1/en
Assigned to TRUIST BANK, AS NOTES COLLATERAL AGENT reassignment TRUIST BANK, AS NOTES COLLATERAL AGENT SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CMC MATERIALS, INC., ENTEGRIS GP, INC., ENTEGRIS, INC., INTERNATIONAL TEST SOLUTIONS, LLC, POCO GRAPHITE, INC., QED TECHNOLOGIES INTERNATIONAL, INC.
Active legal-status Critical Current
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Description

FIG. 1 is a top perspective view of a wafer support ring.
FIG. 2 is a bottom perspective view of the wafer support ring.
FIG. 3 is a top plan view of the wafer support ring.
FIG. 4 is a bottom plan view of the wafer support ring.
FIG. 5 is a front elevational view of the wafer support ring. The rear elevational view of the wafer support ring is a mirror image of the front elevational view.
FIG. 6 is a left side view of the wafer support ring. The right side view of the wafer support ring is a mirror image of the left side view.
FIG. 7 is an enlarged cross-sectional view of the wafer support ring taken along line 7-7 in FIG. 3; and,
FIG. 8 is an enlarged cross-sectional view of the wafer support ring taken along line 8-8 in FIG. 3.

Claims (1)

    CLAIM
  1. The ornamental design for a wafer support ring, as shown and described.
US29/698,332 2019-07-16 2019-07-16 Wafer support ring Active USD917825S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/698,332 USD917825S1 (en) 2019-07-16 2019-07-16 Wafer support ring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/698,332 USD917825S1 (en) 2019-07-16 2019-07-16 Wafer support ring

Publications (1)

Publication Number Publication Date
USD917825S1 true USD917825S1 (en) 2021-04-27

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ID=75570664

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/698,332 Active USD917825S1 (en) 2019-07-16 2019-07-16 Wafer support ring

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US (1) USD917825S1 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD932721S1 (en) * 2020-02-26 2021-10-05 Bway Corporation Container ring
USD940670S1 (en) * 2019-09-26 2022-01-11 Willbe S&T Co., Ltd. Retainer ring for chemical mechanical polishing device
USD949319S1 (en) * 2019-08-22 2022-04-19 Asm Ip Holding B.V. Exhaust duct
TWD226236S (en) 2022-03-18 2023-07-01 美商應用材料股份有限公司 Support ring for an interlocking process kit for a substrate processing chamber
USD1011671S1 (en) 1991-07-02 2024-01-16 Bway Corporation Container
USD1015669S1 (en) 2020-02-26 2024-02-20 Bway Corporation Container ring
USD1042374S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Support pipe for an interlocking process kit for a substrate processing chamber
USD1042373S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Sliding ring for an interlocking process kit for a substrate processing chamber

Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD432356S (en) * 1999-09-23 2000-10-24 Amway Corporation Support ring for cooking utensil
USD486356S1 (en) * 2003-03-04 2004-02-10 Access Business Group International Llc. Support ring for a cooking utensil
USD542091S1 (en) * 2005-11-01 2007-05-08 Access Business Group International Llc Support ring for cooking utensil
US20090020854A1 (en) * 2007-07-20 2009-01-22 Tao Feng Process of forming ultra thin wafers having an edge support ring
USD638523S1 (en) * 2010-07-20 2011-05-24 Wärtsilä Japan Ltd. Seal ring for stern tube
USD638522S1 (en) * 2010-07-20 2011-05-24 Wārtsilā Japan Ltd. Seal ring for stern tube
USD655401S1 (en) * 2009-08-10 2012-03-06 Nippon Valqua Industries, Ltd. Hybrid seal member
USD659175S1 (en) * 2010-08-17 2012-05-08 Ebara Corporation Sealing ring
USD723239S1 (en) * 2012-08-30 2015-02-24 Entegris, Inc. Wafer carrier ring
USD767234S1 (en) 2015-03-02 2016-09-20 Entegris, Inc. Wafer support ring
US20160365265A1 (en) 2014-02-25 2016-12-15 Entegris, Inc. Wafer shipper with stacked support rings
US20170009889A1 (en) * 2014-01-24 2017-01-12 Nok Corporation Sealing ring
USD783922S1 (en) * 2014-12-08 2017-04-11 Entegris, Inc. Wafer support ring
USD802723S1 (en) * 2015-11-27 2017-11-14 Ebara Corporation Sealing ring
US20170372931A1 (en) 2014-12-08 2017-12-28 Entegris, Inc. Horizontal substrate container with integral corner spring for substrate containment
USD815385S1 (en) * 2016-10-13 2018-04-10 Entegris, Inc. Wafer support ring
USD871608S1 (en) * 2017-07-31 2019-12-31 Hitachi High-Technologies Corporation Gas ring for a plasma processing apparatus
USD873981S1 (en) * 2017-06-27 2020-01-28 Nok Corporation Seal ring
USD881958S1 (en) * 2018-05-14 2020-04-21 Samyoung Machinery Co., Ltd. Piston ring for internal combustion engine
USD885444S1 (en) * 2017-12-19 2020-05-26 Valqua, Ltd. Seal member for use in semiconductor production apparatus

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD432356S (en) * 1999-09-23 2000-10-24 Amway Corporation Support ring for cooking utensil
USD486356S1 (en) * 2003-03-04 2004-02-10 Access Business Group International Llc. Support ring for a cooking utensil
USD542091S1 (en) * 2005-11-01 2007-05-08 Access Business Group International Llc Support ring for cooking utensil
US20090020854A1 (en) * 2007-07-20 2009-01-22 Tao Feng Process of forming ultra thin wafers having an edge support ring
USD655401S1 (en) * 2009-08-10 2012-03-06 Nippon Valqua Industries, Ltd. Hybrid seal member
USD638523S1 (en) * 2010-07-20 2011-05-24 Wärtsilä Japan Ltd. Seal ring for stern tube
USD638522S1 (en) * 2010-07-20 2011-05-24 Wārtsilā Japan Ltd. Seal ring for stern tube
USD659175S1 (en) * 2010-08-17 2012-05-08 Ebara Corporation Sealing ring
USD723239S1 (en) * 2012-08-30 2015-02-24 Entegris, Inc. Wafer carrier ring
US20170009889A1 (en) * 2014-01-24 2017-01-12 Nok Corporation Sealing ring
US20160365265A1 (en) 2014-02-25 2016-12-15 Entegris, Inc. Wafer shipper with stacked support rings
USD783922S1 (en) * 2014-12-08 2017-04-11 Entegris, Inc. Wafer support ring
US20170372931A1 (en) 2014-12-08 2017-12-28 Entegris, Inc. Horizontal substrate container with integral corner spring for substrate containment
USD767234S1 (en) 2015-03-02 2016-09-20 Entegris, Inc. Wafer support ring
USD802723S1 (en) * 2015-11-27 2017-11-14 Ebara Corporation Sealing ring
USD815385S1 (en) * 2016-10-13 2018-04-10 Entegris, Inc. Wafer support ring
USD873981S1 (en) * 2017-06-27 2020-01-28 Nok Corporation Seal ring
USD871608S1 (en) * 2017-07-31 2019-12-31 Hitachi High-Technologies Corporation Gas ring for a plasma processing apparatus
USD885444S1 (en) * 2017-12-19 2020-05-26 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD881958S1 (en) * 2018-05-14 2020-04-21 Samyoung Machinery Co., Ltd. Piston ring for internal combustion engine

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1011671S1 (en) 1991-07-02 2024-01-16 Bway Corporation Container
USD949319S1 (en) * 2019-08-22 2022-04-19 Asm Ip Holding B.V. Exhaust duct
USD940670S1 (en) * 2019-09-26 2022-01-11 Willbe S&T Co., Ltd. Retainer ring for chemical mechanical polishing device
USD932721S1 (en) * 2020-02-26 2021-10-05 Bway Corporation Container ring
USD1015669S1 (en) 2020-02-26 2024-02-20 Bway Corporation Container ring
TWD226236S (en) 2022-03-18 2023-07-01 美商應用材料股份有限公司 Support ring for an interlocking process kit for a substrate processing chamber
USD1042374S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Support pipe for an interlocking process kit for a substrate processing chamber
USD1042373S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Sliding ring for an interlocking process kit for a substrate processing chamber

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