USD831086S1 - Substrate processing unit - Google Patents

Substrate processing unit Download PDF

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Publication number
USD831086S1
USD831086S1 US29/606,724 US201729606724F USD831086S US D831086 S1 USD831086 S1 US D831086S1 US 201729606724 F US201729606724 F US 201729606724F US D831086 S USD831086 S US D831086S
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US
United States
Prior art keywords
processing unit
substrate processing
view
elevational view
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/606,724
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English (en)
Inventor
Yusaku SAKKA
Hiromichi KAWASAKI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Assigned to HITACHI HIGH-TECHNOLOGIES CORPORATION reassignment HITACHI HIGH-TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KAWASAKI, Hiromichi, SAKKA, YUSAKU
Application granted granted Critical
Publication of USD831086S1 publication Critical patent/USD831086S1/en
Assigned to HITACHI HIGH-TECH CORPORATION reassignment HITACHI HIGH-TECH CORPORATION CHANGE OF NAME AND ADDRESS Assignors: HITACHI HIGH-TECHNOLOGIES CORPORATION
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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US29/606,724 2016-12-09 2017-06-07 Substrate processing unit Active USD831086S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-026822 2016-12-09
JPD2016-26822F JP1582104S (enrdf_load_stackoverflow) 2016-12-09 2016-12-09

Publications (1)

Publication Number Publication Date
USD831086S1 true USD831086S1 (en) 2018-10-16

Family

ID=59351723

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/606,724 Active USD831086S1 (en) 2016-12-09 2017-06-07 Substrate processing unit

Country Status (3)

Country Link
US (1) USD831086S1 (enrdf_load_stackoverflow)
JP (1) JP1582104S (enrdf_load_stackoverflow)
TW (1) TWD187804S (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1073758S1 (en) * 2022-10-13 2025-05-06 Lam Research Corporation Baffle for substrate processing system

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD556226S1 (en) * 2005-08-23 2007-11-27 Motoman, Inc. Robotic bartender and bar
USD581438S1 (en) * 2006-08-30 2008-11-25 Tie Tao Liu Hydraulic mechanism
USD623673S1 (en) * 2008-12-24 2010-09-14 Applied Materials, Inc. Large area substrate processor
USD675172S1 (en) * 2008-11-14 2013-01-29 Applied Materials, Inc. Substrate support
JP1456090S (enrdf_load_stackoverflow) 2012-01-13 2015-11-16
JP1456479S (enrdf_load_stackoverflow) 2012-01-13 2015-11-16
USD785578S1 (en) * 2016-03-22 2017-05-02 Asm Ip Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
USD804556S1 (en) * 2015-06-16 2017-12-05 Hitachi Kokusai Electric Inc. Heat reflector for substrate processing apparatus
USD805044S1 (en) * 2015-10-30 2017-12-12 Hirata Corporation Adhesive sheet for substrate
USD808350S1 (en) * 2017-03-06 2018-01-23 Topline Corporation Fixture for delivering interconnect members onto a substrate
USD811457S1 (en) * 2015-11-02 2018-02-27 Hirata Corporation Substrate conveyance arm

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM492529U (zh) 2013-03-14 2014-12-21 Applied Materials Inc 使用具有加熱器的基板支撐台的基板支撐組件

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD556226S1 (en) * 2005-08-23 2007-11-27 Motoman, Inc. Robotic bartender and bar
USD581438S1 (en) * 2006-08-30 2008-11-25 Tie Tao Liu Hydraulic mechanism
USD675172S1 (en) * 2008-11-14 2013-01-29 Applied Materials, Inc. Substrate support
USD623673S1 (en) * 2008-12-24 2010-09-14 Applied Materials, Inc. Large area substrate processor
JP1456090S (enrdf_load_stackoverflow) 2012-01-13 2015-11-16
JP1456479S (enrdf_load_stackoverflow) 2012-01-13 2015-11-16
USD804556S1 (en) * 2015-06-16 2017-12-05 Hitachi Kokusai Electric Inc. Heat reflector for substrate processing apparatus
USD805044S1 (en) * 2015-10-30 2017-12-12 Hirata Corporation Adhesive sheet for substrate
USD811457S1 (en) * 2015-11-02 2018-02-27 Hirata Corporation Substrate conveyance arm
USD785578S1 (en) * 2016-03-22 2017-05-02 Asm Ip Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
USD808350S1 (en) * 2017-03-06 2018-01-23 Topline Corporation Fixture for delivering interconnect members onto a substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1073758S1 (en) * 2022-10-13 2025-05-06 Lam Research Corporation Baffle for substrate processing system

Also Published As

Publication number Publication date
JP1582104S (enrdf_load_stackoverflow) 2017-07-24
TWD187804S (zh) 2018-01-11

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